JPS62298953A - Production for grooved optical disk original board - Google Patents
Production for grooved optical disk original boardInfo
- Publication number
- JPS62298953A JPS62298953A JP14338786A JP14338786A JPS62298953A JP S62298953 A JPS62298953 A JP S62298953A JP 14338786 A JP14338786 A JP 14338786A JP 14338786 A JP14338786 A JP 14338786A JP S62298953 A JPS62298953 A JP S62298953A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- cutting tool
- diamond
- groove
- cut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title description 11
- 238000004519 manufacturing process Methods 0.000 title description 6
- 238000005520 cutting process Methods 0.000 claims abstract description 49
- 239000010432 diamond Substances 0.000 claims abstract description 43
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 43
- 239000010409 thin film Substances 0.000 claims abstract description 35
- 239000000463 material Substances 0.000 claims abstract description 20
- 239000011521 glass Substances 0.000 claims abstract description 16
- 239000013543 active substance Substances 0.000 claims description 5
- 238000003825 pressing Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 9
- 239000010408 film Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
（産業上の利用分野）
本発明は機械式カッティング力法によシ、逆台形状の断
面を有するグリグリープを形成する溝付光ディスク原盤
の製造方法に関するものである。Detailed Description of the Invention 3. Detailed Description of the Invention (Field of Industrial Application) The present invention is directed to the production of a grooved optical disc master forming a grooved groove having an inverted trapezoidal cross section by a mechanical cutting force method. It is about the method.
（従来の技術）
従来の機械式カッティング力法による溝付光ディスク原
盤の製造方法としては、アルミニウム板上に形成した銅
の電鋳上に、ダイヤモンドバイトによりグルーブを形成
する方法がある（「ビデオディスクとＤＡＤ入門」、コ
ロナ社Ｐ、１５３〜Ｐ、１５７参照）。(Prior art) As a conventional method for manufacturing grooved optical disc masters using the mechanical cutting force method, there is a method in which grooves are formed using a diamond bit on copper electroforming formed on an aluminum plate ("Video Disc"). ``Introduction to DAD'', Corona Publishing, pp. 153-157).
一般に、逆台形状の断面を有するグルーブを光ヘッドの
サーボトラックとして用いる場合、グルーブの上面がグ
ルーブ底面と平行に形成されることが要求される。この
ようなグルーブを機械式カッティング方法により形成す
るためには、逆台形状の刃先を有するダイヤモンドバイ
トラ用い、ダイヤモンドバイトの刃幅方向における切刃
稜が被剛材表面と平行になるようにダイヤモンドバイト
の固定位置を調整し、グルーブを形成することが必要で
ある。ここで、元ディスクのプリグルーブとは溝幅がサ
ブＳクロンオーダであり、用いるダイヤモンドバイトの
刃先先端部の刃幅も同様にサブミクロンオーダと非常に
微細なものが用いられ製造方法では、ダイヤモンドバイ
トの刃幅方向における切刃稜と被削材表面とを平行に調
整し、固定することは非常に困難であった。したがって
、被剛材表面に対してグルーブ底面が平行な断面を有す
る逆台形状のグルーブを形成することは非常に困難であ
るという問題点があった。Generally, when a groove having an inverted trapezoidal cross section is used as a servo track of an optical head, the top surface of the groove is required to be formed parallel to the bottom surface of the groove. In order to form such grooves using a mechanical cutting method, a diamond bit tool with an inverted trapezoidal cutting edge is used, and the cutting edge of the diamond bit in the blade width direction is parallel to the surface of the rigid material. It is necessary to adjust the fixed position of the cutting tool and form a groove. Here, the pregroove of the original disk has a groove width of sub-S chron order, and the cutting edge width of the cutting edge of the diamond cutting tool used is also very fine, sub-micron order. It was very difficult to adjust and fix the cutting edge in the width direction of the cutting edge and the surface of the workpiece so that they were parallel to each other. Therefore, there has been a problem in that it is very difficult to form an inverted trapezoidal groove in which the bottom surface of the groove has a cross section parallel to the surface of the rigid material.
