JPS63113518A - Optical sensor device and appearance inspecting device - Google Patents
Optical sensor device and appearance inspecting deviceInfo
- Publication number
- JPS63113518A JPS63113518A JP25853086A JP25853086A JPS63113518A JP S63113518 A JPS63113518 A JP S63113518A JP 25853086 A JP25853086 A JP 25853086A JP 25853086 A JP25853086 A JP 25853086A JP S63113518 A JPS63113518 A JP S63113518A
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- Prior art keywords
- image
- sensor
- optical system
- optical
- optical path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 77
- 239000011521 glass Substances 0.000 claims abstract description 19
- 230000000694 effects Effects 0.000 claims abstract description 16
- 230000004907 flux Effects 0.000 claims abstract description 11
- 238000003384 imaging method Methods 0.000 claims description 19
- 238000007689 inspection Methods 0.000 claims description 6
- 239000005357 flat glass Substances 0.000 abstract description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 3
- 238000011179 visual inspection Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 4
- 239000005338 frosted glass Substances 0.000 description 2
- 239000005337 ground glass Substances 0.000 description 2
- 241000287828 Gallus gallus Species 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005308 flint glass Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は光センサ装置および外観検査装置に関し、詳し
くは光学的手段を介して得られる光路長が受光部によっ
て異なるような場合に好適な光センサ装置およびかかる
光センサ装置を適用した外観検査装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to an optical sensor device and an appearance inspection device, and more specifically, to an optical sensor device and a visual inspection device. The present invention relates to a sensor device and an appearance inspection device to which the optical sensor device is applied.
近年ではオプトエレクトロニクスの発展に伴い、光セン
サが利用される分野もその範囲が広く、またその種類に
おいても枚挙にいとまがないが、かかる光センサ装置に
使用される光学的手段において、例えば反射光と直射光
との双方がセンサに受光される場合、その光路長に差異
が生じることから対物レンズの焦点深度内に双方が収ま
らず、従って検出される撮像にぼけが生じる。また、上
述の光センサ装置を用いて立体的な被検体の外観や品位
を自動的に検出する外観検査装置が本出願人による特願
昭６０−２５２８２号および特願昭６１−２１０６３５
号公報において開示されているが、これらの装置におい
てもその光学的手段に反射手段が設けられていることに
より上述のような現象が発生する。In recent years, with the development of optoelectronics, optical sensors are used in a wide range of fields, and there are too many types to list. Among the optical means used in such optical sensor devices, for example, reflection When both the light and the direct light are received by the sensor, there is a difference in their optical path lengths, so both cannot fall within the depth of focus of the objective lens, resulting in blurring of the detected image. Further, an appearance inspection device that automatically detects the appearance and quality of a three-dimensional object using the above-mentioned optical sensor device is disclosed in Japanese Patent Application No. 60-25282 and No. 61-210635 filed by the present applicant.
Although disclosed in the above publication, the above-mentioned phenomenon also occurs in these devices because the optical means is provided with a reflecting means.
第３Ａ図〜第３Ｃ図は特願昭６１−２１０６３５号公報
に開示された外観検査装置の例を示す。ここで、１は被
検体、 ２は中央部を凹ませた搬送装置であり、被検体
ｌは搬送装置２によって搬送される途中において撮像装
置３のＣＣＤラインセンサ（以下で光センサという）４
によりその光学画像が検出されて電気信号に変換される
。５はその撮像装置３に設けられた光学系である。3A to 3C show an example of the visual inspection device disclosed in Japanese Patent Application No. 61-210635. Here, 1 is a subject, 2 is a transport device with a concave central part, and while the subject l is being transported by the transport device 2, a CCD line sensor (hereinafter referred to as an optical sensor) 4 of an imaging device 3 is attached.
The optical image is detected and converted into an electrical signal. 5 is an optical system provided in the imaging device 3.
