JPS6262205A - Surface irregularity inspection for object - Google Patents
Surface irregularity inspection for objectInfo
- Publication number
- JPS6262205A JPS6262205A JP20160485A JP20160485A JPS6262205A JP S6262205 A JPS6262205 A JP S6262205A JP 20160485 A JP20160485 A JP 20160485A JP 20160485 A JP20160485 A JP 20160485A JP S6262205 A JPS6262205 A JP S6262205A
- Authority
- JP
- Japan
- Prior art keywords
- light
- screen
- image
- specimen
- slit light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
（産業」−５の利用分野）
本発明は、積石が向上された物体の表面凹凸検査方法に
関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Application of Industry"-5) The present invention relates to a method for inspecting surface irregularities of an object having improved stone stacks.
（従来の技術）
従来、物体の表面凹凸の検査方法としては、スポラミル
光を被検査面に当て、その正反射光を受光して凹凸部に
よる正反射光の減少により凹凸部を検出するフライング
スボッ１〜方式が知られている。(Prior art) Conventionally, as a method for inspecting the surface irregularities of an object, a flying scan method is used in which sporamil light is applied to the surface to be inspected, the specularly reflected light is received, and irregularities are detected by reducing the specularly reflected light due to the irregularities. The Bot 1 method is known.
（発明が解決しようとする問題点）
しかしながら、１−記従来の方式においては、明らかに
凹凸とわかる：ｂのは検出できるが、微小イ【例えば、
μｍ甲位の凹凸は検出不可能であった。(Problems to be Solved by the Invention) However, in the conventional method described in 1-1, unevenness can be clearly seen: b can be detected, but minute irregularities [e.g.
It was not possible to detect any μm irregularities in the carapace.
すなわら、従来方式では、光の光量の変化絹でとらえて
いるため、微小な凹凸ではその光量に変化が現われない
ことが原因であった。In other words, in the conventional method, changes in the amount of light are captured by silk, so minute irregularities do not cause changes in the amount of light.
本発明の目的は、従来実現が不可能であった微小な、例
えば、Ｉ１ｍ中位の表面凹凸の検出が可能な物体の表面
凹凸検査方法を捉供ｌ！んとするものである。An object of the present invention is to provide a method for inspecting the surface irregularities of an object that can detect minute surface irregularities, for example, in the middle of I1m, which was previously impossible to realize! This is what we do.
（問題点を解決するための手段）
上記目的を達成覆る本発明の構成は、スリット光を被検
査物体へ照ａｔｂ、ぞの反射光をスクリーンに投影し、
該スクリーン上の投影パターンをＩＴＶカメラに″″ｃ
ｃ踊影これを映像信号として画像処理に入力し、正常表
面画像パターンと異常表面画像パターンとの区別により
表面の凹凸を検査することを′＋Ｊ徴と１−る物体の表
面凹凸検査方法である。(Means for Solving the Problems) The configuration of the present invention that achieves the above object is to illuminate an object to be inspected with a slit light, project the reflected light on a screen,
The projection pattern on the screen is sent to the ITV camera.
This is a method for inspecting the surface unevenness of an object, which involves inputting this as a video signal into image processing and inspecting the surface unevenness by distinguishing between a normal surface image pattern and an abnormal surface image pattern. .
すなわら、本発明は、スリッＩ・光を利用して照対接の
反射光の形状変化を利用した表面凹凸検査方法に関する
ものである。In other words, the present invention relates to a surface unevenness inspection method that utilizes slit I light and changes in the shape of reflected light from an object and a contact.
以下、図面に基づいて本発明の表面凹凸検査方法につい
て説明する。Hereinafter, the surface unevenness inspection method of the present invention will be explained based on the drawings.
第１図は、本発明に係る表面凹凸検査方法に適用される
装置の構成図である。FIG. 1 is a configuration diagram of an apparatus applied to the surface unevenness inspection method according to the present invention.