本発明の目的は、このような問題点を解決し、被剛材表
面に対してグルーブ底面が平行な断面を有する逆台形状
グルーブを容易に形成できる溝付光ディスク原盤の製造
方法を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing a grooved optical disk master that can solve these problems and easily form an inverted trapezoidal groove having a cross section in which the bottom surface of the groove is parallel to the surface of the rigid material. It is in.
（問題点を解決するための手段）
本発明の溝付光ディスク原盤の製造方法は、平行平面研
磨したガラス板上にグルーブ形成領域に対応する部分を
少なくとも覆うように被剛材薄膜を形成し、かつ前記ガ
ラス板面上の前記グルーブ形成領域を除いた一部にダイ
ヤモンドと化学的に活性な物質による活性′７Ｎ！、膜
を形成する第１の工程と、前記話性薄膜上にバイトホル
ダに固定したダイヤモンドバイトを押圧しながらこのダ
イヤモンド
ドパイト前記活性薄膜との間に相対運動を与える第２の
工程と、前記被削材薄膜上に前記ダイヤモン下バイトに
よりグルーブを形成する第３の工程とを含んで構成され
る。(Means for Solving the Problems) The method for manufacturing a grooved optical disk master of the present invention includes forming a thin film of a stiffening material on a parallel-plane polished glass plate so as to cover at least a portion corresponding to a groove forming area; Also, a part of the glass plate surface other than the groove forming area is coated with diamond and a chemically active substance. a first step of forming a film; a second step of applying relative motion between the diamond dopite and the active thin film while pressing a diamond tool fixed to a tool holder onto the talking thin film; and a third step of forming a groove on the thin film of the work material using the diamond-cut cutting tool.
（作用）
本発明によれば、バイトホルダにダイヤモンドバイトを
固定し、平行平面研磨したガラス板上に形成したダイヤ
モンドと化学的に活性な物質による話性薄膜上にダイヤ
モンドバイト’（ｉ＝押圧し、これら活性薄膜とダイヤ
モンドバイトとの間に相対運ｗＪヲ与えることにより、
そのダイヤモンドバイトの先端部は活性薄膜面にならい
研磨され、ダイヤモンドバイトの刃幅方向における切刃
稜はその活性薄膜面に対し、平行に形成される。被剛材
薄膜は活性薄膜と同一ガラス板面内に形成されているた
め、ダイヤモンドバイトを研磨した後、その固定状態の
ま畦被削材薄膜上に移動し、そのダイヤモンドバイトに
よりグルーブを形成することにより、被剛材表面に対し
てグルーブ底面が平行な断面を有する逆台形状グルーブ
を形成することが出来る。(Function) According to the present invention, a diamond cutting tool is fixed to a cutting tool holder, and a diamond cutting tool' (i=pressing) is applied to a talking thin film of diamond and a chemically active substance formed on a glass plate polished in parallel planes. , by providing a relative force wJ between these active thin films and the diamond bite,
The tip of the diamond cutting tool is polished to follow the active thin film surface, and the cutting edge of the diamond cutting tool in the blade width direction is formed parallel to the active thin film surface. The thin film of the work material is formed on the same glass plate surface as the active thin film, so after polishing the diamond tool, it moves onto the thin film of the work material in its fixed state, and a groove is formed by the diamond tool. By doing so, it is possible to form an inverted trapezoidal groove in which the bottom surface of the groove has a cross section parallel to the surface of the rigid material.
（実施例） 次に、本発明について図面を参照して説明する。(Example) Next, the present invention will be explained with reference to the drawings.
第１［Ｚｌ（ａｌ〜（ｃ）は本発明の一実施例を説明す
るため工８顔に示した光ディスク原盤の断面図である。1A to 1C are cross-sectional views of an optical disc master shown in Fig. 8 for explaining an embodiment of the present invention.
