JPS6291830A - Evaluating method for airtight performance in airtightness holding chamber - Google Patents

Evaluating method for airtight performance in airtightness holding chamber

Info

Publication number
JPS6291830A
JPS6291830A JP23107085A JP23107085A JPS6291830A JP S6291830 A JPS6291830 A JP S6291830A JP 23107085 A JP23107085 A JP 23107085A JP 23107085 A JP23107085 A JP 23107085A JP S6291830 A JPS6291830 A JP S6291830A
Authority
JP
Japan
Prior art keywords
pressure
room
time
airtightness
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23107085A
Other languages
Japanese (ja)
Inventor
Akihiro Ozaki
明弘 尾崎
Takao Saito
斉藤 隆雄
Eiji Ashizawa
芦沢 英次
Toshinori Aoki
青木 俊憲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ohbayashi Gumi Ltd
Obayashi Corp
Original Assignee
Ohbayashi Gumi Ltd
Obayashi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohbayashi Gumi Ltd, Obayashi Corp filed Critical Ohbayashi Gumi Ltd
Priority to JP23107085A priority Critical patent/JPS6291830A/en
Publication of JPS6291830A publication Critical patent/JPS6291830A/en
Pending legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Ventilation (AREA)

Abstract

PURPOSE:To measure the airtight performance with a high accuracy by setting the upper limit and the lower limit of a prescribed pressure value, in a room whose opening part has been closed up tightly, setting the inside of the room to one pressure value, and measuring the time when it is shifted to the other pressure value. CONSTITUTION:When measuring the airtightness in a clean room 1, an air bomb 11, an absolute pressure gauge 12, and a pen recorder 14 are carried into the room 1, and after having closed opening parts of an exhaust duct 6, a suction port 8, etc., the inside of the room 1 is brought to a pressure rise by the bomb 11. Also, the lower limit pressure P1 and the upper limit pressure P2 to the inside of the room 1 are set in advance, and by length of the time when the pressure has reached the upper limit value P2, and the time when it has reached the lower limit value P1, a degree of its leak is evaluated. In this regard, a measuring signal from the pressure gauge 12 is inputted to the recorder 14, and details of the time extending from a stage in which the pressure has reached the upper limit value P2, to a stage in which it has reached the lower limit value P1 are recorded. In this way, the airtight performance can be measured with a high accuracy.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は、工業用クリーンルーム、バイオロジカルク
リーンルーム、バイオハザード関連施設などのように、
室内の圧力を陽圧または陰圧に保持させる必要がある室
内において、その気密性能の評価方法にI!I?lる。
[Detailed Description of the Invention] (Industrial Application Field) This invention is applicable to industrial clean rooms, biological clean rooms, biohazard related facilities, etc.
I! How to evaluate airtightness in rooms where the indoor pressure must be maintained at positive or negative pressure I? Ill.

(従来の技術) 工業用クリーンル−ム、バイオロジカルクリーンルーム
、バイオハザード関連施設においCは、その使用目的か
ら室内の圧力を陽圧または陰圧に保持させる必要がある
(Prior Art) In industrial clean rooms, biological clean rooms, and biohazard-related facilities, it is necessary to maintain the indoor pressure at positive or negative pressure due to the purpose of use.

従って、このような室内は完全気密はできないとしても
高度な気密性能を要求される。例えばバイオクリーンル
ームなどにおいては、室内を定期的に滅菌消毒すること
が行なわれCいるが、この滅菌法によっては室内が加圧
状態となるため、この滅菌ガスが他室に漏洩することを
防止する必要がある。室内における漏洩対象部分として
は、扉の隙間や仕上材のシーリング部分、空調用の空気
吹出し口や吸込み口まわり、照明器具、コンセントなど
の取付部分その他の設備関連機器取付部などがあるが、
これらの部分は経時変化によって当然劣化し、シーリン
グ性能が低下する。
Therefore, even if such a room cannot be completely airtight, a high degree of airtightness is required. For example, in bio-clean rooms, etc., the room is regularly sterilized and disinfected, but this sterilization method puts the room under pressure, so it is necessary to prevent the sterilization gas from leaking into other rooms. There is a need. Areas subject to leakage indoors include gaps in doors, sealing parts of finishing materials, around air vents and inlets for air conditioning, mounting parts for lighting fixtures, electrical outlets, and other equipment-related equipment.
These parts naturally deteriorate over time, reducing sealing performance.

