JPS62282635A - Production of mixture of ultra-fine aluminum nitride powder and ultra-fine oxidation-resistant aluminum powder - Google Patents
Production of mixture of ultra-fine aluminum nitride powder and ultra-fine oxidation-resistant aluminum powderInfo
- Publication number
- JPS62282635A JPS62282635A JP61124667A JP12466786A JPS62282635A JP S62282635 A JPS62282635 A JP S62282635A JP 61124667 A JP61124667 A JP 61124667A JP 12466786 A JP12466786 A JP 12466786A JP S62282635 A JPS62282635 A JP S62282635A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- ultra
- aluminum
- fine
- ultrafine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000843 powder Substances 0.000 title claims abstract description 54
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims abstract description 38
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims abstract description 23
- 230000003647 oxidation Effects 0.000 title claims description 9
- 238000007254 oxidation reaction Methods 0.000 title claims description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000203 mixture Substances 0.000 title abstract description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 17
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 10
- 239000007789 gas Substances 0.000 claims abstract description 8
- 239000012298 atmosphere Substances 0.000 claims abstract description 7
- 239000012299 nitrogen atmosphere Substances 0.000 claims abstract description 6
- 239000011261 inert gas Substances 0.000 claims abstract description 4
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 abstract 2
- 238000005121 nitriding Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 238000005245 sintering Methods 0.000 description 7
- 239000002245 particle Substances 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000634 powder X-ray diffraction Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 241000270295 Serpentes Species 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- -1 aluminum halide Chemical class 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/24—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique
- B01J8/32—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique with introduction into the fluidised bed of more than one kind of moving particles
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は粒径１μｍ以下の窒化アルミニウム超＃に船、
Ｌ耐酸什桂全にアッパニウム紹尚怜の六−に混合した混
合超微粉の製造法に関する。[Detailed Description of the Invention] Industrial Field of Application The present invention is directed to the use of aluminum nitride particles having a grain size of 1 μm or less.
The present invention relates to a method for producing a mixed ultrafine powder obtained by mixing L-acid-resistant Kiquan with Uppanium Shaoshangrei.
窒化アルミニウムは耐熱性、熱伝導特性、絶縁性等に優
れた特性を有することから、各種の半導体用放熱板、透
光性耐熱材、弾性表面波素子基板、溶融金属用耐浴材な
どとして広く利用されている。Because aluminum nitride has excellent properties such as heat resistance, thermal conductivity, and insulation, it is widely used as heat sinks for various semiconductors, transparent heat-resistant materials, surface acoustic wave device substrates, bath-resistant materials for molten metals, etc. It's being used.
これらの材料はいずれも粉末冶金的手段、すなわち、焼
結によって作成されるが、高性能な焼結体を得るために
は、高純度であり、かつ焼結性の優れた微細な窒化アル
ミニウム粉であることが要求される。All of these materials are created by powder metallurgy, that is, sintering, but in order to obtain a high-performance sintered body, fine aluminum nitride powder of high purity and excellent sinterability is used. is required.
従来技術
従来、粒径１μｍ以下の窒化アルミニウム超微粉を製造
する方法としては、（１）窒化アルミニウム塊の機械的
粉砕、（２）アルミニウムハライドとアンモニヤとの気
相反応を利用した製造法があるが、前者では１μｍ以下
の窒化アルミニウム超微粉を得ることが極めて困難であ
り、後者は反応効率が低く、かつ高純度の窒化アルミニ
ウム超微粉が得がたい等の欠点があった。Conventional technology Conventionally, methods for producing ultrafine aluminum nitride powder with a particle size of 1 μm or less include (1) mechanical pulverization of aluminum nitride lumps, and (2) production methods that utilize a gas phase reaction between aluminum halide and ammonia. However, with the former, it is extremely difficult to obtain ultrafine aluminum nitride powder of 1 μm or less, and with the latter, the reaction efficiency is low and it is difficult to obtain ultrafine aluminum nitride powder with high purity.
