JPS62265519A - Three-dimensional measuring machine - Google Patents
Three-dimensional measuring machineInfo
- Publication number
- JPS62265519A JPS62265519A JP10924286A JP10924286A JPS62265519A JP S62265519 A JPS62265519 A JP S62265519A JP 10924286 A JP10924286 A JP 10924286A JP 10924286 A JP10924286 A JP 10924286A JP S62265519 A JPS62265519 A JP S62265519A
- Authority
- JP
- Japan
- Prior art keywords
- axis direction
- base
- axis
- stage
- document table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 14
- 230000001105 regulatory effect Effects 0.000 claims description 25
- 238000001514 detection method Methods 0.000 claims description 4
- 239000000696 magnetic material Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 10
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract 5
- 239000013585 weight reducing agent Substances 0.000 abstract 1
- 230000007246 mechanism Effects 0.000 description 9
- 238000007667 floating Methods 0.000 description 8
- 241000270295 Serpentes Species 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000002265 prevention Effects 0.000 description 4
- 230000003872 anastomosis Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 201000004384 Alopecia Diseases 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003676 hair loss Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、載物台上の測定対象物と支柱に変位可能に支
持された検出子とを三次元方向に相対移動させつつ形状
、寸′法等を測る三次元測定機の改良に関する。[Detailed Description of the Invention] [Industrial Field of Application] The present invention is capable of changing the shape and size of an object to be measured on a stage and a detector displaceably supported by a column while moving them relative to each other in a three-dimensional direction. Concerning the improvement of a three-dimensional measuring machine for measuring the ′′ method, etc.
載物台に載置された測定対象物と、基台に固定されまた
は移動可能とされた支柱にＸ軸およびＸ軸方向に変位可
能に支持されたタッチ（３月プローブ、ビデオカメラ等
の検出子と、を三次元方向に相対移動させつつその測定
対象物の形状や寸法を測るいわゆる三次元測定機が知ら
れ、高精度測定可能なことから多くの産業分野で利用さ
れている。The object to be measured placed on the stage and the touch supported movably in the X-axis and the A so-called three-dimensional measuring machine is known that measures the shape and dimensions of an object while relatively moving it in a three-dimensional direction, and is used in many industrial fields because it is capable of high-precision measurement.
かかる三次元測定機の一般的構造は、検出子を支持しか
つそれを三次元方向（Ｘ、ＹおよびＸ軸方向）に移動さ
せるための移動機構と載物台とから形成される機械部と
、検出子からの信号を所定処理し形状等を求めるデータ
処理装置を含む電子部とから構成されている。The general structure of such a three-dimensional measuring machine includes a mechanical part formed of a moving mechanism for supporting a detector and moving it in three-dimensional directions (X, Y, and X-axis directions), and a stage. , and an electronic section including a data processing device that processes signals from the detector in a predetermined manner to obtain shapes and the like.
ここに、従来三次元測定機の上記機械部について図面を
参照しながら説明すると、まず第７図に示したような支
柱固定型が知られ、この支柱固定型は、基台３−ヒに載
物台２０と支柱２５．２５が設けら、れ、支柱２５．２
５上をＹ軸方向に移動可能とされたＸスライダ３７．３
７、このＸスライダ３７．３７にｄｌ架された横を行部
材３０上をＸ軸方向に移動可能とされたＸスライダ３５
およびこのＸスライダ３５に支持されたＺ２Ｅ内ボック
ス４０内をＸ軸方向に（多動可能なスピンドル４１とか
ら（移動機構を形成し、そのスピンドル４１の先端側に
検出子４２を取り付けて機械部を構成していた。Here, the above-mentioned mechanical part of a conventional three-dimensional measuring machine will be explained with reference to the drawings. First, a fixed column type as shown in FIG. 7 is known, and this fixed column type is mounted on a base 3-H. A table 20 and a support 25.25 are provided, and a support 25.2 is provided.
5 X slider 37.3 that can be moved in the Y-axis direction
7. An X slider 35 which is movable in the X-axis direction on the horizontal row member 30 mounted on this X slider 37.37.
The inside of the Z2E inner box 40 supported by this X slider 35 is moved in the X-axis direction (from a multi-moveable spindle 41 (forming a moving mechanism, and a detector 42 is attached to the tip side of the spindle 41 to move the mechanical part. It consisted of
一方、第８図に示したような支柱可動型は、載物台２０
の両側端にＹ案内レール３８．３８を固定し、このＹ′
案内レール３８．３８にＹ 軸方向に移動可能とされた
Ｘスライダ３７．３７とこのＸスライダ３７．３７に基
端部が固着された支柱２５．２５上に渡架された横桁部
材３０上をＸ軸方向に移動可能とされたＸスライダ３５
およびこのＸスライダ３５に支持されたＺ案内水ボック
ス４０内Ｘ軸方向に移動可能なスピンドル４１とから移
動機構を形成し、検出子４２をスピンドル４１に取り付
けて機械部を構成していた。On the other hand, in the movable column type as shown in FIG.
Y guide rails 38.38 are fixed to both ends of the Y'
The cross beam member 30 is suspended over an X slider 37.37 which is movable in the Y-axis direction on a guide rail 38.38, and a column 25.25 whose base end is fixed to the X slider 37.37. X slider 35 that can move in the X-axis direction
A moving mechanism was formed by a spindle 41 that was supported by the X slider 35 and movable in the X-axis direction within the Z guide water box 40, and a detector 42 was attached to the spindle 41 to constitute a mechanical section.
