JPS6273550A - Far ultraviolet ray lamp - Google Patents

Abstract

PURPOSE:To make it possible to form a lamp of low cost by air-tightly sealing with a heat-proof adhesive, a pair of stems provided with electrodes coated with electron emitting substances into both ends of quart glass of high pority, which transmits far ultraviolet rays. CONSTITUTION:Two holes, which let the leading-in wires pass through into a circular quartz plates 10 having thickness of 2mm, are opened at both ends of a luminous tube 1 made of, for example, synthetic quart, which transmits far ultraviolet rays, while passing the lead-in wires 9 connected to the electrodes 2 through said holes and in a state of holding the prescribed height of the electrode, epoxy system resin, which is a heat-proof adhesive, is applied to the junction part 11 for both ends of the luminous tube 1 to the circular quartz plates 10 and to the outlet part 11, through which the lead-in wires are inserted, followed by drying. Thereafter, the inside of the tube 1 is degassed through an exhaust pipe 6 followed by electrifying the electrodes while heating and degassing the whole tube for decomposing the electrodes coated with carbonate such as barium, strontium and calcium by heating it for being made into an electron emitting material as an oxide. After fully degasing the tube inside, a prescribed quantity of inert gas such as mercury and argon is sealed up to the prescribed pressure through the exhaust pipe 6 followed by sealing the exhaust pipe 6.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、遠紫外線ランプに係り、特に製造コスト低減
に好適なステムの構造に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a deep ultraviolet lamp, and particularly to a stem structure suitable for reducing manufacturing costs.

〔発明の背景〕[Background of the invention]

従来のこの種のランプは、第１，２図に示すように発光
部である遠紫外線の透過率のよい高純度の石英管１と、
電子放射物質を被着した電極２を具備した硬質ガラスの
ステム３とを、中間硝子Ａ又はＢを介在させて接続して
いた。しかし、発光部を形成する高純度石英管１も該石
英と硬質ガラス製のステム３とを接続する為の中間硝子
Ａ又はＢ自体も非常に材料ならびに製造コストが高いと
いう、欠点があり、コスト低減化が望まれていた。As shown in FIGS. 1 and 2, a conventional lamp of this type includes a high-purity quartz tube 1 that is a light emitting part and has good transmittance for far ultraviolet rays;
A hard glass stem 3 having an electrode 2 coated with an electron emitting material was connected to the stem 3 through an intermediate glass A or B. However, both the high-purity quartz tube 1 that forms the light emitting part and the intermediate glass A or B that connects the quartz and the hard glass stem 3 have the disadvantage that the material and manufacturing costs are very high. A reduction was desired.

なお、この種のランプとして関連するものには例えば特
開昭５１−１１９１８８号、特開昭５７−５４９０８号
等が挙げられる。Incidentally, related lamps of this type include, for example, Japanese Patent Application Laid-Open Nos. 119188-1988 and 54908-1980.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、上記欠点を解消した低コスト遠紫外線
ランプを提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a low-cost deep ultraviolet lamp that eliminates the above-mentioned drawbacks.

〔発明の概要〕[Summary of the invention]

石英または、熱膨張係数の小さい円板に導入線を通す穴
を設け、これに電極を継線した導入線を挿し込み、該円
板の周辺と発光管端部の接合部および、導入線挿入部に
耐熱性接着剤を塗着乾燥させ、気密シールする。ここで
、耐熱性接着剤としては、エポキシ系樹脂がよい０両端
をシールした後、排気管を通して排気し、接着剤の耐熱
温度限度内で加熱脱ガスしながら、電極に通電し、電極
の脱ガスを行ったのち、不活性ガスと水銀を封入し、排
気管をシールする。A hole is made in quartz or a disk with a small coefficient of thermal expansion for the lead-in wire to pass through, and the lead-in wire with the electrode connected is inserted into the hole, and the lead-in wire is inserted into the joint between the periphery of the disk and the end of the arc tube, and the lead-in wire is inserted. Apply heat-resistant adhesive to the area, let dry, and seal airtight. Here, as a heat-resistant adhesive, epoxy resin is recommended. After sealing both ends, exhaust the gas through the exhaust pipe, and while heating and degassing within the heat-resistant temperature limit of the adhesive, energize the electrode and degas the electrode. After the gas is removed, inert gas and mercury are filled in and the exhaust pipe is sealed.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を第２，３図により説明する。 An embodiment of the present invention will be described below with reference to FIGS. 2 and 3.

