JPS63102294A - Electronic component tester - Google Patents
Electronic component testerInfo
- Publication number
- JPS63102294A JPS63102294A JP61247207A JP24720786A JPS63102294A JP S63102294 A JPS63102294 A JP S63102294A JP 61247207 A JP61247207 A JP 61247207A JP 24720786 A JP24720786 A JP 24720786A JP S63102294 A JPS63102294 A JP S63102294A
- Authority
- JP
- Japan
- Prior art keywords
- electronic component
- lead
- suction head
- suction
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000000078 claw Anatomy 0.000 claims description 17
- 238000007689 inspection Methods 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 claims description 11
- 230000007723 transport mechanism Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims 1
- 238000003384 imaging method Methods 0.000 description 8
- 238000007667 floating Methods 0.000 description 7
- 239000013307 optical fiber Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 241000277269 Oncorhynchus masou Species 0.000 description 1
- 235000006732 Torreya nucifera Nutrition 0.000 description 1
- 244000111306 Torreya nucifera Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Supply And Installment Of Electrical Components (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、電子部品をプリント基板に実装する前工程
などで、電子部品のリードを検査するために用いる電子
部品の検査装置に関するものである。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to an electronic component inspection device used for inspecting leads of electronic components in a pre-process of mounting electronic components on a printed circuit board. .
第6図は例えば実開昭60−189808号公報に示さ
れた従来の電子部品の検査装置の斜視図である。第6図
において、1は検査される電子部品であす、電子部品1
は4つの側辺の外周から複数のリード1aがそれぞれ突
出している平面矩形の薄板状のものである。2は電子部
品1を着脱可能に保持するtこめの吸着ヘッドてあり、
吸着ヘッド2ζよ図示しない排気装置に接続されている
。3は吸着・\ラド2の下方に配設され、吸着ヘッド2
を縦軸回りに旋回させるためのモータ、4は吸着・\、
−Iド2事jよびモータ3が装着され、これらを水平に
直線移動させるための移動テーブル、5は移動テーブル
4の移動量を検出するための直線エンコーダ、6および
7は吸着l\ラッドに保持された電子部品1のリード1
aの曲がりを検査するための光ファイバおよびフオI・
センサである。FIG. 6 is a perspective view of a conventional electronic component inspection apparatus disclosed in, for example, Japanese Utility Model Application Publication No. 60-189808. In Fig. 6, 1 is an electronic component to be inspected.Electronic component 1
is a thin plate with a rectangular plane and a plurality of leads 1a protruding from the outer periphery of each of its four sides. 2 has a T-shaped suction head that removably holds the electronic component 1;
The suction head 2ζ is connected to an exhaust device (not shown). 3 is arranged below the suction/rad 2, and the suction head 2
Motor for rotating around the vertical axis, 4 is suction \,
- A moving table is installed to move the moving table 2 and the motor 3 horizontally, 5 is a linear encoder for detecting the amount of movement of the moving table 4, and 6 and 7 are attached to the suction l\rad. Lead 1 of held electronic component 1
Optical fiber and optical fiber for inspecting bending of a.
It is a sensor.
次に、以上のように構成された従来の電子部品の動作に
ついて説明する。電子部品1を吸着ヘッド2上に載置し
、吸着ヘッド2から排気して吸着ヘッド2に電子部品l
を吸着把持する。次に、移動テーブル4を適宜の手段で
直線移動させることで電子部品1を移動させ、これの−
側辺から突出した1番目のり−ド1aの先端部と光ファ
イバ6の先端面とが対向するように位置合せを行う。光
ファイバ6からリード1aの先端部に向って光を照射し
、その反射光の有無をフォトセンサ7で検出することで
、リード1aの上下方向の浮きを検出し、移動テーブル
4によって電子部品1を移動させながら、この移#量を
直線エンコーダ5で検出し、リード1a先端部からの反
射光の有無をフォトセンサ7で検出することにより、リ
ード1aのピ・ソチを検査する。また、モータ3によっ
て吸着ヘッド2に保持された電子部品1を90°回転さ
せ、他の側辺から突出したり−ド1aの曲がり。Next, the operation of the conventional electronic component configured as described above will be explained. The electronic component 1 is placed on the suction head 2, the suction head 2 is evacuated, and the electronic component 1 is placed on the suction head 2.