この欠点をなくすべく、本発明者らはさきに、金属アル
ミニウムを窒素プラズマ溶解することにより高純度の超
微粉を製造する方法を開発した。（特開昭５９−５７９
０４号）、シかし、得られる超微粉は、窒化アルミニラ
ｌ、超微粉と金属アルミニウム超微粉の混合物である。In order to eliminate this drawback, the present inventors have previously developed a method for producing highly pure ultrafine powder by melting metallic aluminum with nitrogen plasma. (Unexamined Japanese Patent Publication No. 59-579
No. 04), the obtained ultrafine powder is a mixture of ultrafine aluminum nitride powder and ultrafine metal aluminum powder.
該混合物中の金属アルミニウム超微粉は極めて活性であ
り、比較的低温（＜７ｏｏ℃）で容易に窒化される半面
、その窒化過程で金属アルミニウム超微粉同志の焼結が
生じたり、僅かの酸素により発火や酸化を生じ、以後の
窒化を著しく阻害するという問題点があった。The ultrafine metal aluminum powder in the mixture is extremely active and is easily nitrided at relatively low temperatures (<70°C); however, during the nitriding process, the ultrafine metal aluminum powder may sinter with each other, or may be oxidized by a small amount of oxygen. There was a problem that ignition and oxidation occurred, which significantly inhibited subsequent nitriding.
発明の目的
本発明は前記プラズマ法における問題点を解決すべくな
されたもので、その目的は混合物中の金属アルミニウム
超微粉を熱処理によって容易に窒化アルミニウム超微粉
となし得る耐酸化性の金属アルミニウム超微粉に代えた
ものとする方法を提供しようとするにある。Purpose of the Invention The present invention has been made to solve the problems in the plasma method, and its purpose is to produce an oxidation-resistant metallic aluminum superfine powder that can be easily converted into aluminum nitride superfine powder by heat treatment of the metallic aluminum superfine powder in the mixture. The aim is to provide a method that can replace fine powder.
発明の構成
本発明者らは前記目的を達成すべく更に研究の結果、窒
化アルミニウムと金属アルミニウムの超微粉混合物を、
酸化させることなく、窒素雰囲気中で適当に熱処理する
と、金属アルミニウム超微粉は大気中に取出し得る程度
に耐酸化性となり、かつ、混合物の窒化熱処理の際、金
属アルミニウム粉同志の焼結しないものとなることを究
明し得た。この知見に基いて本発明を完成した。Structure of the Invention As a result of further research to achieve the above object, the present inventors have developed an ultrafine powder mixture of aluminum nitride and metal aluminum,
When properly heat-treated in a nitrogen atmosphere without oxidation, the metal aluminum ultrafine powder becomes oxidation-resistant to the extent that it can be taken out into the atmosphere, and the metal aluminum powder does not sinter together during the nitriding heat treatment of the mixture. I was able to find out what happened. The present invention was completed based on this knowledge.
本発明の要旨
窒素あるいは窒素と不活性ガスの混合ガス′雰囲気中で
発生させたアークあるいはプラズマジェットのフレーム
により金属アルミニウムを溶融させて窒化アルミニウム
と全項アルミニウムの混合超微粉を発生させ、該混合超
微粉を窒素雰囲気下の４００〜１０００℃１こ加熱した
流動層に導き、金属アルミニウム超微粉表面を部分窒化
□□二
との混合ガス、アンモニヤガス、アンモニヤガスと窒素
、不活性ガスとの混合ガスを導入してもよい。また流動
層の温度は＝１００〜１０００℃である。４００℃未満
では表面窒化に長時間を要し、１０００℃を超えると金
属アルミニウムが蒸発する。その処理時間は雰囲気の組
成、粒子密度、所望の窒化率、温度により異なるが、粒
径制御、操業性の点より０２〜１０００秒の範囲である
ことが望ましい。Summary of the present invention Metal aluminum is melted by an arc or plasma jet flame generated in a nitrogen or a mixed gas atmosphere of nitrogen and an inert gas to generate a mixed ultrafine powder of aluminum nitride and total aluminum. The ultrafine powder is introduced into a fluidized bed heated to 400 to 1000°C in a nitrogen atmosphere, and the surface of the ultrafine metal aluminum powder is partially nitrided with a mixed gas, ammonia gas, ammonia gas and nitrogen, or an inert gas. Gas may also be introduced. Further, the temperature of the fluidized bed is 100 to 1000°C. If the temperature is less than 400°C, a long time is required for surface nitriding, and if the temperature exceeds 1000°C, metal aluminum evaporates. The treatment time varies depending on the composition of the atmosphere, particle density, desired nitriding rate, and temperature, but is preferably in the range of 02 to 1000 seconds from the viewpoint of particle size control and operability.