従って、両型ともスピンドル４１を把持しつつ手動でま
たは図示しない駆動装置によって検出子４２を載物台２
０上に載置された測定対象物に対し三次元方向に移動し
、関与させつつ寸法等をａｌｌｌ定することができた。Therefore, in both types, the detector 42 is moved to the stage 2 manually or by a drive device (not shown) while holding the spindle 41.
It was possible to move in a three-dimensional direction with respect to the object to be measured placed on the surface of the object, and determine all the dimensions etc. while interacting with the object.
しかしながら、上述の従来三次元測定機では次のような
問題点を有していた。However, the above-mentioned conventional three-dimensional measuring machine had the following problems.
■１μｍ前後の高１１１度を保障するためには、支柱２
５．２５等構成要素の変形、（禿みは許されないから、
それらの機械的剛性、機械的強度は堅牢としなければな
らない。ところ力く、上古こいずれの型においても支柱
２５．２５上にＸスライダ３５等が設けられており、か
つ各支柱２５．２５は載物台２０より下方側で支持され
るものとなっていた。従って支柱２５．２５は、大きな
垂直荷重に耐えるべくより堅牢としなければならないと
いう問題があった。このことは、支柱可動型（第８図）
の場合、Ｙ案内レール３８．３Ｂ、これらをＲ吻合２０
に取り（士けるための支持部材等をも強化しなければな
らないので全体として大型化、不祥ｌ斉を招いていた。■In order to guarantee the height of 111 degrees around 1μm, the pillar 2
5. Deformation of the 25th component (because baldness is not allowed,
Their mechanical rigidity and mechanical strength must be robust. However, in both the older and older models, the X slider 35, etc. was provided on the support 25.25, and each support 25.25 was supported below the stage 20. . Therefore, the problem was that the struts 25.25 had to be made more robust in order to withstand large vertical loads. This means that the movable column (Fig. 8)
In the case of Y guide rail 38.3B, these are R anastomosis 20
Because supporting members and other components had to be strengthened to support the construction, the overall size had to be increased, leading to a scandal.
■また、支柱固定型の場合には、基台３の両側に各支柱
２５．２５を立設さ仕るために、有効測定範囲が狭くな
るばかりか、載物台２０上への図示なき測定対象１′９
）の図人出に支障を来たし、さらにその自動化を田ｊＫ
とする問題もあった。一方、支柱可ＦＪＩＩ型はこれら
欠点をある程度解？ｉ’ｉできるが、とりわけＹＺＺレ
ール３８．３８に取り付けられるＹ ！ｄｉ変位検出手
段としてのスケール（図示省略）の保護を強化しなけれ
ばならず一層構造を店雑化させた。また、防塵対策を施
さなければ積度保障も困難とする等の問題を有していた
。■In addition, in the case of the fixed column type, since the columns 25 and 25 are erected on both sides of the base 3, not only the effective measurement range is narrowed, but also measurements (not shown) on the stage 20 are made. Target 1'9
), which has hindered the flow of people, and further automation is required.
There was also the problem of On the other hand, does the supportable FJII type solve these drawbacks to some extent? i'i can, but especially the Y that is attached to the YZZ rail 38.38! The protection of the scale (not shown) as a displacement detection means had to be strengthened, making the structure even more cluttered. In addition, there have been other problems such as the difficulty in guaranteeing the stacking capacity unless dust-proof measures are taken.
■さらに、両型とも載物台２０に対して検出子４３側を
三次元方向に移動させる構造であったため、精巧な前記
事多動機構を連立する観点から支柱２５．２５等の振動
等を防止する機構を付加させなければならず、これは、
自動移動型とするのに不利であった。■Furthermore, since both types have a structure in which the detector 43 side is moved three-dimensionally relative to the stage 20, vibrations of the support columns 25, 25, etc. It is necessary to add a mechanism to prevent this.
It was disadvantageous to make it an automatic moving type.
本発明は、上記従来問題点に鑑みなされたもので、構造
簡華化、防塵対策等による安定性をＧｆ保しつつ高精度
測定を保障する４５れた三次元測定機を提供することを
目的とする。The present invention was made in view of the above-mentioned conventional problems, and an object of the present invention is to provide a three-dimensional measuring machine that guarantees high-precision measurement while maintaining stability by simplifying the structure and taking dust-proof measures. shall be.
〔問題点を解決するための手段および作用〕本発明は、
上記従来問題点が検出子移動型であること、支柱を載物
台の上面から這か下方より立設させていること、Ｙスラ
イダ等が露出さ・Ｕて設けられていること等に起因して
いることに着目し、支柱寸法を短小化するとともに載物
台移動型としかつその駆動手段等を載物台と基台との間
に収納させるよう構成しその問題点を解消したものであ
る。[Means and effects for solving the problems] The present invention has the following features:
The above-mentioned conventional problems are due to the fact that the detector is movable, that the support is installed from above or below the stage, and that the Y slider etc. are exposed and installed in a U-shaped manner. This problem was solved by shortening the column dimensions, making the stage movable, and configuring its drive means to be housed between the stage and the base. .
