JPS6297650A - Air purifying apparatus - Google Patents
Air purifying apparatusInfo
- Publication number
- JPS6297650A JPS6297650A JP60237836A JP23783685A JPS6297650A JP S6297650 A JPS6297650 A JP S6297650A JP 60237836 A JP60237836 A JP 60237836A JP 23783685 A JP23783685 A JP 23783685A JP S6297650 A JPS6297650 A JP S6297650A
- Authority
- JP
- Japan
- Prior art keywords
- passage
- fine particles
- filter
- particles
- negative electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrostatic Separation (AREA)
Abstract
Description
【発明の詳細な説明】 ［発明の技術分野］ 本発明は、空気清浄化装置に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to an air purifying device.
［発明の技術的黄銅］
近年、マイクロエレクトロニクスやバイオテクノロジー
の進歩により、作業空間に要求される空気清浄化度は、
微粒子の径で０．５μｍ以下の基準から、０．３〜０．
１μｍの基準、更には、超高性能の集積回路の製造現場
のように０．１μＩ以下の基準と益々厳しいものになっ
ている。[Technical Brass of the Invention] In recent years, due to advances in microelectronics and biotechnology, the level of air cleanliness required in work spaces has increased.
From the standard of fine particle diameter of 0.5 μm or less, 0.3 to 0.
The standard is becoming increasingly strict, with the standard being 1 .mu.m and even less than 0.1 .mu.I as in the manufacturing sites of ultra-high performance integrated circuits.
而して、空気清浄化のために従来空気通路に少なくとも
２段のフィルターが使用されている。すなわち、空気通
路に取入れられた外気に含まれる比較的粗大な微粒子を
捕獲する中性能又は高性能の第１段フィルターと、これ
を通過した更に微細な微粒子を捕獲する超高性能の第２
段フィルターとによって、微粒子を除去し、クリーンル
ーム等に清浄度の高い空気を供給するようになっている
。Thus, conventionally, at least two stages of filters are used in the air passage for air purification. In other words, a medium-performance or high-performance first stage filter that captures relatively coarse particles contained in the outside air taken into the air passage, and an ultra-high performance second stage filter that captures even finer particles that have passed through this filter.
The stage filter removes particulates and supplies highly clean air to clean rooms, etc.
このため、クリーンルーム等の清浄度は、第２段フィル
ターの性能によって決定される。Therefore, the cleanliness of a clean room or the like is determined by the performance of the second stage filter.
［背景技術の問題点］
現在実用化されている超高性能フィルターで捕獲できる
微粒子の限界は、０．１〜０．３μｍ程度である。この
ため集積回路の製造現場のような極めて高い清浄度を要
求するところでは、０．１μｍ以下の極微粒子を確実に
捕獲できる空気清浄化装置が切望されていた。[Problems with Background Art] The limit of fine particles that can be captured by ultra-high performance filters currently in practical use is about 0.1 to 0.3 μm. For this reason, in places such as integrated circuit manufacturing sites that require extremely high levels of cleanliness, there has been a strong desire for an air cleaning device that can reliably capture ultrafine particles of 0.1 μm or less.
［発明の目的］
本発明は、０．１μｍ以下の極微粒子を確実に捕獲して
極めて高い清浄度を容易に得ることができる空気清浄化
装置を提供することをその目的とするものである。[Object of the Invention] An object of the present invention is to provide an air cleaning device that can reliably capture ultrafine particles of 0.1 μm or less and easily obtain extremely high cleanliness.
［発明の概要コ
本発明は、気体通路の所定領域を正電極通路と負電極通
路に分岐し、開通路を通過した極微粒子が帯電して会合
することにより大粒子を形成するようにして、０．１μ
ｍ以下の極微粒子を確実に捕獲し、極めて高い清浄度を
容易に得ることができる空気清浄化装置である。[Summary of the Invention] The present invention branches a predetermined region of a gas passage into a positive electrode passage and a negative electrode passage, and forms large particles by charging and associating ultrafine particles that have passed through the open passage. 0.1μ
This is an air purifying device that can reliably capture ultrafine particles with a size of less than m and can easily achieve extremely high cleanliness.
