JPS6256846B2 - - Google Patents
Info
- Publication number
- JPS6256846B2 JPS6256846B2 JP53055122A JP5512278A JPS6256846B2 JP S6256846 B2 JPS6256846 B2 JP S6256846B2 JP 53055122 A JP53055122 A JP 53055122A JP 5512278 A JP5512278 A JP 5512278A JP S6256846 B2 JPS6256846 B2 JP S6256846B2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- water
- solvent
- fluorocarbon
- intake port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- 239000002904 solvent Substances 0.000 claims description 71
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 54
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 50
- 238000004140 cleaning Methods 0.000 claims description 27
- 238000000746 purification Methods 0.000 claims description 17
- 238000011084 recovery Methods 0.000 claims description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 17
- 235000019441 ethanol Nutrition 0.000 description 16
- 239000005456 alcohol based solvent Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 239000000243 solution Substances 0.000 description 6
- 230000001476 alcoholic effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000012046 mixed solvent Substances 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000008214 highly purified water Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Detergent Compositions (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Description
【発明の詳細な説明】
本発明は、アルコール系溶剤もしくはアルコー
ル系溶剤と水との混合溶剤で汚染されたフロン系
溶剤の精製回収装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for purifying and recovering fluorocarbon solvents contaminated with alcohol solvents or mixed solvents of alcohol solvents and water.
近年多くの工業分野において、洗浄工程の合理
化、省力化または自動化が進められているが、こ
の中で洗浄効果を高めるために界面活性剤水溶液
による洗浄とフロン系溶剤あるいはその蒸気によ
る洗浄を組合せた洗浄装置が使用されている。 In recent years, cleaning processes have been streamlined, labor-saving, or automated in many industrial fields, and in order to increase the cleaning effect, cleaning with an aqueous surfactant solution and cleaning with a fluorocarbon solvent or its vapor have been combined. Cleaning equipment is used.
第１図はこのような従来の洗浄装置の構成図で
ある。１は、洗浄しようとする物または洗浄しよ
うとする物を取付けた洗浄治具等からなる被洗浄
物で、コンベアにより多数の洗浄工程を経て連続
的に洗浄がなされる。先づ第１工程では、被洗浄
物１は界面活性剤水溶液２を入れた槽３に移動し
この中で界面活性剤水溶液２により洗浄される。
次に第２工程では、被洗浄物１は水４を入れた槽
５に移動しこの中で水４によるゆすぎをなされた
後、第３工程では、アルコール系溶剤６を入れた
槽７に移動しこの中でアルコール系溶剤６による
水４の置換が行なわれる。次に第４工程では、被
洗浄物１はフロン系溶剤８を入れた槽９に移動し
この中でフロン系溶剤８およびその蒸気８ａによ
り洗浄される。なお、９ａはフロン系溶剤８を加
熱する加熱器、９ｂは蒸気８ａを蒸留させるため
の冷却水パイプで、ともに槽９に設けられる。こ
こで、第３工程のアルコール系溶剤６による洗浄
は、フロン系溶剤８が水４に難溶性のため、水４
およびフロン系溶剤８の相方に易溶性を有するア
ルコール系溶剤６で水４の置換を行なうためにな
されるものである。 FIG. 1 is a block diagram of such a conventional cleaning device. Reference numeral 1 denotes an object to be cleaned, which consists of an object to be cleaned or a cleaning jig to which the object is attached, and is continuously cleaned by a conveyor through a number of cleaning steps. First, in the first step, the object 1 to be cleaned is moved to a tank 3 containing an aqueous surfactant solution 2, and is cleaned therein by the aqueous surfactant solution 2.
Next, in the second step, the object 1 to be cleaned is moved to a tank 5 containing water 4 and rinsed with water 4 therein, and then, in the third step, it is moved to a tank 7 containing an alcohol-based solvent 6. In this chamber, water 4 is replaced by alcoholic solvent 6. Next, in a fourth step, the object 1 to be cleaned is moved to a tank 9 containing a fluorocarbon solvent 8, and is cleaned therein by the fluorocarbon solvent 8 and its vapor 8a. Note that 9a is a heater for heating the fluorocarbon solvent 8, and 9b is a cooling water pipe for distilling the steam 8a, both of which are provided in the tank 9. Here, in the third step of cleaning with the alcohol-based solvent 6, since the fluorocarbon-based solvent 8 is poorly soluble in the water 4,
This is done in order to replace the water 4 with the alcohol solvent 6 which is easily soluble as a partner of the fluorocarbon solvent 8.