これにより、粒径１μｍ以下の窒化アルミニウム超微粉
と表面が部分窒化された金属アルミニウム超微粉とが均
一に混合された超微粉を連続的に製造することができる
。得られる超微粉は大気中に取出しても発火等の変質を
生じ難い。Thereby, it is possible to continuously produce ultrafine powder in which ultrafine aluminum nitride powder with a particle size of 1 μm or less and ultrafine metal aluminum powder whose surface is partially nitrided are uniformly mixed. The resulting ultrafine powder is unlikely to undergo changes such as ignition even if taken out into the atmosphere.
また本発明の処理を行わない場合には６００ＣＸ志の焼
結が起きるが、本発明で得られるもの（ｉ、１０００℃
×３時間の窒化処理においても金属アルミニウム超微粉
同志の焼結を起こすことはない、更にまた、得られる超
微粉が９化アルミニウム超微粉と表面部分窒化よれた耐
酸化性金属アルミニウム超微粉であるため、前記９化焼
結処理に際し、金属アルミニウムと窒素の反応熱を利用
し得られ焼結温度を下げることができ、また金属アルミ
ニウムが窒化アルミニウムとなるとき体積膨張を起こす
ので、より緻密な焼結体が得られる等の優れた効果を有
する。In addition, when the treatment of the present invention is not performed, sintering of 600CX occurs, but the sintering of 600C
Even in the nitriding treatment for 3 hours, no sintering of the metal aluminum ultrafine powder occurs.Furthermore, the obtained ultrafine powder is aluminum 9ide ultrafine powder and oxidation-resistant metal aluminum ultrafine powder whose surface is partially nitrided. Therefore, during the sintering process, the sintering temperature can be lowered by using the heat of reaction between metal aluminum and nitrogen, and since the volume expands when metal aluminum turns into aluminum nitride, it is possible to achieve more dense sintering. It has excellent effects such as forming solids.
本発明の方法におけるプラズマ発生による混合超微粉を
製造する装置としては第１図（こ示すものが挙げられる
。図中、１は密閉容器、２はアークプラズマ、３は溶融
アルミニウム、４は流動層、５は′８囲気ガス人口を示
す。密閉容器１は窒素ガスを雰囲気ガス人口５より導入
する。The apparatus for producing mixed ultrafine powder by plasma generation in the method of the present invention includes the one shown in FIG. , 5 indicates the ambient gas population.Nitrogen gas is introduced into the sealed container 1 from the ambient gas population 5.
実施例
第１図に示す装置を使用し、プラズマ発生方体、Ｌ−１
τＨａ 漆’７−／７ ／ ＴＴ：ｆ＆ 姓ケ末＋
Ｍ 凸ＡＳを、雰囲気は純窒素をそれぞれ用いて、窒化
アルミニウム超微粉と金属アルミニウム超微粉との混合
超微粉を発生させ、該発生した混合超微粉を雰囲気窒素
の気流によって流動層へ搬送した。流動層は８００℃で
、処理時間は約１秒であった。Example Using the apparatus shown in FIG. 1, a plasma generation cube, L-1
τHa Lacquer '7-/7 / TT:f& Last name +
A mixed ultrafine powder of aluminum nitride ultrafine powder and metallic aluminum ultrafine powder was generated using M convex AS and pure nitrogen atmosphere, and the generated mixed ultrafine powder was transported to a fluidized bed by an air flow of atmospheric nitrogen. The temperature of the fluidized bed was 800°C, and the treatment time was about 1 second.
得られた混合超微粉の電子顕微鏡写真を第２３図の粉末
Ｘ線回折図形より、窒化アルミニラことがなく、第４図
の粉末Ｘ線回折図形に示すように、８００℃×３時間窒
化熱処理した後も粒成長することがなく、窒化率１００
％の窒化アルミニウムの超微粉となることがわかった。From the powder X-ray diffraction pattern in Figure 23, the electron micrograph of the obtained mixed ultrafine powder shows that there was no nitrided aluminum, and as shown in the powder X-ray diffraction pattern in Figure 4, it was nitrided at 800°C for 3 hours. There is no grain growth even after the process, and the nitriding rate is 100.
