JPS6235590A - Laser mirror device - Google Patents
Laser mirror deviceInfo
- Publication number
- JPS6235590A JPS6235590A JP17312885A JP17312885A JPS6235590A JP S6235590 A JPS6235590 A JP S6235590A JP 17312885 A JP17312885 A JP 17312885A JP 17312885 A JP17312885 A JP 17312885A JP S6235590 A JPS6235590 A JP S6235590A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- laser
- air
- laser mirror
- mirror surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
- H01S3/0346—Protection of windows or mirrors against deleterious effects
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、レーザ装置においてレーザ発振器より放射
されるレーザ光を、例えばレーザヘットなどへ屈折させ
て伝播させるためのレーザミラー装置に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laser mirror device for refracting and propagating laser light emitted from a laser oscillator in a laser device to, for example, a laser head.
レーザ発振器よυのレーザ光出力を効率よく伝播させる
ために、ファイバースコープやレーザミラーなどによっ
てレーザ光路を屈折させてりなっている。特に、中容量
の１０００ Ｗ以上のレーザ装置においては、レーザ光
の屈折時にミラーが吸収する熱による温度上昇全抑制す
るために、ミラーに接した冷却チャンバを設けて冷却水
を循環させ、強制冷却を行なっている。この温度上昇の
抑制とともに、レーザ光の屈折時の又対重の低下を防止
するために重要なことは、レーザ装置の使用中にレーザ
ミラー面に付着するほこ）や粉塵による影響を最小限に
することである。In order to efficiently propagate the laser light output of the laser oscillator, the laser optical path is bent using a fiber scope, laser mirror, etc. In particular, for medium-capacity laser devices of 1000 W or more, in order to completely suppress the temperature rise due to the heat absorbed by the mirror when refracting the laser beam, a cooling chamber is installed in contact with the mirror and cooling water is circulated to enable forced cooling. is being carried out. In addition to suppressing this temperature rise, it is important to minimize the effects of dust and dust that adhere to the laser mirror surface during use of the laser device in order to prevent the decrease in relative weight when the laser beam is refracted. It is to be.
第３図はレーザ光路を屈折させる通常の装置の一例を示
す構成図であシ、（１）はレーザミラー装置、αυはレ
ーザミラー、αＱは冷却チャンバ、αｚｈレーザミラー
ホルダ、（２）はエアーノズル、（３）はダクト、（４
）はレーザ光路である。FIG. 3 is a configuration diagram showing an example of a normal device for refracting a laser optical path, in which (1) is a laser mirror device, αυ is a laser mirror, αQ is a cooling chamber, αzh is a laser mirror holder, and (2) is an air Nozzle, (3) is duct, (4
) is the laser optical path.
次に上記のような装置の動作を説明する。ダクト（３）
内には常に窒素ガスなどを含む清浄な空気を供給し、エ
アーノズル（２）より吹出す風力によって強制的に送風
して、レーザ装置室などから混入してくるほこりや粉塵
などがレーザミラー（１ａ）の表面に付着しようとする
のを吹き払い、レーザミラー（１ａ）面の（＝Ｊ着物に
よる乱反射、透化度の悪化による反射率の低下を防ぐよ
うになっている。Next, the operation of the device as described above will be explained. Duct (3)
Clean air containing nitrogen gas, etc. is constantly supplied inside the interior, and the air is forcibly blown by the wind force blown out from the air nozzle (2) to remove dust and dirt that enters from the laser equipment room etc. into the laser mirror ( This is to blow away the particles that try to adhere to the surface of the laser mirror (1a) and prevent a decrease in reflectance due to diffuse reflection due to (=J kimono) and deterioration of transparency on the surface of the laser mirror (1a).
