JPS6238348Y2 - - Google Patents
Info
- Publication number
- JPS6238348Y2 JPS6238348Y2 JP1985145895U JP14589585U JPS6238348Y2 JP S6238348 Y2 JPS6238348 Y2 JP S6238348Y2 JP 1985145895 U JP1985145895 U JP 1985145895U JP 14589585 U JP14589585 U JP 14589585U JP S6238348 Y2 JPS6238348 Y2 JP S6238348Y2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- crystal
- cut
- resonator
- crystal resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000001259 photo etching Methods 0.000 description 4
- RZVXOCDCIIFGGH-UHFFFAOYSA-N chromium gold Chemical compound [Cr].[Au] RZVXOCDCIIFGGH-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【考案の詳細な説明】
本考案は、GTカツト水晶振動子に関する。本
考案の目的は、高安定にして、安価な水晶振動子
の実用化にある。[Detailed Description of the Invention] The present invention relates to a GT cut crystal resonator. The purpose of the present invention is to put into practical use a highly stable and inexpensive crystal resonator.
水晶時計の高精度化に伴なつて、厚みすべり水
晶振動子、中でもATカツト水晶振動子が注目さ
れつつある。このATカツト水晶振動子を用いる
ことによつて、時間精度は、かなり改良されるが
このATカツト水晶振動子にも、次のような欠点
がある。即ち、小型にできない、共振周波数がＭ
Hz帯で非常に高い、消費電力が大きい、同一性能
のものを大量につくることができない等である。
これらの欠点により、ATカツト水晶振動子は、
高精度の周波数安定度をもつにもかかわらず実用
化されていない。上記の欠点を克服し、安価な高
精度電子時計用水晶振動子の実用化を図るもの
が、本考案になる水晶振動子である。 As quartz clocks become more precise, thickness-slip quartz crystal units, especially AT-cut quartz crystal units, are attracting attention. By using this AT-cut crystal oscillator, the time accuracy is considerably improved, but this AT-cut quartz crystal oscillator also has the following drawbacks. In other words, the resonant frequency is M, which cannot be made smaller.
They are extremely expensive in the Hz band, consume a lot of power, and cannot be manufactured in large quantities with the same performance.
Due to these drawbacks, AT cut crystal resonators are
Despite having highly accurate frequency stability, it has not been put into practical use. The crystal resonator of the present invention overcomes the above-mentioned drawbacks and aims to put into practical use an inexpensive crystal resonator for high-precision electronic watches.
以下図面により説明する。 This will be explained below with reference to the drawings.
第１図は、従来のGTカツト水晶振動子の具体
例である。図においては１１はGTカツト水晶振
動子体、１２は１１の表面上に蒸着によつて着け
られた電極、１３は振動子の支持と電極取り出し
をかねるホルダである。この振動子の振動姿態
は、輪郭すべり振動であつて、温度−共振周波数
特性は常温付近で平らになる優れた特性をもつ。
大きさは、共振周波数が100KHz程度で、40mm角
で、厚みが３mm程度である。しかし優れた電気的
特性を維持するためには、水晶原石から振動子体
を形成する工程において、多くの配慮を必要とす
る。すなわち良い共振周波数のエージング特性、
高いＱ値を得るためには、振動子体に歪の残るよ
うな形成工程例えば、ダイヤモンドカツター等に
よる加工法を採ることができず、研摩によつて仕
上げるような歪の残らない加工法を採らなければ
ならない。従つて第１図の例では、振動子体は、
６面を有するので、６回の研摩工程、あるいは、
対向する平面を同時に研摩したとしても３回の研
摩工程を採らねばならず振動子体を安価に製造す
ることは、非常に難しい。又、このGTカツト水
晶振動子においては、主振動（信号が取出される
振動）と副振動（信号として取出されない振動）
が各々、矩形振動子の縦と横の各々に発生するも
のなので、縦横の辺比が、周波数温度特性に効
き、又、各々の長さが共振周波数に影響するた
め、形状精度は、極めて厳しく、加工は非常に困
難であつた。又、このような加工で、できたもの
は、特性的に、バラツキが大きく、特性の優れた
ものを量産することは、困難であつた。 FIG. 1 shows a specific example of a conventional GT cut crystal resonator. In the figure, 11 is a GT cut crystal resonator body, 12 is an electrode attached by vapor deposition on the surface of 11, and 13 is a holder that supports the resonator and takes out the electrode. The vibration mode of this vibrator is contour-slip vibration, and the temperature-resonance frequency characteristic has an excellent characteristic of flattening around room temperature.
