JPS6285000A - Water jet machining method and device thereof - Google Patents
Water jet machining method and device thereofInfo
- Publication number
- JPS6285000A JPS6285000A JP22403585A JP22403585A JPS6285000A JP S6285000 A JPS6285000 A JP S6285000A JP 22403585 A JP22403585 A JP 22403585A JP 22403585 A JP22403585 A JP 22403585A JP S6285000 A JPS6285000 A JP S6285000A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- workpiece
- nozzle
- ultra
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、ノズルから超高圧水を被加工物に噴射し、そ
の超高圧水の圧力により加工を行うウォータジェット加
工方法およびその装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a water jet machining method and apparatus for injecting ultra-high pressure water onto a workpiece from a nozzle and performing machining using the pressure of the ultra-high pressure water. It is.
従来、ノズルから超高圧水を噴射し、その超高圧水の圧
力により被加工物の加工、例えば、ＬＳＩの樹脂パッケ
ージのぼり取り加工、プリント配線基板等の非金属材料
の切断、切削加工等を行う場合は、被加工物の凹凸形状
または緩かな曲線形状の変化に応じて、前記ノズルを、
ロボットアーム等のアクチュエータを用いて可変制御し
、このノズルと被加工物との間の距離が一定になるよう
に倣い制御している。Conventionally, ultra-high-pressure water is injected from a nozzle, and the pressure of the ultra-high-pressure water is used to process workpieces, such as removing LSI resin packages, cutting non-metallic materials such as printed wiring boards, etc. In this case, the nozzle is adjusted according to changes in the uneven shape or gentle curved shape of the workpiece.
Variable control is performed using an actuator such as a robot arm, and tracing control is performed so that the distance between the nozzle and the workpiece is constant.
この従来のノズル可変制御型のウォータジェット加工方
式は、アクチュエータによるノズルの礪械的追従制御方
式であるから、被加工物の表面形状の変化に対してノズ
ルの応答が遅れやすい欠点がある。このため、被加工物
の表面形状の変化に対し適切な加工圧力を作用させるこ
とができない場合があり、また切削加工の場合は被加工
物の凹凸面に対して均一な加工ができないおそれもある
。This conventional variable nozzle control water jet machining system uses an actuator to mechanically follow the nozzle, and therefore has the disadvantage that the response of the nozzle to changes in the surface shape of the workpiece tends to be delayed. For this reason, it may not be possible to apply appropriate machining pressure to changes in the surface shape of the workpiece, and in the case of cutting, there is a risk that uniform machining may not be possible on the uneven surface of the workpiece. .
本発明の目的は、被加工物の表面形状の変化に対する応
答性等において優れたウォータジェット加工方法および
その装置を提供することにある。An object of the present invention is to provide a water jet processing method and apparatus thereof that are excellent in responsiveness to changes in the surface shape of a workpiece.
本発明は、ノズル３１から超高圧水を被加工物３３に噴
射し、その超高圧水の圧力により加工を行うウォータジ
ェット加工方法において、前記ノズル３１と被加工物３
３との間の距離を検出し、この距離に応じて前記ノズル
３１での噴出圧力を可変制御することにより、被加工物
３３の表面での加工圧力を一定に制御するウォータジェ
ット加工方法である。The present invention provides a water jet machining method in which ultra-high pressure water is injected from a nozzle 31 onto a workpiece 33 and processing is performed using the pressure of the ultra-high pressure water.
This is a water jet machining method in which the machining pressure on the surface of the workpiece 33 is controlled to be constant by detecting the distance between the workpiece 33 and the nozzle 31 and variably controlling the ejection pressure at the nozzle 31 according to this distance. .
