JPS6256661B2 - - Google Patents

Info

Publication number: JPS6256661B2
Authority: JP; Japan
Prior art keywords: inspection; semiconductor wafer; defective; semiconductor wafers; wafers
Prior art date: 1982-08-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP57142846A

Other languages

English (en)

Japanese (ja)

Other versions

JPS5932146A (ja

Inventor

Seiichi Nakamura

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

NEC Corp

Original Assignee

Nippon Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1982-08-18

Filing date

1982-08-18

Publication date

1987-11-26

1982-08-18 Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd

1982-08-18 Priority to JP14284682A priority Critical patent/JPS5932146A/ja

1984-02-21 Publication of JPS5932146A publication Critical patent/JPS5932146A/ja

1987-11-26 Publication of JPS6256661B2 publication Critical patent/JPS6256661B2/ja

Status Granted legal-status Critical Current

Links

235000012431 wafers Nutrition 0.000 claims description 63
239000004065 semiconductor Substances 0.000 claims description 51
238000007689 inspection Methods 0.000 claims description 45
230000002950 deficient Effects 0.000 claims description 22
238000000034 method Methods 0.000 claims description 20
238000010586 diagram Methods 0.000 description 3
230000000694 effects Effects 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
230000007306 turnover Effects 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Testing Or Measuring Of Semiconductors Or The Like (AREA)
Sorting Of Articles (AREA)

JP14284682A 1982-08-18 1982-08-18 半導体ウエハ−の検査装置 Granted JPS5932146A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP14284682A JPS5932146A (ja)	1982-08-18	1982-08-18	半導体ウエハ−の検査装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP14284682A JPS5932146A (ja)	1982-08-18	1982-08-18	半導体ウエハ−の検査装置

Publications (2)

Publication Number	Publication Date
JPS5932146A JPS5932146A (ja)	1984-02-21
JPS6256661B2 true JPS6256661B2 (de)	1987-11-26

Family

ID=15324968

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP14284682A Granted JPS5932146A (ja)	1982-08-18	1982-08-18	半導体ウエハ−の検査装置

Country Status (1)

Country	Link
JP (1)	JPS5932146A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6188240U (de) *	1984-11-15	1986-06-09
JPS6196544U (de) *	1984-11-30	1986-06-21
KR100445457B1 (ko)	2002-02-25	2004-08-21	삼성전자주식회사	웨이퍼 후면 검사 장치 및 검사 방법
CN217830844U (zh) *	2022-06-14	2022-11-18	天津市环欧新能源技术有限公司	一种硅片分选机构及设有该分选机构的分选机

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS50145077A (de) *	1974-05-10	1975-11-21
JPS5572875A (en) *	1978-11-27	1980-06-02	Nec Corp	Sorting method for semiconductor element

1982
- 1982-08-18 JP JP14284682A patent/JPS5932146A/ja active Granted

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS50145077A (de) *	1974-05-10	1975-11-21
JPS5572875A (en) *	1978-11-27	1980-06-02	Nec Corp	Sorting method for semiconductor element

Also Published As

Publication number	Publication date
JPS5932146A (ja)	1984-02-21

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