JPS63120157U - - Google Patents
Info
- Publication number
- JPS63120157U JPS63120157U JP1192687U JP1192687U JPS63120157U JP S63120157 U JPS63120157 U JP S63120157U JP 1192687 U JP1192687 U JP 1192687U JP 1192687 U JP1192687 U JP 1192687U JP S63120157 U JPS63120157 U JP S63120157U
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- gas
- column
- introduction flow
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 14
- 239000012159 carrier gas Substances 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Treatment Of Liquids With Adsorbents In General (AREA)
Description
図は本考案の流路構成の一例を示す流路図であ
る。
１…キヤリヤーガス供給ライン、２…キヤリヤ
ーガス源、３…調圧弁、４…圧力計、５…ガスサ
ンプラー、６…流路切換バルブ、７…サンプルガ
ス供給ライン、８…ガス導入流路、９…ガス排出
ライン、１０…カラム恒温槽、１１…分析カラム
、１２…濃縮管、１３…検出器、１４…ガス排出
流路、１４ａ…分岐管、１５…開閉弁、１６…流
量計、１７…ニードルバルブ。
The figure is a flow path diagram showing an example of the flow path configuration of the present invention. 1... Carrier gas supply line, 2... Carrier gas source, 3... Pressure regulating valve, 4... Pressure gauge, 5... Gas sampler, 6... Channel switching valve, 7... Sample gas supply line, 8... Gas introduction channel, 9... Gas Discharge line, 10... Column constant temperature bath, 11... Analysis column, 12... Concentration tube, 13... Detector, 14... Gas discharge channel, 14a... Branch pipe, 15... Open/close valve, 16... Flow meter, 17... Needle valve .
Claims (1)
位置においてそれぞれキヤリヤーガス及びサンプ
ルガスをカラムへのガス導入流路に導びくための
流路切換バルブと、前記ガス導入流路中に挿入さ
れた濃縮管と、前記ガス導入流路下流端に接続さ
れた分析カラムと、前記濃縮管及び分析カラムを
収納したカラム恒温槽、並びに前記ガス導入流路
下流側から分岐した少くとも開閉弁を含むサンプ
ルガス排出流路を備えたことを特徴とするガスク
ロマトグラフを用いた精製ガス中の微量不純物成
分の測定装置。 a flow path switching valve for guiding the carrier gas and the sample gas to the gas introduction flow path to the column at the carrier gas distribution position and the sample gas collection position, respectively; a concentrating tube inserted into the gas introduction flow path; and the gas introduction flow path. An analysis column connected to the downstream end of the flow path, a column constant temperature bath housing the concentration tube and the analysis column, and a sample gas discharge flow path branched from the downstream side of the gas introduction flow path and including at least an on-off valve. A device for measuring trace impurity components in purified gas using a gas chromatograph.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987011926U JPH068555Y2 (en) | 1987-01-29 | 1987-01-29 | Measuring device for trace impurities in purified gas using gas chromatograph |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987011926U JPH068555Y2 (en) | 1987-01-29 | 1987-01-29 | Measuring device for trace impurities in purified gas using gas chromatograph |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63120157U true JPS63120157U (en) | 1988-08-03 |
| JPH068555Y2 JPH068555Y2 (en) | 1994-03-02 |
Family
ID=30799584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987011926U Expired - Lifetime JPH068555Y2 (en) | 1987-01-29 | 1987-01-29 | Measuring device for trace impurities in purified gas using gas chromatograph |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH068555Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS521679A (en) * | 1975-06-24 | 1977-01-07 | Toshiba Tungaloy Co Ltd | Throw-away system face mill |
| JPS5769250A (en) * | 1980-10-18 | 1982-04-27 | Yuji Takayama | Method for injecting sample into caplicary column |
-
1987
- 1987-01-29 JP JP1987011926U patent/JPH068555Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS521679A (en) * | 1975-06-24 | 1977-01-07 | Toshiba Tungaloy Co Ltd | Throw-away system face mill |
| JPS5769250A (en) * | 1980-10-18 | 1982-04-27 | Yuji Takayama | Method for injecting sample into caplicary column |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH068555Y2 (en) | 1994-03-02 |
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