JPS6293894A - Evaporation pellet - Google Patents
Evaporation pelletInfo
- Publication number
- JPS6293894A JPS6293894A JP60232832A JP23283285A JPS6293894A JP S6293894 A JPS6293894 A JP S6293894A JP 60232832 A JP60232832 A JP 60232832A JP 23283285 A JP23283285 A JP 23283285A JP S6293894 A JPS6293894 A JP S6293894A
- Authority
- JP
- Japan
- Prior art keywords
- pellets
- pellet
- vapor deposition
- evaporation
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 title claims description 68
- 230000008020 evaporation Effects 0.000 title claims description 9
- 238000001704 evaporation Methods 0.000 title claims description 9
- 238000007740 vapor deposition Methods 0.000 claims description 28
- 239000002184 metal Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000011888 foil Substances 0.000 claims description 17
- 238000010894 electron beam technology Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 238000005566 electron beam evaporation Methods 0.000 claims description 4
- 238000005401 electroluminescence Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 description 11
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 4
- 239000012190 activator Substances 0.000 description 3
- 230000001186 cumulative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
（イ）産業上の利用分野
この発明は薄膜エレクトロルミネッセンス（以下薄膜Ｅ
Ｌという）の発光層を電子ビーム蒸着で作製する際に使
用する蒸着材料である蒸着用ペレツトに関する。Detailed Description of the Invention (a) Industrial Application Field This invention relates to thin film electroluminescence (hereinafter referred to as thin film electroluminescence).
The present invention relates to evaporation pellets, which are evaporation materials used when producing a light-emitting layer (referred to as L) by electron beam evaporation.
（ロ）従来の技術
薄膜ＥＬの発光層を作製するために蒸着用ペレツトが用
いられているが、従来の蒸着用ペレツトとしては、
■ １ソースで蒸着するときに用いる蒸着用ペレツトで
あり、組成はＺｎＳ：Ｍｎで、ＺｎＳ母体に金属１ｖｌ
ｎを化学的に反応させ、ＺｎＳ母体内にｚｎｔ、：置換
する配置で、結晶学的に金属１ｙｊｎをドープし、この
ドープされたＺｎＳ：Ｍｎ粉体をプレス法で固め、１１
００ （℃） 、 ２．５ （時間）程度保持焼成す
ることによって、作製されたもの（以下ペレツト（１）
という）、
■ 無添加ＺｎＳ粉体と金属Ｍｎを２つの蒸着源にして
、２ソースで蒸着する２元蒸着法において用いる無添加
ＺｎＳからなるペレツト（以下ペレツト（ａという）が
知られている。(b) Conventional technology Evaporation pellets are used to produce the light-emitting layer of thin film EL. Conventional deposition pellets are: is ZnS:Mn, with 1vl of metal in the ZnS matrix.
By chemically reacting n, the metal 1yjn is crystallographically doped in the ZnS matrix in a substitution arrangement, and this doped ZnS:Mn powder is solidified by a pressing method.
00 (°C) for about 2.5 hours (hereinafter referred to as pellets (1)).
(2) Additive-free ZnS pellets (hereinafter referred to as pellets (a)) are known, which are used in a binary vapor deposition method in which additive-free ZnS powder and metal Mn are used as two vapor deposition sources.
（ハ）発明が解決しようとする問題点
上記した従来技術のペレツト（１）は化学的に反応させ
て付活剤（Ｍｎ ）をドープしているため、付活剤であ
るＭｎの濃度を容易に変更できない。また、Ｍｎドープ
したＺｎＳは、高温状態でも高い絶縁性を保持する性質
があり、電子ビームによるチャージアップのため、蒸着
中に突沸現象を起こしやすい。そのため、ピンボールや
突起物何首の多い膜質になるという問題点があった。(c) Problems to be solved by the invention Since the pellets (1) of the prior art described above are doped with an activator (Mn) through a chemical reaction, the concentration of Mn, which is an activator, can be easily adjusted. cannot be changed to Further, Mn-doped ZnS has a property of maintaining high insulating properties even in a high temperature state, and tends to cause bumping phenomenon during vapor deposition due to charge-up by the electron beam. Therefore, there was a problem that the film had many pinballs and protrusions.
