JPS62298022A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS62298022A JPS62298022A JP14102586A JP14102586A JPS62298022A JP S62298022 A JPS62298022 A JP S62298022A JP 14102586 A JP14102586 A JP 14102586A JP 14102586 A JP14102586 A JP 14102586A JP S62298022 A JPS62298022 A JP S62298022A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- tapes
- film
- magnetic
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000000758 substrate Substances 0.000 claims abstract description 39
- 238000004140 cleaning Methods 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims description 10
- 239000000314 lubricant Substances 0.000 claims description 8
- 230000001681 protective effect Effects 0.000 claims description 8
- 239000012528 membrane Substances 0.000 claims description 6
- 238000005498 polishing Methods 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
〔発明の属する技術分野〕
本発明は固定磁気ディスク装置に用いられる磁気記録媒
体の製造方法に関し、詳しくは磁気記録媒体の表面膜面
上の微少突起を除去する製造方法に関する。Detailed Description of the Invention 3. Detailed Description of the Invention [Technical Field to Which the Invention Pertains] The present invention relates to a method of manufacturing a magnetic recording medium used in a fixed magnetic disk device, and more specifically, to a method for manufacturing a magnetic recording medium used in a fixed magnetic disk device. The present invention relates to a manufacturing method for removing minute protrusions.
磁気記録媒体（以下、単に媒体とも称する）は一般にア
ルミニウム合金９強化ガラス、ポリイミドなどからなる
非磁性ディスク状基板の鏡面仕上げされている表面にア
ルマイト処理あるいはＮ１−Ｐ無電解めっき処理などの
下地処理を施し、形成された下地膜上に磁性膜を均一に
形成し、さらに、その上に保護潤滑膜を形成して作製さ
れる。しかし、このようにして作製された媒体の表面に
は、基板表面の加工むら、その上に各膜を形成するとき
の異物や塵埃、あるいは成膜材料の凝集などの要因によ
り微少突起が存在する。固定磁気ディスク装置において
は通常コンタクト・スタート・ストップ（Ｃ３Ｓ）
方式が採られるが、このような微少突起は磁気ヘッドの
浮動の安定性に悪影響を及ぼす。従って、通常これらの
突起は磁性膜、保護潤滑膜形成後最終的に研摩などによ
り取り除かれていた。例えば、バニッンユヘッドを用い
る方法が多く行われている。これは、サファイアやアル
ミナなどの硬い材料で作製されたバニッシュヘッドを用
い、磁気ヘッドの場合と同様に回転している媒体上に浮
上させる。このときのバニソシニヘッドの浮上量を通常
の磁気ヘッドの浮上量より少なくし、媒体上の微少突起
にバニッシュヘッドを衝突させて微少突起を折損し、通
常の磁気ヘッドの場合には磁気ヘッドに衝突しないよう
にしてしまう方法である。しかし、この方法では、折損
後の突起の根本部は媒体上に残っており、媒体の駆動開
始時、停止時にはこの残存突起に磁気ヘッドが衝突する
という問題があり、また、微少突起が比較的大きい場合
には、突起が折損することにより磁性膜に欠陥部が生じ
ることもある。しかも、バニッシュヘッドを媒体の半径
方向に数回往復運動させる必要があり非常に時間がかか
る。Magnetic recording media (hereinafter also simply referred to as media) are generally made of aluminum alloy 9 tempered glass, polyimide, etc., and have a mirror-finished surface of a non-magnetic disk-shaped substrate that is coated with a base treatment such as alumite treatment or N1-P electroless plating treatment. A magnetic film is uniformly formed on the formed base film, and a protective lubricant film is further formed on the magnetic film. However, on the surface of the medium prepared in this way, microscopic protrusions may exist due to factors such as uneven processing of the substrate surface, foreign matter and dust when forming each film on it, and agglomeration of film forming materials. . Fixed magnetic disk drives usually use contact start/stop (C3S).
However, such minute protrusions have a negative effect on the stability of the floating of the magnetic head. Therefore, these protrusions are usually removed by polishing or the like after the magnetic film and protective lubricant film are formed. For example, a method using a buninyu head is often used. This uses a vanish head made of a hard material such as sapphire or alumina, which is floated above a rotating medium in the same way as a magnetic head. At this time, the flying height of the vanishing head is made smaller than the flying height of a normal magnetic head, and the vanishing head collides with a minute protrusion on the medium to break the minute protrusion, and in the case of a normal magnetic head, it does not collide with the magnetic head. This is the way to do it. However, with this method, the root part of the broken protrusion remains on the medium, and there is a problem that the magnetic head collides with this remaining protrusion when starting or stopping the drive of the medium. If the protrusions are large, the protrusions may break, resulting in defects in the magnetic film. Moreover, it is necessary to reciprocate the burnish head several times in the radial direction of the medium, which is very time consuming.