［発明の実施例］
以下、本発明の実施例について図面を参照して説明する
。第１図は、本発明の一実施例の概略構成を示す説明図
である。図中１は、空気搬送ダクト等からなる気体通路
である。気体通路１の一端部は外気取入れ口になってお
り、他端部は、り１ノーンルーム、クリーンベンチ等の
作業現場合に通じている。気体通路１には、外気取入れ
口から作業現場合に向って、所定の間隔を設けて第１フ
イルター２、微粒子捕獲部３、第２フイルター４が順次
設けられている。第１フイルター２は、中性能又は高性
能フィルターからなり、比較的粗大な微粒子を捕獲する
ようになっている。第２のフィルター４は、超高性能フ
ィルターで構成されており、０．１〜０．３μｍの微粒
子を捕獲するようになっている。微粒子捕獲部３は、第
２図に拡大して示す如く、隔壁５によって気体通路１を
正電極通路６と負電極通路７に分岐して構成されている
。正電極通路６内には、複数枚の正電極８が通路と平行
に配置され、同様の配置で負電極通路７には、複数枚の
負電極９が設けられている。正電極８には１〜５■の正
電圧が印加され、負電極９には、−１〜−５ｖの負電圧
が印加されるようになっている。これらの電極８，９の
配置及び枚数は、気体通路１を通過する空気等の通過気
体の圧力損失を低減させるように設定されている。なお
、電極８．９の配置は、第３図に示す如く、迷路を構成
するようなものとして、電極８．９との衝突による微粒
子１０の直接捕獲作用を高めるようにしても良い。[Embodiments of the Invention] Examples of the present invention will be described below with reference to the drawings. FIG. 1 is an explanatory diagram showing a schematic configuration of an embodiment of the present invention. Reference numeral 1 in the figure indicates a gas passage consisting of an air conveying duct and the like. One end of the gas passage 1 serves as an outside air intake port, and the other end communicates with a working area such as an empty room or a clean bench. In the gas passage 1, a first filter 2, a particulate capture section 3, and a second filter 4 are sequentially provided at a predetermined interval from the outside air intake port toward the working area. The first filter 2 is made of a medium or high performance filter and is designed to capture relatively coarse particles. The second filter 4 is composed of an ultra-high performance filter and is designed to capture fine particles of 0.1 to 0.3 μm. As shown in an enlarged view in FIG. 2, the particulate capture section 3 is constructed by dividing the gas passage 1 into a positive electrode passage 6 and a negative electrode passage 7 by a partition wall 5. In the positive electrode passage 6, a plurality of positive electrodes 8 are arranged in parallel with the passage, and in the same arrangement, in the negative electrode passage 7, a plurality of negative electrodes 9 are provided. A positive voltage of 1 to 5V is applied to the positive electrode 8, and a negative voltage of -1 to -5V is applied to the negative electrode 9. The arrangement and number of these electrodes 8 and 9 are set so as to reduce the pressure loss of passing gas such as air passing through the gas passage 1. The electrodes 8.9 may be arranged to form a maze, as shown in FIG. 3, to enhance the direct capture effect of the particles 10 by collision with the electrodes 8.9.
このように構成された空気清浄化装置旦によれば、先ず
、外界から取入れられた空気等は、第１フイルター２を
通過したところで比較的粗大な微粒子１０が除去される
。次いで、空気等は正電極通路６と負電極通路７に分れ
て入る。正電極通路６内では微粒子１０ａは正に帯電さ
れる。負電極通路７内では微粒子１０ｂは負に帯電され
る。According to the air purifying apparatus configured as described above, first, relatively coarse particles 10 are removed from the air taken in from the outside world after passing through the first filter 2. Next, air and the like are divided into a positive electrode passage 6 and a negative electrode passage 7 and enter therein. Inside the positive electrode passage 6, the fine particles 10a are positively charged. In the negative electrode passage 7, the fine particles 10b are negatively charged.
また、この微粒子捕獲部３では、正・負電極８゜９に衝
突した微粒子１０ａ、１０ｂはそのまま捕獲される。次
いで、微粒子捕獲部３を通過した微粒子１０Ｃは、正又
は負に帯電しているため、相互の電気的引力により会合
し、０．１μｍ以上の大きな微粒子１０ｄに成長する。Further, in this particulate capture section 3, the particulates 10a and 10b that have collided with the positive and negative electrodes 8.9 are captured as they are. Next, the particles 10C that have passed through the particle capture section 3 are positively or negatively charged, so that they are brought together by mutual electrical attraction and grow into large particles 10d of 0.1 μm or more.
このため成長した微粒子１０ｄは、最終段の第２フイル
ター４で完全に除去される。その結果、０．１μｍ以下
の微粒子１０も会合作用にて容易に除去できるので、気
体通路１に接続されたクリーンルーム等の作業現場の清
浄度を極めて高いものにすることができる。Therefore, the grown fine particles 10d are completely removed by the second filter 4 at the final stage. As a result, even fine particles 10 of 0.1 μm or less can be easily removed by association, so that the cleanliness of a work site such as a clean room connected to the gas passage 1 can be extremely high.
