JPS6289374A - Laser oscillator excited by microwave discharge - Google Patents

Laser oscillator excited by microwave discharge

Info

Publication number
JPS6289374A
JPS6289374A JP23083185A JP23083185A JPS6289374A JP S6289374 A JPS6289374 A JP S6289374A JP 23083185 A JP23083185 A JP 23083185A JP 23083185 A JP23083185 A JP 23083185A JP S6289374 A JPS6289374 A JP S6289374A
Authority
JP
Japan
Prior art keywords
microwave
microwave discharge
lamp
light
excitation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23083185A
Other languages
Japanese (ja)
Other versions
JPH0728070B2 (en
Inventor
Yoshihide Kanehara
好秀 金原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60230831A priority Critical patent/JPH0728070B2/en
Publication of JPS6289374A publication Critical patent/JPS6289374A/en
Publication of JPH0728070B2 publication Critical patent/JPH0728070B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/0915—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
    • H01S3/092—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp

Abstract

PURPOSE:To enable an electrode to be omitted and to obtain a long-life exciting lamp, by providing a microwave generating means for causing microwave discharge within the exciting lamp. CONSTITUTION:A magnetron 9 is caused to output microwave power by output from a power supply 4. The microwave power is introduced into a cavity resonator 1a through a waveguide 10 and the resonator is thereby caused to resonated. When the electric field becomes higher, microwave discharge 5a occurs within an exciting lamp 11. If the exciting lamp 11 is composed of a conductor such as glass or the like, microwaves are allowed to pass more easily and therefore the microwave discharge 5a occurs more effectively. A gas such as xenon or krypton enclosed in the exciting lamp 11 is then caused to emit light. The light is reflected in a light-collecting reflection mirror 1 which is a reflecting cylinder having an oval cross section, and the reflected light is applied to a YAG rod 3. The YAG rod 3 is thereby excited, causing laser oscillating between a totally reflecting mirror 6 and a partially transmitting mirror 7 opposed to each other on the central axis of the YAG rod 3. Thus, a laser beam 8 is outputted from the partially transmitting mirror 7.

Description

【発明の詳細な説明】 〔産業上の利用５１舒〕 この発明Ｉ／丁、励起ランプをマイクロ波放電により発
光させるレーザ発振器に関するものである。DETAILED DESCRIPTION OF THE INVENTION [51 Industrial Applications] This invention relates to a laser oscillator that causes an excitation lamp to emit light by microwave discharge.

〔従来の技術〕[Conventional technology]

第２図は５例えば従来のＹ　Ａ　Ｇ　（ＹｊＡ１ｉＧ＋
　２　）レーザ発振器を示す構成図であり１図におｈて
、（１）は励起ランプ（２）とＹＡＧロタド（３）を備
えた集光反射鏡、（４）汀励起ランプ（２）内に設けら
ね九電極の（４ａｌ、（４ｈ）に高電圧を供給するＷｉ
ｌｉ、　（５）ＵｔｆＭ（４ａ）、（４ｂ）　ｌｌｊｌ
Ｋ発生するグロー族ｌ　（６）ｈ全反射鏡、（７）は部
分透過纜でありＹＡＧロッド（３）で発生するレーザ光
（８）の光軸上に対向して設けられている。なお、集光
反射鏡（１）は＄８図に示すように。Figure 2 shows 5, for example, conventional Y A G (YjA1iG+
2) This is a configuration diagram showing a laser oscillator. Wi that supplies high voltage to nine electrodes (4al, (4h))
li, (5) UtfM (4a), (4b) lljl
K generated glow group l (6) h total reflection mirror, (7) is a partially transmitting mirror, and is provided facing on the optical axis of the laser beam (8) generated by the YAG rod (3). The condensing reflector (1) is as shown in Figure $8.

その断面が楕円形となっており、その内面はすぐねた反
射板で形成された反射筒となってｈる。そして、この集
光反射鏡（１）内に、その２つの焦点の線に沿って、励
起ランプ（２）とＹＡＧ口、フド（３）が配旨さねてい
る。Its cross section is elliptical, and its inner surface forms a reflecting tube formed by a straight reflecting plate. An excitation lamp (2), a YAG opening, and a lid (3) are arranged inside this converging reflector (1) along the line of its two focal points.