The resonance frequency is about 100KHz, the size is 40mm square, and the thickness is about 3mm. However, in order to maintain excellent electrical characteristics, many considerations are required in the process of forming a vibrator body from raw crystal. i.e. good resonant frequency aging characteristics,
In order to obtain a high Q value, it is not possible to use a forming process that would leave distortion on the vibrator body, such as a processing method using a diamond cutter, so it is necessary to use a processing method that does not leave distortion, such as finishing by polishing. must be taken. Therefore, in the example of FIG. 1, the vibrator body is
Since it has 6 surfaces, 6 polishing steps or
Even if the opposing planes are polished at the same time, the polishing process must be performed three times, making it extremely difficult to manufacture the vibrator body at a low cost. In addition, this GT cut crystal resonator has main vibration (vibration from which a signal is extracted) and sub-vibration (vibration from which a signal is not extracted).
occurs in both the vertical and horizontal directions of the rectangular vibrator, so the ratio of the vertical and horizontal sides affects the frequency temperature characteristics, and each length affects the resonant frequency, so shape accuracy is extremely strict. , processing was extremely difficult. Furthermore, the properties of products produced by such processing vary widely, making it difficult to mass-produce products with excellent properties.
第２図は、本考案の一具体例の図である。図に
おいて、２１は、GTカツト水晶振動子の振動
部、２２は振動部と一体に成形された電極部、２
３は、振動部とやはり一体に成形された支持部で
ある。２４は固定台、２５はリード線、２６は固
定台に支持部を接着するハンダである。この場
合、表裏の電極と、水晶振動子部、及び支持部
は、同時にエツチングによつて成形される。それ
らの裏表面に蒸着等によつて着けられた金属膜間
に電圧を印加することによつて輪郭すべり振動を
おこすことができる。第２図の水晶振動子を得る
工程例を以下に詳説する。第３図は本考案に係る
水晶薄板が水晶原石から切り出される方向を示す
図である。図においてＸ，Ｙ，Ｚ，はそれぞれ水
晶の電気軸、機械軸、光軸である。３０は従来の
GTカツト水晶振動子を作るための水晶板であ
り、３１は、本考案の水晶振動子を得るための水
晶板であつて、図のように、Ｙ板をＸ軸を中心に
45゜〜55゜回転した位置に水晶原石より切り出さ
れる。この水晶板は、切り出された後、充分に研
摩して、切り出し工程での加工歪を取り除き、所
定の厚さの水晶薄板に仕上げられる。本考案で
は、次にフオトエツチングを行うために、厚みは
500μｍ以下が好ましい。水晶振動子は、この水
晶薄板から次に説明するようにフオトエツチング
によつて形成される。先ず、水晶薄板の表裏両面
に例えば、クロムおよびその上に金の金属膜を蒸
着によつて着ける。次に第４図に示したように、
水晶振動子の形状４１をＸ軸に対して所定の角度
β゜傾けたパターンにしてフオトエツチングによ
り、前記クロム−金の金属膜を残す。その後、こ
の水晶薄板を例えばフツ化水素液とフツ化アンモ
ニウムの混合液中に浸漬すれば、クロム−金の金
属膜によつておおわれていない部分の水晶は、溶
解され、多くの水晶振動子が連なつたものが得ら
れる。しかる後、第４図の接続部分４２に弱い力
を与えれば、分離した、水晶振動子が得られる。
この例においては振動子形状をしたクロム−金の
金属膜は、水晶を溶解する際の保護マスクとして
働くと同時に、完成後は、そのまま振動子の電極
膜として働いている。しかし工程数を増せば電極
と振動子外形とは異つた形状のものとすることが
できることは言うまでもない。又、出来上つた振
動子が、Ｘ軸に関して、さらに角度Ｂだけ傾いて
作られることは言うまでもない。GTカツト水晶
振動子は前述した如く矩形状振動部の縦と横のい
ずれも振動しているものであり、この点周囲に節
を有するATカツト振動子とは大きく異なる点で
ある。従つてGTカツトの周囲に支持部設けるこ
とは、たとえ副振動部においてもなされていなか
つたのが現状である。然るに本考案の実施例によ
れば、第２図に示すように矩形状振動部の外周に