Hold it by suction. Next, the electronic component 1 is moved by linearly moving the moving table 4 by an appropriate means, and the -
Alignment is performed so that the tip end of the first beam 1a protruding from the side and the tip end surface of the optical fiber 6 are opposed to each other. By emitting light from the optical fiber 6 toward the tip of the lead 1a and detecting the presence or absence of the reflected light with the photosensor 7, lifting of the lead 1a in the vertical direction is detected, and the electronic component 1 is moved by the moving table 4. While moving the lead 1a, the linear encoder 5 detects the amount of movement, and the photosensor 7 detects the presence or absence of reflected light from the tip of the lead 1a, thereby inspecting the lead 1a. Moreover, the electronic component 1 held by the suction head 2 is rotated by 90 degrees by the motor 3, and the electronic component 1 is protruded from the other side or the electronic component 1 is bent.
ピッチの検査を上述した一側辺と同様にして行う。The pitch is inspected in the same manner as for one side as described above.
従来の電子部品の検査装置は、上述のように構成され、
光ファイバの先端面と電子部品のリード先端部との距離
が特定されており、特定寸法の電子部品しか検査できず
、また吸着ヘッド上に電子部品を置く際に吸着ヘッドの
中心に対する電子部品の位置ずれや、電子部品の回転に
よるずれによって、光ファイバの先端面と電子部品のリ
ード先端部との距離が変化し、このため高精度のリード
の検査ができず、これ(まフラジ)−パッケージ形の電
子部品をプリン)・基板に実装する工程においてリード
間隔ピッチが小さくなり、信頼性を確保しにくくなるこ
とにつながるという間;頂点がある。A conventional electronic component inspection device is configured as described above,
The distance between the tip of the optical fiber and the lead tip of the electronic component is specified, so only electronic components of specific dimensions can be inspected, and when placing the electronic component on the suction head, the electronic component must be placed relative to the center of the suction head. Due to misalignment or misalignment due to the rotation of electronic components, the distance between the tip of the optical fiber and the tip of the lead of the electronic component changes, making it impossible to inspect the lead with high precision. In the process of mounting electronic components (printed) and printed circuit boards, the lead spacing pitch becomes smaller, making it difficult to ensure reliability.
さらに、リード先端部からの光の反射があるか否かによ
ってリードの検査をしているため、リードの接合面から
の上下方向の浮き址は計測できないという問題点があっ
た。Furthermore, since the lead is inspected based on whether or not there is light reflection from the tip of the lead, there is a problem in that it is not possible to measure the vertical lifting of the lead from the bonding surface.
この発明は、上記のような問題点を解決するためになさ
れたもので、寸法、形状が異なる多品種のヤニ子部品の
リードを、これらのピッチと接合面からの浮き量とを高
精度に計測できる電子部品の検査装置を得ろことを目的
としている。This invention was made in order to solve the above-mentioned problems, and it is possible to accurately adjust the pitch and the amount of floating from the joint surface of the leads of various types of resin parts with different sizes and shapes. The purpose is to obtain an inspection device for electronic components that can be measured.
この発明に係る電子部品の検査装置は、吸着へ、ソドの
両側方に電子部品を押付ける少な(とも1組の相対向す
る開閉可能な爪を配設した位置決め装置と、上記電子部
品の吸着ヘッドによる吸着面と傾斜した光軸上の電子部
品−側方および他側方に光源およびテレビカメラのよう
なリード撮像機を対向設置した画像計測装置とを備え、
上記撮像機を電子部品に対する距離調節可能に構成し、
さらに画像計測装置で得た画像と予めブムグラムされた
リードの形状精度の値とから制御装置によって電子部品
の良否判定を行うようにしたものである。The electronic component inspection device according to the present invention includes a positioning device that presses the electronic component on both sides of a suction member (a positioning device having a pair of opposing claws that can be opened and closed); Equipped with a suction surface by a head, an electronic component on an inclined optical axis, and an image measuring device with a light source and a lead imager such as a television camera installed facing each other on one side and the other side,
The image pickup device is configured to be able to adjust the distance to the electronic component,
Furthermore, the quality of the electronic component is determined by the control device based on the image obtained by the image measuring device and the value of the shape accuracy of the lead which has been programmed in advance.