またペレツト［２１は付活剤Ｃある金属Ｍｎのωを容易
に変えることができ、無添加ＺｎＳからなる蒸着用ペレ
ツトであるため、発光層の結晶性は、比較的良好である
が、電子ビーム照射に伴う熱応力によりクラックを生じ
やすいという問題点があった。さらにペレツトｆｌｌ
（２１は共に厚みが大きいと、熱容聞が大きくなり、ペ
レット内の熱の分布が不均一となり、クラックを生じた
り、突沸現象を生じ膜質が悪くなるという欠点があり、
また厚みが小さいと所定の膜厚の発光層を得られないと
いう問題点があった。In addition, the pellet [21] can easily change the ω of the metal Mn in the activator C, and since it is an evaporation pellet made of additive-free ZnS, the crystallinity of the light emitting layer is relatively good. There was a problem in that cracks were likely to occur due to thermal stress associated with irradiation. More pellets full
(For both No. 21 and 21, if the thickness is large, the heat capacity will be large, and the heat distribution within the pellet will be uneven, causing cracks and bumping phenomena, resulting in poor film quality.
Moreover, if the thickness is small, there is a problem that a light emitting layer having a predetermined thickness cannot be obtained.
この発明はかかる問題点に鑑みなされたものであって、
簿膜ＥＬの発光層を電子ビーム蒸着で作製する際に、電
子ビームの入射を容易にすることでチャージアップによ
る突沸現象や熱の不均一分布を防止し、良好な膜質の発
光層を与えることができる蒸着用ペレツトを提供しよう
とするものである。This invention was made in view of such problems,
To prevent bumping phenomena and uneven distribution of heat due to charge-up by facilitating the incidence of electron beams when producing a light-emitting layer of a book film EL by electron beam evaporation, and to provide a light-emitting layer with good film quality. The aim is to provide pellets for deposition that can be used.
く二）問題点を解決するための手段および作用かくして
この発明によれば１ＴｔＪ膜エレクトロルミネッセンス
の発光層を電子ビーム蒸着で作成リ−る際に使用する蒸
着材料において、Ｕいに独立した２以上の平板状の蒸着
用ペレツトが累積され、かつこれらの累積したベレッｌ
−間に、中央部に開口を有しかつペレツトの蒸着に必要
な電子ビーム加熱では蒸発しない金属箔が介在されたこ
とを特徴とする蒸着用ペレツトが提供される。2) Means and operation for solving the problems Thus, according to the present invention, two or more independent of plate-shaped deposition pellets are accumulated, and these accumulated pellets are
- There is provided a vapor deposition pellet characterized in that a metal foil having an opening in the center and which does not evaporate by electron beam heating necessary for vapor deposition of the pellet is interposed between the metal foils.
この発明に用いるペレツトの組成は通常用いられるペレ
ツトの組成、例えば従来技術で挙げたＺｎＳ：Ｍｎや無
添加ＺｎＳと同一組成のものを用いればよい。以下この
発明のペレツトを構成づる平板状の蒸着用ペレツトを説
明の便宜上分割ペレツトという。分割ペレツトの形状は
２以上を累積するので平板状、例えば円板状のものが適
しており、通常の円柱成形材料（直径３０〜５０ｍｍ）
を横方向に切断して簡便に（９にとができる。ｌみは電
子ビーム加熱時の熱分布等を考慮して３〜１０ｍｍ程度
が適切である。電子ビームのビームパワーは通常１５０
〜６５０Ｗ程度で用いるのが適切である。The composition of the pellets used in this invention may be the same as that of commonly used pellets, such as ZnS:Mn or additive-free ZnS mentioned in the prior art. Hereinafter, for convenience of explanation, the flat plate-shaped deposition pellet constituting the pellet of the present invention will be referred to as a divided pellet. Since two or more divided pellets are accumulated, a flat plate shape, for example a disk shape, is suitable, and a normal cylindrical molding material (30 to 50 mm in diameter) is suitable.
(9) can be easily cut in the transverse direction. The appropriate width is about 3 to 10 mm, taking into consideration the heat distribution during electron beam heating. The beam power of the electron beam is usually 150 mm.
It is appropriate to use the power at about 650W.
このように従来の蒸着用ペレツトと比較してこの発明の
分割ペレット各々は薄いので熱容耐が小さくなり、均一
なペレット内の熱分布を１８にとができる。As described above, since each of the divided pellets of the present invention is thinner than the conventional vapor deposition pellets, the heat capacity is reduced, and a uniform heat distribution within the pellet can be achieved.
