JPS6252629A - Coordinate detector - Google Patents
Coordinate detectorInfo
- Publication number
- JPS6252629A JPS6252629A JP60192142A JP19214285A JPS6252629A JP S6252629 A JPS6252629 A JP S6252629A JP 60192142 A JP60192142 A JP 60192142A JP 19214285 A JP19214285 A JP 19214285A JP S6252629 A JPS6252629 A JP S6252629A
- Authority
- JP
- Japan
- Prior art keywords
- coordinate detection
- shielding layer
- electromagnetic shielding
- coordinate
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、コンピュータに座標位置情報を入力するため
の座標検出装置（タブレットデジタイザ）に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a coordinate detection device (tablet digitizer) for inputting coordinate position information into a computer.
導体線などの座標検出素子と座標指示器（ペンまたはカ
ーソル）との間の電磁誘導や静電誘導を利用した座標検
出感度では、一般的にマイクロコンピュータなどのディ
ジタル制御回路を用いて座標検出素子を走査し座標検出
を行なっているため、ディジタル制御回路の同期信号と
して用いられるクロックパルスの高調渡分が該制御回路
に接続された座標検出素子を通して検出面から無線周波
ノイズとなって外部に輻射され、付近にある他の電子機
器にノイズ障害を与える可能性がある。For coordinate detection sensitivity that uses electromagnetic induction or electrostatic induction between a coordinate detection element such as a conductor wire and a coordinate indicator (pen or cursor), a digital control circuit such as a microcomputer is generally used to detect the coordinate detection element. Since coordinate detection is performed by scanning the digital control circuit, the harmonics of the clock pulse used as a synchronization signal for the digital control circuit become radio frequency noise from the detection surface through the coordinate detection element connected to the control circuit, and are radiated to the outside. may cause noise interference to other nearby electronic equipment.
ノイズ対策としては、一般的に輻射ノイズを発生する装
置全面を導電性筐体で覆い、電磁シールドを施すことが
有効であるとされているが、座標検出装置では、座標検
出の原理上、検出面の上を導電性筐体で覆うと検出感度
か損なわれ実用にならない。このため、従来の座標検出
装置では、実公昭５８−３１２３３号公報に記載のよう
に、座標検出用の導体線が布線された基板の下に電磁シ
ールド材を配置して装置内部のスイッチ等の部品から発
生ずるノイズや外来ノイズにより導体線に電圧が誘導さ
れることによる誤検出の防止を図ったものはあるが、検
出面は合成樹脂等からなる非導電性保護板で覆っただけ
で電気的には開放状態におがれており、検出面からの無
線周波ノイズの漏洩を防止できなかった。As a noise countermeasure, it is generally considered effective to cover the entire surface of equipment that generates radiated noise with a conductive housing and provide electromagnetic shielding. If the surface is covered with a conductive casing, the detection sensitivity will be impaired, making it impractical. For this reason, in conventional coordinate detection devices, as described in Japanese Utility Model Publication No. 58-31233, electromagnetic shielding material is placed under the board on which the conductor wires for coordinate detection are laid, and switches inside the device, etc. Although there are devices designed to prevent false detection due to voltage being induced in conductor wires due to noise generated from components or external noise, the detection surface is simply covered with a non-conductive protective plate made of synthetic resin or the like. It was electrically left open, and leakage of radio frequency noise from the detection surface could not be prevented.
本発明の目的は、座標検出感度や精度を損うことなく、
また実用上の操作性を損うこともなく、外部への輻射無
線周波ノイズを低減した座標検出装置を提供することに
ある。The purpose of the present invention is to
Another object of the present invention is to provide a coordinate detection device that reduces radiated radio frequency noise to the outside without impairing practical operability.