次に、酊力作につｈて説明する。市１源（４）から高１
ゼ圧を供給すると、励起ランプ（２）内に設けらねた各
を極（４ａ＋、＋４ｔｎ　ｎ１１でグ０−＋Ａ電が発生
し、こわにエリ、励起ランプ（２）内に封入さねている
キセノン又はクリプトンガスが発光する。ζ、の発光は
梨光反則鏡（１）内で反射さ力てＹ　Ａ　（）　Ｄリド
（３）に集捷り。Next, I will explain about the intoxicating works. City 1 source (4) to high school 1
When zero pressure is supplied, a voltage of 0-+A is generated at each pole (4a+, +4tn n11) provided in the excitation lamp (2), and it is difficult to seal it inside the excitation lamp (2). The xenon or krypton gas that is present emits light.The light emitted from ζ is reflected within the mirror mirror (1) and concentrated into Y A () D lid (3).

その結果Ｙ　Ａ　Ｃｒロリ１Ｓ（３）が励起さｔて全反
創情（６）と部分秀渦鏡（７）間でレーぜ発肇をする。As a result, the Y A Cr loli 1S (3) is excited and causes a lasing between the total anti-creation (6) and the partial vortex mirror (7).

そして。and.

部分を両鏡（７）から１／−−リ２光（８）として出力
１Ｎねることにｌｆる。The output is 1N from both mirrors (7) as 1/--2 beams (8).

なｋ・、集光反射鏡（’ｌ）内の二つの焦点位Ｉりに励
起９　ンフ”（２Ｌ！：　Ｙ　Ａ　（）　ｏ　、７１’
（３）ヲｔ！ｊ己１ｉ＃すルコとで、第８図の犬印で示
す工うに隼光反射曾（１）内で反射さｉする励起ランプ
（２）の発光が能率よ（Ｙ　Ａ　（ｒ口、１ド（３）に
照射さｔするものである。, excitation at two focal positions I in the converging reflector ('l)' (2L!: Y A () o, 71'
(3) Wot! With this, the light emission of the excitation lamp (2) that is reflected within the ray-light reflector (1) indicated by the dog mark in Fig. 8 is efficient (Y A (r mouth, 1). (3).

〔発明が解決しょうとする問題欝〕[Problem that the invention seeks to solve]

従来のＹ　、Ａ　Ｇ　Ｌ／−→Ｐ発１φ器げ以」二の二
うＶＣ構成さｒｌているので、υｊ力４１１ランプ（２
）を発光さすてＹＡＧロリド（３）を励起するために汀
、励起ランプ（２）内に設けられた各Ｗ版１４ａ　ｌ　
、　（４’ｔ）　１間に高電圧を供給してグロー放電（
５）を発生させなけねばｌｆらず５放電時の強め族１ｄ
電流によ−）て各電極ｔ４ａｌ、＋４ｂ）を形成する金
属が蒸発し、励起ランプ（２）の内面に付層することに
より封入ガスの劣化を招き５発光効率を低下きぜていた
。そのため、励起ランプ（２）をフラ、ソシュランプと
して使用した時の寿命は１０’〜１０　　同程度のフラ
ッシュ回数であり、フラッシュランプとしての寿命が短
＾とめう大＠な問題点があった。Since the conventional Y, A G L/-→P 1φ device has a 2/2 VC configuration, υj force 411 lamps (2
) is installed in the excitation lamp (2) to excite the YAG loride (3).
, (4't) Glow discharge (
5) must be generated without lf and the strengthening group 1d at the time of 5 discharge.
The metal forming each electrode t4al, +4b) was evaporated by the current and deposited on the inner surface of the excitation lamp (2), causing deterioration of the filled gas and decreasing the luminous efficiency. Therefore, when the excitation lamp (2) is used as a flash lamp, the life span is about 10 to 10 flashes, which is a major problem in that the life span as a flash lamp is short.