この発明における電子部品の検査装置は、吸着ヘッドに
載置された電子部品を相対向する爪で対向側辺外側から
押付けて位置決めすることができ、これによって、電子
部品の吸着ヘッドに対する位置ずれや回転方向のずれを
なくすことがてき、また光源と対向する撮像機を移動さ
せることで、撮像機の焦点を合せることができて、形状
寸法が異なる電子部品のリードを高精度に計測でき、さ
らに、電子部品の吸着ヘッドによる吸着面に対し光源お
よび光源に対向する撮像機の光軸を傾斜させたことで、
撮像機によって電子部品のリードのピッチだけではな(
、浮き量も画像として得られ、したがって、1台の撮像
機でリードのピッチと浮き量を同時に計測できる。The electronic component inspection device of the present invention can position the electronic component placed on the suction head by pressing it from the outside of the opposite side with opposing claws, thereby preventing misalignment of the electronic component with respect to the suction head. It is possible to eliminate misalignment in the rotational direction, and by moving the imager facing the light source, the imager can be focused, making it possible to measure leads of electronic components with different shapes and dimensions with high precision. By tilting the optical axis of the light source and the image pickup device facing the light source with respect to the suction surface of the electronic component suction head,
Depending on the imager, it is not just the pitch of the electronic component leads (
, the floating amount can also be obtained as an image, and therefore the pitch and floating amount of the lead can be measured simultaneously with one imaging device.
以下、この発明の一実施例を第1図ないし第5図につい
て説明する。An embodiment of the present invention will be described below with reference to FIGS. 1 to 5.
第1図ないし第5図において、第6図と同一符号は、同
一または相当部分を示す。第1図において、8はロボッ
トからなる搬送機構であり、この搬送機構8は、機台9
の後部上に配設した左右方向に直線往復動する第1アー
ム10と、このアーム10上に配設した前後方向に直線
往復動する第2アーム11と、第2アーム11の先端部
に支持されて上下方向に往復動する搭載ヘッド12とを
備え、搭載ヘッド12にこれを縦軸回りに90’ずつ回
転させろ回転モータ13が連結されている。In FIGS. 1 to 5, the same reference numerals as in FIG. 6 indicate the same or corresponding parts. In FIG. 1, reference numeral 8 denotes a transport mechanism consisting of a robot, and this transport mechanism 8 has a machine base 9
A first arm 10 disposed on the rear part of the arm 10 that reciprocates linearly in the left-right direction, a second arm 11 disposed on this arm 10 that reciprocates linearly in the front-rear direction, and a support at the tip of the second arm 11. A rotary motor 13 is connected to the mounting head 12 to rotate the mounting head 12 by 90' around a vertical axis.
なお、搭載へ・ソド12は吸着ヘッド2と同様に図示し
ない排気装置に接続されている。14ば機台9の高さの
低い前部に設けた位置決め装置であり、位置決め装置1
4は、第2図にも示すように、相対向する爪15.16
の2組がモータ1718によって回動するねじ軸19,
20の互いに反対方向のねじにそれぞれねじ嵌合さt゛
シ、爪15,16が図示しない固定部材にtaじ軸19
,20の軸方向に沿う直線移動可能に係合されている。Note that, like the suction head 2, the mounting head 12 is connected to an exhaust device (not shown). 14 is a positioning device provided at the lower front part of the machine stand 9, and is a positioning device 14.
4, as shown in FIG. 2, opposite claws 15 and 16.
two sets of screw shafts 19 rotated by a motor 1718;
20 screws in opposite directions, and the claws 15 and 16 are attached to the fixing member (not shown) in the same direction as the shaft 19.
, 20 for linear movement along the axial direction.
また、ねじ軸19,20はX、y方向に互いに直交して
立体交差され、さらに一方の組の爪15ば幅が広く、他
方の組の爪16は幅が狭く形成され、上端部が吸着へノ
ド2の外側方にそれぞれ配置されている。21,22は
機台9の前部に設けた画像計測装置であり、画像計測装
置21,221よ、第3図にも示すように、機台9上の
位置決め措置14両側方に固定した支脚23,24上部
にねじ軸25゜26が回動可能に架設され、ねし軸25
,26に搭載台27.28がねし嵌合され、ねじ軸25
゜26の外端部にモータ29,30が連結され、モータ
29,30の正逆回転によってねし軸25゜26を介し
て位置決め装置14に対する搭載台27゜28の距離が
調整されるように構成されている。Further, the screw shafts 19 and 20 are orthogonal to each other in the X and Y directions, and are three-dimensionally intersected, and one set of claws 15 is wide, the other set of claws 16 is narrow, and the upper end is attracted. They are arranged on the outside of the henode 2, respectively. Reference numerals 21 and 22 denote image measuring devices installed at the front of the machine base 9, and the image measuring devices 21 and 221, as shown in FIG. A screw shaft 25° 26 is rotatably installed on the top of 23, 24, and the screw shaft 25
, 26 are screw-fitted to the mounting bases 27 and 28, and the screw shaft 25
Motors 29 and 30 are connected to the outer ends of the mounts 29 and 30, and the distance of the mounting base 27 and 28 to the positioning device 14 is adjusted via the screw shaft 25 and 26 by forward and reverse rotation of the motors 29 and 30, respectively. It is configured.