% aluminum nitride ultrafine powder.
発明の効果
本発明の方法によると、簡易な装置により耐酸化性と耐
熱性を有する金属アルミニウム超微粉と窒化アルミニウ
ム超微粉との混合超微粉が容易かつ無公害に製造するこ
とができる。また、得られる混合超微粉を窒化処理する
ことにより低温・短時間に高純度の窒化アルミニウム超
微粉とすることができる優れた効果を秦し得られる。Effects of the Invention According to the method of the present invention, a mixed ultrafine powder of ultrafine metal aluminum powder and ultrafine aluminum nitride powder having oxidation resistance and heat resistance can be easily and pollution-free produced using a simple device. Further, by subjecting the resulting mixed ultrafine powder to a nitriding treatment, it is possible to obtain an excellent effect of producing highly pure aluminum nitride ultrafine powder at low temperatures and in a short time.
第１図は耐酸化性金属アルミニウム超微粉と窒化アルミ
ニウム超微粉の混合超微粉を製造する装置の実施態様図
、第２図は混合超微粉の電子顕微鏡写真、第３図は混合
超微粉の粉末Ｘ線回折図形、第４図は混合超微粉を窒化
熱処理した後の粉末Ｘ線回折図形を示す。
】：密閉容器 ２：アークプラズマ３；溶融ア
ルミニウム ４：ハ、−ス
５“雰囲気ガス人口 ６：流動層
７：捕集器
特許出願人 科学技術庁金属材料技術研究所長中 川
龍 −
巣１０
枇−反
第３巳Figure 1 is an embodiment of an apparatus for producing a mixed ultrafine powder of oxidation-resistant metal aluminum ultrafine powder and aluminum nitride ultrafine powder, Figure 2 is an electron micrograph of the mixed ultrafine powder, and Figure 3 is the mixed ultrafine powder. X-ray diffraction pattern: FIG. 4 shows the powder X-ray diffraction pattern after the mixed ultrafine powder was subjected to nitriding heat treatment. ]: Sealed container 2: Arc plasma 3; Molten aluminum 4: Ha, -su 5 "Atmospheric gas population 6: Fluidized bed 7: Collector patent applicant Ryu Kawa, Director of the Metals Materials Technology Research Institute, Science and Technology Agency - Su 10 枇- Anti-Third Snake
Claims (1)
生させたアークあるいはプラズマジェットのフレームに
より金属アルミニウムを溶融させて窒化アルミニウムと
金属アルミニウムの混合超微粉を発生させ、該混合超微
粉を窒素雰囲気下の４００〜１０００℃に加熱した流動
層に導き、金属アルミニウム超微粉表面を部分窒化する
ことを特徴とする窒化アルミニウム超微粉と耐酸化性ア
ルミニウム超微粉の混合超微粉の製造法。A mixed ultrafine powder of aluminum nitride and metal aluminum is generated by melting metallic aluminum with an arc or plasma jet flame generated in a nitrogen or a mixed gas atmosphere of nitrogen and an inert gas, and the mixed ultrafine powder is melted in a nitrogen atmosphere. A method for producing a mixed ultrafine powder of aluminum nitride ultrafine powder and oxidation-resistant aluminum ultrafine powder, which comprises introducing the ultrafine metallic aluminum powder into a fluidized bed heated to 400 to 1000°C to partially nitridize the surface of the ultrafine metal aluminum powder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61124667A JPS62282635A (en) | 1986-05-31 | 1986-05-31 | Production of mixture of ultra-fine aluminum nitride powder and ultra-fine oxidation-resistant aluminum powder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61124667A JPS62282635A (en) | 1986-05-31 | 1986-05-31 | Production of mixture of ultra-fine aluminum nitride powder and ultra-fine oxidation-resistant aluminum powder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62282635A true JPS62282635A (en) | 1987-12-08 |
Family
ID=14891074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61124667A Pending JPS62282635A (en) | 1986-05-31 | 1986-05-31 | Production of mixture of ultra-fine aluminum nitride powder and ultra-fine oxidation-resistant aluminum powder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62282635A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS644234A (en) * | 1987-06-27 | 1989-01-09 | Tsukishima Kikai Co | Granulation apparatus with plasma jet fluidized layers |