すなわち、被検体１は両側からの光源６によって照射さ
れるが、その光は光源６と被検体ｌとの間に設けられた
すりガラス７によって散乱光となり、直接撮像装置３に
は入射されないようになっている。８は光源６およびす
りガラス７を保持しているボックスであり、ボックス８
の上板９およびすりガラス７にはそれぞれスリット９Ａ
および７Ａが設けられていて、被検体１からの光束は、
スリット７Ａを介してミラーｌＯにより反射され、更に
上板のスリット９Ａを経て、撮像装置３に入射される。That is, the subject 1 is illuminated by the light sources 6 from both sides, but the light is scattered by the ground glass 7 provided between the light source 6 and the subject 1, and is prevented from directly entering the imaging device 3. It has become. 8 is a box holding the light source 6 and the frosted glass 7;
The upper plate 9 and frosted glass 7 each have slits 9A.
and 7A are provided, and the luminous flux from the subject 1 is
The light is reflected by the mirror 10 through the slit 7A, and further passes through the slit 9A in the upper plate and enters the image pickup device 3.
そこで、このように構成された外観検査装置およびその
先センサ装置においては、その先センサ４によって得ら
れる各面の像に互いに重なり合う部分が生じるが、不図
示の処理回路のメモリから読出すときに、各機の中央部
分を選択して読出すことによりシェーディングの少ない
連続情報を得る。こ妬ができる。Therefore, in the visual inspection device and the sensor device configured in this way, there are parts that overlap each other in the images of each surface obtained by the sensor 4, but when reading from the memory of the processing circuit (not shown), , by selecting and reading out the central part of each machine, continuous information with less shading is obtained. I can be jealous.
しかしながら、上述した外観検査装置等のように、その
光路の途中に反射装置を設け、反射装置からの反射光の
光束と照射された物体からの直接光の光束とが撮像装置
に入力するようにした装置にあっては、先に述べたよう
に反射光の光束の方が直接光の光束より光路長が長くな
るという問題点がある。However, as in the above-mentioned visual inspection equipment, a reflection device is provided in the middle of the optical path, so that the flux of reflected light from the reflection device and the flux of direct light from the irradiated object are input to the imaging device. As mentioned above, such a device has a problem in that the optical path length of the reflected light beam is longer than that of the direct light beam.
そこで、従来は被検体と、撮像装置との間の距離が十分
長く保たれるようにするか、あるいはプリズムにより左
右の像を屈折反射させるか等の手段がとられてきたが、
かかる手段による焦点深度の合わせ方は、前者の場合装
置全体が大きくなり、また後者の場合はプリズムが特殊
な形態のものだけにコストが高くなる。Conventionally, measures have been taken to maintain a sufficiently long distance between the subject and the imaging device, or to refract and reflect the left and right images using a prism.
In the case of adjusting the depth of focus by such means, in the former case, the entire apparatus becomes large, and in the latter case, the cost increases because the prism has a special shape.
本発明の目的は、上述したような従来の問題点に鑑み、
簡単な構成で焦点深度がその表面において合わせられ、
装置に組込まれた場合にも全体の規模を大きくすること
の必要がない光センサ装着を提供することにある。In view of the conventional problems as mentioned above, the object of the present invention is to
With a simple configuration, the depth of focus is matched at the surface,
It is an object of the present invention to provide an optical sensor mounting that does not require increasing the overall scale even when it is incorporated into a device.
更にまた、本発明の他の目的はかかる光センサを適用す
ることにより明瞭かつ１確な撮像が得られる外観検査装
置を提供することにある。Furthermore, another object of the present invention is to provide an appearance inspection device that can obtain clear and accurate imaging by applying such a photosensor.
ｃ問題点を解決するための手段〕
すなわち、本発明は、直線状若しくは２次元的に配設さ
れた撮像素子を有し、物体表面の映像が光学系を介して
結像されるときに、光学系までの光束の光路長が配設さ
れた撮像素子の中心部分と側辺部分とで異なる光センサ
装置において、撮像素子の中心部分と側辺部分とのうち
、光束の光路長が長くなる部分の表面近傍に屈折ガラス
を配設し、屈折ガラスを配設した部分から得られる光路
長の延長効果により中心部分および側辺部分において光
学系の焦点深度を一致させるようにしたことを特徴とす
るものである。Means for Solving Problem c] That is, the present invention has an imaging device arranged linearly or two-dimensionally, and when an image of an object surface is formed through an optical system, In an optical sensor device in which the optical path length of the light beam up to the optical system is different between the central portion and the side portions of the image sensor, the optical path length of the light beam is longer between the center portion and the side portions of the image sensor. A refractive glass is arranged near the surface of the part, and the depth of focus of the optical system is matched in the center part and the side part by the effect of extending the optical path length obtained from the part where the refractive glass is arranged. It is something to do.
