JPS6237922U - - Google Patents
Info
- Publication number
- JPS6237922U JPS6237922U JP12975085U JP12975085U JPS6237922U JP S6237922 U JPS6237922 U JP S6237922U JP 12975085 U JP12975085 U JP 12975085U JP 12975085 U JP12975085 U JP 12975085U JP S6237922 U JPS6237922 U JP S6237922U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- chamber
- substrate
- plasma cvd
- cvd apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例を示す概略正面図
、第２図は従来のプラズマＣＶＤ装置の概略正面
図である。
１…チヤンバー、２，３…電極、６…基板、８
…フアインセラミツクス皮膜。
FIG. 1 is a schematic front view showing an embodiment of this invention, and FIG. 2 is a schematic front view of a conventional plasma CVD apparatus. 1... Chamber, 2, 3... Electrode, 6... Substrate, 8
...Fine ceramics film.
Claims (1)
び前記電極の表面にフアインセラミツクス皮膜を
形成したことを特徴とするプラズマＣＶＤ装置。 A plasma CVD apparatus characterized in that a fine ceramic film is formed on the inner wall of a chamber in which an electrode, a substrate, etc. are disposed, and on the surface of the electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12975085U JPS6237922U (en) | 1985-08-26 | 1985-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12975085U JPS6237922U (en) | 1985-08-26 | 1985-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237922U true JPS6237922U (en) | 1987-03-06 |
Family
ID=31026602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12975085U Pending JPS6237922U (en) | 1985-08-26 | 1985-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237922U (en) |
-
1985
- 1985-08-26 JP JP12975085U patent/JPS6237922U/ja active Pending