槽９においてフロン系溶剤８および蒸気８ａに
よる洗浄がなされた後、被洗浄物１は洗浄作業を
完了して次の工程に移動する。 After cleaning with the fluorocarbon solvent 8 and steam 8a in the tank 9, the object 1 to be cleaned completes the cleaning operation and is moved to the next step.
しかしながら、このような洗浄装置による洗浄
作業においては、前工程の洗浄液を次工程の洗浄
液中に持ち込むことは避けられない。このため、
アルコール系溶剤６の中の水濃度、フロン系溶剤
８の中のアルコール系溶剤濃度および水濃度等が
洗浄回数が増すごとに漸増して行く。このように
フロン系溶剤８がアルコール系溶剤６および水４
の混入により汚染されてくると、これらの各液体
の蒸発の温度、速度等の差によつて被洗浄物１の
表面にアルコール系溶剤６および水４が付着し、
フロン系溶剤８の沸点（例えば50℃前後）ではこ
れらは瞬時に蒸発せず著しい乾燥ムラを起し洗浄
不良が発生する。 However, in cleaning operations using such a cleaning device, it is inevitable that the cleaning liquid from the previous process is brought into the cleaning liquid for the next process. For this reason,
The water concentration in the alcohol solvent 6, the alcohol solvent concentration and water concentration in the fluorocarbon solvent 8, etc. gradually increase as the number of washings increases. In this way, the fluorocarbon solvent 8 is mixed with the alcohol solvent 6 and water 4.
When the object 1 becomes contaminated due to contamination, alcohol-based solvent 6 and water 4 adhere to the surface of the object 1 to be cleaned due to differences in evaporation temperature, speed, etc. of each of these liquids.
At the boiling point of the fluorocarbon solvent 8 (for example, around 50° C.), it does not evaporate instantaneously and causes significant uneven drying, resulting in poor cleaning.
このような洗浄不良現象を防止するために、従
来は常にフロン系溶剤８の中のアルコール系溶剤
６および水４の濃度を監視し、所定濃度以上にな
ると汚染されたフロン系溶剤８を廃棄していた。
しかし、フロン系溶剤８は比較的高価であるし、
また汚染濃度を測定する保守管理が面倒であるた
め、洗浄コストが上つてしまう欠点がある。 In order to prevent such poor cleaning phenomena, conventionally, the concentration of the alcohol solvent 6 and water 4 in the fluorocarbon solvent 8 is constantly monitored, and when the concentration exceeds a predetermined level, the contaminated fluorocarbon solvent 8 is discarded. was.
However, fluorocarbon solvent 8 is relatively expensive,
Furthermore, since the maintenance and management of measuring the contamination concentration is troublesome, there is a drawback that the cleaning cost increases.
この欠点を改善するために、汚染されたフロン
系溶剤を各液体の沸点の差を利用して蒸溜する精
製回収方法が考えられているが、混合溶液である
ために共沸現象等が生じ完全分離が難しく、また
操作が煩雑で、引火性ガス発生にともなう危険性
もあり、精製回収コストが高くなる等の問題点が
あつて実用化はされていない。 In order to improve this drawback, a purification and recovery method has been considered in which the contaminated fluorocarbon solvent is distilled using the difference in boiling point of each liquid, but since it is a mixed solution, azeotropic phenomena etc. occur, resulting in complete recovery. It has not been put to practical use because of problems such as difficult separation, complicated operation, danger of generating flammable gas, and high refining and recovery costs.
本発明はこのような点にかんがみてなされたも
ので、その目的とするところは、低コストで高純
度の精製ができるようなフロン系溶剤の精製回収
方法およびその精製回収装置を提供することにあ
る。 The present invention has been made in view of the above points, and its purpose is to provide a method for purifying and recovering fluorocarbon solvents and an apparatus for purifying and recovering fluorocarbon solvents, which can be purified to high purity at low cost. be.