この発明げ上記の工うな問題点を解消するためになされ
たもので、集光反射鏡内でマイクロ波放電を発生させて
ＹＡＧロッドを励起することにより、長寿命の励起ラン
プを得ることを目的とするものである。This invention was made to solve the above-mentioned difficult problems, and the purpose is to obtain a long-life excitation lamp by generating microwave discharge in a condensing reflector to excite the YAG rod. That is.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係るマイクロ波放電励起レーザ発振器ｉ、ｌ
７ｉ７１起リンプとレーザロッドとを備えた反射筒を空
胴共振器として構成するとともに、上記空胴共振器にマ
イクロ波発生手段からマイクロ波を出力して、上記１１
ｉυ起ランプ内でマイクロ波放電を発生させるようにし
たものである。Microwave discharge pumped laser oscillators i, l according to this invention
7i71 A reflection tube equipped with a limpet and a laser rod is constituted as a cavity resonator, and a microwave is outputted from a microwave generation means to the cavity resonator,
Microwave discharge is generated within the iυ lamp.

〔作　用〕[For production]

この発明においては、マイクロ波余生手段によってマイ
クロ波を空胴共１辰藷に出力することで励起ランプがマ
イクロ波放電し、こねによる励起ランプの発光が反射面
内で反射さねてレーザロッドに照射さｔすることでレー
ザロッドが励起してレーザ発振する。In this invention, the excitation lamp discharges microwaves by outputting microwaves to both the cavity and the cavity by the microwave regeneration means, and the emitted light from the excitation lamp due to kneading is reflected within the reflective surface and reaches the laser rod. The irradiation excites the laser rod and causes laser oscillation.

し発明の実施例〕 以下、この発明の一矢施例ケ図について説明する。、第
１図げこの発明によるマイクロ波放電励起ＹＡＧレーザ
発伽器の構成図である。図において、（１）　、　（３
）　、　（４）　、　（６）〜（８）は従来のものと同
一であり。Embodiments of the Invention] Hereinafter, embodiments of the invention will be described. FIG. 1 is a configuration diagram of a microwave discharge excited YAG laser oscillator according to the present invention. In the figure, (1), (3
), (4), (6) to (8) are the same as the conventional ones.

（ｌａ）ＵＹＡ　（）　Ｄ　、７ド（３）と無’１４ｆ
ｌ＆の励起ランプ０→を備えた集光反射鏡（１）である
とともに、マイクロ波の周波数に共振するように＋ｔ４
ＩｊＹされた空胴共振器でりる。そして、励起ランプ０
υ汀マイクロ波の電界強度が最大とｌ（る工うな位―゛
に設けらねており、この励起ワンプ０１）とＹＡＧロッ
ド（３）との配置は第８図に示す従来のものと同じであ
る。次に。(la) UYA () D, 7 do (3) and no '14f
It is a condensing reflector (1) equipped with an excitation lamp 0→ of l&, and +t4 so as to resonate with the microwave frequency.
IjY cavity resonator. And excitation lamp 0
The arrangement of the excitation wamp 01 and the YAG rod (3) is the same as the conventional one shown in Figure 8. It is. next.

（９）は電源（４）の出力強度に応じたマイクロ波を出
力するマグネトロン、　（ＩＩげマイクロ波を空胴共振
器（ｌａｌ内に導く４波管、（５ａ）は励起ランプαη
内で発生するマイクロ波放電である。(9) is a magnetron that outputs microwaves according to the output intensity of power source (4);
This is a microwave discharge that occurs inside.

次に動作につめて説明する。電源（４）の出力によジマ
グネトロン（９）ぼマイクロ波電力を出力し、こねが導
波管０（参を介して空胴共振器Ｈａ）に導かれて共振を
起す。？かて電界が旨くなって励起ランプＱｌｌ内でマ
イクロ波放電（５ａ）が発生するが、このとき、　Ｉｉ
、！ｌ起ランプ（１１）をガリスｌ（どの誘電オで構成
すればマイクロ波の通過が容易と４Ｃつて効率のよいマ
イクロ波放ｆｉ（５ａｌが行わｔする。次に、マイクロ
波放電（５ａ）によって励起ランプＱｌ）内に封入され
ている１例えばキセノン又げクリプトンなどのガスが発
光し、断面だ円形の反射筒である集光反射鏡（１）内で
反射されて５こわがｆＡ０口・ンド（３）に照射される
。Next, the operation will be explained. The dimagnetron (9) outputs microwave power according to the output of the power source (4), and the dough is guided to the waveguide 0 (via the waveguide to the cavity resonator Ha) to cause resonance. ? Once the electric field becomes stronger and a microwave discharge (5a) occurs in the excitation lamp Qll, at this time, Ii
,! If the electric lamp (11) is made of a dielectric material (which dielectric material), microwaves can easily pass through, and efficient microwave radiation (5al) will be performed.Next, by microwave discharge (5a) A gas such as xenon and krypton sealed in the excitation lamp (Ql) emits light, which is reflected in the condensing reflector (1), which is a reflecting tube with an oval cross section, and the light is reflected by the fA0 port. (3) is irradiated.