本発明は、検出面に沿って配置された座標検出素子と、
該座標検出素子に接続されたディジタル制御回路と、上
記座標検出素子の上を覆う電磁シールド層と、該電磁シ
ールド層の上にあって検出面を形成する非導電性保護板
と、上記各部を収納する筐体とを有し、上記電磁シール
ド層は座標検出感度を損わないで検出面から外部へ輻射
する無線周波ノイズを十分低減できるように材質、厚さ
、形状を選定され、上記電磁シールド層の周縁部は全周
にわたり筐体と電気的に接続されてなることを特徴とす
る座標検出装置である。The present invention includes a coordinate detection element arranged along a detection surface;
A digital control circuit connected to the coordinate detection element, an electromagnetic shielding layer covering the coordinate detection element, a non-conductive protection plate forming a detection surface on the electromagnetic shielding layer, and each of the above parts. The electromagnetic shielding layer has a material, thickness, and shape selected so as to sufficiently reduce radio frequency noise radiated from the detection surface to the outside without impairing the coordinate detection sensitivity. The coordinate detection device is characterized in that the peripheral edge of the shield layer is electrically connected to the casing over the entire circumference.
座標検出装置から発生する輻射無線周波ノイズの強度−
は一般的に１００〜３００μＶ／ｍ程度であり、そのエ
ネルギーは座標検出素子と座標指示器との間に印加され
る座標検出のための励磁エネルギーなどに比べて十分小
さい値である。本発明はこのような輻射無線周波ノイズ
のエネルギーと座標検出用入力エネルギーの大きさの差
に着目し、電磁シールド層の材質、厚さ、形状の選定に
より他の電子機器に障害を与える無線周波ノイズだけを
選択的に遮へいしようとするもので、実験によれば厚さ
２０μｍ程度の薄いアルミニウム箔を電磁シールド層と
して用いることにより、座標検出感度をほとんど損わな
いで輻射無線周波ノイズを十分低減することができる。Intensity of radiated radio frequency noise generated from coordinate detection equipment -
is generally about 100 to 300 μV/m, which is a sufficiently small value compared to the excitation energy for coordinate detection applied between the coordinate detection element and the coordinate indicator. The present invention focuses on the difference in the magnitude of the energy of such radiated radio frequency noise and the input energy for coordinate detection, and by selecting the material, thickness, and shape of the electromagnetic shield layer, it is possible to prevent radio frequency waves that may interfere with other electronic devices. It attempts to selectively shield only noise, and experiments have shown that by using a thin aluminum foil with a thickness of about 20 μm as an electromagnetic shielding layer, radiated radio frequency noise can be sufficiently reduced with almost no loss in coordinate detection sensitivity. can do.
本発明では、電磁シールド層を座標検出素子と非導電性
保護板との間に介在させているので、該電磁シールド層
が薄くても使用時に損傷を受けることはなく、また該電
磁シールド層の周縁部を全周にわたり筐体と電気的に接
続することによって無線周波ノイズの漏洩を防止し、シ
ールド効果を高めることができる。In the present invention, since the electromagnetic shield layer is interposed between the coordinate detection element and the non-conductive protection plate, even if the electromagnetic shield layer is thin, it will not be damaged during use. By electrically connecting the peripheral portion to the casing over the entire circumference, leakage of radio frequency noise can be prevented and the shielding effect can be enhanced.
以下、本発明の実施例を図面により説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図、第２図には本発明を電磁誘導方式の座標検出装
置に適用した例を示す。第１図は装置本体の断面図で、
１は導体線からなる座標検出素子であり、高透磁率で電
気絶縁性を有する基板２上に布線されている。該布線は
印刷により形成される場合もあり、表面は電気的に絶縁
されている。1 and 2 show an example in which the present invention is applied to an electromagnetic induction type coordinate detection device. Figure 1 is a sectional view of the main body of the device.
Reference numeral 1 denotes a coordinate detection element made of a conductor wire, which is wired on a substrate 2 having high magnetic permeability and electrical insulation. The wiring may be formed by printing, and the surface is electrically insulated.