遠紫外線を透過するたとえば合成石英の発光管１の両端
に、厚さ２ｍの円形の、石英板１０に、導入線を通す六
８を２ヶ開け、これに電極２を継線した導入線９を通し
、所定の電極高さに保持した状態で、発光管１の両端と
前記円板石英板１ｏとの接合部１１および、導入線９を
挿入した出口部１１に、耐熱性接着剤であるエポキシ系
樹脂を塗Ｒ乾燥させる。しかるのち、排気管６を通して
管１内を脱ガスし、管全体を加熱腕ガスしながら、電極
に通電して、バリウム、ストロンチウム、カルシウム等
の炭酸塩を被着した電極を加熱することにより分解して
、酸化物とし電子放射物質にする。管内を充分脱ガスし
たのち排気管６を通して所定量の水銀およびアルゴン等
の不活性ガスを所定圧力封入したのち、排気管６をシー
ルする。At both ends of an arc tube 1 made of, for example, synthetic quartz, which transmits far ultraviolet rays, there are two lead-in wires 9 made in a circular quartz plate 10 with a thickness of 2 m, through which the lead-in wires are passed. With the electrode held at a predetermined height, a heat-resistant adhesive is applied to the joint 11 between both ends of the arc tube 1 and the circular quartz plate 1o, and to the outlet 11 into which the lead-in wire 9 is inserted. Apply epoxy resin and let dry. Thereafter, the inside of the tube 1 is degassed through the exhaust pipe 6, and while the entire tube is heated with gas, electricity is applied to the electrodes to heat the electrodes coated with carbonates such as barium, strontium, and calcium, thereby decomposing them. Then, it becomes an oxide and becomes an electron-emitting substance. After sufficiently degassing the inside of the tube, a predetermined amount of inert gas such as mercury and argon is sealed at a predetermined pressure through the exhaust pipe 6, and then the exhaust pipe 6 is sealed.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、導入線を挿入する穴を開けた円形の石
英板と、耐熱性接着剤を使用することのみにより、簡単
に電極封止ができるので、熱膨張係数の異なる石英発光
管と、硬質カラスよりなるステムとを高価な中間ガラス
を使うことなく、また、ステムと発光管と中間ガラスを
封止接続するガラス加工作業がないため製造設備も簡略
化され低コストのランプを提供できる効果がある６According to the present invention, electrodes can be easily sealed simply by using a circular quartz plate with a hole for inserting the lead-in wire and a heat-resistant adhesive, so that it can be used with quartz arc tubes with different coefficients of thermal expansion. The stem is made of hard glass, without the use of expensive intermediate glass, and since there is no glass processing work to seal and connect the stem, luminous tube, and intermediate glass, manufacturing equipment is simplified and a low-cost lamp can be provided. Effective 6

【図面の簡単な説明】[Brief explanation of drawings]

第１，２図は、従来例を説明するためのランプ概略図及
び要部図、第３，４図は１本発明の一実施例を説明する
ためのランプ概略図である。 １・・・高純度石英発光管、２・・・電極、３・・・ス
テＡｘ。1 and 2 are a schematic diagram and a main part diagram of a lamp for explaining a conventional example, and FIGS. 3 and 4 are schematic diagrams of a lamp for explaining an embodiment of the present invention. 1...High purity quartz arc tube, 2...Electrode, 3...Ste Ax.

Claims (1)

【特許請求の範囲】[Claims] １、遠紫外線を透過する高純度の石英ガラスの両端に一
対の電子放射物質を被着した電極を具備したステムを耐
熱性接着剤で気密シールしたことを特徴とする遠紫外線
ランプ。1. A far-ultraviolet lamp characterized by having a stem made of high-purity quartz glass that transmits far-ultraviolet rays and having a pair of electrodes coated with an electron-emitting material at both ends, hermetically sealed with a heat-resistant adhesive.