| US5468697A (en) * | 1993-03-16 | 1995-11-21 | Yoshida Kogyo K.K. | Composite ultrafine particles of aluminum nitride and rare earth nitride, method for production and sintered article thereof |
| US5549951A (en) * | 1993-09-08 | 1996-08-27 | Ykk Corporation | Composite ultrafine particles of nitrides, method for production and sintered article thereof |
| WO2012115430A2 (en) * | 2011-02-21 | 2012-08-30 | 서울대학교 산학협력단 | Method for preparing aluminum/aluminum nitride or aluminum alloy/aluminum nitride composite materials |
| JP2014200779A (en) * | 2013-04-10 | 2014-10-27 | 東芝三菱電機産業システム株式会社 | Particulate generator |
| CN104617213A (en) * | 2014-11-07 | 2015-05-13 | 佛山科学技术学院 | Method for generating aluminum nitride thin film on aluminum plate |
| CN114289722A (en) * | 2021-12-08 | 2022-04-08 | 北京科技大学 | Preparation method of fine-grained spherical tungsten powder |
| CN115028459A (en) * | 2022-07-22 | 2022-09-09 | 成都物熙科技有限公司 | Method and device for preparing high-purity superfine aluminum nitride powder body by using plasma |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6110012A (en) * | 1984-06-22 | 1986-01-17 | Japan Metals & Chem Co Ltd | Production of ultrafine metal nitride and production unit |
| JPS61205606A (en) * | 1985-03-07 | 1986-09-11 | Toshiba Ceramics Co Ltd | Production of high-purity aluminum nitride powder |
| JPS62148311A (en) * | 1985-12-19 | 1987-07-02 | Chugai Ro Kogyo Kaisha Ltd | Process and device for preparing aluminum nitride powder |
-
1986
- 1986-05-31 JP JP61124667A patent/JPS62282635A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6110012A (en) * | 1984-06-22 | 1986-01-17 | Japan Metals & Chem Co Ltd | Production of ultrafine metal nitride and production unit |
| JPS61205606A (en) * | 1985-03-07 | 1986-09-11 | Toshiba Ceramics Co Ltd | Production of high-purity aluminum nitride powder |
| JPS62148311A (en) * | 1985-12-19 | 1987-07-02 | Chugai Ro Kogyo Kaisha Ltd | Process and device for preparing aluminum nitride powder |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS644234A (en) * | 1987-06-27 | 1989-01-09 | Tsukishima Kikai Co | Granulation apparatus with plasma jet fluidized layers |
| US5468697A (en) * | 1993-03-16 | 1995-11-21 | Yoshida Kogyo K.K. | Composite ultrafine particles of aluminum nitride and rare earth nitride, method for production and sintered article thereof |
| US5549951A (en) * | 1993-09-08 | 1996-08-27 | Ykk Corporation | Composite ultrafine particles of nitrides, method for production and sintered article thereof |
| WO2012115430A2 (en) * | 2011-02-21 | 2012-08-30 | 서울대학교 산학협력단 | Method for preparing aluminum/aluminum nitride or aluminum alloy/aluminum nitride composite materials |
| WO2012115430A3 (en) * | 2011-02-21 | 2012-12-20 | 서울대학교 산학협력단 | Method for preparing aluminum/aluminum nitride or aluminum alloy/aluminum nitride composite materials |
| JP2014200779A (en) * | 2013-04-10 | 2014-10-27 | 東芝三菱電機産業システム株式会社 | Particulate generator |
| CN104617213A (en) * | 2014-11-07 | 2015-05-13 | 佛山科学技术学院 | Method for generating aluminum nitride thin film on aluminum plate |
| CN114289722A (en) * | 2021-12-08 | 2022-04-08 | 北京科技大学 | Preparation method of fine-grained spherical tungsten powder |
| CN114289722B (en) * | 2021-12-08 | 2023-08-29 | 北京科技大学 | Preparation method of fine-grained spherical tungsten powder |
| CN115028459A (en) * | 2022-07-22 | 2022-09-09 | 成都物熙科技有限公司 | Method and device for preparing high-purity superfine aluminum nitride powder body by using plasma |
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