これがため、載物台上の測定対象物と支柱上に変位可能
に支持された検出子とを三次元方向に相対移動させつつ
形状寸法等を測る三次元測定機において、
基台にＸ軸方向に所定幅、Ｘ軸方向に所定深さとされか
つＹ軸方向に伸びる凹所を設けるとともに、この基台の
凹所に中心振り分けのｉｌｌのＹ案内レールを設け、
前記載物台を該Ｙ案内レールに沿って移動可能に該基台
に支持させかつ前記支柱を該基台の両側端に起立固定し
、
該基台に対する前記載物台のＸ軸方向位置を規制するた
めのＸ軸位置規制手段、Ｘ軸方向位置を規制するための
Ｘ軸位置規制手段、Ｙ軸方向に前記載物台を自動送りす
るためのＹ軸周の駆動手段およびＹ軸方向の前記載物台
の移動変位量を検出するためのＹ軸変位検出手段を前記
載物台の凹所内に配設した構成とし前記目的を達成する
のである。For this reason, in a three-dimensional measuring machine that measures the shape and dimensions while relatively moving the object to be measured on the stage and the detector displaceably supported on the support in three dimensions, the base is placed in the X-axis direction. A recess having a predetermined width, a predetermined depth in the X-axis direction, and extending in the Y-axis direction is provided in the base, and a Y guide rail for center distribution is provided in the recess in the base, and the document table is guided by the Y guide rail. X-axis position regulation for regulating the position of the document table in the X-axis direction with respect to the base, by supporting the support on the base so as to be movable along a rail and fixing the support pillars upright on both ends of the base; means, an X-axis position regulating means for regulating the position in the X-axis direction, a driving means around the Y-axis for automatically feeding the document table in the Y-axis direction, and an amount of displacement of the document table in the Y-axis direction. The above object is achieved by arranging a Y-axis displacement detecting means for detecting the Y-axis displacement in a recess of the object table.
本発明は、このように構成されているから、基台の凹部
に駆動手段等を収容させることができるので載物台、そ
の案内レール等と支柱との取付位置の相対関係を改良で
きる結果、支柱を短寸化でき有効測定範囲、測定も１度
の拡大、向上を図れる。Since the present invention is configured in this way, the driving means etc. can be housed in the recessed part of the base, so that the relative relationship between the mounting position of the stage, its guide rail etc. and the support can be improved. The length of the support can be shortened, and the effective measurement range and measurement can be expanded and improved by 1 degree.
また、載物台を移動させるよう形成しているのでその支
柱と基台との取り付けが強固かつ横１ｊＬ ｆｊｌ単化
でき組立調整に有利である。また、駆動手段等を基台の
凹部に収容させたので、全体を小型軽量化できる。以上
のような効果を奏しなから載物台上に取り付けた測定対
象物の形状、寸法等を高精度かつ円滑に測定できるよう
作用する。Further, since the stage is formed to be movable, the support and the base can be firmly attached to each other, and the width can be reduced to 1JL, which is advantageous for assembly and adjustment. Furthermore, since the driving means and the like are housed in the recessed portion of the base, the entire device can be made smaller and lighter. In addition to producing the above-mentioned effects, the present invention operates so that the shape, dimensions, etc. of the object to be measured mounted on the stage can be measured with high precision and smoothly.
本発明に係る三次元測定機の一実施例を図面を参照しな
がら説明する。An embodiment of the coordinate measuring machine according to the present invention will be described with reference to the drawings.
この実施例の三次元ａ＋＋＋定機は第１図ないし第６図
に示され、まず、第１図ないし第３図に見られるように
全体が構成されている。The three-dimensional a+++ machine of this embodiment is shown in FIGS. 1 to 6, and is constructed as a whole as shown in FIGS. 1 to 3.
すなわち、ベース１上には、基台３が設置される。この
基台３にはＸ軸方向に一対の支柱２５゜２５がその基端
部２７を固着させて立設されている。支柱２５．２５に
はＸ軸方向に伸びる横桁部材３０が渡架され、この横桁
部材３０に沿って移動可能とされたＸスライダ３５には
ｚ案内ボックス４０が一体的に設けられている。先端に
ビデオカメラとされた検出子４２を有するスピンドル４
１はＺＸＸ水ボックス４０Ｘ軸方向に摺動可能に支持さ
れている。ここに、検出子４２の移動機構は検出子４２
をＸ軸方向とＸ軸方向に移動できるものと形成されてい
る。一方、載物台２０はＹ軸方向に移動可能として基台
３に支持されている。That is, the base 3 is installed on the base 1. A pair of support columns 25.degree. 25 are erected on the base 3 in the X-axis direction with their base ends 27 fixed. A cross beam member 30 extending in the X-axis direction is spanned over the support columns 25.25, and a Z guide box 40 is integrally provided on the X slider 35 which is movable along the cross beam member 30. . A spindle 4 having a detector 42 serving as a video camera at its tip
1 is slidably supported in the ZXX water box 40 in the X-axis direction. Here, the moving mechanism of the detector 42 is
It is formed to be able to move in the X-axis direction and in the X-axis direction. On the other hand, the stage 20 is supported by the base 3 so as to be movable in the Y-axis direction.
従って、載物台２０上に截πされる測定対象物（図示省
略）と検出子４２とは三次元方向にＦ■対糸移動可能さ
れている。Therefore, the object to be measured (not shown) cut out on the stage 20 and the detector 42 can be moved in the three-dimensional direction.