光ディスク原盤には光ヘッドのサーボトラ、りとしてプ
リグルーブと称するスパイラル状の微ＭＢ溝全形成する
が、本実施例の加工においては、第２図に示すように、
断面形状が溝幅ｗ：０．Ｂμｍ。In the optical disc master, a spiral micro-MB groove called a pre-groove is completely formed as a servo track for the optical head, but in the processing of this embodiment, as shown in Fig. 2,
The cross-sectional shape is groove width w: 0. Bμm.
溝深さｈ ＝０．０７ Ａ ” ＋溝側面傾斜角θ＝２
０’の逆台形状グルーブ全１．６μｍピッチでディスク
原盤上に形成することとした。Groove depth h = 0.07 A ” + Groove side inclination angle θ = 2
0' inverted trapezoidal grooves were formed on the disk master with a total pitch of 1.6 μm.
まず、第１図（ａｌ ＶＣ示すように、外径ｙ６１３０
ｒｎｅ＋ 。First, as shown in Figure 1 (al VC), the outer diameter is 6130
rne+.
内径ダニ５圓の平行平面研磨したガラス円板面１０上の
図１５閣からダニ２０篩の領域に、例えばＣｕ（銅）を
０．１μｍの厚さにスパッタして成る被剛材薄膜１１を
形成し、さらにガラス円板面１０上の９６１２０＋＋ｚ
から＄１３ＯＷの領域にダイヤモンドと化学的に活性な
物質、例えばＮｉを０．１μｍの厚さにスパックして成
る活性薄膜１２を形成した。A stiffening material thin film 11 made by sputtering Cu (copper) to a thickness of 0.1 μm is applied to the area of the 20 sieves from FIG. 96120++z on the glass disk surface 10
An active thin film 12 made of diamond and a chemically active substance such as Ni was spun to a thickness of 0.1 μm was formed in a region of $13OW.
このように被削材溝膜１１および活性薄膜１２を形成し
たガラス円板１０を、第１図（ｂ）に示すようにエアス
ピンドル１３上に固定し、このエアスピンドル１３を一
定速度２０Ｑｒｐｍで回転させた。The glass disk 10 on which the workpiece groove film 11 and the active thin film 12 have been formed is fixed on an air spindle 13 as shown in FIG. 1(b), and the air spindle 13 is rotated at a constant speed of 20 Qrpm. I let it happen.
次にダ・イヤモノドバイト１４をバイトホルダ１５に固
定し、ダイヤモンドバイト１４に一定垂直荷重Ｆ＝０．
２ｇを作用させ、活性溝膜１２上にダイヤモンドバイト
１４を押圧しながら同時にダイヤモンドバイト１４にガ
ラス円板１０の半径方向に一定の送り０．４ ｔａｎ
／ ｍｉｎ ｆ与え、ダイヤモンドバイト１４の刃先１
６を研磨した。ここで用いたダイヤモンドバイト１４は
第３図に示すような先端部の刃幅がｔ ＝ ｏ、 ３μ
ｍ、刃先角α＝４０°の逆台形状の刃先１６を有するも
のを用いた。この研磨を２分間行ったところダイヤモン
ドバイト１４の刃幅方向における切刃稜は、活性薄膜１
２に平行に研磨され、刃先１６の先端部刃幅は０．８μ
ｍに成形された。Next, the diamond cutting tool 14 is fixed to the cutting tool holder 15, and a constant vertical load F=0 is applied to the diamond cutting tool 14.
2g to press the diamond cutting tool 14 onto the active groove film 12 while at the same time applying a constant feed of 0.4 tan to the diamond cutting tool 14 in the radial direction of the glass disk 10.
/ min f given, cutting edge 1 of diamond bite 14
6 was polished. The diamond cutting tool 14 used here has a cutting edge width of t = o, 3μ as shown in Fig. 3.
m, and a blade having an inverted trapezoidal cutting edge 16 with a cutting edge angle α=40° was used. When this polishing was performed for 2 minutes, the cutting edge in the blade width direction of the diamond cutting tool 14 was formed by the active thin film 1.
2, the tip width of the cutting edge 16 is 0.8μ
It was formed into m.
