JPS6292555U - - Google Patents
Info
- Publication number
- JPS6292555U JPS6292555U JP18418885U JP18418885U JPS6292555U JP S6292555 U JPS6292555 U JP S6292555U JP 18418885 U JP18418885 U JP 18418885U JP 18418885 U JP18418885 U JP 18418885U JP S6292555 U JPS6292555 U JP S6292555U
- Authority
- JP
- Japan
- Prior art keywords
- gun chamber
- electron gun
- filament
- electron
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の一実施例を示す要部拡大断面
図、第２図は従来例を示す断面図である。
１：電子銃室、２：蓋体、３：碍子、４：フイ
ラメント、５：ウエネルト電極、６：陽極、７：
高圧ケーブル、８：集束レンズ系、９：バームコ
イル。
FIG. 1 is an enlarged sectional view of a main part showing an embodiment of the present invention, and FIG. 2 is a sectional view showing a conventional example. 1: Electron gun chamber, 2: Lid body, 3: Insulator, 4: Filament, 5: Wehnelt electrode, 6: Anode, 7:
High voltage cable, 8: Focusing lens system, 9: Berm coil.
Claims (1)
内の上端に取付けられた碍子と、該碍子の他端に
支持されたフイラメントと、該フイラメントを囲
繞するように配置された前記碍子に支持されたウ
エネルト電極及び前記フイラメントから発生した
電子線を加速するための陽極とを備え、前記電子
銃室内の空間に光軸を中心にして回転対称な磁場
を形成するためのコイルを電子銃室内壁もしくは
壁中に設置してなる電子顕微鏡等用電子線発生装
置。 an electron gun chamber maintained in a vacuum, an insulator having one end attached to the upper end of the electron gun chamber, a filament supported by the other end of the insulator, and the insulator disposed so as to surround the filament. A coil is installed in the electron gun chamber, comprising a supported Wehnelt electrode and an anode for accelerating the electron beam generated from the filament, and for forming a rotationally symmetrical magnetic field about the optical axis in the space inside the electron gun chamber. An electron beam generator for electron microscopes, etc. installed on or in a wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18418885U JPS6292555U (en) | 1985-11-29 | 1985-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18418885U JPS6292555U (en) | 1985-11-29 | 1985-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6292555U true JPS6292555U (en) | 1987-06-13 |
Family
ID=31131625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18418885U Pending JPS6292555U (en) | 1985-11-29 | 1985-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6292555U (en) |
-
1985
- 1985-11-29 JP JP18418885U patent/JPS6292555U/ja active Pending
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