また本発明は、超高圧水発生装置１１と、この超高圧水
発生装置１１から供給される超高圧水を被加工物３３に
噴射するノズル３１と、このノズル３１と被加工物３３
との間の距離を検出するセンサ３４と、このセンサ３４
の検出信号に応じて自動調整され前記超高圧水発生装置
１１での作動圧力を可変制御することににり前記被加工
物３３の表面での加工圧力を一定に制御する圧力制御弁
１５とを具備したウォータジェット加工装置である。The present invention also provides an ultra-high-pressure water generator 11, a nozzle 31 for injecting ultra-high-pressure water supplied from the ultra-high-pressure water generator 11 onto a workpiece 33, and a nozzle 31 and a
a sensor 34 that detects the distance between
a pressure control valve 15 that is automatically adjusted in accordance with a detection signal of and variably controls the operating pressure in the ultra-high pressure water generator 11 to keep the processing pressure on the surface of the workpiece 33 constant; This is a water jet processing device equipped with
本発明は、超高圧水発生装置１１から供給される超高圧
水をノズル３１より被加工物３３に噴射する場合、ノズ
ル３１と被加工物３３との間の距離をセンサ３４により
検出し、このセンサ３４の検出信号に応じて前記超高圧
水発生装置１１における圧力制御弁１５を自動調整し、
前記超高圧水発生装置１１での作動圧力を可変制御する
。In the present invention, when the ultra-high pressure water supplied from the ultra-high pressure water generator 11 is injected from the nozzle 31 to the workpiece 33, the distance between the nozzle 31 and the workpiece 33 is detected by the sensor 34, and the distance between the nozzle 31 and the workpiece 33 is detected. Automatically adjusting the pressure control valve 15 in the ultra-high pressure water generator 11 according to the detection signal of the sensor 34,
The operating pressure in the ultra-high pressure water generator 11 is variably controlled.
そして、例えば、ノズル３１と被加工物３３との間の距
離が大きくなるように変化した場合は、前記作動圧力を
高めることにより、ノズル３１での噴出圧力を高め、被
加工物３３の表面に作用される加工圧力が一定に保たれ
るように自動制御する。For example, when the distance between the nozzle 31 and the workpiece 33 changes to become larger, the working pressure is increased to increase the ejection pressure at the nozzle 31 and the surface of the workpiece 33 is increased. Automatically controls the applied machining pressure to remain constant.
以下、本発明を図面に示す一実施例を参照して詳細に説
明する。Hereinafter, the present invention will be described in detail with reference to an embodiment shown in the drawings.
１１は超高圧水発生装置であり、この超高圧水発生装置
１１は、主として、油圧源１２と、この油圧源１２から
供給される油圧の給排方向を制御する電磁作′＃Ｊ４ボ
ート２位置切換形の方向制御弁１３と、この方向制御弁
１３により給排制御される油圧により駆動される両ロッ
ドタイプのブースタシリンダ１４と、このブースタシリ
ンダ１４に供給される作動圧力を制御する比例圧力制御
弁１５とによって形成されている。Reference numeral 11 denotes an ultra-high pressure water generator, and this ultra-high pressure water generator 11 mainly includes a hydraulic power source 12 and an electromagnetic actuator for controlling the supply and discharge direction of the hydraulic pressure supplied from the hydraulic power source 12. A switching type directional control valve 13, a double rod type booster cylinder 14 driven by hydraulic pressure supplied and discharged by the directional control valve 13, and a proportional pressure control that controls the operating pressure supplied to the booster cylinder 14. It is formed by the valve 15.
前記ブースタシリンダ１４は、前記方向制御弁１３によ
り、受圧面積の大きなピストン２１の両側面に交互に油
圧を作用させ、ピストン２１の両側に設けたプランジャ
２２を強力に進退させ、給水管路２３がら逆止弁２４を
経て一側のプランジャ室２５に水を吸込むとともに、他
側のプランジャ室２５から逆止弁２６を経テ１０００〜
４０００Ｋｇ／ｄの超高圧水を管路２７に吐出供給する
ものである。The booster cylinder 14 causes the directional control valve 13 to alternately apply hydraulic pressure to both sides of the piston 21, which has a large pressure receiving area, and forcefully moves the plungers 22 provided on both sides of the piston 21 back and forth, thereby removing water from the water supply pipe 23. Water is sucked into the plunger chamber 25 on one side through the check valve 24, and the check valve 26 is sucked in from the plunger chamber 25 on the other side.