更に本発明の他の形態は直線状若しくは２次元的に配設
された撮像素子を有し、被検体の上方に配置され、被検
体の表面を撮像する撮像手段と、被検体の側方に配置さ
れ、被検体の側面からの光を反射させる反射手段と、被
検体の上面からの光および反射手段から反射された光の
双方を撮像手段に導く光学系と、撮像素子の表面近傍に
配設され、反射手段から光学系を介して導かれた光の通
路を透過させる屈折ガラスとを具え、屈折ガラスを配設
した撮像素子の部分から得られる光路長の延長効果によ
り、撮像素子の中心部分および側辺部分においてその焦
点深度を一致させるようにしたことを特徴とするもので
ある。Furthermore, another embodiment of the present invention has an imaging device arranged linearly or two-dimensionally, an imaging means arranged above the subject to image the surface of the subject, and an imaging device arranged on the side of the subject. A reflecting means arranged to reflect light from the side surface of the subject; an optical system guiding both the light from the top surface of the subject and the light reflected from the reflecting means to the imaging means; and an optical system arranged near the surface of the imaging element. and a refractive glass that transmits the path of the light guided from the reflection means through the optical system. This feature is characterized in that the depth of focus is made to match in the portion and the side portion.
〔作 用）
本発明光センサ装置によれば、物体の表面から光学系ま
での光束の光路長が長くなるセンサ部分の表面近傍に設
けた屈折ガラスの延長効果により、その部分とその他の
光路長の短い部分との焦点深度が一致させられるので明
瞭な物体の全体的な結像を得ることができる。[Function] According to the optical sensor device of the present invention, due to the elongation effect of the refractive glass provided near the surface of the sensor portion, which increases the optical path length of the light flux from the surface of the object to the optical system, the optical path length of that portion and the other portions becomes longer. Since the depth of focus is matched with the short part of the object, a clear overall image of the object can be obtained.
また、本発明光センサを適用した外観検査装置にあって
は、反射鏡を介して得られた光束と、被検体表面から直
接得られる光束とが、屈折ガラスにより焦点深度を一致
させるように修正されるので得られる映像にぼけの生じ
ることがない。Furthermore, in the visual inspection device to which the optical sensor of the present invention is applied, the depth of focus of the light beam obtained through the reflecting mirror and the light beam obtained directly from the surface of the object is corrected by the refracting glass. Therefore, the resulting image will not be blurred.
（実施例）
以下に、図面に基づいて本発明の実施例を詳細かつ具体
的に説明する。(Example) Examples of the present invention will be described below in detail and specifically based on the drawings.
第１Ａ図〜第１ｃ図は本発明に適用するガラス等透光物
質内の光の屈折に関する原理を示す。先に述べた外観検
査装置においては被検体１と光センサ４との間に光束が
存在する。そこで、いま仮にそのような光学系５のレン
ズと被検体１との間の光路に平板ガラス２０を介在させ
たとすると、第１Ａ図に示すように、被検体ｌ上の１点
０からガラス２０上の点Ｐに導かれた光はここで順のよ
うに屈折され、点Ｑから再び面と平行な光線面となって
大気中に出て行く。なお、ガラス２０に垂直に導入され
た光は光線ｉのように屈折することがない。FIGS. 1A to 1C show the principle of refraction of light within a transparent material such as glass, which is applied to the present invention. In the visual inspection apparatus described above, a light beam exists between the subject 1 and the optical sensor 4. Therefore, if a flat glass 20 were to be interposed in the optical path between the lens of such an optical system 5 and the subject 1, as shown in FIG. 1A, the glass 20 would be The light guided to the upper point P is refracted here in a sequential manner, and exits from the point Q into the atmosphere as a light beam parallel to the surface again. Note that the light introduced vertically into the glass 20 is not refracted like the light ray i.
このことは、点０からの光があたかも点０°から投光さ
れたかのような効果、すなわち光路の短縮効果が得られ
ることを示している。This shows that the effect as if the light from point 0 were projected from point 0°, that is, the effect of shortening the optical path, can be obtained.