搭載台27.28上には工業用テレビカメラからなる撮
像PA31,32が下向きに傾斜してそれぞれ固定され
、撮像8131.32と対向するランプからなる光源3
3.34が搭載台27.28に上向きに傾斜してそれぞ
れ固定され、光i33,34の光軸35,36が吸着ヘ
ッド2−ヒに水工に吸着された電子部品1のリード18
部を経て撮像機31.32の光軸と一致している。なお
、第1図中37は機台9の前後方向中間部上に設けられ
た電子部品1の収納部、第2図中38は吸着ヘッド2の
排気管である。また、第4図において、39は撮111
31.32の画像が映(7出されろ監視用受像機であり
、制御装置に組込まれている。On the mounting bases 27 and 28, imaging PAs 31 and 32 consisting of industrial television cameras are respectively fixed with downward inclinations, and a light source 3 consisting of a lamp facing the imaging 8131 and 32 is fixed.
3.34 are fixed upwardly tilted on the mounting bases 27 and 28, respectively, and the optical axes 35 and 36 of the light beams 33 and 34 are attached to the leads 18 of the electronic component 1 which are sucked by the suction head 2-hi.
The optical axes of the imagers 31 and 32 coincide with each other. Note that 37 in FIG. 1 is a housing portion for the electronic component 1 provided on the intermediate portion of the machine base 9 in the longitudinal direction, and 38 in FIG. 2 is an exhaust pipe of the suction head 2. In addition, in FIG. 4, 39 is the camera 111.
Images 31 and 32 are displayed on the monitor receiver, which is built into the control device.
次に、以上のように構成された実施例の動作について説
明する。Next, the operation of the embodiment configured as above will be explained.
まず、搬送機構8によって収納部37に収納された第4
図に示す電子部品1の上面を搭載・\・・ノド12に吸
着させ、電子部品1を位置決め装置14の吸着ヘッド2
ヒに搬入、N置し、搭載−X7ド12によろ吸着を解除
する。次に、位置決め装置14のモータ17,18の正
回転によって11目いている爪15.16をねj′/軸
19,20を介して閉方向に移動させ、を子部品1の各
側辺のリード1ハを2組の対向する爪15,16で両側
からそれぞスーシ押付け、を子部品1の吸着ヘッド2に
対する位置ずれ、回転方向のずれを修正して電子部品1
を位置決めする。この場合に、位置決めされろ電子部品
1の寸法は、第2図の2 ffJlの爪1.5.+6の
それぞれの可動範囲40.41で決定され、爪15に比
へ爪16の幅が狭いので、多品種の電子部品に対応でき
ろ。その後、電子部品1の下111)を吸でr・\ノド
2からの排気によって吸着ヘッド2上1fjに水下に吸
着保持し、電子部品1の形状寸法に応じ、両19計測装
置21,22の撮像機31,32と光、p733 、3
4の光軸35.36上に電子部品1のリ−ド】aが位置
するように、電子部品1を吸7tヘンド2によって移動
させ、さらに電子部品】の寸法に応じ画像計測装置21
.22のモータ29゜30の駆動によりねじ軸25.2
6を介して撮像機31.32を搭載台27.28と共に
光軸35゜36方向の前後に移動させて焦点合せを行う
。2組の光軸3536上のリード1aは光源33.34
からの光を遮断するために、撮像機31,32に陰影を
結び、第4図に示すように制御装置の監視用受像機39
には、一方の撮像機31の影像が上半部に、他方の撮像
4J32の影像が下半部にそれぞれ映し出される。この
ため、電子部品1の対向する両側辺のリード1aを同時
に検査することができる。また、リード1aの第4図左
右方向および上下方向の座標を読取るととて、リードの
ピッチP、、P2 および浮き量ΔhIF△)12 を
同時に計測することができ、これらの計測値と予めめプ
ログラムされたピッチの基準値および浮き量の許容値と
を比較することで、リードの良否を判定し、判定結果の
出力を制御装置から取出すことができる。そして、を子
部品1の吸着ヘッド2による吸着面と傾斜させた光軸上
に、撮像機31゜32と光1933,34とを対向させ
て設置したので、1組の撮像機と光源で電子部品1のリ
ード〕aのピッチとリードの接合面からの浮き量の両方
を検査できる。さらに、上記2側辺のリード1aの検査
を終った電子部品1を爪15,16による押付けおよび
吸竹ヘッド2による吸着を解除した状態で、搭載ヘッド
12を回転をモータ13で90゜回転させろこと(こよ
り、残った他の2側辺のリード1aの検査を上述した手
順と同様にして検査できる。なお、検査後の電子部品1
は、制御装置の出力信号による搬送81構8の動作によ
り、良品と不良品とに分けて搬出する。First, the fourth
The upper surface of the electronic component 1 shown in the figure is mounted on the throat 12, and the electronic component 1 is placed on the suction head 2 of the positioning device 14.