従って、この種の気密保持室内では定期的にその気密性
能を検査し、劣化した部分を早めに見つけだしバッキン
グ交換や再シールなどの作業を行なわなければならない
Therefore, it is necessary to periodically inspect the airtight performance of this type of airtight room, find deteriorated parts as early as possible, and perform work such as replacing the backing or resealing.

この種の気密性能を評価するための測定方法として、従
来は室内に連通する空調用の給気ダクトと排気ダクトの
風8をそれぞれ測定し、吹出し風聞と排出fJJ 11
の差を漏洩空気量として判断していた。
Conventionally, as a measurement method for evaluating this type of airtightness performance, the airflow of the air conditioning supply air duct and exhaust air duct communicating indoors is measured respectively, and the airflow airflow and exhaust fJJ11 are measured.
The difference between the two was determined to be the amount of leaked air.

(発明が解決しようとする問題点) しかしながら、この測定方法によると、1つのダクト系
により供給される室数が多い場合には、測定対象室内以
外の吹出し口および吸込み口を全部間じなければならず
、その測定には多大な労力を要するどと6に、その測定
誤差も大きく精度の高いデータをi!7 ftかった。
(Problem to be Solved by the Invention) However, according to this measurement method, when a large number of rooms are supplied by one duct system, all the air outlets and suction ports other than the rooms to be measured must be connected. 6. The measurement error is also large, and highly accurate data is difficult to measure. It was 7ft.

この発明は以上の問題点に鑑みなされたものであり、そ
の目的は、他の室内の機能を停止することなく、測定対
象室内のみに限ってその気密性能を精度良く測定し、早
期に漏洩箇所を検知限定できるようにすることにある。
This invention was made in view of the above problems, and its purpose is to accurately measure the airtightness of only the room to be measured without stopping the functions in other rooms, and to quickly identify leakage points. The purpose is to be able to limit detection.

(問題点を解決するための手段) 前記目的を達成するため、この発明方法では、開口部を
密閉した室内において、所定の圧力値の上限と下限とを
設定し、室内を一方の設定圧力値にして該圧力値から他
方の圧力値へ移行するまでの時間の長さを該室内の気密
性能の評価基準としたことを特徴とする。
(Means for Solving the Problems) In order to achieve the above object, in the method of the present invention, an upper limit and a lower limit of a predetermined pressure value are set in a room whose opening is sealed, and the pressure inside the room is set to one set pressure value. The invention is characterized in that the length of time it takes for the pressure value to change from one pressure value to the other pressure value is used as an evaluation criterion for the airtightness of the room.

(作 用) 設定圧力の一方の設定値より他方の設定値へ至るまでの
時間の良さは、室内の気密性能によって異なるため、こ
れを測定すればその室内の気密性能とすることができる
(Function) The time it takes for the set pressure to reach the other set value varies depending on the airtightness of the room, so measuring this can be used as the airtightness of the room.

(実施例) 以下、本発明方法の好適な実施例を図面を用いて詳細に
説明する。
(Example) Hereinafter, preferred examples of the method of the present invention will be described in detail using the drawings.

第1図乃至第3図はこの発明方法の第1の実施例を示す
もので、第1図はこの発明方法を適用したクリーンルー
ムの平断面図、第2図は同クリーンルームの側断面図で
ある。
Figures 1 to 3 show a first embodiment of the method of this invention, where Figure 1 is a plan sectional view of a clean room to which the method of this invention is applied, and Figure 2 is a side sectional view of the same clean room. .