そこで媒体表面に微少突起が発生する原因の大部分が基
板にあることに着目し、下地処理を施された磁性膜形成
前の基板表面に前述のバニッシュヘッドによる仕上げ加
工を行うことが知られている。しかし、この場合にも残
存突起の影響や下地膜がバニッシュヘッドにより受ける
損傷により、その上に形成される磁性膜に欠陥部が発生
する欠点がある。その対策として、下地処理前の基板表
面、あるいは下地処理後で磁性膜形成前の基板表面にラ
フピングテープを圧着接触させて、基板を回転させて一
種の研摩を行う方法が提案されている。この方法によれ
ば基板表面の微少突起は根本から確実にとれ良好な基板
表面が得られるが、ラフピングテープはテープ基材にア
ルミナなどの硬い粒子を接着剤で固着させたものであり
、この方法で処理された基板表面には微少ながら加工の
痕跡が残り、充分満足すべき平滑な面が得られるにはい
たってない。Therefore, we focused on the fact that most of the causes of microprotrusions on the media surface are caused by the substrate, and it is known that finishing processing is performed using the aforementioned burnish head on the surface of the substrate, which has been subjected to surface treatment and before the magnetic film is formed. There is. However, even in this case, there is a drawback that defects are generated in the magnetic film formed thereon due to the influence of the remaining protrusions and damage to the base film caused by the burnish head. As a countermeasure, a method has been proposed in which a roughening tape is pressed into contact with the surface of the substrate before the base treatment or after the base treatment but before the magnetic film is formed, and the substrate is rotated to perform a kind of polishing. With this method, minute protrusions on the substrate surface can be reliably removed from the root and a good substrate surface can be obtained. However, roughing tape is made by fixing hard particles such as alumina to the tape base material with an adhesive. On the surface of the substrate treated by this method, traces of processing remain, although minute, and a sufficiently satisfactory smooth surface cannot be obtained.
本発明は、上述の欠点を除去して、下地膜形成後の基板
表面、または、磁性膜、保護潤滑膜まで形成後の媒体表
面に存在する微少突起を、基板表面または媒体表面を損
傷することなく、確実に短時間で除去し、特性の優れた
媒体を製造する方法を提供することを目的とする。The present invention eliminates the above-mentioned drawbacks and eliminates the possibility of damaging the substrate surface or the medium surface by removing minute protrusions present on the substrate surface after the formation of the base film or on the medium surface after the formation of the magnetic film and protective lubricant film. It is an object of the present invention to provide a method for producing a medium with excellent characteristics by reliably removing it in a short time without any problems.
本発明の目的は、非磁性基板に下地処理を施し下地膜を
形成後、その上に磁性膜、保護潤滑膜を形成する媒体の
製造方法において、前記下地膜形成後および保護潤滑膜
形成後、または、少なくともどちらか一方の後に、クリ
ーニングテープをその膜面に圧着接触せしめ、該膜面と
クリーニングテープとを相対移動させ膜面上の微少突起
を除去することによって達成される。An object of the present invention is to provide a method for producing a medium in which a non-magnetic substrate is subjected to a base treatment to form a base film, and then a magnetic film and a protective lubricant film are formed thereon. Alternatively, after at least one of them, the cleaning tape is brought into pressure contact with the membrane surface, and the membrane surface and the cleaning tape are moved relative to each other to remove minute protrusions on the membrane surface.
以下、本発明の実施例を図面を参照しながら説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図は本発明の方法を実施し得る装置の一実施例の要
部構成を示す上面図である。第１図に見られるように実
施例の装置は４つのブロックからなる。各ブロックは基
板１に対して対象的に配置されており、架台７に回転可
能に取り付けられたコンタクトゴムローラ３．供給リー
ル４１巻取りリール５．テンシミンローラ６およびそれ
らの間に張られたクリーニングテープ２で構成されてい
る（図において番号は１ブロツクについてのみ付し他も
同様の構成であるので略す）。FIG. 1 is a top view showing the configuration of essential parts of an embodiment of an apparatus capable of carrying out the method of the present invention. As seen in FIG. 1, the apparatus of the embodiment consists of four blocks. Each block is arranged symmetrically with respect to the substrate 1, and has a contact rubber roller 3. Supply reel 41 Take-up reel 5. It consists of a tension roller 6 and a cleaning tape 2 stretched between them (in the figure, only one block is numbered and the other blocks are omitted as they have the same structure).