また、光学系５のレンズと光センサ４との間に第１Ｂ図
に示すように平板ガラス２０を介在させたとすると、第
１Ａ図とは逆の効果が生じ、点Ｂからの光線はガラス２
０内で酉のように屈折され、位置■。Furthermore, if a flat glass 20 is interposed between the lens of the optical system 5 and the optical sensor 4 as shown in FIG. 1B, an effect opposite to that shown in FIG.
Refracted like a rooster within 0, position ■.
で結像されるべきものが、位置Ｉで結像されるという光
路の延長効果が得られる。An optical path extension effect is obtained in which what should be imaged at position I is imaged at position I.
更にまた、一般的に物体と結像レンズとの関係について
述べると、第１Ｃ図に示すように、物体１１Ａがレンズ
１２から離れた位置０２にある場合の像１３Ａはレンズ
１２に近い方の位置■２に結像され、逆にレンズ１２に
近い０１にある物体１１Ｂの像１３Ｂはレンズ１２から
遠い位置■１に結像される。Furthermore, generally speaking about the relationship between the object and the imaging lens, as shown in FIG. The image 13B of the object 11B located at position 01, which is close to the lens 12, is imaged at the position ■1, which is far from the lens 12.
しかしてこのことは、例えば第３Ａ図に示したような光
学的検出装置の場合、左右のミラー１０によって反射さ
れた光束による光センサ４上の映像がセンサ４の中央部
に直接投光された光束による映像に比べてその光路長が
長くなることによって前者の映像の方がレンズの手前の
方で結像されることを意味する。However, for example, in the case of an optical detection device as shown in FIG. This means that the optical path length is longer than that of an image created by a light beam, which means that the former image is formed closer to the front of the lens.
そこで、上述したレンズの手前に、第１Ｂ図のところで
説明したようにして平板ガラス２０を設けたとすれば、
その延長効果により結像を中央部の映像に合わせて得る
ことができる。ちなみに、ガラスの屈折率をｎ、厚さを
ｄとするとその延長長さはｎｄ／ｎ＋１で表わされるが
、レンズと被検体との間の距離をレンズの焦点距離に比
べて十分に大きくとることができるので、被検体の像は
焦点の近くで密集した状態に結像されることになり、厚
さｄが薄く（例えば０．３ｍｍのフリントガラス）でも
出願人が行った実験では十分な所要長の延長長さを発生
させることが可能であった。Therefore, if the flat glass 20 is provided in front of the above-mentioned lens as explained in FIG. 1B,
Due to the extension effect, it is possible to obtain an image that is aligned with the central image. By the way, if the refractive index of the glass is n and the thickness is d, its extended length is expressed as nd/n+1, but the distance between the lens and the subject must be sufficiently large compared to the focal length of the lens. As a result, the image of the object is formed in a dense manner near the focal point, and even if the thickness d is thin (for example, 0.3 mm flint glass), it was sufficient for the experiments conducted by the applicant. It was possible to generate extended lengths.
第２Ａ図および第２Ｂ図は本発明光センサを適用した外
観検査装置の一例を示す。なお、本例では第３Ａ図〜第
３Ｃ図の場合と同様撮像装置３の光センサ４にＣＣＤラ
インセンサを使用するのでミラー１０は幅の狭いもので
よいが、２次元センサを用いる場合には幅の広いミラー
を使用する。FIGS. 2A and 2B show an example of a visual inspection apparatus to which the optical sensor of the present invention is applied. In this example, as in the case of FIGS. 3A to 3C, a CCD line sensor is used as the optical sensor 4 of the imaging device 3, so the mirror 10 may have a narrow width. However, when a two-dimensional sensor is used, Use wide mirrors.
ここで、被検体１上面側からの光束は、光学系５により
センサ４の中央部に入射され結像するが、側面側からの
光束はミラーｌｏによって反射され、同じく光学系５を
介してセンサ４の左右に入射されて結像する。そこで、
本例ではセンサ４の上述した左右の位置に平板ガラス２
ｏを配設するように構成する。なお左右の平板ガラス２
ｏはそれぞれセンサ４への受光が妨げられないようにし
てセンサ４上またはその手前側の位置に不図示のホルダ
等によって取付けられればよいが、かかるセンサ４にお
いては、第２Ｂ図に示すようにそのＣＣＤ素子列２１と
これらを保護している石英ガラス２２との間に間隙とし
ての空気層２３が介在するので、平板ガラス２０をセン
サ４に密着させるようにしても、支障なく、先に説明し
たような光路の延長効果を発生させることができる。ま
た、その他の構成については第３Ａ図〜第３Ｃ図と同様
であるのでその説明を省略する。Here, the light beam from the upper surface side of the object 1 is incident on the central part of the sensor 4 by the optical system 5 and forms an image, but the light beam from the side surface side is reflected by the mirror lo and passes through the optical system 5 to the sensor 4. 4 and forms an image. Therefore,
In this example, flat glass 2 is placed at the left and right positions as described above for the sensor 4.