この結果、ＹＡＧロッド（３）が励起して、ＹＡＧロッ
ド（３）の中心軸上に対向して設けらハた全反射鏡（６
）と部分透過鏡（７）間でレーザ発振が行なわれ部分透
過８ｉ１．（７）からレーザ光（８）が出力されるので
ある。As a result, the YAG rod (3) is excited, and the total reflection mirror (6) provided oppositely on the central axis of the YAG rod (3) is excited.
) and the partially transmitting mirror (7), and the partially transmitting mirror 8i1. Laser light (8) is output from (7).

なお、従来例でも述べたように、空胴共＠器１１ａ）を
構成する集光反射鏡（１）を断面楕円形で構阪し。In addition, as described in the conventional example, the condensing reflector (1) constituting the cavity 11a) has an elliptical cross-section.

かつ、この中の二つの焦点位置に庁）起ランプ（１１）
とＹＡＧ口・ノド（３）を（Ｍｉ！　瞳することで、第
８図の矢印で示すように励起ランプ０１）でのガスの発
光が能率よ＜Ｙ　Ａ　Ｇ　口、、、ド（３）に照射さね
るので、効率のよｈレーザ発振が得られるのである。And, at the two focal positions among these, there is a lamp (11)
By looking at the YAG mouth/throat (3) (Mi! Pupil), the gas emission from the excitation lamp 01 is efficient as shown by the arrow in Figure 8. Since the laser beam is irradiated with the same amount of light as possible, highly efficient laser oscillation can be obtained.

また、マイクロ波を出力するマグネトロン（９）はピー
ク幀の高ｈマイクロ波を発生することができるので、非
常にｌｌ？ｌｌ／１ビーク１１Ｉｔのパルスレー→Ｎ　
出力が得らねろ。In addition, the magnetron (9) that outputs microwaves can generate high peak microwaves, so it is extremely difficult to use. Pulse ray of ll/1 peak 11It →N
I can't get any output.

ところで、−ヒ紀、説明では、この発明をＹＡＧレーザ
に利用するものとしてｈるが９例えは、ルビー、ガラス
４Ｃど餅の固体レーザにも利用できることに−う捷でも
ｒ（＾０ し発明の効果〕 以上のように、この発明によｔｌげマイクロ波発生手段
を設けて励起ランプ内でマイクロ波放電を発生させるよ
うに構成したので、励起ランプ内の電極が不要となり、
電極の蒸発に起因する励起ランプに封入サネたガスの劣
化が防止できる。したがって、」二記ガスの発光効率が
低下しなムため長寿命の励起ランプが得らねるので、レ
ーザ発振動゛率および信頼性の高ｂマイクロ波放電励起
レーザ発振Ｒｇが得らねる効果がある。By the way, in the explanation, this invention is used for YAG lasers, but it can also be used for ruby, glass, 4C, and mochi solid-state lasers. [Effect] As described above, since the present invention is configured to provide a microwave generating means and generate microwave discharge within the excitation lamp, electrodes within the excitation lamp are no longer required.
Deterioration of the gas sealed in the excitation lamp due to evaporation of the electrodes can be prevented. Therefore, it is not possible to obtain a long-life excitation lamp because the luminous efficiency of the two gases does not decrease, so it is difficult to obtain a microwave discharge excitation laser oscillation Rg with a high laser oscillation rate and reliability. be.