また、基台３はセンター振り分けの断面コ字状の凹所５
がＹ軸方向に沿って設けられており、その両端側には四
部５を閉成し、かつ後記防塵装置９０の蛇腹９２の一端
側を固定する蛇腹取付板９４（９４）が設けられ、凹部
５内には後記のＸ軸位ｒ１１規制手段５０、Ｘ軸位置規
制手段６０、Ｙ軸変位検出手段７０および駆動手段８０
等が収容されている。なお、データ処理装置等電子部は
図示省略している。In addition, the base 3 has a recess 5 with a U-shaped cross section distributed at the center.
are provided along the Y-axis direction, and bellows mounting plates 94 (94) are provided on both ends thereof for closing the four parts 5 and fixing one end side of the bellows 92 of the dust-proofing device 90, which will be described later. 5 includes an X-axis position r11 regulating means 50, an X-axis position regulating means 60, a Y-axis displacement detecting means 70, and a driving means 80, which will be described later.
etc. are accommodated. Note that electronic parts such as a data processing device are not shown.
さて、基台３の凹部５の底部は磁性体部分である中間床
部４とされ、また両側方には立上部７゜７を設は形成さ
れている。なお、１７．１７は調整ボルトでヘース１に
対し基台３の姿勢を正すためのものである。基台３の中
間床部４にはセンター振り分けのＹ案内レール３８．３
８がＹ軸方向に沿って設けられボルトによって固着され
ている。Now, the bottom of the concave portion 5 of the base 3 is an intermediate floor portion 4 which is a magnetic material portion, and rising portions 7.7 are formed on both sides. Note that reference numeral 17.17 is an adjustment bolt for correcting the attitude of the base 3 with respect to the heath 1. On the intermediate floor 4 of the base 3, there is a Y guide rail 38.3 for center distribution.
8 are provided along the Y-axis direction and fixed with bolts.
Ｙ案内レール３日の断面は直方形であって各面は平滑仕
上げされている。従って、載物台２０はこのＹ案内レー
ル３８．３８の上面および側面を基第に位置出しされる
よう形成されている。そして、支柱２５．２５の基端部
２７．２７は固定ボルト２６．２Ｇで基台３の立上部７
，７の上０ス１面にそれぞれ固定されている。これによ
り支柱２５．２５の高さは、載物台２０を案内するＹ案
内レール３８．３８よりもその基端部２７．２７が高位
置であるため短小化することができる。The cross section of the Y guide rail 3 is a rectangular parallelepiped, and each surface is finished smooth. Therefore, the stage 20 is formed to be positioned based on the top and side surfaces of the Y guide rails 38,38. Then, the base end 27.27 of the support column 25.25 is fixed to the upright part 7 of the base 3 with a fixing bolt 26.2G.
, 7 are fixed to the upper 0th surface of each of them. As a result, the height of the support column 25.25 can be reduced because its base end 27.27 is located higher than the Y guide rail 38.38 that guides the stage 20.
Ｚ軸位置規制手段６０は、載物台２０の下端面２２に設
けられた一対のエアベアリング６１．６１と、基台３の
Φ開法部４と吸引作用する載物台２０に取付けられたマ
グネット６２と、を含み構成されている。エアへ７リン
グ６１．６１は図示しないエア源より圧搾空気が供給さ
れ、その空気をＹ案内レール３８．３８の上端面に噴出
させることによって！ｌ！物台吻合を数μｍ〜数＋μｍ
だけ浮上させＺ軸方向の位置を規制するとともにｍ１物
台２０のＹ軸方向移動を許容するものである。ここで、
載物台２０が小型軽量のときまたは載置する測定対象物
（図示省略）の重量等を考慮して、載物台２０を第４図
で下方向に引き下す手段としてマグネット６２が設けら
れているのである。マグネット６２は調整ボルト６４で
高さ方向調整が行われ、取付ボルト６５で載物台２０に
固定されている。なお、磁性体６３は磁気効率向上のた
め設けられ、さらに非磁性体６６を介しｆ２物台２０に
固定されている。従って、載物台２０は磁力による下方
向吸引力と、これに抗するエアベアリング６１の空気圧
力とのバランスによってＺ軸方向の位置規制が行われる
よう形成されている。The Z-axis position regulating means 60 is attached to a pair of air bearings 61 and 61 provided on the lower end surface 22 of the stage 20, and the stage 20 that has a suction effect with the Φ opening part 4 of the base 3. It is configured to include a magnet 62. Compressed air is supplied to the air 7 ring 61.61 from an air source (not shown), and the air is blown out onto the upper end surface of the Y guide rail 38.38! l! A few μm to several + μm of table anastomosis
The m1 table 20 is levitated by 100 mm to restrict its position in the Z-axis direction, and allows the m1 table 20 to move in the Y-axis direction. here,
When the stage 20 is small and lightweight, or in consideration of the weight of the object to be measured (not shown) to be placed, a magnet 62 is provided as a means for pulling the stage 20 downward in FIG. There is. The magnet 62 is adjusted in the height direction with an adjustment bolt 64 and is fixed to the stage 20 with a mounting bolt 65. Note that the magnetic body 63 is provided to improve magnetic efficiency, and is further fixed to the f2 table 20 via a non-magnetic body 66. Therefore, the stage 20 is formed so that its position in the Z-axis direction is regulated by the balance between the downward attractive force caused by the magnetic force and the air pressure of the air bearing 61 that resists this force.
