JPS63137226U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案装置を施したトンネル片クリー
ンルームの実施例を示す截断正面図、第２図は第
１図の―線截断側面図、第３図は要部の斜視
図、第４図は他の実施例の斜視図、第５図は更に
他の実施例を示す斜視図、第６図は単位構材の実
施例を示す斜視図、第７図Ａ，Ｂは従来例の截断
面図、第８図は他の従来例を示す斜視図である。 １……クリーンルーム、２……床、４……単位
構材、５……凹溝、６……排気路、６ａ，６ｂ…
…排気路の両端開口部、７……バツクパネル、８
……パネルの下部開口。 Fig. 1 is a cutaway front view showing an embodiment of a tunnel piece clean room equipped with the device of the present invention, Fig. 2 is a side view taken along the line - - of Fig. 1, Fig. 3 is a perspective view of the main parts, and Fig. 4 is A perspective view of another embodiment, FIG. 5 is a perspective view of still another embodiment, FIG. 6 is a perspective view of an embodiment of the unit structure, and FIGS. 7A and B are cross-sectional views of the conventional example. , FIG. 8 is a perspective view showing another conventional example. 1...Clean room, 2...Floor, 4...Unit structure, 5...Ditch, 6...Exhaust path, 6a, 6b...
...Openings at both ends of the exhaust path, 7... Back panel, 8
...The opening at the bottom of the panel.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 既成建物の床面上に適宜長さでその長さ方向の
側面に凹溝を形成した単位構材を並設して隣接す
る構材間に凹溝による空間で排気路を形成し、該
排気路の一端をクリーンルーム内に開口連通させ
他端をクリーンルームのバツクパネルの下部開口
に連通させて成るトンネル型クリーンルームの排
気路装置。 Unit structures with grooves formed on the sides in the length direction are arranged side by side on the floor surface of an existing building, and an exhaust passage is formed between adjacent structures by the grooves. A tunnel-type clean room exhaust path device in which one end of the path communicates with the inside of the clean room and the other end communicates with the lower opening of the back panel of the clean room.