Carry it in to H, place it in N, and release the suction with the mounting-X7 door 12. Next, by forward rotation of the motors 17 and 18 of the positioning device 14, the eleventh claws 15 and 16 are moved in the closing direction via the screws/shafts 19 and 20, and the The lead 1 is pressed down from both sides with two sets of opposing claws 15 and 16, and the electronic component 1 is corrected for misalignment and rotational direction of the child component 1 with respect to the suction head 2.
position. In this case, the dimensions of the electronic component 1 to be positioned are 2 ffJl claws 1.5. The width of the claw 16 is narrower than that of the claw 15, so it can accommodate a wide variety of electronic components. After that, the lower part 111) of the electronic component 1 is suctioned and held under water on the upper part 1fj of the suction head 2 by suction and exhaust from the throat 2. image pickup devices 31, 32 and light, p733, 3
The electronic component 1 is moved by the suction hand 2 so that the lead A of the electronic component 1 is positioned on the optical axis 35, 36 of the electronic component 4, and then the image measuring device 21 is moved according to the dimensions of the electronic component.
.. The screw shaft 25.2 is driven by the motor 29°30 of 22.
Focusing is performed by moving the imaging devices 31 and 32 together with the mounting bases 27 and 28 back and forth along the optical axis 35.degree. The leads 1a on the two sets of optical axes 3536 are light sources 33.34
In order to block the light from the camera, a shadow is connected to the image pickup devices 31 and 32, and as shown in FIG.
, the image of one imaging device 31 is displayed in the upper half, and the image of the other imaging device 4J32 is displayed in the lower half. Therefore, the leads 1a on opposite sides of the electronic component 1 can be inspected simultaneously. In addition, by reading the coordinates of the lead 1a in the horizontal and vertical directions in Figure 4, the lead pitch P, , P2 and floating amount ΔhIFΔ)12 can be measured simultaneously, and these measured values and the By comparing the programmed pitch reference value and floating amount tolerance value, it is possible to determine whether the lead is good or not, and output the determination result from the control device. The image pickup device 31° 32 and the lights 1933 and 34 were installed facing each other on the optical axis inclined to the suction surface of the suction head 2 of the child component 1. Both the pitch of lead a of component 1 and the amount of floating of the lead from the joint surface can be inspected. Furthermore, after the inspection of the leads 1a on the two sides has been completed, the electronic component 1 is released from being pressed by the claws 15 and 16 and sucked by the suction head 2, and the mounting head 12 is rotated by 90 degrees by the motor 13. (Thus, the remaining leads 1a on the other two sides can be tested in the same manner as the above-mentioned procedure.The electronic component 1 after the test
The products are separated into good products and defective products and transported out by the operation of the conveyor 81 structure 8 based on the output signal of the control device.
この発明による検査装置は、電子部品の検査過程で、リ
ードのピッチおよび浮きの絶対量がわかるので、回路基
板の所定位置に精度よく電気部品を載置する電子部品搭
載装置に用いてもよい。Since the inspection device according to the present invention can determine the lead pitch and the absolute amount of float during the process of inspecting electronic components, it may be used in an electronic component mounting device that accurately places electrical components at predetermined positions on a circuit board.
