JPS6256661B2 - - Google Patents
Info
- Publication number
- JPS6256661B2 JPS6256661B2 JP57142846A JP14284682A JPS6256661B2 JP S6256661 B2 JPS6256661 B2 JP S6256661B2 JP 57142846 A JP57142846 A JP 57142846A JP 14284682 A JP14284682 A JP 14284682A JP S6256661 B2 JPS6256661 B2 JP S6256661B2
- Authority
- JP
- Japan
- Prior art keywords
- inspection
- semiconductor wafer
- defective
- semiconductor wafers
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 63
- 239000004065 semiconductor Substances 0.000 claims description 51
- 238000007689 inspection Methods 0.000 claims description 45
- 230000002950 deficient Effects 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 20
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Sorting Of Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14284682A JPS5932146A (ja) | 1982-08-18 | 1982-08-18 | 半導体ウエハ−の検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14284682A JPS5932146A (ja) | 1982-08-18 | 1982-08-18 | 半導体ウエハ−の検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5932146A JPS5932146A (ja) | 1984-02-21 |
JPS6256661B2 true JPS6256661B2 (de) | 1987-11-26 |
Family
ID=15324968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14284682A Granted JPS5932146A (ja) | 1982-08-18 | 1982-08-18 | 半導体ウエハ−の検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5932146A (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6188240U (de) * | 1984-11-15 | 1986-06-09 | ||
JPS6196544U (de) * | 1984-11-30 | 1986-06-21 | ||
KR100445457B1 (ko) | 2002-02-25 | 2004-08-21 | 삼성전자주식회사 | 웨이퍼 후면 검사 장치 및 검사 방법 |
CN217830844U (zh) * | 2022-06-14 | 2022-11-18 | 天津市环欧新能源技术有限公司 | 一种硅片分选机构及设有该分选机构的分选机 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50145077A (de) * | 1974-05-10 | 1975-11-21 | ||
JPS5572875A (en) * | 1978-11-27 | 1980-06-02 | Nec Corp | Sorting method for semiconductor element |
-
1982
- 1982-08-18 JP JP14284682A patent/JPS5932146A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50145077A (de) * | 1974-05-10 | 1975-11-21 | ||
JPS5572875A (en) * | 1978-11-27 | 1980-06-02 | Nec Corp | Sorting method for semiconductor element |
Also Published As
Publication number | Publication date |
---|---|
JPS5932146A (ja) | 1984-02-21 |
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