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの発明の一実施例によるマイクロ波放”イ励
起Ｙ　Ａ、　Ｇレーザ発指器を示す構成図、第２図は従
来のＹＡＧレーザ発儂澁を示す構成図、第８図は集光反
射鏡の断面図である。図において。 （１）汀集光反射１１．　　（ｌａ）ｉ）空胴共Ｓ！　
（３）ｆｌＹＡＧロッド、（５ａ、）げマイクロ波放電
、（９）汀マダネトロン、（１１）ＵＩ７ｒａ起ランプ
である。 なお１図中、同一符号は同一部分を示す。 代卯人　大岩増雄 二ゴｎ宅Fig. 1 is a block diagram showing a microwave-excited YA, G laser generator according to an embodiment of the present invention, Fig. 2 is a block diagram showing a conventional YAG laser emitting device, and Fig. 8 is a block diagram showing a conventional YAG laser emitting device. It is a sectional view of a condensing reflector. In the figure. (1) Shore condensing reflection 11. (la) i) Both cavities S!
(3) flYAG rod, (5a) microwave discharge, (9) damanetron, and (11) UI7ra lamp. Note that the same reference numerals in Figure 1 indicate the same parts. Daiuto Oiwa Masuo Nigo n's house

Claims (4)

【特許請求の範囲】[Claims] （１）内面が反射板で構成された反射筒内に励起ランプ
とレーザロッドを備え、上記励起ランプの放電によつて
上記レーザロッドを励起してレーザ発振を行うものにお
いて、上記反射筒を空胴共振器として構成するとともに
、上記空胴共振器にマイクロ波発生手段からマイクロ波
を出力して上記励起ランプ内でマイクロ波放電を発生さ
せることを特徴とするマイクロ波放電励起レーザ発振器
。(1) An excitation lamp and a laser rod are provided in a reflector tube whose inner surface is composed of a reflector plate, and the laser rod is excited by the discharge of the excitation lamp to generate laser oscillation, in which the reflector tube is empty. A microwave discharge excitation laser oscillator configured as a body resonator, and configured to output microwaves from microwave generating means to the cavity resonator to generate microwave discharge within the excitation lamp. （２）励起ランプはガスが封入されたガラスで形成した
ことを特徴とする特許請求の範囲第１項記載のマイクロ
波放電 励起レーザ発振器。(2) The microwave discharge excitation laser oscillator according to claim 1, wherein the excitation lamp is made of glass filled with gas. （３）マイクロ波発生手段は、マグネトロンであること
を特徴とする特許請求の範囲第１項 記載のマイクロ波放電励起レーザ発振器。(3) The microwave discharge excitation laser oscillator according to claim 1, wherein the microwave generating means is a magnetron. （４）レーザロッドの母体材料は、ＹＡＧ（Ｙ＿３Ａｌ
＿５Ｇ＿１＿２）であることを特徴とする特許請求の範
囲第１項記載のマイクロ波放電励起レーザ発振器。(4) The base material of the laser rod is YAG (Y_3Al
_5G_1_2) The microwave discharge excitation laser oscillator according to claim 1, characterized in that: _5G_1_2).
JP60230831A 1985-10-16 1985-10-16 Microwave discharge pumped laser oscillator Expired - Lifetime JPH0728070B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60230831A JPH0728070B2 (en) 1985-10-16 1985-10-16 Microwave discharge pumped laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60230831A JPH0728070B2 (en) 1985-10-16 1985-10-16 Microwave discharge pumped laser oscillator

Publications (2)

Publication Number Publication Date
JPS6289374A true JPS6289374A (en) 1987-04-23
JPH0728070B2 JPH0728070B2 (en) 1995-03-29

Family

ID=16913958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60230831A Expired - Lifetime JPH0728070B2 (en) 1985-10-16 1985-10-16 Microwave discharge pumped laser oscillator

Country Status (1)

Country Link
JP (1) JPH0728070B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007081366A (en) * 2005-08-19 2007-03-29 Stanley Electric Co Ltd Light source equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119096A (en) * 1976-03-31 1977-10-06 Mitsubishi Electric Corp Laser equipment
JPS5535825A (en) * 1978-09-06 1980-03-13 Itsuki Ban Lighter equipped with watch

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119096A (en) * 1976-03-31 1977-10-06 Mitsubishi Electric Corp Laser equipment
JPS5535825A (en) * 1978-09-06 1980-03-13 Itsuki Ban Lighter equipped with watch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007081366A (en) * 2005-08-19 2007-03-29 Stanley Electric Co Ltd Light source equipment

Also Published As

Publication number Publication date
JPH0728070B2 (en) 1995-03-29

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