一方、Ｘ軸方向位置規制手段５０は、各Ｙ案内レール３
８．３８の各側面に対応するエアベアリング５１．５１
から形成され、各エフへ７リング５１．５１は、ボール
５２．５２を介し姿勢の自由性を確保しつつ調整ボルト
５３．５３によってそのクリアランスが調整できるよう
されている。On the other hand, the X-axis direction position regulating means 50
Air bearings corresponding to each side of 8.38 51.51
Each F7 ring 51.51 is configured such that its clearance can be adjusted using adjustment bolts 53.53 while ensuring freedom of posture through balls 52.52.
また、Ｙ軸変位検出手段７０は、基台３のＸ軸方向の中
心部に立設されたスケール支持台７６に支持されたメイ
ンスケール７１と、このメインスケール７１と対応する
インデックススケール７２および検出回路を含む検出器
７３とから形成され基台３に対する！動台２０のＹ軸方
向変位量を検出できるよう構成されている。インデック
ススケール７２のメインスケール７１に対する姿勢を調
整するための位置調整ボルト７４．７５が設けられてい
る。なお、このメインスケール７１等の型は不問だが、
この実施例では光学格子を有する光電型とされている。The Y-axis displacement detection means 70 also detects a main scale 71 supported by a scale support 76 erected at the center of the base 3 in the X-axis direction, an index scale 72 corresponding to the main scale 71, and a A detector 73 including a circuit is formed from the base 3! It is configured to be able to detect the amount of displacement of the moving table 20 in the Y-axis direction. Position adjustment bolts 74 and 75 are provided for adjusting the attitude of the index scale 72 with respect to the main scale 71. The type of this main scale 71 etc. does not matter, but
This embodiment is of a photoelectric type having an optical grating.
また、駆動手段８０は、載物台２０をＹ軸方向に自動的
に移動させるためのもので、基台３に固定された支持台
８３に回動自在に支持されたボールぶジ８１、このボー
ルネジ８１に螺合され載物台２０に取り付けられている
ナンド部材８２および図示しないモータとから形成され
ている。The driving means 80 is for automatically moving the stage 20 in the Y-axis direction. It is formed from a NAND member 82 screwed into a ball screw 81 and attached to the stage 20, and a motor (not shown).
さらに、防塵装置９０が設けられ、防塵装置９０；よ蛇
ＤＩ装置９１と防店カバー１０１とから構成されている
。この蛇腹装置９１は、第１図、第５図および第６図か
ら明らかのように、第１の蛇腹９２ａと第２の蛇腹９２
ｂとを有し、第１の蛇腹９２ａは載物台２０のＹ軸方向
一端側２３と蛇腹端＋Ｆｊ、９３．９３、蛇腹取付板９
４を介し基台３の５２側の蛇Ｉｌｌ取付部６とに張設さ
れている。第２の蛇ｌ１１９２ ｂも載物台２０のＹ軸
方向他端側２４と対応する基台３のｉｌ！！瑞側との間
に第１の蛇腹９２ａと同様に張設されている。従って、
両蛇ｉｌｌ ９２ａ、９２ｂは、それぞれ載物台２０の
Ｙ軸方向移動に伴って伸縮することができ、各手段が配
設された基台３の凹部５を閉成することができる。Further, a dustproof device 90 is provided, and is composed of a dustproof device 90; a security DI device 91 and a store-proof cover 101. As is clear from FIGS. 1, 5, and 6, this bellows device 91 has a first bellows 92a and a second bellows 92.
b, and the first bellows 92a has one end 23 in the Y-axis direction of the stage 20, the bellows end +Fj, 93.93, and the bellows mounting plate 9.
4 to the serpentine Ill attachment portion 6 on the 52 side of the base 3. The second snake l1192b is also located on the base 3 corresponding to the other end 24 of the stage 20 in the Y-axis direction! ! Similar to the first bellows 92a, it is stretched between the first bellows 92a and the first bellows 92a. Therefore,
Both snakes 92a and 92b can expand and contract as the stage 20 moves in the Y-axis direction, and can close the recess 5 of the base 3 in which each means is disposed.
また、蛇ＩＩｓ！装置９１は、蛇腹浮上防止機構９９を
含み形成されている。この蛇腹浮上機構９９は、各蛇腹
９２ａ、９２ｂが伸縮するときの風圧によってＺ軸方向
（図で上方向）に浮上することを防止するものであって
、各蛇腹９２ａ（９２ｂ）の略中央下端に設けられたＸ
軸方向に開口する溝部９７を有するガイドプレート９５
と、先端側がこの溝部９７に挿入され基端側か支持部材
１１を介し基台３に固定されたガイドレール９６とから
構成されている。従って、蛇１１Ｍ９２ａ（９２ｂ）は
ガイドプレート９５を介しガイドレール９６によって軸
方向の変位が規制されるので浮上が阻止される。Also, Snake IIs! The device 91 is formed to include a bellows floating prevention mechanism 99. This bellows floating mechanism 99 prevents each bellows 92a, 92b from floating in the Z-axis direction (upward in the figure) due to wind pressure when expanding and contracting, and is designed to prevent the bellows 92a, 92b from floating in the Z-axis direction (upward in the figure) at the substantially central lower end of each bellows 92a (92b). X set in
Guide plate 95 having a groove 97 opening in the axial direction
and a guide rail 96 whose distal end is inserted into the groove 97 and whose proximal end is fixed to the base 3 via the support member 11. Therefore, the axial displacement of the snake 11M92a (92b) is restricted by the guide rail 96 via the guide plate 95, so that it is prevented from floating.