環状の支持部を一体に形成するとともに、その環
状部分のほぼ中央部分のみを固定台に固着支持さ
せ且つ固着される部分以外の支持部は同じ幅でな
る構成であるので、幅振動があつても支持部が一
体的に振動することになり、支持部における振動
洩れを実質的に無くしているものである。また矩
形状振動部の表裏に配置される電極が支持部まで
伸び、支持部の箇所で電気的接続がなされるの
で、接続による振動の影響も皆無となつている。 FIG. 2 is a diagram of a specific example of the present invention. In the figure, 21 is a vibrating part of the GT cut crystal resonator, 22 is an electrode part molded integrally with the vibrating part, and 2
Reference numeral 3 denotes a support portion which is also integrally molded with the vibrating portion. 24 is a fixing base, 25 is a lead wire, and 26 is a solder for bonding the supporting part to the fixing base. In this case, the front and back electrodes, the crystal resonator section, and the support section are formed by etching at the same time. By applying a voltage between the metal films attached to their back surfaces by vapor deposition or the like, contour sliding vibration can be generated. An example of the process for obtaining the crystal resonator shown in FIG. 2 will be explained in detail below. FIG. 3 is a diagram showing the direction in which the crystal thin plate according to the present invention is cut out from the crystal raw stone. In the figure, X, Y, and Z are the electrical axis, mechanical axis, and optical axis of the crystal, respectively. 30 is the conventional
This is a crystal plate for making a GT cut crystal resonator, and 31 is a crystal plate for obtaining a crystal resonator of the present invention.
It is cut from a rough crystal at a position rotated 45° to 55°. After this quartz plate is cut out, it is sufficiently polished to remove processing distortion during the cutting process, and is finished into a thin quartz plate with a predetermined thickness. In this invention, in order to perform photo etching next, the thickness is
The thickness is preferably 500 μm or less. A crystal resonator is formed from this crystal thin plate by photoetching as described below. First, metal films of, for example, chromium and gold are deposited on both the front and back surfaces of a thin crystal plate by vapor deposition. Next, as shown in Figure 4,
The shape 41 of the crystal resonator is patterned to be inclined at a predetermined angle .beta..degree. with respect to the X axis, and photoetching is performed to leave the chromium-gold metal film. After that, if this crystal thin plate is immersed in a mixed solution of hydrogen fluoride and ammonium fluoride, the portion of the crystal that is not covered by the chromium-gold metal film will be dissolved, and many crystal oscillators will be removed. You get something that is connected. Thereafter, by applying a weak force to the connecting portion 42 of FIG. 4, a separate crystal resonator can be obtained.
