JPS6235300U - - Google Patents
Info
- Publication number
- JPS6235300U JPS6235300U JP12799985U JP12799985U JPS6235300U JP S6235300 U JPS6235300 U JP S6235300U JP 12799985 U JP12799985 U JP 12799985U JP 12799985 U JP12799985 U JP 12799985U JP S6235300 U JPS6235300 U JP S6235300U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- degassing
- electrons
- ultra
- high vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007872 degassing Methods 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
Landscapes
- Particle Accelerators (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図は、本考案の脱ガス装置の使用を示す概
略断面図である。
１…脱ガス装置、２…電子銃、３…集束マグネ
ツト、４，４′…偏向マグネツト、５…排気系、
６…電子銃電源、１０…超高真空ダクト。
FIG. 1 is a schematic cross-sectional view showing the use of the degassing device of the present invention. 1... Degassing device, 2... Electron gun, 3... Focusing magnet, 4, 4'... Deflection magnet, 5... Exhaust system,
6... Electron gun power supply, 10... Ultra-high vacuum duct.
Claims (1)
部品を脱ガスする装置であつて、 (1) 電子を発生させる電子銃、 (2) 電子を集束させる集束マグネツト、および (3) 電子ビームを偏向させる２組の偏向マグネ
ツト を有することを特徴とする脱ガス装置。[Scope of Claim for Utility Model Registration] A device for degassing ultra-high vacuum components by irradiating it with an electron beam, which comprises: (1) an electron gun that generates electrons; (2) a focusing magnet that focuses the electrons. , and (3) a degassing device characterized by having two sets of deflection magnets for deflecting an electron beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12799985U JPS6235300U (en) | 1985-08-21 | 1985-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12799985U JPS6235300U (en) | 1985-08-21 | 1985-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6235300U true JPS6235300U (en) | 1987-03-02 |
Family
ID=31023269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12799985U Pending JPS6235300U (en) | 1985-08-21 | 1985-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6235300U (en) |
-
1985
- 1985-08-21 JP JP12799985U patent/JPS6235300U/ja active Pending