また、防塵カバー１０１，１０１は、支持部材１１．１
１を介し基台３に固定されその先３＋％ｉ ！！’ｌｌ
が載物台２０の各側面に設けられた凹部２１にそれぞれ
挿入可能とされている。従って、載物台２０の幅相当に
ついては蛇ｎＭ装置９１によって、また載物台２０と基
台３の立上部７とのＸ軸方向隙間については防塵カバー
１０１，１０１によって基台３の凹部５は閉成されるこ
とができる。もとより、Ｙ軸方向の基台３の両側端は前
記蛇腹取付板９４（９４）によって塞がれている。Further, the dustproof covers 101, 101 are attached to the support member 11.1.
It is fixed to the base 3 through 1 and 3+%i! ! 'll
can be inserted into recesses 21 provided on each side of the stage 20, respectively. Therefore, the width equivalent to the stage 20 is determined by the snake nM device 91, and the gap in the X-axis direction between the stage 20 and the upright part 7 of the base 3 is determined by the dustproof covers 101, 101, which can be closed. Naturally, both ends of the base 3 in the Y-axis direction are closed by the bellows mounting plates 94 (94).
１１は支持部材であって、Ｙ軸方向に沿って基台３に固
定配設され、前記防塵カバー１０１と、蛇腹浮上防止ａ
ｆＡ９９を構成するガイドレール９６とを支持するもの
である。また、凹所１２には工具類を収容できるようゴ
ム１３が貼設されている。Reference numeral 11 denotes a support member, which is fixedly disposed on the base 3 along the Y-axis direction, and is attached to the dustproof cover 101 and the bellows floating prevention a.
It supports the guide rail 96 that constitutes fA99. Moreover, rubber 13 is attached to the recess 12 so that tools can be accommodated therein.
なお、基台３に取り付けられたリミットスイッチ１１１
と載物台２０に取り付けられた係合部材１１２とから構
成される装置検出手段１１０は載物台２０のＹ軸方向限
界位置を検出するものである。Note that the limit switch 111 attached to the base 3
The apparatus detecting means 110, which is constituted by the engaging member 112 attached to the stage 20, detects the limit position of the stage 20 in the Y-axis direction.
このように構成された三次元測定機では、載物台２０上
にＲ置された測定対象物（図示省略）と検出子４２とを
三次元方向に相対移動させつつＹ軸変位検出手段７０等
からの出力１３号を利用して測定対象物の寸法等を高精
度で測定することができる。In the three-dimensional measuring machine configured in this way, the Y-axis displacement detecting means 70, etc. are moved while the object to be measured (not shown) placed R on the stage 20 and the detector 42 are moved relative to each other in the three-dimensional direction. The dimensions of the object to be measured can be measured with high accuracy by using the output No. 13 from the .
ここに、ｉ３ｉ物台２０のＹ軸方向の移動は、駆動手段
８０のボールネジ８１をモータ（図示省略）で回動させ
ることによって行われる。そして、載物台２０は、予め
クリアランス調整されたＸ軸位置規制手段５０によって
Ｘ軸方向位置が規制され、一方Ｚ軸位置規制手段６０に
よってｙｇ内レール３８．３８の上面に対しＺ軸方向位
置が規制される。従って、載物台２０すなわちこれに載
置された測定対象物はＸおよびＺ軸方向に位置規制され
つつＹ軸方向に移動される。Here, the i3i table 20 is moved in the Y-axis direction by rotating the ball screw 81 of the drive means 80 with a motor (not shown). The position of the stage 20 in the X-axis direction is regulated by the X-axis position regulating means 50 whose clearance is adjusted in advance, and the position in the Z-axis direction is regulated by the Z-axis position regulating means 60 with respect to the upper surface of the YG inner rail 38.38. is regulated. Therefore, the stage 20, that is, the object to be measured placed thereon, is moved in the Y-axis direction while its position is regulated in the X- and Z-axis directions.
このＹ軸方向移動中、蛇腹浮上防止機構９９の作用も相
俟って蛇１ｔ１９２ａ、９２ｂは１７上することなく載
物台２０の移動に伴ってそれぞれ伸縮し、凹部５に収容
された変位検出手段７０等をカバーし防塵する。また、
載物台２０と基台３とのＸ軸方向クリアランスは、防塵
カバーによってカバーされるので確実な防塵が行われる
。During this movement in the Y-axis direction, together with the action of the bellows floating prevention mechanism 99, the snakes 1t192a and 92b expand and contract with the movement of the stage 20 without moving up 17. The means 70 etc. are covered to prevent dust. Also,
Since the clearance in the X-axis direction between the stage 20 and the base 3 is covered by the dustproof cover, reliable dustproofing is achieved.
この実施例によれば、基台３に振り分けの凹部５を設け
、この凹部５にＹ２Ｅ内レール３８．３８を配設すると
ともに位置規制手段５０．６０、Ｙ軸変位検出手段７０
および駆動手段８０等を収容したので、載物台２０のＺ
軸方同高さを低くすなわち支柱２５．２５を高い位置で
基台３に取り付けることができる。その結果、支柱２５
．２５を短寸化できるからその小型軽量化または／およ
び高剛性とすることができ検出子４２の位置を不動のも
のとして高精度測定を達成することができる。According to this embodiment, a distribution recess 5 is provided in the base 3, and the Y2E inner rail 38, 38 is arranged in this recess 5, and the position regulating means 50, 60 and the Y-axis displacement detecting means 70 are arranged.