o. In addition, left and right flat glass 2
o may be mounted on or in front of the sensor 4 using a holder (not shown) or the like so that light reception to the sensor 4 is not obstructed. Since there is an air layer 23 as a gap between the CCD element array 21 and the quartz glass 22 that protects them, there is no problem even if the flat glass 20 is brought into close contact with the sensor 4, as explained earlier. It is possible to generate an optical path extension effect like that shown in FIG. Further, since the other configurations are the same as those shown in FIGS. 3A to 3C, the explanation thereof will be omitted.
以上の説明では延長効果を得るために平板ガラスを設け
るようにしたが、必らずしも一定した長さの延長効果を
得る必要がなく、むしろ、延長効果をセンサ４の中心寄
りと外縁寄りとで変化させるようにすることも考えられ
るので、センサ４のライン方向に対して曲率または傾斜
を有するレンズ型のガラスを設けるようにしてもよい。In the above explanation, flat glass is provided in order to obtain an elongation effect, but it is not necessarily necessary to obtain an elongation effect of a constant length. It is also conceivable to change the distance between the sensor 4 and the sensor 4, so a lens-shaped glass having a curvature or inclination with respect to the line direction of the sensor 4 may be provided.
なお、平板ガラス等センサ４に設けるガラスの中心寄り
縁部については、先に述べたように処理回路のメモリか
ら多像を読出すときに、それぞれの中央部分の選択読出
しを行うので、映像に影響を及ぼすようなことはない。Regarding the edges of the glass provided in the sensor 4, such as a flat glass, as mentioned earlier, when reading out multiple images from the memory of the processing circuit, the central part of each is selectively read out. There is no impact.
（発明の効果）
以上説明してきたように、本発明によれば、直線状若し
くは２次元的に配設された撮像素子を有し、物体からの
映像が光学系を介して結像されるときに、その光学系ま
での光束の光路長がセンサの中心部分と側辺部分とで異
なる構成の光センサにおいて、中心部分と側辺部分との
うち、光束の光路長が長くなる部分の表面近傍に屈折ガ
ラスを配置し、屈折ガラスを配置した部分から得られる
光路長の延長効果によりその他の部分からの光束と焦点
深度を一致させるようにしたので、明瞭な物体の映像を
結像させることが可能となった。(Effects of the Invention) As described above, according to the present invention, when an image sensor is provided linearly or two-dimensionally, and an image from an object is formed through an optical system. In an optical sensor configured such that the optical path length of the luminous flux to the optical system is different between the center part and the side parts of the sensor, the area near the surface of the part where the optical path length of the luminous flux is longer between the center part and the side parts. A refractive glass is placed in the area, and the optical path length extension effect obtained from the part where the refractive glass is placed matches the depth of focus with the light flux from other parts, making it possible to form a clear image of an object. It has become possible.
また、このように構成した光センサを上述例のような３
次元形状物体の外観検査装置に適用すれば、異なる光路
の光束における光路長を一致させて結像させることがで
き、シェーディングが少なくぼけのない明瞭な像を得る
ことによって正確な誤の無い外観検査を連続的に実施す
ることができる。Moreover, the optical sensor configured in this way can be
When applied to a visual inspection device for dimensional shaped objects, it is possible to form an image by matching the optical path lengths of the light beams of different optical paths, and to obtain a clear image with little shading and no blurring, allowing for accurate visual inspection without errors. can be performed continuously.