また、この発明による検査装置は、対向する1組の側辺
のみからリードが突出した電子部品の場合は、搭載ヘッ
ドを回転させるモータなどの桟構を省(ことができ、ま
たこの回転機構を用いて電子部品を90°ずっ回動させ
、画像計測装置の光源およびリードmI!aを1組のみ
にしてもよい。Furthermore, in the case of an electronic component in which leads protrude only from one set of opposing sides, the inspection device according to the present invention can omit a frame structure such as a motor that rotates the mounting head, and can also eliminate this rotation mechanism. The electronic components may be rotated through 90 degrees using the optical system, and there may be only one set of the light source and lead mI!a of the image measuring device.
さらに上記撮像機は工業用テレビカメラに限られるもの
ではなく適宜のものを用いることができる。Furthermore, the above-mentioned image pickup device is not limited to an industrial television camera, and any suitable camera can be used.
以−ヒ説明しt二ように、この発明によれば、吸着ヘッ
ドの両側方に相対向させて開閉可能な爪を配設し、これ
らの爪で電子部品を対向側辺外側から揮付けて位置決め
するLうにしたので、電子部品を吸着・\ラドに対し高
精度に位置決めして吸着保持させることができ、また光
源と対向する撮像機を移動させろことで、撮像機の焦点
を合せることができるので、形状寸法が異なるr電子部
品のリードを、11精度に計コDIでき、さらに7は子
部品の吸着ヘッドによる吸4¥1faに対し光源および
撮像機の光軸を傾斜させたので、1台の撮像機によって
電子部品のリードのピッチと浮き量を同時に計測できろ
という効果が得られる。As explained below, according to the present invention, claws that can be opened and closed are provided on both sides of the suction head, and electronic components are volatilized from the outside of the opposite sides using these claws. Since the positioning is L, it is possible to attract and hold electronic components with high accuracy by positioning them against the radar, and by moving the image pickup device facing the light source, it is possible to focus the image pickup device. As a result, the leads of electronic components with different shapes and dimensions can be measured with 11 accuracy, and the optical axis of the light source and image pickup device is tilted relative to the suction head of the child component. This provides the advantage of being able to simultaneously measure the lead pitch and floating amount of electronic components using a single imaging device.
第1図はこの発明の一実施例による電子部品の検査装置
を示す斜視図、第2図(よ671位置決め装置の斜視図
、第3図ば撮像機と光源との正面図、第4図は監視用受
像機の正面図、第5図は電子部品の平向図、第6図は従
来の電子部品の検査装置を示す斜視図である。
1 電子部品、1 a −’J−ド、2 吸着・λラド
、8 搬送機構、12 搭載ヘッド、13 回転モータ
、14 位置決め装置、15,16−爪、17.18
モータ、19,20 ねじ軸、21゜22 画像計
測装置、25,26−ねし軸、27゜28 搭載台、2
9,30 モータ、31,32・撮像機、33,34
光源、39 監視用受(重機。
なお、図中同一符号は同一または相当部分を示す。
代理人 大 岩 増 !#(外2名)
沁 l λ
/゛宅ぜ品
8遡バ費躊
15 口
第 2 図
2 R多るAシト
茅3図
手続補正書(自発)
昭和 年 月 日
02 ε ど6
特許庁長官殿 と1
、事件の表示 特願昭61−247207号′2、
発明の名称
電子部品の検査装置
3、補正をする者
事件との関係 特許出願人
住 所 東京都千代田区丸の内二丁目2番3号名
称 (601)三菱電機株式会社代表者志岐守哉
4、代理人
住 所 東京都千代田区丸の内二丁目2番3号、
(−” 、、、:H′
5、補正の対象
(1)明細書の発明の詳細な説明の欄
(2)図面
6、補正の内容
(1)明細書筒8頁15行目に「位置決め措置14」と
あるを、「位置決め装置14」と補正する。
(2)同第8頁17行目に「回動可能」とあるを、「回
転可能」と補正する。
(3)同第10頁13〜15行目に「その後、・・・・
・・電子部品1の形状寸法に応じ、コとあるを、[その
後、搭載ヘッド12が電子部品1の上面を吸着把持する
際、位置ずれ9回転ずれを生じないよう電子部品1の下
面を吸着へンド2からの排気によって吸着ヘッド2上面
に水平に吸着保持し、搭載ヘッド12が電子部品1の上
面に下降。
吸着把持した後、爪15.16による押付けおよび吸着
ヘッド2による吸着を解除した状態で搭載ヘッド12が
、電子部品1の形状寸法に応じ、」と補正する。
(4)同第10頁18〜19行目に「電子部品1を吸着
ヘッド2によって移動させ」とあるを、「電子部品1を
移動させ」と補正する。
(5)図面第1図を別紙の通り補正する。
7、添付書類FIG. 1 is a perspective view showing an electronic component inspection device according to an embodiment of the present invention, FIG. 2 is a perspective view of a positioning device, FIG. 3 is a front view of an image pickup device and a light source, and FIG. 5 is a plan view of an electronic component, and FIG. 6 is a perspective view of a conventional electronic component inspection device. 1 Electronic component, 1 a-'J-do, 2 Adsorption/λrad, 8 Transport mechanism, 12 Mounting head, 13 Rotating motor, 14 Positioning device, 15, 16-claw, 17.18
Motor, 19, 20 Screw shaft, 21゜22 Image measuring device, 25, 26-Thread shaft, 27゜28 Mounting stand, 2
9, 30 Motor, 31, 32/Imaging device, 33, 34