最後に、第１図（ｃ）に示すように、ダイヤモンドバイ
ト１４に一定の垂直荷重Ｆ ：＝ ｏ、 ２ 、Ｆ’を
作用させ、ダイヤモンドバイト１４の刃先１６を被剛材
薄膜１１上に押圧しながら、エアスピンドル１３をｚｏ
ｏｒｐｍの一定速で回転し、同時にダイヤモンドバイ）
１４をガラス円板１０の半径方向に一定速０．３２躍／
ｍ ｉ ｎ−″Ｃ：移動することＫよシ、被削材薄膜
１１上グ１１６〜９６５２１１ａＩの領域にピッチ１．
６μｍでスパイラル状にグルーブを形成した。Finally, as shown in FIG. 1(c), a constant vertical load F:=o,2,F' is applied to the diamond cutting tool 14, and the cutting edge 16 of the diamond cutting tool 14 is pressed onto the thin film 11 of the rigid material. While doing so, rotate the air spindle 13 to
Rotates at a constant speed of orpm and at the same time diamond by)
14 in the radial direction of the glass disk 10 at a constant speed of 0.32 leaps/
min-''C: By moving K, a pitch of 1.
A spiral groove was formed with a thickness of 6 μm.
このように形成したグルーブの断面形状を走査型電子顕
微鏡で観察したところ、第２図に示すような被削材薄膜
１１の表面１７とグルーブ底面１８が平行な断面を有す
る溝幅Ｗ＝０．８μｍ、溝深さｈ ＝ Ｏ，Ｑ ７ μ
ｎｔ 、 ｆｇ側面傾斜角θ＝２０° の逆台形状グル
ーブが形成できた。When the cross-sectional shape of the groove formed in this way was observed with a scanning electron microscope, it was found that the groove width W=0. 8 μm, groove depth h = O, Q 7 μ
An inverted trapezoidal groove with a side inclination angle θ=20° was formed.
なお、本実施例では、ダイヤモンドバイト１４の研磨を
行う活性薄膜としてＮｉスパ、り膜１２を用いたが、そ
の他Ｃｒ、Ｔｉ、Ｗ、Ｔａ、Ｚｒ、Ｆｅ、Ｃｏ。In this embodiment, the Ni spa film 12 was used as the active thin film for polishing the diamond cutting tool 14, but other materials such as Cr, Ti, W, Ta, Zr, Fe, and Co were used.
Ｍｎ 、 Ｐ を等のダイヤモンドと化学的に活性な物
質の薄膜を用いても同様の効果が得られる。また、本実
施例では活性薄膜をガラス円板の外周部に形成したが、
内周部に形成しても同様の効果が得られる。A similar effect can be obtained by using a thin film of a substance chemically active with diamond, such as Mn or P. In addition, in this example, the active thin film was formed on the outer periphery of the glass disk.
A similar effect can be obtained even if it is formed on the inner circumference.
（発明の効果）
以上説明したように、本発明の溝付光ディスク原盤の製
造方法は、バイトホルダにダイヤモンドバイトを固定し
、平行平面研磨したガラス板面上に被剛材薄膜とダイヤ
モンドと化学的に活性な物質の活性薄膜を形成し、この
活性薄膜によりダイヤモンドバイト刃先をその刃幅方向
における切刃稜が前記被剛材表面と平行になるように研
磨しながら、被削材薄膜上にグルーブを形成することに
より、被剛材表面に対してグルーブ底面が平行な断面を
有する逆台形状グルーブを安定に形成することができる
。(Effects of the Invention) As explained above, in the method for manufacturing a grooved optical disk master of the present invention, a diamond cutting tool is fixed to a cutting tool holder, and a thin film of the stiffening material and diamond are chemically coated on a glass plate surface that has been polished in parallel planes. An active thin film of an active substance is formed on the work material, and this active thin film is used to polish the cutting edge of the diamond cutting tool so that the cutting edge in the blade width direction is parallel to the surface of the work material. By forming this, it is possible to stably form an inverted trapezoidal groove having a cross section in which the bottom surface of the groove is parallel to the surface of the rigid material.
