JPS63115706U - - Google Patents

Info

Publication number
JPS63115706U
JPS63115706U JP832187U JP832187U JPS63115706U JP S63115706 U JPS63115706 U JP S63115706U JP 832187 U JP832187 U JP 832187U JP 832187 U JP832187 U JP 832187U JP S63115706 U JPS63115706 U JP S63115706U
Authority
JP
Japan
Prior art keywords
electromagnetic actuator
electrodes
plane
armature
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP832187U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP832187U priority Critical patent/JPS63115706U/ja
Publication of JPS63115706U publication Critical patent/JPS63115706U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Fuel-Injection Apparatus (AREA)

Description

【図面の簡単な説明】
第１図はこの考案に係る電磁アクチユエータの
一実施例を示す断面図、第２図は同上の電磁アク
チユエータに用いられるステータの平面図、第３
図は同上の電磁アクチユエータにおける静電容量
変化を検出する回路の一実施例を示す回路図、第
４図は第３図に示される回路の主要部の波形を示
す波形図、第５図はこの考案に係る電磁アクチユ
エータの他の実施例を示す断面図である。 ３……ステータ、４……アーマチユア、８……
絶縁層、９，１０……電極。

Claims (1)

    【実用新案登録請求の範囲】
  1. 励磁コイルを有するステータとアーマチユアと
    を互いの平面で相対運動可能に向き合せた電磁ア
    クチユエータにおいて、前記アーマチユアの平面
    に対向した同一部材に２つの電極を互いに絶縁し
    て設け、該２つの電極間の静電容量の変化を検出
    するようにしたことを特徴とする電磁アクチユエ
    ータ。
JP832187U 1987-01-23 1987-01-23 Pending JPS63115706U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP832187U JPS63115706U (ja) 1987-01-23 1987-01-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP832187U JPS63115706U (ja) 1987-01-23 1987-01-23

Publications (1)

Publication Number Publication Date
JPS63115706U true JPS63115706U (ja) 1988-07-26

Family

ID=30792591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP832187U Pending JPS63115706U (ja) 1987-01-23 1987-01-23

Country Status (1)

Country Link
JP (1) JPS63115706U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02173484A (ja) * 1988-12-26 1990-07-04 Toto Ltd 位置検出機能を有する圧電アクチュエータ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587503A (ja) * 1981-07-08 1983-01-17 Nippon Steel Corp 容量式変位計
JPS5818102A (ja) * 1981-07-24 1983-02-02 Nippon Steel Corp 容量式変位計

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587503A (ja) * 1981-07-08 1983-01-17 Nippon Steel Corp 容量式変位計
JPS5818102A (ja) * 1981-07-24 1983-02-02 Nippon Steel Corp 容量式変位計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02173484A (ja) * 1988-12-26 1990-07-04 Toto Ltd 位置検出機能を有する圧電アクチュエータ

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