Ultra-high pressure water of 4000 kg/d is discharged and supplied to the pipe line 27.
前記管路２７の内部に生ずる脈動は、この管路２７に設
けたアキュムレータ２８によって平滑化する。The pulsations occurring inside the pipe line 27 are smoothed out by an accumulator 28 provided in the pipe line 27.
前記管路２７は、ノズル３１に連通接続する。このノズ
ル３１は、ロボットアーム３２等により支持され、そし
て先端を被加工物３３に対向し、超高圧水をこの被加工
物３３に噴射する。The pipe line 27 is communicatively connected to the nozzle 31 . This nozzle 31 is supported by a robot arm 32 or the like, has its tip facing the workpiece 33, and injects ultra-high pressure water onto the workpiece 33.
また、前記ノズル３１に、このノズル３１ど波加工物３
３との間の距離を光電方式または磁気方式等により無接
触で検出するセンサ３４を一体的に設ける。Further, the nozzle 31 is connected to the wave-processed workpiece 3.
A sensor 34 is integrally provided to detect the distance between the terminal and the terminal 3 in a non-contact manner using a photoelectric method or a magnetic method.
さらに、前記センサ３４の出力コード４０を比較回路４
１の入力端子に接続する。この比較回路４１は、この比
較回路４１に予め入力された設定値と前記センサ３４で
検出された測定値とを電気的に比較してその誤差を出力
するものであり、この比較回路４１の出力端子を増幅ｉ
１！＋４２の入力端子に接続し、この増幅２！ｉ４２の
出力端子を前記比例圧力制御弁１５の設定圧力調整部４
３に接続する。Further, the output code 40 of the sensor 34 is input to the comparison circuit 4.
Connect to input terminal 1. This comparison circuit 41 electrically compares the set value inputted in advance to this comparison circuit 41 and the measured value detected by the sensor 34 and outputs the error. Amplify the terminal
1! +42 input terminal, this amplification 2! The output terminal of i42 is connected to the set pressure adjustment section 4 of the proportional pressure control valve 15.
Connect to 3.
この比例圧力制御弁１５は、前記油圧１１２がらタンク
にドレンされる油量を調整してブースタシリンダ１４に
供給される油圧を設定圧力に保つサーボバルブであり、
この比例圧力制御弁１５の設定圧力は、前記増幅器４２
の出力（前記設定圧力調整部４３への入力）に比例して
自動的に可変調整され、前記ブースタシリンダ１４に供
給されるｈｔ＋圧を比例制御する。This proportional pressure control valve 15 is a servo valve that adjusts the amount of oil drained into the tank from the oil pressure 112 to maintain the oil pressure supplied to the booster cylinder 14 at a set pressure.
The set pressure of this proportional pressure control valve 15 is the same as that of the amplifier 42.
is automatically variably adjusted in proportion to the output (input to the set pressure adjustment section 43), and the ht+ pressure supplied to the booster cylinder 14 is controlled proportionally.
次に、この実施例の作用を説明する。Next, the operation of this embodiment will be explained.
超高圧水発生装置１１から吐出された超高圧水を管路２
７を経てノズル３１に供給し、このノズル３１より被加
工物３３に噴射し、被加工物としてのＬＳＩの樹脂パッ
ケージのぼり取り加工またはプリント配線基板等の非金
属材料の切断、切削加工等を行うようにする。The ultra-high pressure water discharged from the ultra-high pressure water generator 11 is transferred to the pipe 2.
7 and is supplied to a nozzle 31 from which it is injected onto a workpiece 33 to perform cutting of a resin package of an LSI as a workpiece or cutting or machining of a non-metallic material such as a printed wiring board. Do it like this.
その場合、ノズル３１と被加工物３３との間の距離をセ
ンサ３４により検出し、このセンサ３４で検出した測定
値を比較回路４１の設定値と比較し、誤着がある場合は
、その誤差を増幅器４２により増幅して比例圧力制御弁
１５の設定圧力調整部４３に出力し、この制御弁１５の
設定圧力を自動的に可変調整する。In that case, the distance between the nozzle 31 and the workpiece 33 is detected by the sensor 34, and the measured value detected by this sensor 34 is compared with the set value of the comparison circuit 41. is amplified by the amplifier 42 and output to the set pressure adjustment section 43 of the proportional pressure control valve 15, and the set pressure of the control valve 15 is automatically variably adjusted.