以下、本発明の詳細を実施例に基づいて説明す
る。第２図は本発明に係るフロン系溶剤の精製回
収装置の一実施例を使用した洗浄装置の構成図で
ある。図において、第１図と同一部品には同番号
を付してあり、またその作用も同じであるので説
明は省略する。槽１０には、底部側面に取出口１
１、ほぼ中央部側面に取入口１２、底面中心部に
水取入口１３、上部側面に水取出口１４がそれぞ
れ設けられている。取出口１１と槽９の底部側面
に設けられた取入口９ｃとの間はほぼ水平に配置
されたパイプ１５によつて連結され、取入口１２
と槽９の上部側面に設けられた取出口９ｄとの間
もほぼ水平に配置されたパイプ１６によつて連結
される。水取入口１３には純度の高い水を供給す
るための供給パイプ１７が接続され、水取出口１
４にはアルコール系溶剤が溶解した水を排出する
ための排出パイプ１８が接続される。１９，２
０，２１，２２はそれぞれ各パイプに設けられた
栓である。これらによつてフロン系溶剤精製回収
装置が構成されている。そして、槽９においては
フロン系溶剤８を取出口９ｄより上まで入れ、同
時に槽１０においてもフロン系溶剤８を取入口１
２よりやや上まで入れる。さらに槽１０において
はフロン系溶剤８の上に水取出口１４より上まで
水４０を入れる。フロン系溶剤８は水４０に対し
て難溶性であり（溶解度は50℃で0.01重量％程
度）、かつ比重が大きい（1.5程度）ので両者は槽
１０内で上下二層に完全に分離する。本実施例で
は槽１０内のフロン系溶剤８と水４０の量のほぼ
同量にしてある。ここで栓１９，２０を開けると
槽９内のフロン系溶剤８は加熱された上部のもの
がパイプ１６を通つて取入口１２から槽１０に入
り、さらに取出口１１からパイプ１５を通つて槽
９に戻り循環作用をなす。槽９内のフロン系溶剤
８は前述のようにアルコール系溶剤および水によ
つて汚染されているので、槽１０内のフロン系溶
剤８も循環により同時に汚染される。一方、栓２
１，２２を開けると純度の高い水が水取入口１３
から供給される、フロン系溶剤８中に浸透して上
方に昇り、増加した水４０は水取出口１４から排
出される。このとき槽１０内においては、比重差
により上層部は水とアルコール系溶剤を主成分と
する溶液、下層部はフロン系溶剤とアルコール系
溶剤を主成分とする溶液となつて分離し、いわゆ
る分配律が成立する。水取入口１３から入つた水
は汚染されたフロン系溶剤８中に浸透するが、ア
ルコール系溶剤は水に対して易溶性であるためこ
の中に含まれているアルコール系溶剤を溶解して
上昇し上層部の溶液となり、フロン系溶剤８中か
らアルコール系溶剤が分離、除去される。 Hereinafter, details of the present invention will be explained based on examples. FIG. 2 is a configuration diagram of a cleaning device using an embodiment of the fluorocarbon solvent purification and recovery device according to the present invention. In the figure, parts that are the same as those in FIG. 1 are given the same numbers, and their functions are the same, so their explanations will be omitted. The tank 10 has an outlet 1 on the bottom side.
1. An intake port 12 is provided at the side surface of the approximately central portion, a water intake port 13 is provided at the center of the bottom surface, and a water outlet port 14 is provided at the top side surface. The intake port 11 and the intake port 9c provided on the bottom side of the tank 9 are connected by a pipe 15 arranged approximately horizontally, and the intake port 12
and an outlet 9d provided on the upper side of the tank 9 are also connected by a pipe 16 arranged substantially horizontally. A supply pipe 17 for supplying highly purified water is connected to the water intake port 13.
4 is connected to a discharge pipe 18 for discharging water in which alcoholic solvent is dissolved. 19,2
0, 21, and 22 are plugs provided on each pipe, respectively. These components constitute a fluorocarbon solvent purification and recovery device. Then, in the tank 9, the fluorocarbon solvent 8 is poured into the tank 10 up to the point above the port 9d, and at the same time, in the tank 10, the fluorocarbon solvent 8 is also introduced into the port 1.
Fill it slightly above 2. Further, in the tank 10, water 40 is poured above the fluorocarbon solvent 8 to a level above the water outlet 14. Since the fluorocarbon solvent 8 is poorly soluble in water 40 (solubility is about 0.01% by weight at 50° C.) and has a high specific gravity (about 1.5), the two completely separate into two layers, upper and lower, in the tank 10. In this embodiment, the amounts of fluorocarbon solvent 8 and water 40 in the tank 10 are approximately the same. When the plugs 19 and 20 are opened, the heated upper part of the fluorocarbon solvent 8 in the tank 9 passes through the pipe 16 and enters the tank 10 from the intake port 12, and then passes through the pipe 15 from the outlet 11 into the tank. It returns to 9 and performs a circulatory action. Since the fluorocarbon solvent 8 in the tank 9 is contaminated by the alcohol solvent and water as described above, the fluorocarbon solvent 8 in the tank 10 is also contaminated at the same time by circulation. On the other hand, stopper 2
When opening 1 and 22, high purity water flows into the water intake port 13.