次にこの装置を用いて本発明の磁気記録媒体の製造方法
について説明する。第１図における矢印のａ方向・へ各
ブロックを移動させて離間させる（移動機構は図示せず
）。表面に下地処理を施された基板１を基板駆動軸８に
装着し、軸を中心に基板１を回転駆動させる。各ブロッ
クを矢印のｂ方向に移動させ、各ブロックのクリーニン
グテープ２をコンタクトゴムローラ３により基板１の両
面に圧着接触させ、基板１の両面を２個づつのクリーニ
ングテープ、従って、合計４個のクリーニングテープを
巻き取り移動させながら同時に研摩する。その状態を側
面より見たＡ−Ａ断面図が第２図、Ｂ−Ｂ断面図が第３
図である。第３図に示すように回転している基板１０両
面にクリーニングテープ２をテンンヨンローラ６により
たわまないようにテンションをかけながらコンタクトゴ
ムローラ３で圧着接触した状態で、第２図に示す矢印の
方向すなわちクリーニングテープ２の各り一ルの回転軸
方向に基板１０半径内で架台７と共にカム構造を用いて
（図示はされてない）往復運動させる。かくして、基板
１の両面全面が４個のりリーニングテープ２により研摩
され、微少突起が短時間に効率良く除去される。Next, a method for manufacturing a magnetic recording medium of the present invention using this apparatus will be explained. Each block is moved in the direction of arrow a in FIG. 1 to separate them (the moving mechanism is not shown). A substrate 1 whose surface has been subjected to surface treatment is mounted on a substrate drive shaft 8, and the substrate 1 is rotated about the shaft. Each block is moved in the direction of arrow b, and the cleaning tape 2 of each block is pressed into contact with both sides of the substrate 1 by the contact rubber roller 3, and two cleaning tapes are applied to both sides of the substrate 1, so a total of four cleaning tapes are applied. The tape is wound and moved while simultaneously being polished. Figure 2 is a cross-sectional view taken along line A-A and Figure 3 is a cross-sectional view taken along line B-B.
It is a diagram. As shown in FIG. 3, the cleaning tape 2 is pressed onto both sides of the rotating substrate 10 by the contact rubber roller 3 while applying tension to prevent bending by the tension roller 6, and the cleaning tape 2 is pressed against both sides of the rotating substrate 10 by the arrows shown in FIG. 2. The cleaning tape 2 is reciprocated within the radius of the substrate 10 in the direction of the axis of rotation of each cleaning tape 2 using a cam structure (not shown) together with the pedestal 7. In this way, the entire surface of both sides of the substrate 1 is polished by the four adhesive leaning tapes 2, and minute protrusions are efficiently removed in a short time.
クリーニングテープは、例えば、天然繊維ポリエステル
混合の不織紙からなり、コンタクトゴムローラは、例え
ばエアシリンダの押圧力で圧接される。従って、クリー
ニングテープと基板表面との相対運動の摩擦による研摩
面には、硬質の研摩粒子を利用しているラフピングテー
プの場合の様な鋭角的な加工跡は生じない。The cleaning tape is made of, for example, nonwoven paper mixed with natural fibers and polyester, and the contact rubber roller is pressed against it by the pressing force of, for example, an air cylinder. Therefore, no sharp machining marks are produced on the polished surface due to the friction of the relative movement between the cleaning tape and the substrate surface, unlike in the case of roughing tape that uses hard abrasive particles.
さらに、研摩中クリーニングテープ２は第３図の矢印に
示すように供給リール４より新しいクリーニングテープ
２が送り出され、研摩に使用され表面が汚染されたクリ
ーニングテープ２は巻取りリール５に巻き取られ、研摩
面には常に清浄なりリーニングテープが存在することに
なるので基板表面より除去された微少突起により基板表
面が汚染損傷されることもない。Furthermore, during polishing, a new cleaning tape 2 is fed out from the supply reel 4 as shown by the arrow in FIG. Since a clean or leaning tape is always present on the polished surface, the substrate surface will not be contaminated or damaged by minute protrusions removed from the substrate surface.
本実施例は下地処理を施された基板の微少突起の除去の
場合について述べたが、最終的に保護潤滑膜まで形成し
た媒体の表面の微少突起の除去にも有効である。媒体の
製造において、下地処理を施した基板表面および最終的
な媒体表面についてそれぞれ本実施例による微少突起の
除去を行っても良く、また、いずれか一方の面について
のみ行ってもよい。Although this embodiment has been described for removing minute protrusions on a substrate that has been subjected to surface treatment, it is also effective for removing minute protrusions on the surface of a medium on which a protective lubricant film has finally been formed. In the production of the medium, the removal of minute protrusions according to this embodiment may be performed on each of the surface of the substrate subjected to the base treatment and the final surface of the medium, or may be performed on only one of the surfaces.