第１図（ａｔ〜（Ｃ１は本発明の一実施例を工程項に示
した元ディスク原盤を含む断面図、第２図は本実施例に
より加工したプリグルーブの断面図、第３図は第１図に
示す光ディスク原盤の加工に用いたダイヤモンドバイト
の断面図である。
１０・・−・・・ガラス円板、１１・・・・・・被削材
薄膜、１２・・・・・・活性薄膜、１３・・・・・・エ
アスピンドル、１４・・・・−・ダイヤモンドバイト、
１５・−・・・・バイトホルダ、１６・・・・・・刃先
、１７・・−・・・表面、１８・・・・・・グルーブ底
面。
−゛ 九
代理人 弁理士 内 原 日 。
＼〜、−
浴 ／ 回FIG. 1 (at~(C1) is a cross-sectional view including the original disk master showing an example of the present invention in the process section, FIG. 2 is a cross-sectional view of the pregroove processed according to this example, and FIG. It is a sectional view of a diamond cutting tool used for processing the optical disk master shown in Fig. 1. 10...Glass disc, 11...Work material thin film, 12...Activation Thin film, 13...Air spindle, 14...Diamond bite,
15...Bite holder, 16...Blade tip, 17...Surface, 18...Groove bottom. −゛9 Agent Patent Attorney Hiro Uchihara. ＼〜、− Bath / times
Claims (1)
応する部分を少なくとも覆うように被削材薄膜を形成し
、かつ前記ガラス板面上の前記グルーブ形成領域を除い
た一部にダイヤモンドと化学的に活性な物質による活性
薄膜を形成する第１の工程と、前記話性薄膜上にバイト
ホルダに固定したダイヤモンドバイトを押圧しながらこ
のダイヤモンドバイトと前記活性薄膜との間に相対運動
を与える第２の工程と、前記被削材薄膜上に前記ダイヤ
モンドバイトによりグルーブを形成する第３の工程とを
含むことを特徴とする溝付光ディスク原盤の製造方法。A thin film of the work material is formed on a parallel plane polished glass plate so as to cover at least a portion corresponding to the groove forming area, and a part of the glass plate surface other than the groove forming area is chemically coated with diamond. a first step of forming an active thin film of an active substance; and a second step of applying relative motion between the diamond tool and the active thin film while pressing a diamond tool fixed to a tool holder onto the talking thin film. and a third step of forming grooves on the thin film of the work material using the diamond cutting tool.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14338786A JPS62298953A (en) | 1986-06-18 | 1986-06-18 | Production for grooved optical disk original board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14338786A JPS62298953A (en) | 1986-06-18 | 1986-06-18 | Production for grooved optical disk original board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62298953A true JPS62298953A (en) | 1987-12-26 |
Family
ID=15337585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14338786A Pending JPS62298953A (en) | 1986-06-18 | 1986-06-18 | Production for grooved optical disk original board |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62298953A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS637538A (en) * | 1986-06-27 | 1988-01-13 | Showa Alum Corp | Production of aluminum substrate for optical disk |
| JPS637539A (en) * | 1986-06-27 | 1988-01-13 | Showa Alum Corp | Production of aluminum master disk for optical disk |
| EP1117090A1 (en) * | 1999-07-27 | 2001-07-18 | Toyo Kasei Kabushiki Kaisha | Method of producing records |
-
1986
- 1986-06-18 JP JP14338786A patent/JPS62298953A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS637538A (en) * | 1986-06-27 | 1988-01-13 | Showa Alum Corp | Production of aluminum substrate for optical disk |
| JPS637539A (en) * | 1986-06-27 | 1988-01-13 | Showa Alum Corp | Production of aluminum master disk for optical disk |
| EP1117090A1 (en) * | 1999-07-27 | 2001-07-18 | Toyo Kasei Kabushiki Kaisha | Method of producing records |
| EP1117090A4 (en) * | 1999-07-27 | 2003-09-10 | Toyo Kasei Kabushiki Kaisha | Method of producing records |
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