［発明の効果］
以上説明した如く、本発明に係る空気清浄化装置によれ
ば、０．１μｍ以下の極微粒子を確実に捕獲して極めて
高い清浄度を容易に得ることができるものである。[Effects of the Invention] As explained above, according to the air purifying device according to the present invention, extremely high cleanliness can be easily obtained by reliably capturing ultrafine particles of 0.1 μm or less.
第１図は、本発明の一実施例の概略構成を示す説明図、
第２図は、同実施例の要部の説明図、第３図は、本発明
の他の実施例の要部の説明図である。
１・・・気体通路、２・・・第１フイルター、３・・・
微粒子捕獲部、４・・・第２フイルター、５・・・隔壁
、６・・・正電極通路、７・・・負電極通路、８・・・
正電極、９・・・負Ｎ極、１０・・・微粒子。FIG. 1 is an explanatory diagram showing a schematic configuration of an embodiment of the present invention,
FIG. 2 is an explanatory diagram of the main part of the same embodiment, and FIG. 3 is an explanatory diagram of the main part of another embodiment of the present invention. 1... Gas passage, 2... First filter, 3...
Particulate capture section, 4... Second filter, 5... Partition wall, 6... Positive electrode passage, 7... Negative electrode passage, 8...
Positive electrode, 9... Negative N electrode, 10... Fine particles.
Claims (1)
、該最終段フィルターの前段の前記気体通路の領域を正
電極通路と負電極通路に分岐するように設けられた隔壁
と、前記正電極通路に設けられた正電極と、前記負電極
通路に設けられた負電極とを具備することを特徴とする
空気清浄化装置。a final stage filter attached to a predetermined region of the gas passage; a partition wall provided to branch the region of the gas passage before the final stage filter into a positive electrode passage and a negative electrode passage; and a partition wall installed in the positive electrode passage. An air purifying device comprising: a positive electrode provided in the negative electrode passage; and a negative electrode provided in the negative electrode passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60237836A JPS6297650A (en) | 1985-10-24 | 1985-10-24 | Air purifying apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60237836A JPS6297650A (en) | 1985-10-24 | 1985-10-24 | Air purifying apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6297650A true JPS6297650A (en) | 1987-05-07 |
Family
ID=17021129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60237836A Pending JPS6297650A (en) | 1985-10-24 | 1985-10-24 | Air purifying apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6297650A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0259056A (en) * | 1988-08-25 | 1990-02-28 | Midori Anzen Kk | Air purifier |
| EP0713419A1 (en) * | 1993-08-12 | 1996-05-29 | Contamco Corporation | Improved electrostatic filter |
| US5667565A (en) * | 1995-03-21 | 1997-09-16 | Sikorsky Aircraft Corporation | Aerodynamic-electrostatic particulate collection system |
| GB2419543A (en) * | 2004-10-28 | 2006-05-03 | Tec Ltd | Apparatus for removing pollutants from a gas stream |
| US20110094383A1 (en) * | 2009-10-28 | 2011-04-28 | Samsung Electronics Co., Ltd. | Electric precipitator and air cleaner having the same |
-
1985
- 1985-10-24 JP JP60237836A patent/JPS6297650A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0259056A (en) * | 1988-08-25 | 1990-02-28 | Midori Anzen Kk | Air purifier |
| EP0713419A1 (en) * | 1993-08-12 | 1996-05-29 | Contamco Corporation | Improved electrostatic filter |
| EP0713419A4 (en) * | 1993-08-12 | 1997-05-02 | Contamco Corp | Improved electrostatic filter |
| US5667565A (en) * | 1995-03-21 | 1997-09-16 | Sikorsky Aircraft Corporation | Aerodynamic-electrostatic particulate collection system |
| US5762691A (en) * | 1995-03-21 | 1998-06-09 | Sikorsky Aircraft Corporation | Aerodynamic-electrostatic particulate collection system |
| GB2419543A (en) * | 2004-10-28 | 2006-05-03 | Tec Ltd | Apparatus for removing pollutants from a gas stream |
| GB2419543B (en) * | 2004-10-28 | 2007-02-14 | Tec Ltd | Improvements in and relating to apparatus for removing pollutants from a gas stream |
| US20110094383A1 (en) * | 2009-10-28 | 2011-04-28 | Samsung Electronics Co., Ltd. | Electric precipitator and air cleaner having the same |
| US8597415B2 (en) * | 2009-10-28 | 2013-12-03 | Samsung Electronics Co., Ltd. | Electric precipitator and air cleaner having the same |
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