上記のような構成の従来のレーザミラー装置では、レー
ザミラー（１ａ）面のほこりなどの付着を避けるために
は窒素ガスなどを含む空気を多量に供給しなければなら
ず、またエアーノズル（２）の吹出し力によるダクト（
３）内の風速が弱いため、通常のレーザ装置の使用状態
では、数ケ月でレーザミラー（１ａ）面のほこりなどの
付着の影響によって、反射率が２〜３％低下してしまう
などの問題があった。In the conventional laser mirror device configured as described above, a large amount of air containing nitrogen gas etc. must be supplied in order to prevent dust from adhering to the surface of the laser mirror (1a). ) due to the blowing force of the duct (
3) Due to the weak wind speed inside the mirror, under normal laser device usage conditions, the reflectance will drop by 2-3% in a few months due to the adhesion of dust etc. on the laser mirror (1a) surface. was there.
この発明は上記のような間頴点を解決するためになされ
たもので、多量の空気を供給してこれをダクト内で強制
送風しなくても、レーザミラー面を長期間清浄に維持し
て反射率の低下を防止できるレーザミラー装置を得るこ
とを目的とする。This invention was made to solve the problems mentioned above, and it is possible to maintain the laser mirror surface clean for a long period of time without having to supply a large amount of air and forcefully blow it inside the duct. The object of the present invention is to obtain a laser mirror device that can prevent a decrease in reflectance.
この発明に係るレーザミラー装置は、レーザミラーの鏡
面の上部にこの鏡面と空隙を隔ててエアーガイドを設け
、外部より供給される圧縮空気を鏡面とエアーガイド間
の上記空隙に圧送するようにしたものである。In the laser mirror device according to the present invention, an air guide is provided above the mirror surface of the laser mirror with a gap between the mirror surface and the air guide, and compressed air supplied from the outside is forced into the gap between the mirror surface and the air guide. It is something.
この発明においては、外部より供給された圧縮空気が鏡
面の上部に設けられたエアーガイドに反射してレーザミ
ラーの鏡面へ噴射するので、この噴射力によって鏡面に
付着しようとするほこシなどを吹き払う。In this invention, compressed air supplied from the outside is reflected by the air guide provided at the top of the mirror surface and is injected onto the mirror surface of the laser mirror, so this jetting force blows off dust and other particles that tend to adhere to the mirror surface. pay.
第１図および第２図はこの発明の一実施例によるレーザ
ミラー装置の構成図である。図において、←υはレーザ
ミラー、０■はレーザミラーホルダ、０階は冷却室、Ｉ
およびαつはそれぞれ冷却水の入口および出口、ａｅは
レーザミラーホルダ（１ｚを基台αηに固定する取付ね
じ、（慢はエアーガイドで、レーザミラーαυの鏡面部
とレーザミラーホルダα２との間の空洞部（Ｉ！Ｊ内に
外部からの圧縮空気（イ）の導入管（２１）が設けられ
、０リング（２２）によってレーザミラーホルダα２と
空洞部０１間をシールし、取付ねじ（２３）によってレ
ーザホルダα２に固定されている。1 and 2 are configuration diagrams of a laser mirror device according to an embodiment of the present invention. In the figure, ←υ is the laser mirror, 0■ is the laser mirror holder, the 0th floor is the cooling room, and I
and α are the inlet and outlet of the cooling water, respectively, ae is the mounting screw that fixes the laser mirror holder (1z) to the base αη, and (arrogance is the air guide between the mirror surface of the laser mirror αυ and the laser mirror holder α2) An inlet pipe (21) for compressed air (A) from the outside is provided in the cavity (I!J), and an O-ring (22) seals between the laser mirror holder α2 and the cavity 01. ) is fixed to the laser holder α2.