本発明によれば、クリーニングテープを用いることによ
り、下地処理を施された基板表面あるいは保護潤滑膜ま
で形成した媒体表面にある微少突起を、その表面を損傷
することなく、確実に短時間で効率良く除去することが
でき、磁気記録媒体の製造時間を大幅に短縮することが
できる。本発明によれば表面を損傷することなく確実に
痕跡の残らぬように微少突起を除去できるので、基板に
適用した場合には、非常に良好な平滑性を有する磁性膜
を形成することが可能となり、磁気特性の優れた磁気記
録媒体を得ることができ、磁気記録媒体の表面に適用し
た場合には極めて平滑な表面が得られるので、磁気ヘッ
ドの浮上量を少なくしても安定した浮上性が確保でき、
高記録密度を指向する固定磁気ディスク装置に用いられ
る薄膜磁気記録媒体の製造に極めて有効である。According to the present invention, by using a cleaning tape, minute protrusions on the surface of a substrate that has been subjected to base treatment or the surface of a medium on which a protective lubricant film has been formed can be removed reliably and efficiently in a short time without damaging the surface. It can be removed easily and the manufacturing time of magnetic recording media can be significantly shortened. According to the present invention, minute protrusions can be removed without damaging the surface without leaving traces, so when applied to a substrate, it is possible to form a magnetic film with very good smoothness. As a result, a magnetic recording medium with excellent magnetic properties can be obtained, and when applied to the surface of a magnetic recording medium, an extremely smooth surface can be obtained, resulting in stable flying performance even when the flying height of the magnetic head is reduced. can be ensured,
It is extremely effective in manufacturing thin film magnetic recording media used in fixed magnetic disk drives that aim for high recording density.
第１図は本発明の方法を実施し得る装置の一実施例の要
部構成を示す上面図、第２図は第１図のＡ −Ａ断面図
、第３図は第１図のＢ−Ｂ断面図である。
１ 基板、２ クリーニングテープ、３ コンタクトゴ
ムローラ、４ 供給リール、５ 巻取りリール、６ テ
ンションローラ、Ｔ 架台、８第 ｊ 図
１２図
第３図FIG. 1 is a top view showing the configuration of essential parts of an embodiment of an apparatus capable of carrying out the method of the present invention, FIG. 2 is a sectional view taken along line A-A in FIG. 1, and FIG. It is a sectional view of B. 1 Substrate, 2 Cleaning tape, 3 Contact rubber roller, 4 Supply reel, 5 Take-up reel, 6 Tension roller, T Frame, 8 j Figure 12 Figure 3
Claims (1)
地膜上に磁性膜、保護潤滑膜を形成する磁気記録媒体の
製造方法において、前記下地膜形成後および保護潤滑膜
形成後または少なくともどちらか一方の後に、クリーニ
ングテープをその膜面に圧着接触せしめ、該膜面とクリ
ーニングテープとを相対移動させることによって、該膜
面上の微少突起を除去するようにしたことを特徴とする
磁気記録媒体の製造方法。1) A method for producing a magnetic recording medium in which a non-magnetic substrate is subjected to a base treatment to form a base film, and then a magnetic film and a protective lubricant film are formed on the base film, after the base film is formed and after the protective lubricant film is formed, or After at least one of them, a cleaning tape is brought into pressure contact with the membrane surface, and the membrane surface and the cleaning tape are moved relative to each other, thereby removing minute protrusions on the membrane surface. A method for manufacturing a magnetic recording medium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14102586A JPS62298022A (en) | 1986-06-17 | 1986-06-17 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14102586A JPS62298022A (en) | 1986-06-17 | 1986-06-17 | Production of magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62298022A true JPS62298022A (en) | 1987-12-25 |
| JPH0553008B2 JPH0553008B2 (en) | 1993-08-09 |
Family
ID=15282460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14102586A Granted JPS62298022A (en) | 1986-06-17 | 1986-06-17 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62298022A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03147518A (en) * | 1989-11-02 | 1991-06-24 | Internatl Business Mach Corp <Ibm> | Finishing method and apparatus for magnetic disc |
-
1986
- 1986-06-17 JP JP14102586A patent/JPS62298022A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03147518A (en) * | 1989-11-02 | 1991-06-24 | Internatl Business Mach Corp <Ibm> | Finishing method and apparatus for magnetic disc |
| JPH0630143B2 (en) * | 1989-11-02 | 1994-04-20 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | Magnetic disk finishing method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0553008B2 (en) | 1993-08-09 |
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