The increased water 40 that permeates into the fluorocarbon solvent 8 supplied from the fluorocarbon solvent 8 and rises upward is discharged from the water outlet 14. At this time, in the tank 10, due to the difference in specific gravity, the upper layer becomes a solution mainly composed of water and an alcohol-based solvent, and the lower layer becomes a solution mainly composed of a fluorocarbon solvent and an alcohol-based solvent. The law is established. Water entering from the water intake port 13 penetrates into the contaminated fluorocarbon solvent 8, but since alcoholic solvent is easily soluble in water, it dissolves the alcoholic solvent contained therein and rises. The upper layer becomes a solution, and the alcohol solvent is separated and removed from the fluorocarbon solvent 8.
槽９と１０の間のフロン系溶剤８の交換は前記
のように温度差を利用しての対流循環のほか、ポ
ンプを使用して強制循環させることもできる。 The fluorocarbon solvent 8 can be exchanged between the tanks 9 and 10 by convection circulation using the temperature difference as described above, or by forced circulation using a pump.
また、常時栓１９，２０を開けておき、連続的
に動作させることもできる。また常時は栓１９，
２０は閉めておき、槽１０内でフロン系溶剤８を
十分に精製回収した後、栓１９，２０を開けて槽
９と１０のフロン系溶剤を全部交換させるような
間欠動作も行なうことができる。 Further, the taps 19 and 20 can be kept open at all times and operated continuously. In addition, the stopper is always 19,
It is also possible to perform an intermittent operation such as keeping 20 closed and fully purifying and recovering the fluorocarbon solvent 8 in tank 10, and then opening the plugs 19 and 20 to exchange all of the fluorocarbon solvent in tanks 9 and 10. .
第３図は、間欠的動作で精製回収した場合、フ
ロン系溶剤中のアルコール系溶剤の濃度（重量
％）と精製回数との関係を示すグラフである。最
初フロン系溶剤中に34％も含まれていたアルコー
ル系溶剤は、第１回の水の浸透、分離、除去によ
る精製作業で８％に大幅に減少し、第２回の精製
作業後は0.5％に減少した。さらに第３回の精製
作業で検出不能領域となり、第４回で完全に検出
不能となつた。なお、この実験は、アルコール系
溶剤としてイソプロピルアルコールを使用し、濃
度測定はガスクロマトグラフイーによる定量分析
で行なつた。また、水濃度についても測定した
が、これもアルコール系溶剤の濃度の減少ととも
に低減することが確認された。 FIG. 3 is a graph showing the relationship between the concentration (% by weight) of the alcohol solvent in the fluorocarbon solvent and the number of times of purification in the case of intermittent purification and recovery. The alcohol solvent, which initially contained 34% in the fluorocarbon solvent, was significantly reduced to 8% by the first purification process through water penetration, separation, and removal, and after the second purification process it was reduced to 0.5%. %. Furthermore, it became undetectable in the third purification process, and completely undetectable in the fourth purification process. In this experiment, isopropyl alcohol was used as the alcohol solvent, and the concentration was measured by quantitative analysis using gas chromatography. The water concentration was also measured, and it was confirmed that this also decreased as the alcohol solvent concentration decreased.
なお、アルコール系溶剤としてはこのほか、メ
チルアルコール、エチルアルコール等が使用され
る。 In addition, as the alcohol solvent, methyl alcohol, ethyl alcohol, etc. are used.
第２図に示した実施例を高度な清浄度を要求さ
れる電子部品用ガラス板の洗浄に使用した結果、
良好な洗浄結果が長期の洗浄作業にわたつて安定
に得られた。 As a result of using the embodiment shown in Fig. 2 for cleaning glass plates for electronic components that require a high degree of cleanliness,
Good cleaning results were stably obtained over a long period of cleaning work.