Since the drive means 80 and the like are accommodated, the Z of the stage 20 is
It is possible to attach the supports 25, 25 to the base 3 at a lower axial height, that is, at a higher position. As a result, post 25
．． Since the detector 25 can be shortened, it can be made smaller and lighter and/or more rigid, and the position of the detector 42 can be fixed to achieve high precision measurement.
また、Ｘ軸位置規制手段６０は、エアベアリング６１．
６１とこれに坑して載物台２０を下方向に付勢するマグ
ネット６２．６２利用の手段とから構成されているから
載物台２０が軽量でもあるいは′Ｒ置すべき測定対象物
が軽量である場合でもエアベアリング６１．６１への供
給空気の微小調整をすることなく載物台２０のＺ軸方向
位置を正６′僅に規制することができる。Further, the X-axis position regulating means 60 includes an air bearing 61.
61 and a means using magnets 62 and 62 that press the workpiece stand 20 downward by penetrating it, so even if the workpiece stand 20 is lightweight or the object to be measured is lightweight. Even in this case, the position of the stage 20 in the Z-axis direction can be slightly regulated by 6' without making minute adjustments to the air supplied to the air bearings 61, 61.
さらに、基台３の各手段５０．６０．７０．８Ｏを収容
させた凹部５をカバーする防塵装置９０を設けているの
で、それら手段の特性、機能を安定して維持することが
できるばかりか、安全作業を保障することができる。ま
た、蛇腹！ｊｔｙ ９ ｔには蛇腹浮上防止機構９９を
設けているので、この点からも確実な防塵運転をするこ
とができる。 ”□さらにまた、駆動手段８０のボー
ルネジ８１とナンド部材９２との螺合は、載物台２０の
中央部で行うよう形成されているから、Ｘ軸位置規制手
段５０の機能と相俟ってガタ、蛇行を防止しっつ載物台
２０をＹ軸方向に直動させることができる。Furthermore, since a dustproof device 90 is provided to cover the recess 5 in which each means 50, 60, 70.8O of the base 3 is accommodated, the characteristics and functions of these means can be stably maintained. , can ensure safe work. Also, bellows! Since the jty9t is provided with a bellows floating prevention mechanism 99, reliable dust-proof operation can be achieved from this point as well. "Furthermore, since the ball screw 81 of the driving means 80 and the NAND member 92 are screwed together at the center of the stage 20, the screwing together with the function of the X-axis position regulating means 50 Shake and meandering can be prevented and the stage 20 can be moved directly in the Y-axis direction.
この点からも高精度測定を保障できる。High precision measurement can also be guaranteed from this point of view.
なお、以上の実施例では、検出子４２がビデオカメラと
されていたが、タッチ信号プローブ等でもよく、その種
別は不問である。また、Ｘスライダ３５、スピンドル４
１等はモータ送り方式でも手動送り方式でもよい、さら
に、防塵装置９ｏのガイドレール９６、防塵カバー１０
１の各先端部またはこれらに対応する凹部２ ’ｌ 、
Ｒ１部９７のいずれか一方に回転ローラを設は摺動性を
向上させることも可能である。In the above embodiment, the detector 42 is a video camera, but it may be a touch signal probe or the like, and its type is not limited. Also, the X slider 35, spindle 4
The first type may be a motor feeding method or a manual feeding method.Furthermore, the guide rail 96 of the dustproof device 9o, the dustproof cover 10
Each tip of 1 or a recess 2'l corresponding to these,
It is also possible to provide a rotating roller on either one of the R1 portions 97 to improve sliding properties.
以上の説明から明らかの通り、本発明は駆動手段等を基
台の凹部に収容させて小型軽量化を達成できるとともに
支柱を短小化することによって高精度測定を達成できる
という優れた効果ををする。As is clear from the above explanation, the present invention has the excellent effect of being able to achieve a reduction in size and weight by housing the driving means etc. in the recess of the base, and also to achieve high precision measurement by shortening the support. .
第１図は本発明に係る三次元ＩＩＩ定機の一実施例の全
体構成を示す斜視図、第２図、第３図は同じく第１図に
対応させた正面図および側面図、第４図は同じく第１［
２］のｒＶ−ｒＶ矢視線に基づく断面図、第５図は同し
く第１図のＶ−Ｖ矢視線に基づく断面図、第６図は蛇腹
装置の要部斜視図、第７図は従２１４の支柱固定型三次
元測定機の全体構成図および第８図は従来の支柱可動型
三次元測定機の全体構成図である。
３・・・基台、５・・・凹部、２０・・・載物台、２５
・・・支柱、３８・・・ｙｇ内レール、４２・・・検出
子、５０・・・Ｘ軸位置規制手段、６０・・・Ｚ軸位置
規制手段、６１・・エアベアリング、６２・・・マグネ
ット、６３・・・磁性体、７０・・・Ｙ軸変位検出手段
、８０・・・駆動手段。FIG. 1 is a perspective view showing the overall configuration of an embodiment of a three-dimensional III straightening machine according to the present invention, FIGS. 2 and 3 are front and side views corresponding to FIG. 1, and FIG. 4 is also the first [
2], FIG. 5 is a sectional view also taken along the V-V arrow line in FIG. 1, FIG. 6 is a perspective view of the main part of the bellows device, and FIG. 214 is an overall configuration diagram of a fixed column type coordinate measuring machine, and FIG. 8 is an overall configuration diagram of a conventional column movable type coordinate measuring machine. 3... Base, 5... Recess, 20... Loading stand, 25
... Pillar, 38... YG inner rail, 42... Detector, 50... X-axis position regulating means, 60... Z-axis position regulating means, 61... Air bearing, 62... Magnet, 63... Magnetic material, 70... Y-axis displacement detection means, 80... Drive means.