ペレツトの蒸着に必要な電子ビーム愼では蒸発しない金
属とは、例えばペレツトとしてｚｎ ｓ ：Ｍ７や無添
加７ｎＳを用いるときはＷ１丁ａ。The metal that does not evaporate with the electron beam required for pellet evaporation is, for example, W1 when using zns:M7 or non-additive 7nS as a pellet.
ＭＯなどが挙げられるが加工性の点でＴａが最適である
。これらの金属は中央部に開口を設けて金属箔とされる
かまたは金属箔としてから中央部に開口を設けてペレツ
ト間に挿入される。この金属箔はどのような形状でもよ
いがペレツトと同一形状であることが適しており、厚み
は１０〜２０４程度が適当である。Examples include MO, but Ta is optimal in terms of workability. These metals are made into metal foil with an opening in the center, or are inserted between the pellets after forming into a metal foil with an opening in the center. This metal foil may have any shape, but it is suitably the same shape as the pellet, and the thickness is suitably about 10 to 20 mm.
なお、この金属箔の中央部の開口の大きさは所望する蒸
着Ｍの程度により大小を加減寸ればよい。The size of the opening in the center of the metal foil may be adjusted depending on the desired degree of vapor deposition M.
間口の形状はどのようなものでもよいが例えば円板状の
分割ペレツトを用いた場合にはペレツトに対して同心円
の開口とすることが都合がよい。Although the opening may have any shape, for example, when disc-shaped split pellets are used, it is convenient to make the opening concentric with the pellet.
この分割ベレッ１〜の累積数は２個〜６個が適しており
熱分布、熱伝４等を考慮して２ｇ１〜３個累積して使用
することが好ましい。このように２以上の分割ペレツト
を蒸着に使用できるので十分な蒸？Ｊｍを得ることがで
きる。The cumulative number of these divided bellets 1 to 1 is preferably 2 to 6 pieces, and it is preferable to use a cumulative number of 2 g 1 to 3 pieces in consideration of heat distribution, heat transfer, etc. In this way, two or more divided pellets can be used for vapor deposition, making it possible to achieve sufficient vapor deposition. Jm can be obtained.
この発明のペレツトにおいては各分割ベレツｊ・間に金
属箔が介在されているため、分割による熱伝導の低下を
金Ｒ箔による熱伝導および電気伝導により補うことがで
きる。また蒸着に必要な電子ビームパワーでは金属は蒸
発しないのＣ発光層に金属が混入することはない。In the pellet of the present invention, since a metal foil is interposed between each divided pellet, the decrease in heat conduction due to division can be compensated for by the heat conduction and electrical conduction due to the gold R foil. Furthermore, the electron beam power required for vapor deposition does not evaporate the metal, so no metal is mixed into the C light-emitting layer.
（ホ）実施例
以下この発明を実施例を用いて説明でるがこの発明はこ
れにより限定されるものではない。(e) Examples This invention will be explained below using examples, but the invention is not limited thereto.
発光母体材料としてのＺｎＳ：Ｍｎ材料を筒状のラバー
に均一に詰め、等圧プレスで、＋０００ （ｋＱ檀）程
度圧縮させて、円柱状に固めた後、このＺｎＳ：Ｍｎ材
料を△ｒ雰囲気で、１１００（’Ｃ）。ZnS:Mn material as a luminescent matrix material was packed uniformly into a cylindrical rubber, compressed by about +000 (kQ dan) using an isopressure press, and solidified into a cylindrical shape. This ZnS:Mn material was then placed in a △r atmosphere. So, 1100 ('C).
２．５（時間）程度保持し、高温焼成して、直径３０ｍ
ｍの円ｔ１−成形材ｒ１を形成した。その後、５ｍｍ程
度の厚みに薄く切断加重して、円板状の分割ペレツトを
作成した。この分割ｊペレット（１１）および０３１は
従来のペレツト（第２図参照）と比較して薄い。この円
板状ペレツト（１１）とＯＪの間にＴａからなるペレツ
ト径より小さな径の円状の穴（直径２０＋ｕ＋）を有す
る金属箔（１２＋をはさみ込み（第１図参照）、この発
明の蒸着用ペレツトを完成した。Hold for about 2.5 hours, bake at high temperature, and make a diameter of 30 m.