第１図において、１は矢印方向に走行する被検査物体で
あり、２は、例えばレーザと円筒状レンズで構成された
スリット光発生装置であり、該スリット光発生装置２か
ら広幅のスリット光３が被検査物体１に対して照射され
、その反射光４がスクリーン５に映し出されるようにな
っている。スリット光３は、被検査物体１に対して角度
θで照射される。In FIG. 1, 1 is an object to be inspected that travels in the direction of the arrow, and 2 is a slit light generator composed of, for example, a laser and a cylindrical lens. is irradiated onto the object 1 to be inspected, and its reflected light 4 is projected onto a screen 5. The slit light 3 is irradiated onto the inspected object 1 at an angle θ.
従来、表面凹凸が微小な、例えば、μｍ単（ｆｆのもの
を直接児つ（〕ることは非常に困難であったが、本発明
は、表面凹凸を光の形状の変化として取り出すために、
スーツ１〜光を使用する点に特徴を有する。例えば、表
面凹凸のない平板状の被検査物体１に対してスリット光
３を照射し、その反射光４をスクリーン５−１に投影す
ると、第２図のイに示す如く、直線状の光が映る。とこ
ろが、表面（こ凹凸が存在すると、直線状の光の映像が
乱れて、第２図の口〜ハに示す如く、ゆがみ、ふくれが
発生する。また、ふくれに伴い直線状の光の光量が減少
する。Conventionally, it has been extremely difficult to directly produce objects with minute surface irregularities, for example, micrometers (ff), but the present invention is capable of extracting surface irregularities as changes in the shape of light.
Suit 1 is characterized by the use of light. For example, when the slit light 3 is irradiated onto a flat plate-shaped object to be inspected 1 with no surface irregularities and the reflected light 4 is projected onto the screen 5-1, linear light is produced as shown in Fig. 2A. reflected. However, if there are irregularities on the surface, the linear light image is disturbed, causing distortion and bulges as shown in Figure 2. Decrease.
第２図は、スクリーン上での反射光の映像変化の一例を
示す図である。FIG. 2 is a diagram showing an example of an image change of reflected light on a screen.
第２図において、イはスクリーン５−トの正常部の反射
光パターンであり、口は凹凸部が入り始めの反射光のパ
ターンであり、ハは凹凸部が入りきった反則光のパター
ンであり、二は凹凸部が出始めのパターンであり、さら
に、ホは凹凸部が出てしまった後のパターンをそれぞれ
示す。In Figure 2, A is the reflected light pattern of the normal part of the screen 5-T, the opening is the reflected light pattern where the uneven part begins to enter, and C is the reflected light pattern where the uneven part has completely entered. , 2 are the patterns where the uneven portions begin to appear, and E shows the patterns after the uneven portions have appeared.
本発明は、上記のスクリーン５上に映し出されたパター
ンを■丁Ｖカメラ６にて県像し、その映像信号を画像処
理装置７に送る。すなわち、上記スクリーン５上に現れ
た変化を検知する装置として、画像処理装置７を用いる
。In the present invention, the pattern projected on the screen 5 is imaged by the V camera 6, and the image signal is sent to the image processing device 7. That is, the image processing device 7 is used as a device for detecting changes appearing on the screen 5.
ＩＴＶカメラ６は、上記スクリーン５」−の直線状の光
の映像を、水平走査線を垂直方向にとらえ、その映像信
号を画像処理装置７へ送る。８はモニタテレビであり、
画像処理装置７で処理された画像を映し出す。The ITV camera 6 captures an image of linear light on the screen 5'' with horizontal scanning lines in the vertical direction, and sends the image signal to the image processing device 7. 8 is a monitor TV;
The image processed by the image processing device 7 is displayed.
第３図は、ＩＴＶカメラで異常をとらえた時の水平走査
線の波形を示す図である。FIG. 3 is a diagram showing the waveform of a horizontal scanning line when an abnormality is captured by an ITV camera.
第３図のイは、第２図のへの凹凸部が存在するパターン
を示すものであり、これを水平走査線の波形で示すと、
口、二の如く正常なパターンの場合、連続した一定光量
の狭幅ピークが１個水平走査線上に存在する。一方、凹
凸部はハに示す如く、光量の減少された広幅のピークが
水平走査線上に存在し、この光量に対して連続した幅を
設定しておき、これが変化した時、つまり、表面凹凸を
とらえた場合、ゆがみ、ふくれが光量の減少、あるいは
幅の増加となり、異常を検出する。A in FIG. 3 shows a pattern with uneven parts as shown in FIG. 2, and this is shown as a horizontal scanning line waveform.