図において、クリーンルーム1は、床2、天井3および
四周を壁部4によって囲われた一つの区画室を構成する
もので、天井3の裏面には天井面に開口部5を有する給
気用のダクト6が配置され、ダクト6内に設【プられた
トIEPAフィルタおよびファンなどにより開口部5を
通じてクリーンルーム1内に清浄空気を送風するように
している。また、壁部4の四隅部には打型7が立設され
でおり、この打型7には、吸込口8を設けた排気ダクト
9が埋設され、開口部5より吹出した空気を吸込口8の
内部に取入れてクリーンルーム1内の空気を循環するよ
うにしている。また、壁部4の一面には気密性のff1
j10が開閉可能に設けられているほか、図示しない照
明器具、コンセントの取付は部分、その他の装置が配列
されている。
In the figure, a clean room 1 constitutes one compartment surrounded by a floor 2, a ceiling 3, and walls 4 on all sides, and has an opening 5 on the back side of the ceiling 3 for air supply. A duct 6 is arranged, and clean air is blown into the clean room 1 through the opening 5 using an IEPA filter and a fan installed in the duct 6. Furthermore, a mold 7 is erected at the four corners of the wall 4, and an exhaust duct 9 having a suction port 8 is embedded in the mold 7, and the air blown out from the opening 5 is taken into the suction port. 8 to circulate the air within the clean room 1. In addition, one side of the wall portion 4 has an airtight ff1
In addition to the j10 that can be opened and closed, lighting fixtures (not shown), outlets, and other devices are arranged.

以上のように構成されたクリーンルーム1内の気密性を
測定するには、第2図に示すようにクリーンルーム1内
に空気ボンベ11および絶対圧力計12、これに付設さ
れたペンレコーダ14を持込み、給気および排気ダクト
6.9の開口部5゜と吸込口8を適宜な手段で完全に閉
鎖し、ij1!10を開じ、さらにその他の通常外界と
連通している間口部を閉じた後に、ボンベ11のバルブ
11aを聞きクリーンルーム1内を昇圧する。
In order to measure the airtightness in the clean room 1 configured as described above, as shown in FIG. After completely closing the opening 5° of the air supply and exhaust duct 6.9 and the suction port 8 by appropriate means, opening ij1!10, and closing the other mouth portions normally communicating with the outside world , the pressure inside the clean room 1 is increased by listening to the valve 11a of the cylinder 11.

昇圧により第3図に示すように圧力が上界するが、クリ
ーンルーム1内に対する下限圧力P1と上限加圧圧力P
2を予め設定しておき、上限圧力P2より高くなった状
態でバルブ11aを閉じる。
The pressure rises to an upper limit as shown in FIG.
2 is set in advance, and the valve 11a is closed when the pressure is higher than the upper limit pressure P2.

そして、この状態のまま放首しておくと、クリーンルー
ム1内の圧力は徐々に低下し、ついには外界の圧力と笠
しくなるが、その圧力より高い圧力を設定下限値P1と
して、設定上限値P2に至った時間t1と、下限設定値
P1に至った時間t2間の長さによりそのリークの度合
が評価される。
If the head is left open in this state, the pressure inside the clean room 1 will gradually decrease and eventually become cloudy with the pressure in the outside world, but the pressure higher than that pressure will be set as the lower limit value P1, and the upper limit value will be set. The degree of leakage is evaluated based on the length between time t1 when P2 is reached and time t2 when lower limit setting value P1 is reached.

すなわち時間が長ければ長いほどリークが少なく、気密
性が高いことを示唆する。また短いほどリークが多いと
いうことが分かる。尚、ペンレコーダ14にはタイマー
が内蔵され絶対圧力計12からの測定信号を取入れ、設
定上限値P2に至った段階より設定下限値P1に至った
段階までの記録を時間のI!緯とともに描画する。
In other words, the longer the time, the less leakage occurs, suggesting that the airtightness is higher. It can also be seen that the shorter the time, the more leakage occurs. Incidentally, the pen recorder 14 has a built-in timer, receives the measurement signal from the absolute pressure gauge 12, and records the time from the stage when the set upper limit value P2 is reached until the stage when the set lower limit value P1 is reached. Draw with latitude.