３は基板２の下に設けた補強板、４は表面の平滑な非導
電性保護板（例えば５朋厚の合成樹脂板）であり、この
保護板４と前記座標検出素子ｌとの間に電磁シールド層
５として、例えば厚さ２０μｍのアルミニウム箔を介在
させる。このアルミニウム箔の周縁部を全周にわたり保
護板４の上面の一部に沿うように折り返し、保護板４と
導電性筐体（例えば１．６ ｒｒａｎ厚の鉄板製）６と
の間で挾みっけることにより、この部分７で電磁シール
ド層５を接地された導電性筐体６に電気的に接続し、筐
体６で覆われない保護板４の表面を検出面８としている
。９は゛座標検出素子１に接続されたディジタル制御回
路、１０は制御部筐体であり、装置本体の検出面８以外
の面は導電性筐体６および１ｏにより電磁シールドが施
されている。3 is a reinforcing plate provided under the substrate 2, 4 is a non-conductive protective plate with a smooth surface (for example, a synthetic resin plate with a thickness of 5 mm), and between this protective plate 4 and the coordinate detection element l, As the electromagnetic shielding layer 5, for example, an aluminum foil with a thickness of 20 μm is interposed. The peripheral edge of this aluminum foil is folded back along a part of the upper surface of the protection plate 4, and is sandwiched between the protection plate 4 and the conductive casing 6 (for example, made of an iron plate with a thickness of 1.6 rran). By doing so, the electromagnetic shielding layer 5 is electrically connected to the grounded conductive casing 6 at this portion 7, and the surface of the protection plate 4 that is not covered by the casing 6 serves as a detection surface 8. Reference numeral 9 denotes a digital control circuit connected to the coordinate detection element 1, 10 a control unit housing, and surfaces other than the detection surface 8 of the main body of the apparatus are electromagnetically shielded by conductive housings 6 and 1o.
第２図は装置の外観図で、１１は動作表示灯、１２は座
標指示器（以下、単にペンという）である。FIG. 2 is an external view of the device, in which 11 is an operation indicator light and 12 is a coordinate indicator (hereinafter simply referred to as a pen).
第３図は座標検出の原理説明図で、実公昭５８−３１２
３３号公報記載のものと同様に、座標検出素子１は多数
の導体線１＋〜ｌ！ｏを等間隔に配列し、この導体線／
１〜／Ｈの一端をそれぞれ出力端子ｔ。Figure 3 is an explanatory diagram of the principle of coordinate detection.
Similar to the one described in Publication No. 33, the coordinate detection element 1 includes a large number of conductor wires 1+ to l! o are arranged at equal intervals, and this conductor wire/
One end of 1 to /H is connected to an output terminal t.
〜１ｎに接続するとともに、他端を共通に接続してなり
、ペン１２は図示しない正弦波発振器（例えば発振周波
数３０ ｋ Ｈｚ 、出力５０ｍＷ）により励磁される
コイル１３を有している。上記出力端子ｔ１〜ｔｎはデ
ィジタル制御回路９により走査され、例えば導体線／＋
”／ｎのうち１２とｅ３とで構成されるループ（以下、
センスループという）が選択された時、図示のようにこ
のセンスループ内にペン１２が置かれていれば、コイル
１３から発生する磁束は導体線１２および１３と鎖交し
、センスループの出力端子１２．１３間に誘起電圧が発
生することから、ディジタル制御回路９は選択されたセ
ンスループ内にペン１２の指示位置が存在することを検
出する。1n and the other end is connected in common, and the pen 12 has a coil 13 excited by a sine wave oscillator (for example, oscillation frequency 30 kHz, output 50 mW) (not shown). The output terminals t1 to tn are scanned by the digital control circuit 9, for example, conductor wires /+
A loop consisting of 12 of ``/n and e3 (hereinafter,
When a sense loop (referred to as a sense loop) is selected, if the pen 12 is placed within this sense loop as shown in the figure, the magnetic flux generated from the coil 13 interlinks with the conductor wires 12 and 13, and the output terminal of the sense loop Since an induced voltage is generated between 12 and 13, the digital control circuit 9 detects that the indicated position of the pen 12 exists within the selected sense loop.
