JPS6238414B2 - - Google Patents
Info
- Publication number
- JPS6238414B2 JPS6238414B2 JP59168684A JP16868484A JPS6238414B2 JP S6238414 B2 JPS6238414 B2 JP S6238414B2 JP 59168684 A JP59168684 A JP 59168684A JP 16868484 A JP16868484 A JP 16868484A JP S6238414 B2 JPS6238414 B2 JP S6238414B2
- Authority
- JP
- Japan
- Prior art keywords
- wire
- copper alloy
- alloy wire
- copper
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 28
- 229910000881 Cu alloy Inorganic materials 0.000 claims abstract description 21
- 239000010949 copper Substances 0.000 claims abstract description 21
- 229910052737 gold Inorganic materials 0.000 claims abstract description 10
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 7
- 229910052738 indium Inorganic materials 0.000 claims abstract description 7
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 6
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 9
- 229910052744 lithium Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 abstract description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 9
- 239000010703 silicon Substances 0.000 abstract description 9
- 229910045601 alloy Inorganic materials 0.000 abstract description 2
- 239000000956 alloy Substances 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 239000011573 trace mineral Substances 0.000 abstract description 2
- 235000013619 trace mineral Nutrition 0.000 abstract description 2
- 229910052732 germanium Inorganic materials 0.000 abstract 2
- 239000002994 raw material Substances 0.000 abstract 2
- 229910000510 noble metal Inorganic materials 0.000 abstract 1
- 238000003466 welding Methods 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 20
- 229910052802 copper Inorganic materials 0.000 description 16
- 229910052782 aluminium Inorganic materials 0.000 description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 13
- 239000010931 gold Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910000838 Al alloy Inorganic materials 0.000 description 5
- 239000010970 precious metal Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000002788 crimping Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 241000587161 Gomphocarpus Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005491 wire drawing Methods 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Classifications
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01051—Antimony [Sb]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01083—Bismuth [Bi]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/012—Semiconductor purity grades
- H01L2924/01204—4N purity grades, i.e. 99.99%
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
- Conductive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59168684A JPS6148543A (ja) | 1984-08-10 | 1984-08-10 | 半導体素子結線用銅合金線 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59168684A JPS6148543A (ja) | 1984-08-10 | 1984-08-10 | 半導体素子結線用銅合金線 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6148543A JPS6148543A (ja) | 1986-03-10 |
JPS6238414B2 true JPS6238414B2 (zh) | 1987-08-18 |
Family
ID=15872552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59168684A Granted JPS6148543A (ja) | 1984-08-10 | 1984-08-10 | 半導体素子結線用銅合金線 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6148543A (zh) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6199645A (ja) * | 1984-10-20 | 1986-05-17 | Tanaka Denshi Kogyo Kk | 半導体素子のボンデイング用銅線 |
JPS61113740A (ja) * | 1984-11-09 | 1986-05-31 | Tanaka Denshi Kogyo Kk | 半導体素子のボンデイング用銅線 |
JPS61258463A (ja) * | 1985-05-13 | 1986-11-15 | Mitsubishi Metal Corp | 半導体装置用Cu合金製ボンディングワイヤ |
JPH0747791B2 (ja) * | 1985-10-18 | 1995-05-24 | 住友電気工業株式会社 | ボンデイングワイヤ |
JPH0785483B2 (ja) * | 1986-07-15 | 1995-09-13 | 株式会社東芝 | 半導体装置 |
TWI287282B (en) | 2002-03-14 | 2007-09-21 | Fairchild Kr Semiconductor Ltd | Semiconductor package having oxidation-free copper wire |
SG190482A1 (en) * | 2011-12-01 | 2013-06-28 | Heraeus Materials Tech Gmbh | Doped 4n copper wire for bonding in microelectronics device |
SG11201608819VA (en) | 2014-04-21 | 2016-12-29 | Nippon Steel & Sumikin Mat Co | Bonding wire for semiconductor device |
SG11201604437RA (en) | 2015-02-26 | 2016-09-29 | Nippon Micrometal Corp | Bonding wire for semiconductor device |
WO2016189752A1 (ja) | 2015-05-26 | 2016-12-01 | 日鉄住金マイクロメタル株式会社 | 半導体装置用ボンディングワイヤ |
WO2016189758A1 (ja) | 2015-05-26 | 2016-12-01 | 日鉄住金マイクロメタル株式会社 | 半導体装置用ボンディングワイヤ |
US10137534B2 (en) | 2015-06-15 | 2018-11-27 | Nippon Micrometal Corporation | Bonding wire for semiconductor device |
KR101670209B1 (ko) | 2015-06-15 | 2016-10-27 | 닛데쓰스미킹 마이크로 메탈 가부시키가이샤 | 반도체 장치용 본딩 와이어 |
JP5893230B1 (ja) | 2015-07-23 | 2016-03-23 | 日鉄住金マイクロメタル株式会社 | 半導体装置用ボンディングワイヤ |
US9887172B2 (en) * | 2015-08-12 | 2018-02-06 | Nippon Micrometal Corporation | Bonding wire for semiconductor device |
JP6445186B2 (ja) * | 2015-12-15 | 2018-12-26 | 日鉄ケミカル&マテリアル株式会社 | 半導体装置用ボンディングワイヤ |
WO2017221434A1 (ja) * | 2016-06-20 | 2017-12-28 | 日鉄住金マイクロメタル株式会社 | 半導体装置用ボンディングワイヤ |
SG11202001066VA (en) * | 2017-08-09 | 2020-03-30 | Nippon Steel Chemical & Material Co Ltd | Cu ALLOY BONDING WIRE FOR SEMICONDUCTOR DEVICE |
KR102187539B1 (ko) | 2017-12-28 | 2020-12-07 | 닛데쓰마이크로메탈가부시키가이샤 | 반도체 장치용 본딩 와이어 |
US20230013769A1 (en) | 2019-12-02 | 2023-01-19 | Nippon Micrometal Corporation | Copper bonding wire for semiconductor devices and semiconductor device |
WO2021167083A1 (ja) | 2020-02-21 | 2021-08-26 | 日鉄マイクロメタル株式会社 | 銅ボンディングワイヤ |
KR20240015610A (ko) | 2021-06-25 | 2024-02-05 | 닛데쓰마이크로메탈가부시키가이샤 | 반도체 장치용 본딩 와이어 |
EP4361299A1 (en) | 2021-06-25 | 2024-05-01 | Nippon Micrometal Corporation | Bonding wire for semiconductor device |
EP4361301A1 (en) | 2021-06-25 | 2024-05-01 | Nippon Micrometal Corporation | Bonding wire for semiconductor device |
JPWO2022270049A1 (zh) | 2021-06-25 | 2022-12-29 | ||
KR102497492B1 (ko) | 2021-06-25 | 2023-02-08 | 닛데쓰마이크로메탈가부시키가이샤 | 반도체 장치용 본딩 와이어 |
KR102671200B1 (ko) | 2022-06-24 | 2024-06-03 | 닛테츠 케미컬 앤드 머티리얼 가부시키가이샤 | 반도체 장치용 본딩 와이어 |
-
1984
- 1984-08-10 JP JP59168684A patent/JPS6148543A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6148543A (ja) | 1986-03-10 |
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