In this example, the vibrator-shaped chromium-gold metal film serves as a protective mask when melting the crystal, and at the same time, after completion, it directly functions as the electrode film of the vibrator. However, it goes without saying that if the number of steps is increased, the electrodes and the vibrator can have different shapes. Furthermore, it goes without saying that the finished vibrator is made tilted by an angle B with respect to the X-axis. As mentioned above, the GT cut crystal oscillator has a rectangular vibrating section that vibrates both vertically and horizontally, which is very different from the AT cut crystal oscillator, which has nodes around this point. Therefore, the current situation is that no supporting part is provided around the GT cut, even in the sub-vibrating part. However, according to the embodiment of the present invention, as shown in FIG. 2, an annular support part is integrally formed on the outer periphery of the rectangular vibrating part, and only approximately the central part of the annular part is fixedly supported by a fixed base. In addition, since the support part other than the fixed part has the same width, even if there is width vibration, the support part vibrates as one, and vibration leakage in the support part is virtually eliminated. It is. Furthermore, since the electrodes arranged on the front and back sides of the rectangular vibrating section extend to the support section and are electrically connected at the support section, there is no effect of vibration due to the connection.
本考案の水晶振動子は、以上説明したように、
非常に簡単で、量産に適する工適によつて形成す
ることが出来るので、非常に安価に製造すること
ができる。又、本考案は振動子外形をフオトエツ
チングによつて形成するので次のような特徴を有
する。 As explained above, the crystal resonator of the present invention has
Since it is very simple and can be formed using a technique suitable for mass production, it can be manufactured at a very low cost. Furthermore, the present invention has the following features since the outer shape of the vibrator is formed by photoetching.
(1) 加工形状に自由度が大きく、超小型に振動子
を形成することができる。(1) There is a high degree of freedom in the processing shape, making it possible to form ultra-small oscillators.
(2) 外形寸法を高精度に仕上げることができるの
で、GTカツト水晶振動子の場合、共振周波数
温度特性、共振周波数の一様なものを作ること
ができる。(2) Since external dimensions can be finished with high precision, GT cut crystal resonators can be manufactured with uniform temperature characteristics and resonant frequencies.
(3) 電極部、支持部も外形成形と同時に行なうた
め工数低減になる。(3) The electrode part and support part are also formed at the same time as the external forming, which reduces the number of man-hours.
(4) 支持部を振動部と一体で成形し、しかも支持
部を環状としてその中央部分のみを固定台に固
着する構成のため、支持による振動の損失が少
ないと同時に、支持による振動子の特性バラツ
キが少なくなる。また電気的な接続も振動部の
電極が支持部まで伸び、支持部の箇所で接続が
行なわれるので、接続が振動に対する影響は実
質的に皆無である。(4) The support part is molded integrally with the vibrating part, and since the support part is annular and only the central part is fixed to the fixed base, there is less loss of vibration due to the support, and at the same time, the characteristics of the vibrator due to the support are improved. There will be less variation. Further, since the electrical connection is such that the electrode of the vibrating part extends to the support part and the connection is made at the support part, the connection has virtually no effect on vibration.
(5) 支持部を振動部と一体で形成するため、支持
部のスペースが小さくてすみ、支持線を不要と
すること等から、超小型にすることが可能であ
る。(5) Since the support part is formed integrally with the vibrating part, the space of the support part is small, and support wires are not required, so it is possible to make it ultra-compact.
第１図は、従来のGTカツト水晶振動子、第２
図は、本考案のGTカツト水晶振動子の具体例の
図、第３図は、本考案に係る水晶薄板の切り出し
角度を示す図、第４図は、本考案の水晶振動子の
製造法を示す図。
１１，２１，４１……GTカツト水晶振動子、
１２，２２……電極膜、１３……支持体、２３…
…振動部と一体に形成れた支持部、３０……従来
の輪郭すべり水晶振動子をつくるための水晶板、
３１……本考案の輪郭すべり水晶振動子をつくる
ための水晶板、４２……接続部。
Figure 1 shows a conventional GT cut crystal resonator,
The figure shows a specific example of the GT-cut crystal resonator of the present invention, Figure 3 shows the cutting angle of the crystal thin plate according to the present invention, and Figure 4 shows the manufacturing method of the crystal resonator of the present invention. Figure shown. 11, 21, 41...GT cut crystal oscillator,
12, 22... Electrode film, 13... Support, 23...