In the case of a normal pattern such as a mouth or two, one continuous narrow peak of constant light amount exists on the horizontal scanning line. On the other hand, as shown in Figure C, the uneven portion has a wide peak with a reduced amount of light on the horizontal scanning line, and a continuous width is set for this amount of light. When captured, distortions and bulges result in a decrease in light intensity or an increase in width, and abnormalities are detected.
以上述べたように、本発明は、ライン上に流れている被
検査物体にスリッ］へ光をある角度を保ち、照ｑ４する
と、表面」−に凹凸がない場合には、その反射光が直線
状の光の映像としてスクリーン上に映るが、表面十に凹
凸があると、スクリーン上の直線状の映像がゆがみ、ま
たはふくれる現象を利用し、これをＩ丁Ｖカメラにて取
り込み、画像処理装置にてこの変化を検出する。これを
検出した時、異常信号を発生さ［、外部に出力するよう
にしたものである。As described above, in the present invention, when the light is held at a certain angle to the object to be inspected flowing on the line, and the reflected light is not uneven on the surface, the reflected light will be in a straight line. It appears on the screen as a linear image of light, but if the surface is uneven, the linear image on the screen becomes distorted or bulges, which is a phenomenon that is captured by an I-V camera and processed by an image processing device. detect this change. When this is detected, an abnormal signal is generated and output to the outside.
本発明は、スリット光の照射角度θを被検査物体に対し
てＯ〜１５°の範囲に設定して照射することが好ましい
。すなわら、この範囲の角度にて照射すると、表面反射
と４１す、反射光の光量が減少することか少なく、表面
の状態が反ｑ４光の変化となって坦ねされる。スリット
光の照ｑ４角度Ｏを被検査物体に対して１５°以」−に
すると、５μｍ程度の凹凸では、反則光の変化があまり
を【り、この装置の効果が充分発揮されない。本発明は
、上記の如くスーツ１〜光の照ｑ４角度を被検査物体に
対して小さくとることにより、表面反射光量の減衰を防
ぐことができる。In the present invention, it is preferable to set the irradiation angle θ of the slit light to the object to be inspected in the range of 0 to 15 degrees. That is, when irradiating at an angle within this range, the amount of reflected light is less likely to decrease due to surface reflection, and the state of the surface is flattened as a change in the inverse q4 light. If the illumination angle q4 of the slit light is set to 15 degrees or more with respect to the object to be inspected, irregularities of about 5 μm will cause too much change in the reflected light, and the effect of this device will not be fully demonstrated. In the present invention, as described above, by setting the angle of illumination q4 of the light from the suit 1 to the object to be inspected to be small, it is possible to prevent attenuation of the amount of surface reflected light.
一方、スリッｌ〜光の光量が小さいと、反射光量をＩＴ
Ｖカメラにてとらえられないこととなるの＝ ６−
で、ＩＴＶカメラに適する光量を照射する必要がある。On the other hand, if the amount of light is small, the amount of reflected light is
The amount of light that cannot be captured by the V camera is 6-, so it is necessary to irradiate an amount of light suitable for the ITV camera.
本発明において、被検査物体は、平板状のものに適用で
きる。例えば、フィルム、金属、プラスデック、建材、
ガラス、紙、セラミックスなど。In the present invention, the object to be inspected can be a flat object. For example, films, metals, plus decks, building materials,
glass, paper, ceramics, etc.
また、溶接、物の貼り（＝ｉけ俊の表面処理状態の検査
、逆に区切りのために付けられた凹凸を検出し、被検査
物の大きさ、良さの測定にも使用できる。It can also be used to inspect the surface treatment status of welding and pasting objects, and conversely, to detect irregularities added for separation, and to measure the size and quality of objects to be inspected.