このような座標検出装置において、ディジタル制御回路
９に用いるクロックパルスの周波数ｔ−１４ＭＨｚとし
た場合、該クロックパルスの高調液分が無線周波ノイズ
となり、導体線ｅ１〜ｌｎを通して検出面８から外部に
輻射しようとするが、第１図に示したように座標検出素
子ｌと保護板４との間に厚す２０μｍのアルミニウム箔
を電磁シールド層５として介在させた実施例では、ノイ
ズ障害を与える可能性があるとされている輻射無線周波
ノイズ（３Ｃ１〜１０００ ＭＨｚ） （７）強度は、
従前の値（約５０ｄｂ）より１０〜２０ｄｂ減と大幅に
低減した。このノイズ強度の測定は、アメリカ連邦通信
委員会規則（Ｆｅｄｅｒａｌ Ｃｏｍｍｕｎｉｃａｔｉ
ｏｎ’ｓ Ｃｏｍｍ１ｓｓｉｏｎ ｒｕｌｅｓ ａｎｄ
ｒｅｇｕｌａｔｉｏｎ ） ］５章Ｊ項に準拠し、被検
品からアンチ−すまでの距離を３ｍとして行なったもの
である。In such a coordinate detection device, when the frequency of the clock pulse used in the digital control circuit 9 is set to t-14 MHz, the harmonic component of the clock pulse becomes radio frequency noise, which is transmitted from the detection surface 8 to the outside through the conductor wires e1 to ln. However, in the embodiment in which a 20 μm thick aluminum foil is interposed as the electromagnetic shielding layer 5 between the coordinate detection element l and the protection plate 4 as shown in FIG. 1, it may cause noise interference. Radiated radio frequency noise (3C1 to 1000 MHz) (7) The intensity is
This is a significant reduction of 10 to 20 db from the previous value (approximately 50 db). This measurement of noise intensity is based on Federal Communications Commission regulations.
on's Comm1ssion rules and
The test was carried out in accordance with Chapter 5, Section J, and the distance from the test item to the anti-slip was set at 3 m.
一方、座標検出感度は、この電磁シールド層５を設けて
も、ペン１２の検出面８からの読取り可能高さが４Ｔｕ
ｎから３．５ｍ＋ｎに低下するだけで、実用上支障はな
い。これは、コイル１３の励磁エネルギーが大きい割に
電磁シールド層５を形成するアルミニウム箔の比抵抗が
高く、アルミニウム箔中のうず電流により磁束の打消さ
れる割合が少ないためと考えられ、アルミニウム箔の場
合、厚さ５０μｍ程度までなら検出感度が大きく低下す
ることはない。さらに、本実施例のように電磁シールド
層５を全検出面にわたり均一な面導電体で形成すること
により、座標検出の精度も全く損われないことが実験に
より確認された。また、本実施例によれば、製品コスト
、重量の増加は僅かである。On the other hand, the coordinate detection sensitivity is such that even with this electromagnetic shielding layer 5, the readable height from the detection surface 8 of the pen 12 is 4Tu.
There is no practical problem as long as the distance is reduced from n to 3.5m+n. This is thought to be because the specific resistance of the aluminum foil forming the electromagnetic shielding layer 5 is high despite the large excitation energy of the coil 13, and the rate of magnetic flux being canceled by eddy currents in the aluminum foil is low. In this case, the detection sensitivity will not decrease significantly if the thickness is up to about 50 μm. Furthermore, it was confirmed through experiments that by forming the electromagnetic shielding layer 5 with a uniform planar conductor over the entire detection surface as in this embodiment, the accuracy of coordinate detection is not impaired at all. Furthermore, according to this embodiment, the increase in product cost and weight is slight.
なお、薄いアルミニウム箔を検出面８の」二に貼付した
のでは、使用中に箔が損傷してシールド効果が損われ、
また電磁シールド層５が全周にわたり導電性筐体６に電
気的に接続されていないと、十分なシールド効果は得ら
れない。Note that if a thin aluminum foil is attached to the second part of the detection surface 8, the foil will be damaged during use and the shielding effect will be impaired.
Further, unless the electromagnetic shielding layer 5 is electrically connected to the conductive casing 6 over the entire circumference, a sufficient shielding effect cannot be obtained.
ここで電磁シールド層５は、座標検出感度を損わないで
検出面から外部へ輻射する無線周波ノイズを十分低減で
きるように、材質、厚さ、形状を選定されたものであれ
ばよく、上記実施例に示したアルミニウム箔以外に、銅
箔、薄鉄板、導電性合成樹脂板あるいは目の細かい金網
などもシールド材として使用でき、また保護板４に被着
した導電性塗料やメッキ層、蒸着金属膜などであっても
よい。Here, the electromagnetic shield layer 5 may be of a material, thickness, and shape selected so as to sufficiently reduce radio frequency noise radiated from the detection surface to the outside without impairing the coordinate detection sensitivity. In addition to the aluminum foils shown in the examples, copper foils, thin iron plates, conductive synthetic resin plates, or fine wire mesh can also be used as shielding materials. It may also be a metal film or the like.
