JPS629155U - - Google Patents
Info
- Publication number
- JPS629155U JPS629155U JP8658686U JP8658686U JPS629155U JP S629155 U JPS629155 U JP S629155U JP 8658686 U JP8658686 U JP 8658686U JP 8658686 U JP8658686 U JP 8658686U JP S629155 U JPS629155 U JP S629155U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- optical fiber
- lens
- optical
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013307 optical fiber Substances 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000007547 defect Effects 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims 2
- 238000003780 insertion Methods 0.000 claims 2
- 230000010355 oscillation Effects 0.000 claims 2
- 239000000835 fiber Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
第１図はこの考案による光学式表面欠陥検出器
におけるオプチカルフアイバの配列説明図、第２
図はオプチカルフアイバの先端の被検体上への投
影図、第３図はオプチカルフアイバの先端面と半
球面積の比の特性曲線図、第４図はオプチカルフ
アイバの入射角特性の１例を示す曲線図、第５図
はこの考案による光学式欠陥検出器におけるオプ
チカルフアイバの配列におけるオプチカルフアイ
バの数と最大入射角の関係を示す特性図、第６図
ａ，ｂ，ｃはこの考案による光学式欠陥検出器の
実施例を示す構造図、第７図はこの考案による光
学式表面欠陥検出器の受光素子部の実施例を示す
構造図である。
１……被検物、２……レーザ光、３……オプチ
カルフアイバ、４……レーザ管、５……ホルダ、
６，１７，２７……セツトスクリユー、７……窓
、８……微動ダイヤル、９……固定具、１０……
電源線入口、１１……ツマミ、１２……微動ネジ
棒、１３……ローラガイド、１３―１……固定部
、１３―２……移動部、１４……スタンド、１５
……スライドピン、１６……クランプ、１８……
固定リング、１９……回転リング、２０……押え
リング、２１……レンズ内管、２２……レンズ、
２３……レンズ外筒、２４，２５……ネジ、２６
……ピンホール板、２８……フオトマルチプライ
ヤ、２９……磁気シールドケース、３０……取付
具、３１……固定具、３２……穴。
Figure 1 is an explanatory diagram of the arrangement of optical fibers in the optical surface defect detector according to this invention;
The figure is a projection of the tip of the optical fiber onto the subject, Figure 3 is a characteristic curve diagram of the ratio of the tip surface of the optical fiber to the area of the hemisphere, and Figure 4 is a curve showing an example of the incident angle characteristics of the optical fiber. Figure 5 is a characteristic diagram showing the relationship between the number of optical fibers and the maximum angle of incidence in the optical fiber array in the optical defect detector according to this invention, and Figures 6 a, b, and c are optical defect detectors according to this invention. FIG. 7 is a structural diagram showing an embodiment of the detector. FIG. 7 is a structural diagram showing an embodiment of the light receiving element portion of the optical surface defect detector according to this invention. 1... Test object, 2... Laser light, 3... Optical fiber, 4... Laser tube, 5... Holder,
6, 17, 27...Set screw, 7...Window, 8...Fine movement dial, 9...Fixing tool, 10...
Power line inlet, 11...knob, 12...fine screw thread, 13...roller guide, 13-1...fixed part, 13-2...movable part, 14...stand, 15
...Slide pin, 16...Clamp, 18...
Fixed ring, 19... Rotating ring, 20... Holding ring, 21... Lens inner tube, 22... Lens,
23... Lens outer cylinder, 24, 25... Screw, 26
... Pinhole plate, 28 ... Photo multiplier, 29 ... Magnetic shielding case, 30 ... Mounting tool, 31 ... Fixing tool, 32 ... Hole.
Claims (1)
ザビームを集光するレンズと、該レンズの前方に
生ずるレーザスポツトの位置に指向させて放射状
に複数本配置したオプチカルフアイバ群とにより
検出部を構成し、前記検出部とは別に、前記オプ
チカルフアイバ群の他端を一括して１個の受光素
子に接続した受光部を設けたことを特徴とする光
学式表面欠陥検出器。 ２ レーザ管をホルダにより被検体の表面に対し
直角に支持すると共に、前記ホルダの下端にレー
ザスポツト位置を中心としてそれより外方に放射
状にのびる複数の挿入穴を有するオプチカルフア
イバ固定具を固定し、該固定具の各挿入穴に夫々
オプチカルフアイバを挿入固定し、さらに、前記
レーザ管の下端とオプチカルフアイバ固定具との
間に集光レンズを上下位置調整自在に取付けてな
る実用新案登録請求の範囲第１項に記載の光学式
表面欠陥検出器。[Scope of Claim for Utility Model Registration] 1. A laser oscillation tube, a lens for condensing a laser beam from the laser oscillation tube, and a plurality of optical lenses arranged radially to point at the position of a laser spot generated in front of the lens. A detecting section is constituted by a group of fibers, and a light receiving section is provided separately from the detecting section, the other end of the optical fiber group being collectively connected to one light receiving element. Detector. 2. The laser tube is supported by a holder at right angles to the surface of the subject, and an optical fiber fixture having a plurality of insertion holes extending radially outward from the laser spot position is fixed to the lower end of the holder. , an optical fiber is inserted and fixed into each insertion hole of the fixing device, and a condensing lens is attached between the lower end of the laser tube and the optical fiber fixing device so as to be vertically adjustable. Optical surface defect detector according to scope 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986086586U JPS6247073Y2 (en) | 1986-06-09 | 1986-06-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986086586U JPS6247073Y2 (en) | 1986-06-09 | 1986-06-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS629155U true JPS629155U (en) | 1987-01-20 |
| JPS6247073Y2 JPS6247073Y2 (en) | 1987-12-24 |
Family
ID=30943025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986086586U Expired JPS6247073Y2 (en) | 1986-06-09 | 1986-06-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6247073Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49123384A (en) * | 1973-03-20 | 1974-11-26 | ||
| JPS5090388A (en) * | 1973-12-10 | 1975-07-19 |
-
1986
- 1986-06-09 JP JP1986086586U patent/JPS6247073Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49123384A (en) * | 1973-03-20 | 1974-11-26 | ||
| JPS5090388A (en) * | 1973-12-10 | 1975-07-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6247073Y2 (en) | 1987-12-24 |
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