（効 果）
本発明は、上記の構成を採用することにより、次の如き
作用効果を奏する。すなわち、■ スーツ１〜光を被検
査物体に照射することにより、表面凹凸を表面反射光の
変化として表わすことかできる。(Effects) By employing the above configuration, the present invention provides the following effects. That is, (1) By irradiating the suit 1 with light onto the object to be inspected, surface irregularities can be expressed as changes in surface reflected light.
■ スクリーン上の映像をＩＴＶカメラにて２次元でと
らえるため、被検査物体の多少のゆれも許容できる。■ Since the image on the screen is captured two-dimensionally by an ITV camera, some shaking of the object to be inspected can be tolerated.
■ 第１図に示すように、水平走査線に対してスーツ１
〜光のスクリーン上の映像を垂直にとらえ、水平走査線
上の変化を異常として画像処理装置が認識するため、１
画面の取込みが終了するまでに異常を検知することがで
きる。■ As shown in Figure 1, suit 1 is applied to the horizontal scanning line.
~The image on the light screen is captured vertically, and the image processing device recognizes changes on the horizontal scanning line as abnormalities, so 1.
Abnormalities can be detected before screen capture is completed.
■ ＩＴＶカメラの取込み周期毎に処理するため、被検
査物体が高速で搬送されていても、表面凹凸を正確に検
出することができる。(2) Since processing is performed every capture cycle of the ITV camera, surface irregularities can be accurately detected even if the object to be inspected is being transported at high speed.
第１図は、本発明に係る表面凹凸検査方法に適用される
装置の構成図である。第２図は、スクリーン上での反射
光の映像変化の一例を示す図である。第３図は、ＩＴＶ
カメラで異常をとらえた時の水平走査線の波形を示す図
である。
図面中の符号の説明FIG. 1 is a configuration diagram of an apparatus applied to the surface unevenness inspection method according to the present invention. FIG. 2 is a diagram showing an example of an image change of reflected light on a screen. Figure 3 shows ITV
FIG. 6 is a diagram showing a waveform of a horizontal scanning line when an abnormality is captured by a camera. Explanation of symbols in drawings
Claims (1)
ーンに投影し、該スクリーン上の投影パターンをＩＴＶ
カメラにて撮影し、これを映像信号として画像処理に入
力し、正常表面画像パターンと異常表面画像パターンと
の区別により表面の凹凸を検査することを特徴とする物
体の表面凹凸検査方法。Slit light is irradiated onto the object to be inspected, the reflected light is projected onto a screen, and the projected pattern on the screen is
1. A method for inspecting surface irregularities of an object, comprising photographing the surface with a camera, inputting the image signal as a video signal to image processing, and inspecting the surface irregularities by distinguishing between a normal surface image pattern and an abnormal surface image pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20160485A JPS6262205A (en) | 1985-09-13 | 1985-09-13 | Surface irregularity inspection for object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20160485A JPS6262205A (en) | 1985-09-13 | 1985-09-13 | Surface irregularity inspection for object |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6262205A true JPS6262205A (en) | 1987-03-18 |
Family
ID=16443803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20160485A Pending JPS6262205A (en) | 1985-09-13 | 1985-09-13 | Surface irregularity inspection for object |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6262205A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0342559A (en) * | 1989-06-30 | 1991-02-22 | Jaguar Cars Ltd | Method of inspecting member surface |
| JPH06288726A (en) * | 1993-04-06 | 1994-10-18 | Yokokawa Buritsuji:Kk | Fitting inspection of car body and its device |
| JP2005003691A (en) * | 1999-02-08 | 2005-01-06 | Jfe Steel Kk | Surface inspection apparatus |
| JP2005221283A (en) * | 2004-02-04 | 2005-08-18 | Jfe Steel Kk | Surface irregularity measuring/evaluating method and system, surface irregularity evaluation device, and program of surface irregularity measuring/evaluating method |
| JP2008002870A (en) * | 2006-06-21 | 2008-01-10 | Ishida Co Ltd | Load cell, and its manufacturing method |
| KR100894819B1 (en) | 2007-10-10 | 2009-04-24 | 울산대학교 산학협력단 | Apparatus of measuring deformation of microelement using similar triangles and method there of |