筐体６および１０も鉄板などの金属製に限らず、例えば
導電性合成樹脂あるいは導電性塗料を塗布した合成樹脂
、金属箔を貼付した合成樹脂等の合成樹脂成形品であっ
てもよい。The housings 6 and 10 are not limited to being made of metal such as iron plates, but may also be made of synthetic resin molded products such as conductive synthetic resin, synthetic resin coated with conductive paint, or synthetic resin pasted with metal foil.
また、図示は省略したが、電磁シールド層５と導電性筐
体６との電気的接続が均一に行なわれるよう、接続部７
に導電性を有するガスケット（シールドガスケット）を
介在させるとなお良い。Although not shown in the drawings, the connecting portion 7
It is even better to interpose a conductive gasket (shield gasket) between the two.
なお、上記実施例では本発明をペン１２に高周波入力を
加える電磁誘導方式の座標検出装置に適用した例を示し
たが、本発明はこのほか、布線側に高周波入力を加える
電磁誘導方式、静電誘導方式あるいは回磁性体の磁歪効
果を利用して座標検出を行なう磁歪方式などの他の種類
の座標検出装置にも同様に一適用することができる。In the above embodiment, an example was shown in which the present invention is applied to an electromagnetic induction type coordinate detection device that applies a high frequency input to the pen 12, but the present invention is also applicable to an electromagnetic induction type coordinate detection device that applies a high frequency input to the wiring side, The present invention can be similarly applied to other types of coordinate detecting devices such as an electrostatic induction method or a magnetostrictive method that detects coordinates using the magnetostrictive effect of a rotating magnetic body.
以」二説明したように本発明は、座標検出装置の検出面
を形成する非導電性保護板とディジタル制御回路に接続
された座標検出素子との間（こ周縁部が全周にわたり筐
体と電気的に接続された電磁シールド層を介在させ、該
電磁シールド層の材質、厚さ、形状の選定により検出面
から外部へ輻射する無線周波ノイズを選択的に遮へいす
るようにしたものであるから、座標検出感度や精度を損
うことなく、また実用上の操作性を損うこともなく、池
の電子機器にノイズ障害を与える輻射無線周波ノイズを
十分に低減することができる。As explained above, the present invention provides a structure between the non-conductive protection plate forming the detection surface of the coordinate detection device and the coordinate detection element connected to the digital control circuit (the peripheral edge of which is connected to the housing over the entire circumference). This is because an electrically connected electromagnetic shielding layer is interposed, and radio frequency noise radiated from the detection surface to the outside is selectively shielded by selecting the material, thickness, and shape of the electromagnetic shielding layer. , it is possible to sufficiently reduce the radiated radio frequency noise that causes noise interference to electronic equipment without impairing coordinate detection sensitivity or accuracy or impairing practical operability.
第１図は本発明の一実施例を示す断面図、第２図は装置
外観を示す斜視図、第３図は座標検出の原理説明図であ
る。
ｌ：座標検出素子 ４：非導電性保護板５：電磁シ
ールド層 ６．１０ ：筐体７：電磁シールド層５
と筐体６の接続部８：検出面
９：ディジタル制御回路FIG. 1 is a sectional view showing an embodiment of the present invention, FIG. 2 is a perspective view showing the external appearance of the device, and FIG. 3 is a diagram explaining the principle of coordinate detection. l: Coordinate detection element 4: Non-conductive protection plate 5: Electromagnetic shielding layer 6.10: Housing 7: Electromagnetic shielding layer 5
Connection part 8 between and housing 6: Detection surface 9: Digital control circuit
Claims (1)
素子に接続されたディジタル制御回路と、上記座標検出
素子の上を覆う電磁シールド層と、該電磁シールド層の
上にあって検出面を形成する非導電性保護板と、上記各
部を収納する筐体とを有し、上記電磁シールド層は座標
検出感度を損わないで検出面から外部へ輻射する無線周
波ノイズを十分低減できるように材質、厚さ、形状を選
定され、上記電磁シールド層の周縁部は全周にわたり筐
体と電気的に接続されてなることを特徴とする座標検出