上記のようなレーザミラー装置において、冷却室ａ３内
を循環する冷却水によってレーザミラーホルダ（１３の
隔壁を介してレーザミラーの温度上昇が抑制され、一方
エアーガイド（１υに設けられた導入口（２１）より、
図示の々い空気源から送給される圧縮空気（イ）が空洞
部α１内に圧送され、エアーガイドＯｇＪの内壁に反射
してレーザミラーαυの鏡面に噴射することにより、周
辺に浮遊して鏡面に付着すると反射率の低下などの弊害
を及ぼすほこりなどを吹き払うようになっている。In the laser mirror device as described above, the temperature rise of the laser mirror is suppressed by the cooling water circulating in the cooling chamber a3 through the partition wall of the laser mirror holder (13), while the air guide (1υ) has an inlet ( From 21),
Compressed air (A) supplied from the illustrated air source is forced into the cavity α1, reflected on the inner wall of the air guide OgJ, and injected onto the mirror surface of the laser mirror αυ, thereby causing air to float around. It is designed to blow away dust that can cause harmful effects such as a decrease in reflectance if it adheres to the mirror surface.
この発明は以上説明したとおり、レーザミラーの鏡面側
の上方にエアーガイドを設け、との止アーガイド内の空
洞部より圧縮空気をレーザミラーの鏡面に吹きつけると
いう簡単な構造によって、効率よくほこりなどの付着の
防止ができる効果がある０As explained above, this invention has a simple structure in which an air guide is provided above the mirror surface side of the laser mirror, and compressed air is blown onto the mirror surface of the laser mirror from the cavity in the stopper guide. It has the effect of preventing the adhesion of
第１図はこの発明の一実施例によるレーザミラー装置の
構成を示す断面図、第２図は第１図の上面図、第３図は
従来のレーザ光路を屈折させる装置の一例を示す構成図
である。
図において、αυはレーザミラー、α樽はエアーガイド
、０は空洞部、（イ）は圧縮空気。
なお、図中同一符号は同一または相当部分を示す。
代理人 弁理士 佐 藤 正 年
２０：圧Ｉａ空糺
第２国
第３ ＠FIG. 1 is a sectional view showing the configuration of a laser mirror device according to an embodiment of the present invention, FIG. 2 is a top view of FIG. 1, and FIG. 3 is a configuration diagram showing an example of a conventional device for refracting a laser optical path. It is. In the figure, αυ is a laser mirror, α barrel is an air guide, 0 is a cavity, and (a) is compressed air. Note that the same reference numerals in the figures indicate the same or corresponding parts. Agent: Patent Attorney Tadashi Sato Year 20: Pressure Ia Sora 2nd Country 3rd @
Claims (1)
切断などを行うレーザ装置において、上記レーザ発振器
よりのレーザ光路を屈折するレーザミラーの鏡面側の上
部にこの鏡面と空隙を隔てて設けられたエアーガイド内
に空気を圧送し、この圧送された空気を上記レーザミラ
ーの鏡面へ吹きつけるように成されたことを特徴とする
レーザミラー装置。Welding by focusing laser light emitted from a laser oscillator,
In a laser device that performs cutting, etc., air is pumped into an air guide provided at the upper part of the mirror surface side of the laser mirror that refracts the laser beam path from the laser oscillator, with a gap between the mirror surface and the air guide. A laser mirror device characterized in that the laser mirror device is configured to spray the laser beam onto the mirror surface of the laser mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17312885A JPS6235590A (en) | 1985-08-08 | 1985-08-08 | Laser mirror device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17312885A JPS6235590A (en) | 1985-08-08 | 1985-08-08 | Laser mirror device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6235590A true JPS6235590A (en) | 1987-02-16 |
Family
ID=15954643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17312885A Pending JPS6235590A (en) | 1985-08-08 | 1985-08-08 | Laser mirror device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6235590A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2020054593A1 (en) * | 2018-09-13 | 2021-08-30 | パナソニック株式会社 | Optical device |
-
1985
- 1985-08-08 JP JP17312885A patent/JPS6235590A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2020054593A1 (en) * | 2018-09-13 | 2021-08-30 | パナソニック株式会社 | Optical device |
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