第１Ａ図および第１Ｂ図は本発明に適用するガラスによ
る屈折原理を説明するための光路の２態様をそれぞれ示
す線図、第１Ｃ図は凸レンズ系による物体映像の結像点
の変化を示す光線図、第２Ａ図は本発明光センサ装置お
よびその装置を適用した外観検査装置の概要を示す桟弐
図、第２Ｂ図はその先センサ装置の詳細な説明図、第３
Ａ図は本発明の適用３Ｃ図はその照明ボックスのそれぞ
れ側面図および上面図である。
ｌ・・・被検体、
２・・・搬送装置、
３・・・撮像装置、
４・・・光センサ、
５・・・光学系、
６・・・光源、
７・・・すりガラス、
７Ａ、 ９Ａ・・・スリット、
８・・・ボックス、
９・・・上板、
ｌＯ・・・ミラー、
１１Ａ、 ＩＩＢ・・・物体、
１２・・・レンズ、
１３Ａ、 １３Ｂ・・・像、
２０・・・平板ガラス、
２１・・・ＣＣＤ素子列、
２２・・・石英ガラス、
２３・・・空気層。
第１Ａ図 第１Ｂ図
第１Ｃ図
第２Ｂ図
本宛明寅絶例０況理を示す説明図
第２Ａ図
４尤センサ
第３Ａ図Figures 1A and 1B are diagrams showing two aspects of the optical path, respectively, to explain the principle of refraction by glass applied to the present invention, and Figure 1C is a ray diagram showing changes in the imaging point of an object image by a convex lens system. 2A is a cross-sectional view showing an outline of the optical sensor device of the present invention and an appearance inspection device to which the device is applied, FIG. 2B is a detailed explanatory diagram of the sensor device, and FIG.
Figure A is an application of the present invention; Figure C is a side view and a top view of the lighting box, respectively. 1... Subject, 2... Transport device, 3... Imaging device, 4... Optical sensor, 5... Optical system, 6... Light source, 7... Ground glass, 7A, 9A ...Slit, 8...Box, 9...Top plate, IO...Mirror, 11A, IIB...Object, 12...Lens, 13A, 13B...Image, 20... Flat glass, 21... CCD element row, 22... Quartz glass, 23... Air layer. Fig. 1A Fig. 1B Fig. 1C Fig. 2B Fig. 2B explanatory diagram showing the theory of the absolute best example 0 situation for the book Fig. 2A Fig. 4 sensor Fig. 3A
Claims (1)
し、物体表面の映像が光学系を介して結像されるときに
、前記光学系までの光束の光路長が前記配設された撮像
素子の中心部分と側辺部分とで異なる光センサ装置にお
いて、 前記撮像素子の中心部分と側辺部分とのうち、前記光束
の光路長が長くなる部分の表面近傍に屈折ガラスを配設
し、 当該屈折ガラスを配設した部分から得られる光路長の延
長効果により前記中心部分および前記側辺部分において
前記光学系の焦点深度を一致させるようにしたことを特
徴とする光センサ装置。 ２）直線状若しくは２次元的に配設された撮像素子を有
し、被検体の上方に配置され、該被検体の表面を撮像す
る撮像手段と、 前記被検体の側方に配置され、当該被検体の側面からの
光を反射させる反射手段と、 前記被検体の上面からの光および前記反射手段から反射
された光の双方を前記撮像手段に導く光学系と、 前記撮像素子の表面近傍に配設され、前記反射手段から
前記光学系を介して導かれた光の通路を透過させる屈折
ガラスとを具え、 当該屈折ガラスを配設した前記撮像素子の部分から得ら
れる光路長の延長効果により、前記撮像素子の中心部分
および側辺部分においてその焦点深度を一致させるよう
にしたことを特徴とする外観検査装置。[Scope of Claims] 1) An optical path of a light beam to the optical system when an image of the surface of an object is formed through the optical system, having an image sensor arranged linearly or two-dimensionally. In the optical sensor device, the length of the central portion and the side portions of the disposed image pickup device are different, and the length of the portion near the surface of the portion where the optical path length of the luminous flux is longer between the center portion and the side portions of the image pickup device. A refractive glass is disposed in the optical system, and the depth of focus of the optical system is made to match in the center portion and the side portions due to the effect of extending the optical path length obtained from the portion where the refractive glass is disposed. Optical sensor device. 2) an imaging means having an image sensor disposed linearly or two-dimensionally and arranged above the subject to take an image of the surface of the subject; a reflecting means for reflecting light from a side surface of the subject; an optical system that guides both the light from the top surface of the subject and the light reflected from the reflecting means to the imaging means; and near the surface of the imaging element. and a refractive glass that is disposed and transmits the path of light guided from the reflection means through the optical system, and the optical path length is extended by the effect of extending the optical path length obtained from the portion of the image pickup device in which the refractive glass is