JPS6246904A - Production of double oxide powder - Google Patents
Production of double oxide powderInfo
- Publication number
- JPS6246904A JPS6246904A JP18633685A JP18633685A JPS6246904A JP S6246904 A JPS6246904 A JP S6246904A JP 18633685 A JP18633685 A JP 18633685A JP 18633685 A JP18633685 A JP 18633685A JP S6246904 A JPS6246904 A JP S6246904A
- Authority
- JP
- Japan
- Prior art keywords
- granules
- double oxide
- powder
- vessel
- compounds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は半導体などに使用されるセラミック製品などを
得るための原料である複酸化物の粉末を製造する方法に
関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a method for producing a double oxide powder, which is a raw material for obtaining ceramic products used in semiconductors and the like.
(従来の技術)
従来複酸化物粉末を製造するには、2種以上の化合物を
粉末化して原料調合し、この調合した化合物粉末を混合
機により混合し、混合した化合物て粉末をプレス成形機
により直径50〜200111厚み20〜100膓の′
筒状の成形物とし、この成形物をアルミナ質の匣鉢上に
置き反応炉に入れて加熱反応させ、もろい塊りの複酸化
物と成し、このもろい複酸化物を粉砕機により粉砕する
工程がとられている。そしてこの複酸化物の粉末は所望
形状に成形されて焼結炉で加熱焼結されて製品となるの
である。(Prior art) Conventionally, in order to produce double oxide powder, two or more compounds are powdered and prepared as raw materials, the prepared compound powder is mixed in a mixer, and the mixed compound powder is pressed into a press molding machine. Diameter 50~200111 Thickness 20~100cm
A cylindrical molded product is formed, and this molded product is placed on an alumina sagger, placed in a reactor, and heated to react, forming a brittle lump of double oxide, and this brittle double oxide is crushed using a crusher. A process is being followed. This mixed oxide powder is then molded into a desired shape and heated and sintered in a sintering furnace to become a product.
(発明が解決しようとする問題点)
上記のような従来技術による複酸化物粉末の製造方法に
おいては、プレス成形により成形される ゛成形物の
内部と表面では化合物粉末の密度が異なり、そのために
均一な加熱反応が得られず粉砕後の複酸化物粉末が均一
な品質にならないという問題があった。(Problems to be Solved by the Invention) In the conventional method for producing double oxide powder as described above, the compound powder is formed by press molding. There was a problem in that a uniform heating reaction could not be obtained and the quality of the mixed oxide powder after pulverization would not be uniform.
また、プレス成形された成形物は大きな形状をしている
ため匣鉢上の全面にわたってムラなく置くことが困難で
あり、反応炉に入れた場合匣鉢がその上面の温度ムラの
ために歪み寿命を短くしている等の問題もあった。In addition, because the press-formed product has a large shape, it is difficult to place it evenly over the entire surface of the sagger. There were also problems such as shortening the .
(問題を解決するための手段)
本発明は上記の問題を解決する目的のもとに成されたも
のであり、2種以上の化合物を所定粒度に粉末化して原
料調合し、この調合した化合物粉末を混合機により混合
し、混合した化合物粉末を回転ロール式ブリケットマシ
ンにより長径2〜30謡の大きさの造粒体に成形し、こ
の成形造粒体を匣鉢上にムラなく置いて反応炉に入れて
反応させもってもろい塊り状の複酸化物を得ると共にこ
の1塊り状の複酸化物を粉砕機により粉砕することを特
徴とするものである。(Means for Solving the Problems) The present invention has been made with the aim of solving the above problems, and involves preparing raw materials by pulverizing two or more compounds to a predetermined particle size, and then producing a mixture of the prepared compounds. The powders are mixed using a mixer, and the mixed compound powder is formed into granules with a major diameter of 2 to 30 mm using a rotating roll briquette machine, and the formed granules are evenly placed on a sagger for reaction. The method is characterized in that a brittle lump-like double oxide is obtained by reacting in a furnace, and this lump-like double oxide is pulverized using a pulverizer.
(実施例)
化合物として炭酸バリウム(BaO03)と酸化チタン
(TiOz)をそれぞれ直径0.2p前後の大きさに粉
末化する原料調合を行ない、この調合された化合物粉末
をモル比で1:1の割合で混合した後、この混合した化
合物粉末を回転ロールの表面にポケット状凹部を多数設
けた回転ロール式ブリケットマシンにより圧縮成形して
長径2〜30藺の大きさの造粒体を得てこの成形造粒体
をアルミナ質の匣鉢上にムラなく置き反応炉へ入れて1
000°OGこ加熱して化合物粉末を反応させ、もろい
塊り状のチタン酸バリウム(BaTiOa)と成し、こ
の塊り状のチタン酸バリウムを粉砕機により粉砕してチ
タン酸バリウムの粉末を得た。(Example) A raw material preparation was carried out to powder barium carbonate (BaO03) and titanium oxide (TiOz) as compounds to a size of about 0.2p in diameter, and the compound powder was mixed in a molar ratio of 1:1. After mixing in proportions, the mixed compound powder is compression molded using a rotary roll briquette machine with a number of pocket-like recesses on the surface of the rotary roll to obtain granules with a major diameter of 2 to 30 mm. Place the molded granules evenly on an alumina sagger and put it into the reactor.
The compound powder is reacted by heating at 000°OG to form a brittle lump of barium titanate (BaTiOa), and this lump of barium titanate is crushed using a crusher to obtain barium titanate powder. Ta.
