JPS6255235A - Feeder of carriage in clean room - Google Patents

Abstract

PURPOSE:To prevent the dust in a clean room by fixedly securing a current collector on a carriage and retreatably mounting a feeder, which is operated apart from said collector at the stopped position of said carriage. CONSTITUTION:A current collector 8 is fixedly secured on the side surface of a carriage 2 and, at the stopped position of said carriage 2, a feeder 9 being retreatable through a cylinder device 10 is mounted to a box-like frame body 1. On stopping the carriage 2, the feeder 9 is made to become forward through the cylinder device 10 so as to come in contact with the collector 8, thereby power is supplied to the motor of a wafer treatment apparatus <M> mounted on the carriage 2. On starting the carriage 2, the feeder 9 is made to become backward through the cylinder device 10 so as to come apart from the collector 8. Therefore, the collector 8 is not slidably abutted to the feeder 9 accompanied with the movement of the carriage 2 so that it is possible to prevent the dust.

Description

【発明の詳細な説明】 産業上の利用分野 シリコンウェハ等の電子部品は、クリーンルームのよう
な無塵雰囲気中で取扱われるが、該クリーンルーム内で
取扱う際には、取扱い機器の作動に原因する発塵を極力
抑制する配慮が必要である。[Detailed Description of the Invention] Industrial Application Field Electronic components such as silicon wafers are handled in a dust-free atmosphere such as a clean room. Consideration must be taken to suppress dust as much as possible.

本発明は、クリーンルーム内でウェハ等の搬送する台車
に発頭のおそれがない給電をする装置である。The present invention is an apparatus for supplying power to a trolley for transporting wafers, etc. in a clean room without the risk of head generation.

従来の技術 従来、クリーンルーム内で走行する１駁送自車Ｃ，ｔ：
　、例えば特開昭Ｇ　Ｏ−４４４３０号公報に開示され
ているように、台車トのチェーン又はフＡ−りを作動ざ
・Ｕるための原動機に動力を供給する給電ケーブルを有
している。そして、該給電ケーブルは、一端が床面−１
−の給電端子に固定され、他端が移動体でよする走行台
車の集電端子に１妄続されているので、台車が走行する
都度、該給電ケーブルが床面−ヒを匍釦屈曲して台車に
追随可動するので、この動作が発塵の１つの原因になら
ている。Conventional technology Conventionally, one transport vehicle C, t running in a clean room:
For example, as disclosed in Japanese Patent Application Laid-Open No. 44430/1997, the power supply cable has a power supply cable for supplying power to a prime mover for operating a chain or a lift of a truck. The power supply cable has one end at the floor surface -1.
The power supply cable is fixed to the power supply terminal of -, and the other end is connected to the current collection terminal of the moving vehicle, so that the power supply cable bends over the floor surface -A every time the vehicle moves. This movement is one of the causes of dust generation.

発明が解決しようとする問題点 本発明は、クリーンルーム内にお１ノる１１！送台車上
の機器が、該台車の停止時に作動することに着目し、台
車が給電ケーブルを引きずって走行することをυ１・除
して発塵の原因の１つを除去するものである。Problems to be Solved by the Invention The present invention solves the following problems in a clean room. Focusing on the fact that the equipment on the carriage is activated when the carriage is stopped, one of the causes of dust generation is eliminated by eliminating the need for the carriage to drag the power supply cable while traveling by υ1.

問題点を解決するための手段 本発明は給電ケーブルによることなく、クリーンルーム
内で走行する１駁送右車に集電子を固設し、該台車の停
止位置に前記集電子に接高１１を柴作される給電子を進
退動可能に固設したクリーンルーム内に才１する１１！
送台車給電装置である。Means for Solving the Problems The present invention does not require a power supply cable, but instead installs a collector fixedly on a single-speed transport vehicle running in a clean room, and attaches a contact height 11 to the collector at the stop position of the truck. The feeder to be produced is housed in a clean room that is fixed so that it can move forward and backward.11!
This is a feeding vehicle power supply device.