disposed. . An external appearance inspection apparatus, characterized in that the depth of focus is made to match the depth of focus in the center portion and the side portions of the image sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61258530A JP2677351B2 (en) | 1986-10-31 | 1986-10-31 | 3D object external inspection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61258530A JP2677351B2 (en) | 1986-10-31 | 1986-10-31 | 3D object external inspection system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63113518A true JPS63113518A (en) | 1988-05-18 |
| JP2677351B2 JP2677351B2 (en) | 1997-11-17 |
Family
ID=17321494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61258530A Expired - Lifetime JP2677351B2 (en) | 1986-10-31 | 1986-10-31 | 3D object external inspection system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2677351B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998012502A1 (en) * | 1996-09-17 | 1998-03-26 | Komatsu Ltd. | Device for imaging object to be inspected and device for inspecting semiconductor package |
| JP2006071453A (en) * | 2004-09-02 | 2006-03-16 | Mega Trade:Kk | Surface inspection device |
| JP2008020801A (en) * | 2006-07-14 | 2008-01-31 | Fuji Xerox Co Ltd | Stereoscopic display system |
| US7852333B2 (en) | 2005-05-31 | 2010-12-14 | Fuji Xerox Co., Ltd. | Three-dimensional volumetric display apparatus and method |
| WO2012039298A1 (en) * | 2010-09-21 | 2012-03-29 | 東レ株式会社 | Inspection device and inspection method for thread-like product |
| CN114754700A (en) * | 2022-04-29 | 2022-07-15 | 江苏立晶工业科技有限公司 | Curvature detection method and device for windshield |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS527746A (en) * | 1975-07-09 | 1977-01-21 | Canon Inc | Multifocal-point microscope |
| JPS6049886A (en) * | 1983-08-31 | 1985-03-19 | Matsushita Electric Ind Co Ltd | Laser working head |
| JPS61191909A (en) * | 1985-02-14 | 1986-08-26 | Ikegami Tsushinki Co Ltd | Pick-up device for surface of object |
-
1986
- 1986-10-31 JP JP61258530A patent/JP2677351B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS527746A (en) * | 1975-07-09 | 1977-01-21 | Canon Inc | Multifocal-point microscope |
| JPS6049886A (en) * | 1983-08-31 | 1985-03-19 | Matsushita Electric Ind Co Ltd | Laser working head |
| JPS61191909A (en) * | 1985-02-14 | 1986-08-26 | Ikegami Tsushinki Co Ltd | Pick-up device for surface of object |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998012502A1 (en) * | 1996-09-17 | 1998-03-26 | Komatsu Ltd. | Device for imaging object to be inspected and device for inspecting semiconductor package |
| US6307210B1 (en) | 1996-09-17 | 2001-10-23 | Cognex Technology And Investment Corporation | Device for imaging object to be inspected and device for inspecting semiconductor package |
| JP2006071453A (en) * | 2004-09-02 | 2006-03-16 | Mega Trade:Kk | Surface inspection device |
| US7852333B2 (en) | 2005-05-31 | 2010-12-14 | Fuji Xerox Co., Ltd. | Three-dimensional volumetric display apparatus and method |
| JP2008020801A (en) * | 2006-07-14 | 2008-01-31 | Fuji Xerox Co Ltd | Stereoscopic display system |
| US7651225B2 (en) | 2006-07-14 | 2010-01-26 | Fuji Xerox Co., Ltd. | Three dimensional display system |
| WO2012039298A1 (en) * | 2010-09-21 | 2012-03-29 | 東レ株式会社 | Inspection device and inspection method for thread-like product |
| CN114754700A (en) * | 2022-04-29 | 2022-07-15 | 江苏立晶工业科技有限公司 | Curvature detection method and device for windshield |
| CN114754700B (en) * | 2022-04-29 | 2023-08-18 | 江苏立晶工业科技有限公司 | Method and device for detecting curvature of windshield |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2677351B2 (en) | 1997-11-17 |
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