A circle t1-molded material r1 of m was formed. Thereafter, the pellets were cut thinly to a thickness of about 5 mm to produce disk-shaped divided pellets. The divided J pellets (11) and 031 are thinner than conventional pellets (see FIG. 2). A metal foil (12+) having a circular hole (diameter 20+u+) smaller than the diameter of the pellet made of Ta (see Fig. 1) is sandwiched between the disc-shaped pellet (11) and the OJ, and the vapor deposition of the present invention is carried out. Completed pellets.
一方通常の方法を用いてガラス基板上に透明導電膜、第
一絶縁膜を積層した後、上記のこの発明の蒸着用ペレツ
トを用い、電子ビーム蒸ｆ’？（電子ビームパワー２４
０Ｗ ）で発光層を形成した。次いで第二絶縁膜、背面
電極を形成して７ｉ９１膜ＥＬを作製した。On the other hand, after laminating a transparent conductive film and a first insulating film on a glass substrate using a conventional method, electron beam evaporation f'? (Electron beam power 24
0 W) to form a light emitting layer. Next, a second insulating film and a back electrode were formed to produce a 7i91 film EL.
発光層形成中に、蒸着中の突沸現象はなく、また得られ
た発光層はピンホール、突起物付着もなく良好な膜質を
有していた。During the formation of the light emitting layer, there was no bumping phenomenon during vapor deposition, and the obtained light emitting layer had good film quality with no pinholes or adhesion of protrusions.
発光母体材料として無添加ＺｎＳ材料を用いて同様の実
験を行ない、同様に良好な膜質の発光層を得た。A similar experiment was conducted using an additive-free ZnS material as the luminescent host material, and a luminescent layer with similarly good film quality was obtained.
さらにペレツトを３個累積して同様の実験を行ない、良
好な結果を得た。Further, a similar experiment was carried out by accumulating three pellets, and good results were obtained.
また第４図に示すように従来の蒸着用ペレツトでは蒸着
後かなりの部分が残るのに対し、第３図に示すようにこ
の発明によれば分割ペレツト（１１）の大部分は蒸着に
使用され、一部蒸谷に使用された分割ペレツト０３）を
Ｔａ箔にの上部に配置、新しい分割ペレツト（１４１を
Ｔａ箔の下に配置することにより、分割ペレツト（１３
）の再利用が可能であった。第３図（ｂ）、（Ｃ）の繰
り返しにより発光母体材料の有効利用量が増加すること
がわかる。Furthermore, as shown in Fig. 4, in the conventional vapor deposition pellet, a considerable portion remains after vapor deposition, but as shown in Fig. 3, according to the present invention, most of the divided pellets (11) are used for vapor deposition. By placing the divided pellets (03), which were partially used in the steamer, on the top of the Ta foil, and placing the new divided pellets (141) under the Ta foil, the divided pellets (13) are placed on top of the Ta foil.
) could be reused. It can be seen that by repeating the steps in FIGS. 3(b) and 3(c), the effective amount of luminescent host material used increases.
（へ）発明の効果
以上のようにこの発明の蒸着用ペレツトによれば、
■ 分割ペレツトの厚みが従来のペレツトに比して薄い
ため、熱容徴が小さくペレツト全体の均一な加熱が可能
となるのでクラック及び突沸現象を防止でき、またＴａ
箭をはさみ込んで２以上の分割ペレツトを蒸着に使用で
きるため蒸着ｍも十分となる、
■ 分割ペレツト間、例えば第１図に示す円板状べＩノ
ッｌ−（ｉｌｌとＧ３）の間の分割による熱伝達の低下
を金属箔による熱伝導および、電気伝導により補うこと
かできるためペレツト全体の均一な加熱が可能となり分
割ペレツト間に大きな温度差は生じず、また分に１ベレ
ツトａυを通過して分割ペレツト（１３＋に電子ビーム
が照射される場合にも急激な熱発生による突沸現象を防
止することができる、■ 金属箔の開口の大小により蒸
着覆を加減でき、また蒸着用ペレツト組成分の蒸着に必
要な電子ビームパワーでは金属箔の蒸発を生じさすに足
らないため、発光母体材料のみを蒸着できる、■ 実施
例Ｊ３よび第３図に示したようにペレツトの有効利用量
が増加する
等の利点を有する。(F) Effects of the Invention As described above, according to the pellets for vapor deposition of the present invention, the thickness of the divided pellets is thinner than that of conventional pellets, so the heat signature is small and uniform heating of the entire pellet is possible. Therefore, cracks and bumping phenomena can be prevented, and Ta
Since two or more split pellets can be used for vapor deposition by sandwiching the bamboo shoots, the vapor deposition m is also sufficient. Since the decrease in heat transfer due to splitting can be compensated for by heat conduction and electrical conduction through the metal foil, uniform heating of the entire pellet is possible, and there is no large temperature difference between split pellets, and one pellet passes through aυ per minute. It is possible to prevent the bumping phenomenon caused by rapid heat generation even when divided pellets (13+) are irradiated with an electron beam. Since the electron beam power required for vapor deposition is not sufficient to cause evaporation of the metal foil, only the luminescent host material can be vaporized. ■ As shown in Example J3 and FIG. 3, the effective amount of pellets used increases. It has the following advantages.