第４図は精製回収装置の他の実施例の説明図で
ある。槽１０ａの上層部はアルコール系溶剤を含
んだ水４０に、下層部はフロン系溶剤８に分離さ
れる。取出口１１は槽１０の下部に同様に設けら
れるが取入口１２は槽１０の上部に設けられ、ア
ルコール系溶剤および水で汚染されたフロン系溶
剤は水４０の中に添加されてここで水に浸透さ
れ、その中に含んでいたアルコール系溶剤は水に
溶解されて分離し除去される。水取入口１３およ
び水取出口１４は槽１０ａの水４０の入つている
領域の下部および上部側面にそれぞれ設けられ
る。水の浸透効果は前記実施例よりさらに大きく
なり精製効率は上る。 FIG. 4 is an explanatory diagram of another embodiment of the purification and recovery apparatus. The upper layer of the tank 10a is separated into water 40 containing an alcohol-based solvent, and the lower layer is separated into a fluorocarbon-based solvent 8. The outlet 11 is similarly provided in the lower part of the tank 10, but the inlet 12 is provided in the upper part of the tank 10, and the alcohol solvent and the fluorocarbon solvent contaminated with water are added into the water 40 and are then disposed of in the water. The alcoholic solvent contained therein is dissolved in water, separated and removed. The water inlet 13 and the water outlet 14 are provided at the lower and upper sides of the area containing the water 40 of the tank 10a, respectively. The water permeation effect is even greater than in the previous example, and the purification efficiency is improved.
第５図は精製回収装置の別の実施例の説明図で
ある。取出口１１および取入口１２は第２図の実
施例と同じ位置に、水取入口１３および水取出口
１４は第４図の実施例と同じ位置にそれぞれ設け
られている。この例では水の浸透効率の点ではや
や劣るが、精製過程で水が混入する割合は少なく
なり、また比重差による分離が容易になる効果が
ある。 FIG. 5 is an explanatory diagram of another embodiment of the purification and recovery apparatus. The outlet 11 and the inlet 12 are provided at the same positions as in the embodiment of FIG. 2, and the water inlet 13 and the water outlet 14 are provided at the same locations as in the embodiment of FIG. 4, respectively. Although this example is slightly inferior in terms of water penetration efficiency, it has the effect of reducing the proportion of water mixed in during the purification process and facilitating separation based on the difference in specific gravity.
以上に説明したように、本発明によれば、アル
コール系溶剤もしくはアルコール系溶剤と水との
混合溶剤で汚染されたフロン系溶剤を、簡単な装
置で高精度にかつ極めて生産性よく精製回収する
ことができ、ランニングコストが安価になるとと
もに、洗浄性能が優れ、その性能が長期にわたり
安定であり、高価なフロン系溶剤の寿命が大幅に
延長されかつ保守管理が容易になる等の数多くの
優れた効果を奏する。 As explained above, according to the present invention, fluorocarbon solvents contaminated with alcohol-based solvents or mixed solvents of alcohol-based solvents and water can be purified and recovered with high precision and extremely high productivity using a simple device. It has many advantages such as low running costs, excellent cleaning performance, long-term stable performance, greatly extending the life of expensive fluorocarbon solvents, and easy maintenance. It has a great effect.
第１図は従来の洗浄装置の構成図、第２図は本
発明の一実施例を使用した洗浄装置の構成図、第
３図は精製回数とフロン系溶剤中のアルコール系
溶剤の濃度との関係を示すグラフ、第４図は精製
回収装置の他の実施例の説明図、第５図は同じく
別の実施例の説明図である。
１……被洗浄物、２……界面活性剤水溶液、
３，５，７，９……槽、４，４０……水、６……
アルコール系溶剤、８……フロン系溶剤、８ａ…
…蒸気、１０……槽、１１……取出口、１２……
取入口、１３……水取入口、１４……水取出口、
１５，１６……パイプ、１７……供給パイプ、１
８……排出パイプ、１９，２０，２１，２２……
栓。
Fig. 1 is a block diagram of a conventional cleaning device, Fig. 2 is a block diagram of a cleaning device using an embodiment of the present invention, and Fig. 3 shows the relationship between the number of purification times and the concentration of alcohol solvent in fluorocarbon solvent. A graph showing the relationship, FIG. 4 is an explanatory diagram of another embodiment of the purification and recovery apparatus, and FIG. 5 is an explanatory diagram of another embodiment. 1...Object to be cleaned, 2...Surfactant aqueous solution,
3,5,7,9...tank, 4,40...water, 6...
Alcohol solvent, 8... Freon solvent, 8a...
...steam, 10...tank, 11...outlet, 12...