装置。A coordinate detection element disposed along the detection surface, a digital control circuit connected to the coordinate detection element, an electromagnetic shielding layer covering the coordinate detection element, and a detection surface located on the electromagnetic shielding layer. The electromagnetic shielding layer has a non-conductive protection plate that forms a non-conductive protection plate and a housing that houses each of the above parts, and the electromagnetic shield layer is designed to sufficiently reduce radio frequency noise radiated from the detection surface to the outside without impairing the coordinate detection sensitivity. The coordinate detection device is characterized in that the material, thickness, and shape of the electromagnetic shielding layer are selected according to the above, and the peripheral edge of the electromagnetic shielding layer is electrically connected to the casing over the entire circumference.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60192142A JPS6252629A (en) | 1985-09-02 | 1985-09-02 | Coordinate detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60192142A JPS6252629A (en) | 1985-09-02 | 1985-09-02 | Coordinate detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6252629A true JPS6252629A (en) | 1987-03-07 |
| JPH036529B2 JPH036529B2 (en) | 1991-01-30 |
Family
ID=16286388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60192142A Granted JPS6252629A (en) | 1985-09-02 | 1985-09-02 | Coordinate detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6252629A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6424449U (en) * | 1987-07-31 | 1989-02-09 | ||
| JPH01250124A (en) * | 1988-03-30 | 1989-10-05 | Pentel Kk | Tablet input device |
| JPH06511341A (en) * | 1991-12-26 | 1994-12-15 | カルコンプ インコーポレイテッド | Printed conductive ink electrostatic shield for electromagnetic digitizers |
| US10355346B2 (en) | 2000-01-19 | 2019-07-16 | Fractus, S.A. | Space-filling miniature antennas |
-
1985
- 1985-09-02 JP JP60192142A patent/JPS6252629A/en active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6424449U (en) * | 1987-07-31 | 1989-02-09 | ||
| JPH01250124A (en) * | 1988-03-30 | 1989-10-05 | Pentel Kk | Tablet input device |
| JP2572625B2 (en) * | 1988-03-30 | 1997-01-16 | ぺんてる株式会社 | Tablet input device |
| JPH06511341A (en) * | 1991-12-26 | 1994-12-15 | カルコンプ インコーポレイテッド | Printed conductive ink electrostatic shield for electromagnetic digitizers |
| US10355346B2 (en) | 2000-01-19 | 2019-07-16 | Fractus, S.A. | Space-filling miniature antennas |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH036529B2 (en) | 1991-01-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0537458B1 (en) | Shielding materials for electromagnetic digitizers | |
| US8390272B2 (en) | Position detecting device | |
| US5274198A (en) | Printed conductive ink electrostatic shield for electromagnetic digitizers | |
| US5506375A (en) | Circuit board for coordinate detecting apparatus with noise suppression | |
| JPH04504304A (en) | Non-contact displacement measurement system | |
| JPS6252629A (en) | Coordinate detector | |
| US4497977A (en) | Automatic coordinate determining device having electrostatic shielding | |
| KR20130007954A (en) | Inputting device | |
| WO2021082269A1 (en) | Sensor packaging structure and electronic device | |
| JP6049165B2 (en) | Non-contact power transmission device and electronic device | |
| US7277817B2 (en) | Position sensing device | |
| JP4872989B2 (en) | Capacitance type sensor component, object mounting body, semiconductor manufacturing apparatus, and liquid crystal display element manufacturing apparatus | |
| JPH03204716A (en) | Tablet for coordinate detector | |
| EP0762314B1 (en) | A multipaneled digitizer | |
| US20030010544A1 (en) | Low EMI digitizer tablet | |
| JPH0534036Y2 (en) | ||
| JPS5831233Y2 (en) | Coordinate input device tablet | |
| JPH07210294A (en) | Information processor | |
| JPH03215774A (en) | Magnetic field communication type individual exposure dosimeter | |
| JPS6391732A (en) | Manufacture of tablet plate | |
| JPH1049287A (en) | Tablet of position detecting device | |
| AU664698B2 (en) | Flexible digitizer tablet | |
| JPH05108247A (en) | Tablet for digitizer | |
| JPH06230881A (en) | Circuit board for coordinate detector and coordinate detector using the circuit board | |
| JPH05304387A (en) | Flexible shielding sheet |