Light source, 39 Monitoring receiver (heavy equipment. In addition, the same reference numerals in the diagram indicate the same or corresponding parts. Agent: Masu Oiwa! # (2 others) 2nd Figure 2 Written amendment to the procedures for Figure 3 of R, A, and Kaya (voluntary), Showa year, month, day, 02 ε d6 Mr. Commissioner of the Japan Patent Office and 1
, Incident Display Patent Application No. 61-247207'2,
Name of the invention: Electronic component inspection device 3; Relationship with the case of the person making the amendment Patent applicant address: 2-2-3 Marunouchi, Chiyoda-ku, Tokyo Name (601) Moriya Shiki, representative of Mitsubishi Electric Corporation 4; Agent address: 2-2-3 Marunouchi, Chiyoda-ku, Tokyo.
(-” ,,,:H' 5. Subject of amendment (1) Detailed description of the invention column in the specification (2) Drawing 6, contents of amendment (1) "Positioning" on page 8, line 15 of the specification tube ``Measure 14'' is corrected to ``Positioning device 14''. (2) ``Rotatable'' on page 8, line 17 of the same is corrected to ``rotatable.'' (3) 10th page of the same. On page 13-15, it says, “After that...
...Depending on the shape and dimensions of the electronic component 1, select [After that, when the mounting head 12 suctions and grips the top surface of the electronic component 1, it suctions the bottom surface of the electronic component 1 to avoid misalignment by 9 rotations. The mounting head 12 is horizontally sucked and held on the top surface of the suction head 2 by the exhaust from the hand 2, and the mounting head 12 is lowered to the top surface of the electronic component 1. After the electronic component 1 is gripped by suction, the mounting head 12 corrects the electronic component 1 according to its shape and size while the pressing by the claws 15 and 16 and the suction by the suction head 2 are released. (4) On page 10, lines 18-19, the phrase "electronic component 1 is moved by suction head 2" is corrected to "electronic component 1 is moved." (5) Amend Figure 1 of the drawing as shown in the attached sheet. 7. Attached documents
Claims (5)
を吸着保持する吸着ヘッドの両側方に上記電子部品を押
付けて位置決めする少なくとも1組の相対向した開閉可
能な爪を配設した位置決め装置と、上記吸着ヘッドに対
し電子部品を出し入れする搬送機構と、上記電子部品の
吸着ヘッドによる吸着面と傾斜した光軸上に電子部品の
一側方に配置した光源および電子部品の他側方に電子部
品との距離調節可能に配置したリード撮像機を対向配置
した画像計測装置と、この画像計画装置で得た画像と予
めプログラムされた上記リードの形状精度の値とから良
否判定の出力をする制御装置とを備えたことを特徴とす
る電子部品の検査装置。(1) Positioning with at least one set of opposing claws that can be opened and closed to press and position the electronic component on both sides of a suction head that suction holds one side of the electronic component with multiple leads protruding from the sides. a device, a transport mechanism for loading and unloading electronic components into and out of the suction head, a light source disposed on one side of the electronic component on an optical axis inclined to the suction surface of the electronic component suction head, and the other side of the electronic component. An image measurement device has a lead imager placed facing the electronic component so that the distance can be adjusted, and an output of a pass/fail judgment is made from the image obtained by this image planning device and the shape accuracy value of the lead programmed in advance. An electronic component inspection device comprising: a control device for controlling electronic components;
せて2組設け、電子部品の対向する側辺から突出したリ
ードを同時に検査するものである特許請求の範囲第1項
に記載の電子部品の検査装置。(2) The image measuring device is provided with two sets of light sources and lead imagers facing each other, and simultaneously inspects the leads protruding from opposite sides of the electronic component. Electronic component inspection equipment.