従ってこの発明の蒸着用ペレツトを用いると良好な膜質
の薄膜ＥＬの発光層を得ることができ、さらに経済的に
も優れた効果を得ることができる。Therefore, by using the vapor deposition pellets of the present invention, it is possible to obtain a thin film EL light emitting layer with good film quality, and furthermore, it is possible to obtain excellent economical effects.
第１図はこの発明の平板状の蒸着用ペレツトと金属箔と
の位置関係を示す説明図、第２図は従来の蒸着用ペレツ
トの斜視図、第３図はこの発明の蒸着用ペレツトの使用
時の状態を示す説明図で（Ｊ、（Ｃ）は蒸着前＋ｂ＋は
蒸着後を示し、第４図は従来の蒸着用ペレツトの使用時
の状態を示す説明図で（田、＋ｂ＋はそれぞれ蒸着前、
蒸着後を示す。
口Ｄ、０３、Ｇ４１・・・・・・発光母体材料、面・・
・・・・金属箔。Fig. 1 is an explanatory diagram showing the positional relationship between the flat plate-shaped vapor deposition pellet of the present invention and metal foil, Fig. 2 is a perspective view of a conventional vapor deposition pellet, and Fig. 3 is a use of the vapor deposition pellet of the present invention. Figure 4 is an explanatory diagram showing the state when a conventional deposition pellet is used (J, +b+ indicates the state before vapor deposition, and (C) shows the state after vapor deposition, respectively. Before,
Shown after vapor deposition. Mouth D, 03, G41... Luminescent matrix material, surface...
...Metal foil.
Claims (1)
ム蒸着で作成する際に使用する蒸着材料において、 互いに独立した２以上の平板状の蒸着用ペレツトが累積
され、かつこれらの累積したペレット間に、中央部に開
口を有しかつペレットの蒸着に必要な電子ビーム加熱で
は蒸発しない金属箔が介在されたことを特徴とする蒸着
用ペレット。1. In the evaporation material used when creating a light-emitting layer for thin film electroluminescence by electron beam evaporation, two or more independent flat evaporation pellets are accumulated, and there is a central portion between these accumulated pellets. 1. A pellet for vapor deposition, characterized in that the pellet has an opening and is interposed with a metal foil that does not evaporate during electron beam heating necessary for vapor deposition of the pellet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60232832A JPS6293894A (en) | 1985-10-17 | 1985-10-17 | Evaporation pellet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60232832A JPS6293894A (en) | 1985-10-17 | 1985-10-17 | Evaporation pellet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6293894A true JPS6293894A (en) | 1987-04-30 |
Family
ID=16945485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60232832A Pending JPS6293894A (en) | 1985-10-17 | 1985-10-17 | Evaporation pellet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6293894A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06140155A (en) * | 1992-10-27 | 1994-05-20 | Sharp Corp | Manufacture of thin film el element |
| US7684583B2 (en) | 2006-06-29 | 2010-03-23 | Cotron Corporation | In-ear type and ear-plug type earphone with adjustable volume of front chamber between speaker and housing |
-
1985
- 1985-10-17 JP JP60232832A patent/JPS6293894A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06140155A (en) * | 1992-10-27 | 1994-05-20 | Sharp Corp | Manufacture of thin film el element |
| US7684583B2 (en) | 2006-06-29 | 2010-03-23 | Cotron Corporation | In-ear type and ear-plug type earphone with adjustable volume of front chamber between speaker and housing |
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