| JP2010133967A (en) * | 1999-02-08 | 2010-06-17 | Jfe Steel Corp | Surface inspection apparatus |
| WO2017204119A1 (en) * | 2016-05-23 | 2017-11-30 | 新日鐵住金株式会社 | Shape measurement device and shape measurement method |
| WO2018235376A1 (en) * | 2017-06-20 | 2018-12-27 | 日立オートモティブシステムズ株式会社 | Surface inspection method, surface inspection device, and product manufacturing method |
| WO2023111854A1 (en) * | 2021-12-15 | 2023-06-22 | 3M Innovative Properties Company | Optical inspection system for detecting surface profile defects in manufactured webs |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57113310A (en) * | 1980-12-29 | 1982-07-14 | Matsushita Electric Works Ltd | Measuring device for surface coarseness of rotary object |
| JPS58115314A (en) * | 1981-12-28 | 1983-07-09 | Matsushita Electric Works Ltd | Measuring device of flatness |
| JPS58169012A (en) * | 1982-03-31 | 1983-10-05 | Matsushita Electric Works Ltd | Surface defect detecting device |
-
1985
- 1985-09-13 JP JP20160485A patent/JPS6262205A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57113310A (en) * | 1980-12-29 | 1982-07-14 | Matsushita Electric Works Ltd | Measuring device for surface coarseness of rotary object |
| JPS58115314A (en) * | 1981-12-28 | 1983-07-09 | Matsushita Electric Works Ltd | Measuring device of flatness |
| JPS58169012A (en) * | 1982-03-31 | 1983-10-05 | Matsushita Electric Works Ltd | Surface defect detecting device |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0342559A (en) * | 1989-06-30 | 1991-02-22 | Jaguar Cars Ltd | Method of inspecting member surface |
| JPH06288726A (en) * | 1993-04-06 | 1994-10-18 | Yokokawa Buritsuji:Kk | Fitting inspection of car body and its device |
| JP2010133967A (en) * | 1999-02-08 | 2010-06-17 | Jfe Steel Corp | Surface inspection apparatus |
| JP2005003691A (en) * | 1999-02-08 | 2005-01-06 | Jfe Steel Kk | Surface inspection apparatus |
| JP4492275B2 (en) * | 1999-02-08 | 2010-06-30 | Ｊｆｅスチール株式会社 | Surface inspection device |
| JP2005221283A (en) * | 2004-02-04 | 2005-08-18 | Jfe Steel Kk | Surface irregularity measuring/evaluating method and system, surface irregularity evaluation device, and program of surface irregularity measuring/evaluating method |
| JP4534507B2 (en) * | 2004-02-04 | 2010-09-01 | Ｊｆｅスチール株式会社 | Surface unevenness measurement / evaluation method and system, surface unevenness evaluation apparatus, and surface unevenness measurement / evaluation method program |
| JP2008002870A (en) * | 2006-06-21 | 2008-01-10 | Ishida Co Ltd | Load cell, and its manufacturing method |
| KR100894819B1 (en) | 2007-10-10 | 2009-04-24 | 울산대학교 산학협력단 | Apparatus of measuring deformation of microelement using similar triangles and method there of |
| WO2017204119A1 (en) * | 2016-05-23 | 2017-11-30 | 新日鐵住金株式会社 | Shape measurement device and shape measurement method |
| JP6281667B1 (en) * | 2016-05-23 | 2018-02-21 | 新日鐵住金株式会社 | Shape measuring apparatus and shape measuring method |
| US10605591B2 (en) | 2016-05-23 | 2020-03-31 | Nippon Steel Corporation | Shape measurement apparatus and shape measurement method |
| WO2018235376A1 (en) * | 2017-06-20 | 2018-12-27 | 日立オートモティブシステムズ株式会社 | Surface inspection method, surface inspection device, and product manufacturing method |
| JPWO2018235376A1 (en) * | 2017-06-20 | 2020-04-16 | 日立オートモティブシステムズ株式会社 | Surface inspection method, surface inspection apparatus and product manufacturing method |
| WO2023111854A1 (en) * | 2021-12-15 | 2023-06-22 | 3M Innovative Properties Company | Optical inspection system for detecting surface profile defects in manufactured webs |
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| JPH0354406A (en) | Soldered-part inspecting apparatus |