の軸方向に移動する搭載台に固定してある特許請求の範
囲第1項または第2項に記載の電子部品の検査装置。(3) The electronic component inspection device according to claim 1 or 2, wherein the lead imager is fixed to a mounting base that moves in the axial direction of the screw shaft as the screw shaft rotates.
2組の相対向した爪を有している特許請求の範囲第1項
、第2項または第3項に記載の電子部品の検査装置。(4) The electronic component inspection device according to claim 1, 2 or 3, wherein the positioning device has two sets of opposing claws that open and close in directions perpendicular to each other.
0°ずつ回動する搭載ヘッドを有している特許請求の範
囲第1項、第2項、第3項または第4項に記載の電子部
品の検査装置。(5) The conveyance device picks up the electronic components and places them on the suction head at 9
The electronic component inspection device according to claim 1, 2, 3, or 4, which has a mounting head that rotates by 0°.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61247207A JPH0770879B2 (en) | 1986-10-17 | 1986-10-17 | Electronic component inspection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61247207A JPH0770879B2 (en) | 1986-10-17 | 1986-10-17 | Electronic component inspection device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63102294A true JPS63102294A (en) | 1988-05-07 |
JPH0770879B2 JPH0770879B2 (en) | 1995-07-31 |
Family
ID=17160038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61247207A Expired - Lifetime JPH0770879B2 (en) | 1986-10-17 | 1986-10-17 | Electronic component inspection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0770879B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02269943A (en) * | 1989-04-11 | 1990-11-05 | Mitsubishi Electric Corp | Outward appearance inspecting device for semiconductor device |
JP2002532701A (en) * | 1998-12-15 | 2002-10-02 | コンパニー ジェネラール デ マチエール ヌクレイル | A method for controlling the verticality of cylindrical elements such as nuclear fuel pellets |
US6545866B2 (en) | 1998-02-04 | 2003-04-08 | Fujitsu Limited | Electronic device |
JP2004510975A (en) * | 2000-10-02 | 2004-04-08 | テラダイン・インコーポレーテッド | Optical inspection system integrating element learning |
JP2015172575A (en) * | 2014-03-05 | 2015-10-01 | タイコ エレクトロニクス (シャンハイ) カンパニー リミテッド | programmable digital machine vision inspection system |
CN111829948A (en) * | 2019-04-17 | 2020-10-27 | 台达电子工业股份有限公司 | Electronic component detection system and method |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5946179A (en) * | 1982-09-09 | 1984-03-15 | 株式会社日立製作所 | Recognizer for chip part |
JPS60148196A (en) * | 1984-01-13 | 1985-08-05 | 日本電気株式会社 | Apparatus for producing semiconductor device |
JPS60155325A (en) * | 1984-01-20 | 1985-08-15 | Sanyo Electric Co Ltd | Positioner of electronic parts |
-
1986
- 1986-10-17 JP JP61247207A patent/JPH0770879B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5946179A (en) * | 1982-09-09 | 1984-03-15 | 株式会社日立製作所 | Recognizer for chip part |
JPS60148196A (en) * | 1984-01-13 | 1985-08-05 | 日本電気株式会社 | Apparatus for producing semiconductor device |
JPS60155325A (en) * | 1984-01-20 | 1985-08-15 | Sanyo Electric Co Ltd | Positioner of electronic parts |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02269943A (en) * | 1989-04-11 | 1990-11-05 | Mitsubishi Electric Corp | Outward appearance inspecting device for semiconductor device |
US6545866B2 (en) | 1998-02-04 | 2003-04-08 | Fujitsu Limited | Electronic device |
JP2002532701A (en) * | 1998-12-15 | 2002-10-02 | コンパニー ジェネラール デ マチエール ヌクレイル | A method for controlling the verticality of cylindrical elements such as nuclear fuel pellets |
JP2004510975A (en) * | 2000-10-02 | 2004-04-08 | テラダイン・インコーポレーテッド | Optical inspection system integrating element learning |
JP2015172575A (en) * | 2014-03-05 | 2015-10-01 | タイコ エレクトロニクス (シャンハイ) カンパニー リミテッド | programmable digital machine vision inspection system |
CN111829948A (en) * | 2019-04-17 | 2020-10-27 | 台达电子工业股份有限公司 | Electronic component detection system and method |
Also Published As
Publication number | Publication date |
---|---|
JPH0770879B2 (en) | 1995-07-31 |
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