また、上限値P2を絶対圧力計の15s+AQとし、下
限値P1を1aiAQとしたところ、第3図のグラフに
示すようにその時間との関係においてほぼ直線的な領域
内での圧力減小となるため、所定の測定精度を得られた
Furthermore, when the upper limit P2 is set to 15s+AQ of the absolute pressure gauge, and the lower limit P1 is set to 1aiAQ, the pressure decreases within an almost linear region in relation to time, as shown in the graph of Figure 3. Therefore, a predetermined measurement accuracy was obtained.

つまり、加圧圧力が高いと、初期においては急勾配で圧
力が降下し、最終的には外界の圧力、すなわち常圧に近
くなるため勾配が緩勾配となるが、この上下限値の範囲
では直線的な下降勾配となり、クリーンルーム1に要求
される気密度合に応じた精度のよい測定結果となってい
る。
In other words, when the pressurizing pressure is high, the pressure initially decreases at a steep slope, and eventually becomes close to the external pressure, that is, normal pressure, so the slope becomes gentle; however, within this upper and lower limit value range, It has a linear downward slope, and the measurement result is accurate in accordance with the degree of airtightness required for the clean room 1.

従って、この種のクリーンルームに理想的な気密性能の
データの圧力降下時間と実際の測定時間とを比較するこ
とによって、クリーンルーム1の気密度合を評価できる
Therefore, the airtightness of the clean room 1 can be evaluated by comparing the pressure drop time of ideal airtightness performance data for this type of clean room with the actual measurement time.

また、下限値に至るまでの時間が極めて短い場合には必
ずいずれかにリークが生じているので、漏洩対架部分を
個々にめばりしつつ測定を繰返すことによって、その漏
洩箇所を検知限定できることになる。
In addition, if the time to reach the lower limit is extremely short, there is always a leak somewhere, so by repeating measurements while inspecting the leakage parts individually, it is possible to detect and limit the location of the leak. become.

次に第4図はこの発明方法の第2の実施例を示す。Next, FIG. 4 shows a second embodiment of the method of this invention.

尚、以下の説明では、第1実施例と同一箇所には同一符
号を付して説明を行なう。
In the following description, the same parts as in the first embodiment are given the same reference numerals.

図において、壁部4の一方にはクリーンルーム1の内外
をd通する圧力変更用の接続パイプ16および圧力測定
用の接続パイプ17が配管されており、これらの先端に
取付けられたバルブ16a。
In the figure, a connecting pipe 16 for changing pressure and a connecting pipe 17 for measuring pressure, which pass between the inside and outside of the clean room 1, are installed on one side of the wall 4, and a valve 16a is attached to the ends of these connecting pipes.

17aを介してクリーンルーム1外のボンベ11および
差圧計18およびこれに付設されたペンレコーダ14が
接続されている。
A cylinder 11 outside the clean room 1, a differential pressure gauge 18, and a pen recorder 14 attached thereto are connected via 17a.

この実施例においては、クリーンルーム1内の各間口部
を完全に閉鎖した後に、バルブ16a。
In this embodiment, after each opening in the clean room 1 is completely closed, the valve 16a is closed.

17aを開き、ボンベ11のバルブ11aを聞いて圧力
空気をクリーンルーム1内に入れ、差圧訓18によりそ
の圧力降下を測定することができる。
17a is opened, pressure air is admitted into the clean room 1 by listening to the valve 11a of the cylinder 11, and the pressure drop can be measured by the differential pressure test 18.

この実施例においては、室外で測定を行なうことができ
る。また、クリーンルーム1が多い場合にはそれぞれの
クリーンルームに配管し、遠隔操作等によりクリーンル
ーム全体あるいは個々のクリーンルームについて個別の
測定を行なうことができる。
In this embodiment, measurements can be taken outdoors. Furthermore, if there are many clean rooms 1, piping can be installed in each clean room, and individual measurements can be performed for the entire clean room or for each clean room by remote control or the like.