作　　　　　　　用 Ｉ歓送台車の走行中においては、給電子と集電イとは摺
接することがないので、摺動による発塵ば全くなく、１
駁送右車が所望の位置に停止してウェハ等の物品を移載
又はす？降させるようなリノ作を行・う機ｚ：；に動力
を供給する際には、停止位置に固設した給電子を前進さ
−１て停止り中の１射込台車の集電子に接合させて行わ
れる。Function I While the transfer trolley is running, the feeder and current collector A do not come into sliding contact, so there is no dust generation due to sliding, and no dust is generated.
Does the right transport vehicle stop at the desired position and transfer or load goods such as wafers? When supplying power to a machine that performs reno work such as reno work, the feeder fixed at the stop position is moved forward and connected to the collector of the stopped one-shot trolley. It will be done.

したがって、給電ケーブルによって搬送台車に動力を供
給する必要はなく、目つ給電子と集電子との間に摺動を
生じることもない。Therefore, there is no need to supply power to the carrier vehicle through the power supply cable, and no sliding movement occurs between the main power supply and the current collector.

実　　　施　　　例 第１図（Ｊ１１駁送車に設けた集電子と台車停止位置に
固設しノコ給電子の側面図、第２図は１歓送台車停市時
の集電イと給電子の平面図であって、床−ｔ−Ｆのボッ
クス状枠体１内に取（＝ｔ　４Ｊた段違いレールＲ１及
び１ン２１−を走行する車輪Ｗ＋及びＷ、を自し、１１
つレール［ン、の両側面に案内される一対の案内車輪Ｇ
、Ｇをｆｒするウェハ搬送台車２の−に面には、ウェハ
取扱い機器Ｍ　（ｉｉ’ｌ’♀■ｋ１図示口ず）が搭載
されている。また、該台中２の一１゛而にζ４１被動輪
３が直軸の周りにｈヤ回自在に取イ・１けられ、被動輪
３は図示しないハ；！動機に３１、って回転駆動されて
いる回転駆動軸４にり１接している。Example Figure 1 (side view of the collector installed on the J11 transport vehicle and the saw feeder fixed at the bogie stop position; Figure 2 is a plane view of the collector and feeder when the first transport vehicle is stopped) In the figure, wheels W+ and W running on uneven rails R1 and 1-21-, which are installed in a box-like frame 1 on a floor -t-F (=t 4J), are
A pair of guide wheels G guided on both sides of the rail
, G fr, a wafer handling device M (ii'l'♀■k1 not shown) is mounted on the - side of the wafer transport vehicle 2. Also, at the center of the platform 2, a driven wheel 3 (ζ41) is mounted so as to be freely rotatable around a vertical axis, and the driven wheel 3 is not shown. The motive member 31 is in contact with the rotary drive shaft 4 which is rotationally driven.

波動軸３は公知の手段、例えば、特開昭５９３８１６４
号公報に開示されているような手段によっ−Ｃ前記ｉｆ
軸の周りに旋回制御され、被動軸３の旋回角に見合う回
転駆動軸の回転分力によっ゛ζ１駁送台車２を走行駆り
すｊする。The wave axis 3 is formed by known means, for example, Japanese Patent Application Laid-Open No. 5938164.
By means such as those disclosed in the above publication, if
It is controlled to turn around the shaft, and the transport truck 2 is driven by the rotational force of the rotary drive shaft corresponding to the turning angle of the driven shaft 3.