このようにして得たチタン酸バリウムの粉末は、化合物
が反応炉に入れられる際に2〜30鵡程度の)710.
、、いい+、:***i、s*is。オ、よ(よ1.カ
ーな密度の造粒体となり、反応炉の中においてもほぼ均
一な反応が起こり、従来のものに比べてばらつきのない
均一な品質となっていた。The barium titanate powder obtained in this way has a concentration of about 2 to 30 mm) when the compound is put into the reactor.
,,ii+,:***i,s*is. The resulting granules had a high density, a nearly uniform reaction occurred in the reactor, and the quality was uniform with no variation compared to conventional products.
また、匣鉢上に置かれる成形造粒体は小さな一定した形
状の造粒物であるため匣鉢上の全面にわたってムラなく
置くことができ匣鉢上の温度ムラによる歪をほとんどな
くすことができた。In addition, since the molded granules placed on the saggers are small, uniformly shaped granules, they can be placed evenly over the entire surface of the saggers, and distortion due to uneven temperature on the saggers can be almost eliminated. Ta.
尚、実施例では複酸化物としてチタン酸バリウムをその
一例として挙げているが、これにタンクラム(Ta)、
ビスマス(Bi) 、稀土類を含む化合物を少量添加す
る場合はもちろん、酸化マグネシューム(Mg O)と
アルミナ(A6zOa)の反応によるスビネ/L/ (
MgO・AlzOa)あルイハカイアナイト(u203
・Sing)とアルミナ(AIlzOa)の反応による
ムライト(3AdgQ3・2SfOz)等の複酸化物を
得る場合にもこの製造方法を適用することができる。In the examples, barium titanate is cited as an example of the double oxide, but tancrum (Ta),
Not only when adding small amounts of compounds containing bismuth (Bi) and rare earth elements, but also when subine/L/ (
MgO・AlzOa) Aruihakaianite (u203
This manufacturing method can also be applied to the case of obtaining a double oxide such as mullite (3AdgQ3.2SfOz) by the reaction of Sing) and alumina (AIlzOa).
Claims (1)
調合した化合物粉末を混合機により混合する工程と、該
混合した化合物粉末を回転ロール式ブリケットマシンに
より長径2〜30mmの大きさの造粒体に成形する工程
と、該成形造粒体を匣鉢上にムラなく置いて反応炉に入
れて反応させ、もってもろい塊り状の複酸化物を得る工
程と、該塊り状の複酸化物を粉砕機により粉砕する工程
と、から成る複酸化物粉末の製造方法A process of pulverizing two or more compounds to prepare raw materials, a process of mixing the blended compound powder with a mixer, and a process of forming the mixed compound powder into a product with a major diameter of 2 to 30 mm using a rotating roll briquette machine. a step of forming the formed granules into granules, a step of placing the formed granules evenly on a sagger and placing them in a reactor to react to obtain a brittle lump-like complex oxide; A method for producing a double oxide powder, comprising: a step of pulverizing an oxide using a pulverizer;
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18633685A JPS6246904A (en) | 1985-08-23 | 1985-08-23 | Production of double oxide powder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18633685A JPS6246904A (en) | 1985-08-23 | 1985-08-23 | Production of double oxide powder |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6246904A true JPS6246904A (en) | 1987-02-28 |
Family
ID=16186563
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18633685A Pending JPS6246904A (en) | 1985-08-23 | 1985-08-23 | Production of double oxide powder |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6246904A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012101989A (en) * | 2010-11-12 | 2012-05-31 | Osami Seri | Method for manufacturing double oxide |
JP2013519624A (en) * | 2010-02-16 | 2013-05-30 | ヘレーウス クヴァルツグラース ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト | Manufacturing method of quartz glass crucible |
DE112015003903B4 (en) | 2014-08-27 | 2018-06-28 | Fujifilm Corporation | Device for checking printed matter, procedures for checking printed matter and program |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5542202A (en) * | 1978-09-12 | 1980-03-25 | Onoda Cement Co Ltd | Manufacture of magnesiaaalumina spinel clinker |
JPS57160968A (en) * | 1981-03-27 | 1982-10-04 | Teijin Ltd | Metal oxide composite body and separation of oxygen |
JPS5823331A (en) * | 1981-08-01 | 1983-02-12 | Sony Corp | Controller for optical head |
JPS5950028A (en) * | 1982-09-11 | 1984-03-22 | Kyoritsu Yogyo Genryo Kk | Formation of high purity barium titanate |
-
1985
- 1985-08-23 JP JP18633685A patent/JPS6246904A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5542202A (en) * | 1978-09-12 | 1980-03-25 | Onoda Cement Co Ltd | Manufacture of magnesiaaalumina spinel clinker |
JPS57160968A (en) * | 1981-03-27 | 1982-10-04 | Teijin Ltd | Metal oxide composite body and separation of oxygen |
JPS5823331A (en) * | 1981-08-01 | 1983-02-12 | Sony Corp | Controller for optical head |
JPS5950028A (en) * | 1982-09-11 | 1984-03-22 | Kyoritsu Yogyo Genryo Kk | Formation of high purity barium titanate |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013519624A (en) * | 2010-02-16 | 2013-05-30 | ヘレーウス クヴァルツグラース ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト | Manufacturing method of quartz glass crucible |
JP2012101989A (en) * | 2010-11-12 | 2012-05-31 | Osami Seri | Method for manufacturing double oxide |
DE112015003903B4 (en) | 2014-08-27 | 2018-06-28 | Fujifilm Corporation | Device for checking printed matter, procedures for checking printed matter and program |
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