尚、本実施例においてはボンベ11内に蓄圧された空気
をクリーンルーム1内に送るようにしたが、コンプレッ
サー等を接続し、このコンプレッサーにより圧縮された
空気をクリーンルーム1内に送風して測定を行なうよう
にしてもよい。
In this embodiment, the air pressured in the cylinder 11 is sent into the clean room 1, but a compressor or the like is connected and the compressed air is blown into the clean room 1 for measurement. You can do it like this.

また、更にクリーンルームにあっては、陰圧に保つ場合
があるが、この場合には接続パイプ16に真空ポンプを
接続しクリーンルーム1内の空気を吸引した後にその圧
力上界の時間を測定すればよい。
In addition, in some clean rooms, negative pressure may be maintained; in this case, a vacuum pump is connected to the connecting pipe 16 and the air in the clean room 1 is sucked, and then the time of the upper limit of the pressure is measured. good.

その場合の十7?特性は第5図に示す如く、第3図の下
降曲線とは逆になるが、いずれにあっても、リーク吊が
少なければその時間は艮いものとなり、理想的な高度の
気密性能の圧力上界時間と比較して、その気密度を評1
+I[i ′C−きることになる。
Seventeen in that case? As shown in Fig. 5, the characteristics are opposite to the downward curve shown in Fig. 3, but in either case, if the leak suspension is small, the time will be significant, and the pressure for the ideal high degree of airtight performance will be reduced. Evaluate its airtightness by comparing it with the upper limit time.
+I[i'C-.

(発明の効果) 以上各実施例により詳細に説明したように、本発明方法
によれば、気密保持室内における気密性能の評価を加圧
又は減圧により室内を外界とは異なった圧力に設定し、
その上下限値に至るまでの時間を気密性の評価基準とし
ているので、従来の給気と排気の風子の差により気密度
を評価した場合に比べて精度のよい測定やその評価或い
はリーク部分の検知限定ができ、ざらには測定時におい
て、個々の気密室内での作業のみによってその気密度を
測定できるので、測定準備時間およびその測定口、1間
を短くできる。
(Effects of the Invention) As explained in detail in each of the embodiments above, according to the method of the present invention, the airtightness performance in the airtightness maintenance chamber is evaluated by setting the pressure in the room to a pressure different from the outside world by pressurization or depressurization,
Since the time required to reach the upper and lower limit values is used as the evaluation standard for airtightness, it is possible to more accurately measure and evaluate airtightness than the conventional method of evaluating airtightness based on the difference between air intake and exhaust air, or to identify leakage areas. Since the detection can be limited and the airtightness can be measured only by working in each airtight room during measurement, the measurement preparation time and the measurement port time can be shortened.

【図面の簡単な説明】[Brief explanation of drawings]

第1図乃至第3図はこの発明方法の第1の実施例を示ケ
もので、第1図はこの発明を適用したクリーンルームの
平断面図、第2図は同側断面図、第3図は本発明方法に
おける圧力降下特性を承りグラフ、第4図はこの発明の
第2の実施例を示す側断面図、第5図はクリーンルーム
内を圧力降下させた状態で測定した場合における圧力上
界特性を示すグラフである。 1・・・・・・クリーンルーム  11・・・空気ボン
ベ12・・・絶対圧力計 16・・・圧力変更用接続パ
イプ17・・・圧力測定用接続パイプ 16a、17a・・・バルブ 18・・・差圧計P1・
・・下限値      P2・・・上限値tl、t2・
・・時間 特許出願人     株式会社 大 林 組成 理 人
     弁理士 −色 健 輔第2図
Figures 1 to 3 show a first embodiment of the method of this invention, in which Figure 1 is a plan sectional view of a clean room to which this invention is applied, Figure 2 is a sectional view of the same side, and Figure 3 is a sectional view of the same side. is a graph showing the pressure drop characteristics in the method of the present invention, FIG. 4 is a side cross-sectional view showing the second embodiment of the present invention, and FIG. 5 is the pressure upper limit when measured with a pressure drop in the clean room. It is a graph showing characteristics. 1... Clean room 11... Air cylinder 12... Absolute pressure gauge 16... Connection pipe for pressure change 17... Connection pipe for pressure measurement 16a, 17a... Valve 18... Differential pressure gauge P1・
... Lower limit value P2 ... Upper limit value tl, t2.
... Time patent applicant: Obayashi Co., Ltd., patent attorney - Kensuke Iro Figure 2