...Support part formed integrally with the vibrating part, 30...Crystal plate for making a conventional contour slip crystal resonator,
31...Crystal plate for making the contour slip quartz crystal resonator of the present invention, 42... Connection portion.
Claims (1)
において、前記振動子はＹ板をＸ軸を中心に45゜
〜55゜回転した位置に切り出された500μｍ以下
の厚みの薄板上にＸ軸に対して所定の角度β゜傾
けて設けた前記振動子のパターンに基いてエツチ
ング形成されるとともに、前記振動子は矩形の振
動部と、該矩形の対向する２辺の各々から伸長し
環状部分として形成される支持部とが前記エツチ
ング加工により１体に形成され、且つ前記支持部
は前記環状部分のほぼ中央部のみが固定台に支持
されるとともに、前記支持部の固定台に固着され
る部分以外はほぼ同一幅で前記振動子の対向する
２辺の振動に応じて振動しうる幅に形成され、更
に前記振動部の表裏に設けられた電極が前記支持
部まで伸び、支持部の箇所で電気的接続をなすよ
う構成されたことを特徴とするGTカツト水晶振
動子。 In a GT cut crystal resonator having a rectangular planar shape, the resonator is placed on a thin plate with a thickness of 500 μm or less cut out from a Y plate at a position rotated by 45° to 55° around the X axis. The vibrator is formed by etching based on a pattern of the vibrator provided at a predetermined angle β°, and the vibrator is formed as a rectangular vibrating portion and an annular portion extending from each of two opposing sides of the rectangle. A supporting part is formed into one piece by the etching process, and in the supporting part, only the substantially central part of the annular part is supported by the fixing base, and the part of the supporting part other than the part fixed to the fixing base is The vibrator is formed in a width that is approximately the same width and can vibrate in accordance with the vibrations of the two opposing sides of the vibrator, and furthermore, electrodes provided on the front and back of the vibrating part extend to the support part, and an electrical connection is made at the support part. A GT cut crystal oscillator characterized in that it is configured to form a connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985145895U JPS6238348Y2 (en) | 1985-09-25 | 1985-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985145895U JPS6238348Y2 (en) | 1985-09-25 | 1985-09-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6168522U JPS6168522U (en) | 1986-05-10 |
| JPS6238348Y2 true JPS6238348Y2 (en) | 1987-09-30 |
Family
ID=30704146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985145895U Expired JPS6238348Y2 (en) | 1985-09-25 | 1985-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6238348Y2 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4888886A (en) * | 1972-02-21 | 1973-11-21 | ||
| JPS50790A (en) * | 1973-05-02 | 1975-01-07 | ||
| JPS50153891A (en) * | 1974-05-14 | 1975-12-11 | ||
| JPS5160189A (en) * | 1974-11-09 | 1976-05-25 | Suwa Seikosha Kk | Suishoshindoshi |
| JPS51140065A (en) * | 1975-05-28 | 1976-12-02 | Aisin Seiki Co Ltd | Change gear |
-
1985
- 1985-09-25 JP JP1985145895U patent/JPS6238348Y2/ja not_active Expired
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4888886A (en) * | 1972-02-21 | 1973-11-21 | ||
| JPS50790A (en) * | 1973-05-02 | 1975-01-07 | ||
| JPS50153891A (en) * | 1974-05-14 | 1975-12-11 | ||
| JPS5160189A (en) * | 1974-11-09 | 1976-05-25 | Suwa Seikosha Kk | Suishoshindoshi |
| JPS51140065A (en) * | 1975-05-28 | 1976-12-02 | Aisin Seiki Co Ltd | Change gear |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6168522U (en) | 1986-05-10 |
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