これより、前記ブースタシリンダ１４に供給される作動
油圧が調整され、管路２７での発生水圧が調整され、ノ
ズル３１での噴出圧力が可変調整される。As a result, the hydraulic pressure supplied to the booster cylinder 14 is adjusted, the water pressure generated in the pipe line 27 is adjusted, and the ejection pressure in the nozzle 31 is variably adjusted.
例えば、ノズル３１と被加工物３３との間の距Ｈが大き
くなるように変化した場合は、その距離の変化に応じた
前記比例圧力制御弁１５の自動調整作用により、１ｊＸ
ｊ記ブースタシリンダ１４に供給される作動油圧が高め
られ、前記プランジャ室２５から管路２７に吐出される
発生水圧が高められ、ノズル３１での噴出圧力が前記離
間距離の増加分だけ高められる。これにより被加工物３
３の表面に作用されるウォータジェッ１〜の加工圧力が
一定に保たれるように自動制御される。For example, when the distance H between the nozzle 31 and the workpiece 33 changes to increase, the proportional pressure control valve 15 automatically adjusts according to the change in distance by 1jX
The working oil pressure supplied to the booster cylinder 14 is increased, the generated water pressure discharged from the plunger chamber 25 to the pipe line 27 is increased, and the ejection pressure at the nozzle 31 is increased by the increase in the separation distance. As a result, the workpiece 3
The processing pressure of the water jets 1 to 3 applied to the surface of the water jets 3 is automatically controlled to be kept constant.
なお、前記ロボットアーム３２は必ずしも必要ではなく
、ノズル３１を固定設置しておいてもよい。Note that the robot arm 32 is not necessarily required, and the nozzle 31 may be fixedly installed.
さらに、本発明は、前記ロボットアーム３２によりノズ
ル３１を被加工物３３の表面から一定距離に保つように
表面形状の変化に追従さける倣い制御方式と組合せて併
用するようにしてもよい。その場合は、機械的な倣い制
御方式につきものの応答性における欠点を本発明によっ
て補うことになる。Further, the present invention may be used in combination with a tracing control method in which the robot arm 32 keeps the nozzle 31 at a constant distance from the surface of the workpiece 33 to follow changes in the surface shape. In that case, the present invention compensates for the shortcomings in responsiveness inherent in mechanical tracing control systems.
本発明によれば、ノズルと被加工物との間の距離に応じ
てノズルにおける噴出圧力を可変制御することにより、
被加工物の表面における加工圧力を一定に制御するよう
にしたから、アクチュエータを用いてノズルを機械的に
可変制御する必要がなく、被加工物の表面形状の変化に
対する応答が速い。このため、被加工物の表面形状の変
化に対し常に適切な加工圧力を作用させることができ、
そして、切削加工の場合は被加工物の凹凸面に対して均
一な加工ができる。According to the present invention, by variably controlling the ejection pressure in the nozzle according to the distance between the nozzle and the workpiece,
Since the processing pressure on the surface of the workpiece is controlled to be constant, there is no need to variably control the nozzle mechanically using an actuator, and the response to changes in the surface shape of the workpiece is fast. Therefore, it is possible to always apply appropriate machining pressure to changes in the surface shape of the workpiece.
In the case of cutting, the uneven surface of the workpiece can be processed uniformly.
また、本発明によれば、前記距離を検出するセンサの検
出信号に応じて圧力制御弁を自動調整し、前記加工圧力
が一定になるように超高圧水発生装置の作動圧力を可変
制御するようにしたから、前記圧力制御弁を用いて前記
噴出圧力を連続的にかつ高精度に可変制御できる。Further, according to the present invention, the pressure control valve is automatically adjusted according to the detection signal of the sensor that detects the distance, and the operating pressure of the ultra-high pressure water generator is variably controlled so that the processing pressure is constant. Therefore, the ejection pressure can be continuously and highly accurately variably controlled using the pressure control valve.