Claims (4)

【特許請求の範囲】[Claims] (1)開口部を密閉した室内において、所定の圧力値の
上限と下限とを設定し、室内を一方の設定圧力値にして
該圧力値から他方の圧力値へ移行するまでの時間の長さ
を該室内の気密性能の評価基準としたことを特徴とする
気密保持室内における気密性能の評価方法。
(1) In a room with a sealed opening, set the upper and lower limits of a predetermined pressure value, set the room to one set pressure value, and the length of time until the pressure changes from that pressure value to the other pressure value. A method for evaluating airtightness in an airtight room, characterized in that the evaluation criteria for airtightness in the room are:
(2)前記室内に圧力空気を送って室内の圧力が設定上
限値になった時点より設定下限値になるまでの時間を測
定することを特徴とする特許請求の範囲第1項記載の気
密保持室内における気密性能の評価方法。
(2) Maintaining airtightness according to claim 1, characterized in that pressurized air is sent into the room and the time from when the indoor pressure reaches a set upper limit value to when it reaches a set lower limit value is measured. Method for evaluating indoor airtightness.
(3)前記室内の空気を減圧して室内の圧力が設定下限
値になった時点より設定上限値になるまでの時間を測定
することを特徴とする特許請求の範囲第1項記載の気密
保持室内における気密性能の評価方法。
(3) Maintaining airtightness according to claim 1, characterized in that the time from the time when the indoor air is depressurized and the indoor pressure reaches a set lower limit value to the time when the indoor pressure reaches a set upper limit value is measured. Method for evaluating indoor airtightness.
(4)室内にバルブを介して連通する圧力変更用の接続
パイプおよび圧力測定用パイプを室内外を貫通して配管
してなることを特徴とする特許請求の範囲第1項ないし
第3項のいずれかに記載の気密保持室内における気密性
能の評価方法。
(4) A connecting pipe for changing pressure and a pipe for measuring pressure that communicate with the inside of the room via a valve are piped through the inside and outside of the room. A method for evaluating airtight performance in an airtight room according to any one of the above.
JP23107085A 1985-10-18 1985-10-18 Evaluating method for airtight performance in airtightness holding chamber Pending JPS6291830A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23107085A JPS6291830A (en) 1985-10-18 1985-10-18 Evaluating method for airtight performance in airtightness holding chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23107085A JPS6291830A (en) 1985-10-18 1985-10-18 Evaluating method for airtight performance in airtightness holding chamber

Publications (1)

Publication Number Publication Date
JPS6291830A true JPS6291830A (en) 1987-04-27

Family

ID=16917812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23107085A Pending JPS6291830A (en) 1985-10-18 1985-10-18 Evaluating method for airtight performance in airtightness holding chamber

Country Status (1)

Country Link
JP (1) JPS6291830A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999066300A1 (en) * 1998-06-17 1999-12-23 Kunitaka Mizobe Method of and apparatus for testing airtightness of closed space provided with steam movement control device
WO2003095964A1 (en) * 2002-05-13 2003-11-20 Kyushu Sankosha Inc. Box body airtight inspection device with vapor movement control device
WO2004104544A1 (en) * 2003-05-26 2004-12-02 Kyushu Sankosha Inc. Measurement method in air-tightness inspection device that is for inspecting box body and has seam movement control device
JP2015137826A (en) * 2014-01-24 2015-07-30 ダイキン工業株式会社 Air conditioning device
JP2015171418A (en) * 2014-03-11 2015-10-01 株式会社大林組 Smoke interruption performance evaluation method
JP2017207064A (en) * 2016-05-16 2017-11-24 ゼネラル・エレクトリック・カンパニイ Integrated ventilation and leak detection system and method of assembly
CN114791341A (en) * 2022-06-23 2022-07-26 北京迈世高科电子技术有限公司 Air tightness detection method and detector