Intake port, 13...Water intake port, 14...Water intake port,
15, 16...pipe, 17...supply pipe, 1
8...Exhaust pipe, 19, 20, 21, 22...
plug.
Claims (1)
物を洗浄するためのフロン系溶剤を取出口より上
まで収容する第１の槽と、この第１の槽の取入
口、取出口とそれぞれ連通する取出口、取入口を
有し、下部にフロン系溶剤、上部に水を収容する
第２の槽と、この第２の槽の下部に設けられた水
取入口と、第２の槽の上部に設けられた水取出口
と、フロン系溶剤を第１の槽と第２の槽の間で循
環させる手段とを備えたフロン系溶剤の精製回収
装置。 ２ 下部に取入口、上部に取出口を有し、被洗浄
物を洗浄するためのフロン系溶剤を取出口より上
まで収容する第１の槽と、この第１の槽の取入
口、取出口とそれぞれ連通する取出口、取入口を
有し、下部にフロン系溶剤、上部に水を収容する
第２の槽と、この第２の槽の水が収容される部分
の下部に設けられた水取入口と、第２の槽の水が
収容される部分の上部に設けられた水取出口と、
フロン系溶剤を第１の槽と第２の槽の間で循環さ
せる手段とを備えたフロン系溶剤の精製回収装
置。[Scope of Claims] 1. A first tank having an intake port at the bottom and an exit port at the top and containing a fluorocarbon solvent for cleaning objects to be cleaned up to above the port, and this first tank. A second tank has an intake port and an intake port that communicate with the intake port and the intake port, respectively, and contains a fluorocarbon solvent at the bottom and water at the top, and a water intake provided at the bottom of the second tank. A fluorocarbon solvent purification and recovery apparatus comprising an inlet, a water outlet provided at the top of a second tank, and means for circulating the fluorocarbon solvent between the first tank and the second tank. 2. A first tank that has an intake port at the bottom and an exit port at the top, and stores a fluorocarbon solvent for cleaning objects to be cleaned up to above the port, and an intake port and an exit port for this first tank. A second tank has an outlet and an intake port communicating with the tank, respectively, and stores a fluorocarbon solvent in the lower part and water in the upper part, and a water tank provided in the lower part of the part where the water of this second tank is stored. an intake port, and a water intake port provided at the top of a portion where water of the second tank is accommodated;
A fluorocarbon solvent purification and recovery apparatus comprising means for circulating the fluorocarbon solvent between a first tank and a second tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5512278A JPS54148707A (en) | 1978-05-09 | 1978-05-09 | Method and apparatus for purification and recovery of freon solvents |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5512278A JPS54148707A (en) | 1978-05-09 | 1978-05-09 | Method and apparatus for purification and recovery of freon solvents |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54148707A JPS54148707A (en) | 1979-11-21 |
| JPS6256846B2 true JPS6256846B2 (en) | 1987-11-27 |
Family
ID=12989946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5512278A Granted JPS54148707A (en) | 1978-05-09 | 1978-05-09 | Method and apparatus for purification and recovery of freon solvents |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54148707A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0312643U (en) * | 1989-06-22 | 1991-02-08 | ||
| WO2016144734A1 (en) | 2015-03-12 | 2016-09-15 | Dupont-Mitsui Fluorochemicals Co. Ltd | Separating method of fluorine-containing solvent, removing method of fluorine-containing solvent contaminant, and apparatus therefore |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60146838A (en) * | 1984-01-09 | 1985-08-02 | Toray Ind Inc | Method for removing lower alcohol in chlorine- containing solvent |
| US5595661A (en) * | 1994-08-03 | 1997-01-21 | Schering Corporation | Process for recover halocarbons from liquid waste slurries |
| JP5085954B2 (en) * | 2007-02-23 | 2012-11-28 | スリーエム イノベイティブ プロパティズ カンパニー | Purification method, purification device and cleaning device for fluorine-containing solvent-containing solution |
-
1978
- 1978-05-09 JP JP5512278A patent/JPS54148707A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0312643U (en) * | 1989-06-22 | 1991-02-08 | ||
| WO2016144734A1 (en) | 2015-03-12 | 2016-09-15 | Dupont-Mitsui Fluorochemicals Co. Ltd | Separating method of fluorine-containing solvent, removing method of fluorine-containing solvent contaminant, and apparatus therefore |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54148707A (en) | 1979-11-21 |
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