図は本発明のウォータジェット加工方法およびその装置
の一実施例を示す流体回路図である。
１１・・超高圧水発生装置、１５・・圧力制御弁、３１
・・ノズル、３３・・被加工物、３４・・センサ。The figure is a fluid circuit diagram showing an embodiment of the water jet processing method and apparatus of the present invention. 11...Ultra high pressure water generator, 15...Pressure control valve, 31
... Nozzle, 33... Workpiece, 34... Sensor.
Claims (2)
高圧水の圧力により加工を行うウォータジェット加工方
法において、前記ノズルと被加工物との間の距離を検出
し、この距離に応じて前記ノズルにおける噴出圧力を可
変制御することにより、被加工物の表面における加工圧
力を一定に制御することを特徴とするウォータジェット
加工方法。(1) In a water jet machining method in which ultra-high pressure water is injected from a nozzle onto a workpiece and machining is performed using the pressure of the ultra-high pressure water, the distance between the nozzle and the workpiece is detected, and the distance between the nozzle and the workpiece is A water jet machining method characterized in that the machining pressure on the surface of the workpiece is controlled to be constant by variably controlling the ejection pressure in the nozzle accordingly.
供給される超高圧水を被加工物に噴射するノズルと、こ
のノズルと被加工物との間の距離を検出するセンサと、
このセンサの検出信号に応じて自動調整され前記超高圧
水発生装置における作動圧力を可変制御することにより
前記被加工物の表面における加工圧力を一定に制御する
圧力制御弁とを具備したことを特徴とするウォータジェ
ット加工装置。(2) an ultra-high-pressure water generator, a nozzle that injects ultra-high-pressure water supplied from the ultra-high-pressure water generator onto a workpiece, and a sensor that detects the distance between the nozzle and the workpiece;
A pressure control valve that is automatically adjusted in accordance with a detection signal of the sensor and variably controls the working pressure in the ultra-high pressure water generator to keep the processing pressure on the surface of the workpiece constant. Water jet processing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22403585A JPS6285000A (en) | 1985-10-08 | 1985-10-08 | Water jet machining method and device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22403585A JPS6285000A (en) | 1985-10-08 | 1985-10-08 | Water jet machining method and device thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6285000A true JPS6285000A (en) | 1987-04-18 |
| JPH0150559B2 JPH0150559B2 (en) | 1989-10-30 |
Family
ID=16807571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22403585A Granted JPS6285000A (en) | 1985-10-08 | 1985-10-08 | Water jet machining method and device thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6285000A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01199799A (en) * | 1988-02-04 | 1989-08-11 | Sugino Mach:Kk | Water jet cutting method |
| JP2008504086A (en) * | 2004-06-30 | 2008-02-14 | エルベ エレクトロメディツィン ゲーエムベーハー | Medical pump |
| US7955057B2 (en) | 2004-06-30 | 2011-06-07 | Erbe Elektromedizin Gmbh | Medical pump |
| JP2016064463A (en) * | 2014-09-24 | 2016-04-28 | 三菱重工業株式会社 | Device for and method of removing heat deterioration layer of heat-resistant coating film |
-
1985
- 1985-10-08 JP JP22403585A patent/JPS6285000A/en active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01199799A (en) * | 1988-02-04 | 1989-08-11 | Sugino Mach:Kk | Water jet cutting method |
| JP2008504086A (en) * | 2004-06-30 | 2008-02-14 | エルベ エレクトロメディツィン ゲーエムベーハー | Medical pump |
| US7955057B2 (en) | 2004-06-30 | 2011-06-07 | Erbe Elektromedizin Gmbh | Medical pump |
| JP4925213B2 (en) * | 2004-06-30 | 2012-04-25 | エルベ エレクトロメディツィン ゲーエムベーハー | Medical pump |
| JP2016064463A (en) * | 2014-09-24 | 2016-04-28 | 三菱重工業株式会社 | Device for and method of removing heat deterioration layer of heat-resistant coating film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0150559B2 (en) | 1989-10-30 |
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