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50147385A (en) * 1974-05-16 1975-11-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50147385A (en) * 1974-05-16 1975-11-26

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999066300A1 (en) * 1998-06-17 1999-12-23 Kunitaka Mizobe Method of and apparatus for testing airtightness of closed space provided with steam movement control device
GB2354591A (en) * 1998-06-17 2001-03-28 Kunitaka Mizobe Method of and apparatus for testing airtightness of closed space provided with steam movement control device
GB2354591B (en) * 1998-06-17 2002-04-24 Kunitaka Mizobe Apparatus for testing airtightness of closed space provided with steam movement control device
US6494082B1 (en) 1998-06-17 2002-12-17 Kunitaka Mizobe Method of and apparatus for testing airtightness of closed space provided with steam movement control device
WO2003095964A1 (en) * 2002-05-13 2003-11-20 Kyushu Sankosha Inc. Box body airtight inspection device with vapor movement control device
WO2004104544A1 (en) * 2003-05-26 2004-12-02 Kyushu Sankosha Inc. Measurement method in air-tightness inspection device that is for inspecting box body and has seam movement control device
JP2015137826A (en) * 2014-01-24 2015-07-30 ダイキン工業株式会社 Air conditioning device
JP2015171418A (en) * 2014-03-11 2015-10-01 株式会社大林組 Smoke interruption performance evaluation method
JP2017207064A (en) * 2016-05-16 2017-11-24 ゼネラル・エレクトリック・カンパニイ Integrated ventilation and leak detection system and method of assembly
CN114791341A (en) * 2022-06-23 2022-07-26 北京迈世高科电子技术有限公司 Air tightness detection method and detector
CN114791341B (en) * 2022-06-23 2022-09-13 北京迈世高科电子技术有限公司 Air tightness detection method and detector

Similar Documents

Publication Publication Date Title
US9880077B2 (en) Multi sampling port monitoring apparatus for measuring pollution level and monitoring method using the same
US8201438B1 (en) Detection of gas leakage
CN107907273B (en) A kind of partially sealed outer surface air-tightness detection method of product
KR101173240B1 (en) Apparatus for testing leakage performance of a door using pressure control system
CN107796570B (en) A kind of product part special-shaped surfaces air tightness detection system and application
US5600996A (en) Method and apparatus for testing the tightness of housings
KR20180105672A (en) On-line hermetically sealed inspection apparatus, multi-section type closed chamber processing apparatus and method
CN109540421A (en) Air tightness detection device and method
JPS6291830A (en) Evaluating method for airtight performance in airtightness holding chamber
CN109540391A (en) Air tightness detection device and method
JPH10185749A (en) Method and apparatus for leak inspection
CN208751811U (en) Test device for air tightness
CN109211367A (en) A kind of pVTt method gas flow standard device
CN210036906U (en) Negative pressure source device and gas meter verification gas circuit system
CN207248452U (en) A kind of ball valve tightness test system
JP3149226B2 (en) Leak detection device
CN110470437A (en) A kind of closestool pipeline leakage detection device and detection method
CN206891641U (en) The differential pressure indicator free of demolition that declines
CN109253849A (en) A kind of multi-functional air-tightness detection device
JPH0749286A (en) Engine leak testing method
CN115248097A (en) Inspection system
CN207976258U (en) A kind of device for the test of utensil air-tightness
CN215985132U (en) Pressure testing device
CN106124139A (en) A kind of method of quick detection dialyser seepage
CN208188067U (en) A kind of batch-testing device of gas detection load