Claims (2)
された検出子とを三次元方向に相対移動させつつ形状寸
法等を測る三次元測定機において、基台にＸ軸方向に所
定幅、Ｚ軸方向に所定深さとされかつＹ軸方向に伸びる
凹所を設けるとともに、この基台の凹所に中心振り分け
の１組のＹ案内レールを設け、 前記載物台を該Ｙ案内レールに沿って移動可能に該基台
に支持させかつ前記支柱を該基台の両側端に起立固定し
、 該基台に対する前記載物台のＸ軸方向位置を規制するた
めのＸ軸位置規制手段、Ｚ軸方向位置を規制するための
Ｚ軸位置規制手段、Ｙ軸方向に前記載物台を自動送りす
るためのＹ軸用の駆動手段およびＹ軸方向の前記載物台
の移動変位量を検出するためのＹ軸変位検出手段を前記
載物台の凹所内に配設したことを特徴とする三次元測定
機。(1) In a three-dimensional measuring machine that measures the shape and dimensions of an object to be measured on a stage and a detector movably supported on a support in three-dimensional directions, the base is placed in the X-axis direction. A recess having a predetermined width, a predetermined depth in the Z-axis direction, and extending in the Y-axis direction is provided in the base, and a set of Y guide rails distributed in the center is provided in the recess of the base, so that the document table is connected to the Y-axis. an X-axis position for regulating the position of the document table in the X-axis direction with respect to the base; a regulating means, a Z-axis position regulating means for regulating the position in the Z-axis direction, a drive means for the Y-axis for automatically feeding the document table in the Y-axis direction, and a movement displacement of the document table in the Y-axis direction. A three-dimensional measuring machine, characterized in that a Y-axis displacement detection means for detecting a quantity is disposed in a recess of the object table.
置規制手段が、前記Ｙ案内レールの上端面に対応させて
前記載物台に取り付けたエアベアリングと、前記基台の
磁性体部分とこの磁性体部分と吸引作用する載物台に取
り付けられたマグネットとから形成され前記載物台を基
台下方向に引張付勢する手段と、から構成されている三
次元測定機。(2) In claim 1, the Z-axis position regulating means includes an air bearing attached to the object stand in correspondence with the upper end surface of the Y guide rail, and a magnetic portion of the base. and a means for tensioning and biasing the document table downward from the base, which is formed from the magnetic material portion and a magnet attached to the document table which acts as an attraction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10924286A JPS62265519A (en) | 1986-05-12 | 1986-05-12 | Three-dimensional measuring machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10924286A JPS62265519A (en) | 1986-05-12 | 1986-05-12 | Three-dimensional measuring machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62265519A true JPS62265519A (en) | 1987-11-18 |
| JPH04526B2 JPH04526B2 (en) | 1992-01-07 |
Family
ID=14505215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10924286A Granted JPS62265519A (en) | 1986-05-12 | 1986-05-12 | Three-dimensional measuring machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62265519A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5339531A (en) * | 1992-01-30 | 1994-08-23 | Tokyo Seimitsu, Co., Ltd. | Coordinate measuring machine |
-
1986
- 1986-05-12 JP JP10924286A patent/JPS62265519A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5339531A (en) * | 1992-01-30 | 1994-08-23 | Tokyo Seimitsu, Co., Ltd. | Coordinate measuring machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04526B2 (en) | 1992-01-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO1999013289A1 (en) | Coordinate measuring machine of a gantry-style | |
| JPH0439011B2 (en) | ||
| JPH0478927B2 (en) | ||
| GB1354130A (en) | Apparatus for supporting and accurately positioning an object | |
| US6960855B2 (en) | Bearing for a measuring instrument, particularly a coordinate measuring instrument | |
| TWI260646B (en) | X-Y axis stage device | |
| JPS62265519A (en) | Three-dimensional measuring machine | |
| CN219574594U (en) | One-dimensional movement device | |
| JPH0421051Y2 (en) | ||
| JPH0422253Y2 (en) | ||
| JPH044168Y2 (en) | ||
| US20050086821A1 (en) | Coordinate measuring device | |
| JPH07139936A (en) | Coordinate measuring apparatus | |
| CN211373497U (en) | Vertical interferometer lifting adjusting frame mechanism | |
| JPS62265520A (en) | Three-dimensional measuring machine equipped with two detecting elements | |
| CN107214530A (en) | A kind of ultraprecise air supporting locating platform | |
| JP2837756B2 (en) | Positioning stage | |
| JPH0738805Y2 (en) | Bridge type coordinate measuring machine | |
| JPH0548087Y2 (en) | ||
| JPH0525789Y2 (en) | ||
| JP5292668B2 (en) | Shape measuring apparatus and method | |
| CN218066356U (en) | Profile measuring instrument capable of adjusting Z-axis direction measuring range | |
| CN220751944U (en) | Linear motion platform and microscope detection device | |
| JPH0320688B2 (en) | ||
| JPH0349364B2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |