JPS6265142U - - Google Patents

Info

Publication number
JPS6265142U
JPS6265142U JP15579285U JP15579285U JPS6265142U JP S6265142 U JPS6265142 U JP S6265142U JP 15579285 U JP15579285 U JP 15579285U JP 15579285 U JP15579285 U JP 15579285U JP S6265142 U JPS6265142 U JP S6265142U
Authority
JP
Japan
Prior art keywords
workpiece
receiving
vacuum chuck
jig
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15579285U
Other languages
Japanese (ja)
Other versions
JPH0248202Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985155792U priority Critical patent/JPH0248202Y2/ja
Publication of JPS6265142U publication Critical patent/JPS6265142U/ja
Application granted granted Critical
Publication of JPH0248202Y2 publication Critical patent/JPH0248202Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本考案の一実施例を示す受出し治具
の側面断面図、第２図は、従来の受出し方法を示
す側面断面図である。 １……真空チヤツク、４……ウエハ、９……受
出し治具、１０……溝、１１……受板、１２……
回転軸。 FIG. 1 is a side sectional view of a receiving jig showing an embodiment of the present invention, and FIG. 2 is a side sectional view showing a conventional receiving method. 1...Vacuum chuck, 4...Wafer, 9...Receiving jig, 10...Groove, 11...Success plate, 12...
Axis of rotation.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空チヤツクに略鉛直に支持された薄板状の被
加工物を真空チヤツクから受出すための治具であ
つて、真空チヤツクの下方に回転可能に配量され
た回転軸と、この回転軸に結合され、回転軸側の
端部に被加工物の一端を収容するコの字形の溝が
形成され、かつ被加工物に接したとき、被加工物
の全面に接するように形成された受板を設けたこ
とを特徴とする被加工物の受出し治具。 This is a jig for receiving a thin plate-shaped workpiece supported approximately vertically on the vacuum chuck from the vacuum chuck, and is connected to a rotary shaft rotatably disposed below the vacuum chuck and connected to this rotary shaft. A U-shaped groove is formed at the end on the rotating shaft side to accommodate one end of the workpiece, and a receiving plate is formed so as to contact the entire surface of the workpiece when it comes into contact with the workpiece. A workpiece receiving jig characterized by being provided with a workpiece receiving jig.
JP1985155792U 1985-10-14 1985-10-14 Expired JPH0248202Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985155792U JPH0248202Y2 (en) 1985-10-14 1985-10-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985155792U JPH0248202Y2 (en) 1985-10-14 1985-10-14

Publications (2)

Publication Number Publication Date
JPS6265142U true JPS6265142U (en) 1987-04-22
JPH0248202Y2 JPH0248202Y2 (en) 1990-12-18

Family

ID=31076813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985155792U Expired JPH0248202Y2 (en) 1985-10-14 1985-10-14

Country Status (1)

Country Link
JP (1) JPH0248202Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188304A (en) * 1992-12-17 1994-07-08 Furukawa Electric Co Ltd:The Automatic cleaning apparatus of ring frame

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58129638U (en) * 1982-02-24 1983-09-02 富士通株式会社 Wafer support mechanism
JPS5994353A (en) * 1982-11-19 1984-05-31 Toshiba Corp Semiconductor wafer holding device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58129638U (en) * 1982-02-24 1983-09-02 富士通株式会社 Wafer support mechanism
JPS5994353A (en) * 1982-11-19 1984-05-31 Toshiba Corp Semiconductor wafer holding device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188304A (en) * 1992-12-17 1994-07-08 Furukawa Electric Co Ltd:The Automatic cleaning apparatus of ring frame

Also Published As

Publication number Publication date
JPH0248202Y2 (en) 1990-12-18

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