また、１駁送台車２の発進・ｆ亭Ｉ１．、は回転駆動軸
４を駆動又は停止１さ・ｌて行ってもよいが、１ｉｉｉ
述の公開特許公報に開示の如く、該台車２の下面に突設
したスｌ−ツバｌ］−ラ５に係脱するス１ツバ６をシリ
ンダ７の作動制御によりシミ′降せしめると共に被動輪
の旋回角を変更制御することにより行ってもよい。In addition, the start of 1 transport truck 2, f-tei I1. , may drive or stop the rotational drive shaft 4, but 1iii
As disclosed in the above-mentioned patent publication, the slip collar 6, which engages and disengages from the slip collar 5 protruding from the lower surface of the truck 2, is lowered by actuation control of the cylinder 7, and the driven wheel is This may be done by changing and controlling the turning angle of.

１絞込台車２の１ｕ１１面には集電子８が固設され、ま
た、該台車２の停止位置には給電子９がシリンダ装？Ｗ
１０により矢印方向に進退動ｉｉＪ能にボックス状枠体
１に取付けられており、ｌｕｌ！送台車送台車重時には
、シリンダ装置１０の操作により給電子９が前進して集
電子８に接合して、１絞込台車に搭載したウェハｌ１ｌ
ｊ扱い機器Ｍの原動機に作動動力を供給し、ｌｕｌ！送
台車送台車重するときには、シリンダ装置１０が逆ｔ’
Ｊ作して給電子９を進退−〇しめて集電子８より離間さ
せるものである。A collector 8 is fixedly installed on the 1u11 surface of the 1-squeezing truck 2, and a feeder 9 is installed in a cylinder at the stop position of the truck 2. W
10, it is attached to the box-shaped frame 1 to move forward and backward in the direction of the arrow. Feeding Cart When the feeding cart is heavy, the feeder 9 moves forward by operating the cylinder device 10 and connects to the collector 8, thereby removing the wafer l1l mounted on the 1-squeezing cart.
j Supply operating power to the prime mover of equipment M, lul! When the feeding truck is loaded, the cylinder device 10 is inverted t'
J is used to move the feeder 9 forward and backward to move it away from the collector 8.

発明の効果 本発明は、給電のための給電子と集電子とが接離可能に
独立して増付けられているので、１ｉｆｔ送台車の停止
時には、給電子が前進して集電子に接合して１射込台車
」−のウェハ取扱い機器の原動機に作動動力を供給する
が、該台車の移動時には給電子が後退して集電子より離
間するから、該台車の移動に伴って集電子が給電子に摺
接して発展の原因をηミ起するおそれはなく、クリーン
ルーム内にお番Ｊる１絞込台車」−の原動機に動力を供
給する手段として優れた々ｊｒ果を有するものである。Effects of the Invention In the present invention, the feeding electron and the collector for power feeding are added independently so that they can be brought into contact with and separated from each other, so when the 1ift feeder vehicle is stopped, the feeding electron advances and joins to the collector. Operational power is supplied to the prime mover of the wafer handling equipment in the 1-injection trolley, but when the trolley moves, the feeder moves backward and separates from the collector. There is no risk of sliding contact with electrons and causing development, and it has an excellent effect as a means of supplying power to the prime mover of a narrowing trolley in a clean room.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明の実施例を示し、第１図は１１！１　ｊＸ
台東に取付（Ｊた集電子と枠体に取付けた給電子との配
置を示す側面図、第２図は集電子と給電子との関係位置
を示す平面図である。The drawings show an embodiment of the invention, and FIG.
FIG. 2 is a side view showing the arrangement of the collector mounted on the Taito and the feeder attached to the frame, and FIG. 2 is a plan view showing the relative position of the collector and feeder.

Claims (1)

【特許請求の範囲】[Claims] クリーンルーム内で走行する搬送台車に集電子を固設し
、該台車の停止位置に前記集電子に接離操作される給電
子を進退動可能に固設したクリーンルーム内における搬
送台車給電装置。A power supply device for a transport vehicle in a clean room, in which a collector is fixed to a transport vehicle running in the clean room, and a power supply, which is operated toward and away from the collector, is fixed at a stop position of the trolley so as to be movable forward and backward.