JPS624130U - - Google Patents

Info

Publication number
JPS624130U
JPS624130U JP9557985U JP9557985U JPS624130U JP S624130 U JPS624130 U JP S624130U JP 9557985 U JP9557985 U JP 9557985U JP 9557985 U JP9557985 U JP 9557985U JP S624130 U JPS624130 U JP S624130U
Authority
JP
Japan
Prior art keywords
support
tester
board holding
contact part
embedded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9557985U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9557985U priority Critical patent/JPS624130U/ja
Publication of JPS624130U publication Critical patent/JPS624130U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案の一実施例を示すもので、第１図
は本考案の一部切欠した側面断面図、第２図は従
来の一部切欠した側面断面図である。 １ａ：支柱、１ｂ：メジヤリング、１ｃ：接続
部を保有する構造物もしくは基板、１ｄ：接続機
構、１ｅ：間隙、１ｓ：テスタ側の接続部、１ｆ
：支柱の段差部、２ｂ：リングインサート、３：
位置合わせ用ピン、７：基台、８：主柱、９：ヘ
ツドプレート、１０：接続部。 The drawings show an embodiment of the present invention; FIG. 1 is a partially cut-away side sectional view of the present invention, and FIG. 2 is a partially cut-away side sectional view of the conventional device. 1a: Strut, 1b: Measure ring, 1c: Structure or board holding the connection part, 1d: Connection mechanism, 1e: Gap, 1s: Connection part on the tester side, 1f
: Step part of pillar, 2b: Ring insert, 3:
Positioning pin, 7: Base, 8: Main pillar, 9: Head plate, 10: Connection part.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] テストヘツドに支柱を螺合せしめ、該支柱の溝
部において接触部を保有する構造物もしくは基板
が水平方向に揺動可能に架設せしめた構造のテス
タにおいて、接触部を保有する構造物もしくは基
板に埋設されている接触部が、直接プローブカー
ドの電極に接触したことを特徴とするウエハプロ
ーバとテスタとの接続装置。 In a tester with a structure in which a support is screwed onto the test head, and a structure or a board holding a contact part is installed in the groove of the support so as to be able to swing horizontally, the support is embedded in the structure or board holding a contact part. A connection device between a wafer prober and a tester, characterized in that a contact portion thereof directly contacts an electrode of a probe card.
JP9557985U 1985-06-24 1985-06-24 Pending JPS624130U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9557985U JPS624130U (en) 1985-06-24 1985-06-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9557985U JPS624130U (en) 1985-06-24 1985-06-24

Publications (1)

Publication Number Publication Date
JPS624130U true JPS624130U (en) 1987-01-12

Family

ID=30654776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9557985U Pending JPS624130U (en) 1985-06-24 1985-06-24

Country Status (1)

Country Link
JP (1) JPS624130U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02163952A (en) * 1988-12-16 1990-06-25 Sanyo Electric Co Ltd Measuring apparatus of semiconductor device
JPH0492943U (en) * 1990-12-27 1992-08-12

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5751733A (en) * 1980-09-12 1982-03-26 Toyo Soda Mfg Co Ltd Yellow resin colorant

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5751733A (en) * 1980-09-12 1982-03-26 Toyo Soda Mfg Co Ltd Yellow resin colorant

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02163952A (en) * 1988-12-16 1990-06-25 Sanyo Electric Co Ltd Measuring apparatus of semiconductor device
JPH0492943U (en) * 1990-12-27 1992-08-12

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