JPS62263942A - Copper alloy for lead frame - Google Patents

Copper alloy for lead frame

Info

Publication number
JPS62263942A
JPS62263942A JP61106190A JP10619086A JPS62263942A JP S62263942 A JPS62263942 A JP S62263942A JP 61106190 A JP61106190 A JP 61106190A JP 10619086 A JP10619086 A JP 10619086A JP S62263942 A JPS62263942 A JP S62263942A
Authority
JP
Japan
Prior art keywords
alloy
lead frame
solder
copper alloy
electrical conductivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61106190A
Other languages
Japanese (ja)
Inventor
Daiji Sakamoto
坂本 大司
Rikizo Watanabe
力蔵 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP61106190A priority Critical patent/JPS62263942A/en
Publication of JPS62263942A publication Critical patent/JPS62263942A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49579Lead-frames or other flat leads characterised by the materials of the lead frames or layers thereon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

PURPOSE:To obtain a copper alloy for lead frame having high strength and high electric conductivity, by incorporating specific amounts of Fe, Co, Mn, and Mg to a Cu-Ni-Ti alloy. CONSTITUTION:The copper alloy for lead frame has a composition comprising, by weight, 0.8-4% Ni and 0.2-4% Ti in a range satisfying Ni%/Ti%=1-4, containing 0.01-1% Fe and/or Co and 0.05-1%, in total, of 0.1-1% Mn and/or 0.05-0.6% Mg or containing 0.1-1% Mn and/or 0.05-0.6% Mg and 0.1-1% Zn so that the sum of Zn, Mn, and Mg is 0.05-1, and having the balance Cu.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はおもに半導体装置のリードフレーム用として使
用される銅基合金に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a copper-based alloy mainly used for lead frames of semiconductor devices.

〔従来の技術〕[Conventional technology]

一般に半導体を要素とする集積回路のリードフレーム材
には次のような特性が要求される。
Generally, lead frame materials for integrated circuits using semiconductors as elements are required to have the following characteristics.

(1)電気および熱の伝導性が良いこと回路部に電気信
号を伝達し、また回路部の発熱をすみやかに外部へ放出
させるため、優れた電気伝導性と熱伝導性が要求される
(1) Good electrical and thermal conductivity Excellent electrical and thermal conductivity is required in order to transmit electrical signals to the circuit section and to quickly release heat generated from the circuit section to the outside.

(2)機械的強度が大きいこと 半導体機器は最終的にはそのリード先端部を各種回路基
板のソケットに差し込むか、あるいは半田付けして使用
されるためリード自体の強度が大きいことが必要であり
、またリード部の繰返し折り曲げに対する疲労強度の強
いことが必要である。
(2) High mechanical strength Semiconductor devices are ultimately used by inserting the lead tips into the sockets of various circuit boards or by soldering them, so the leads themselves need to have high strength. In addition, the lead portion must have high fatigue strength against repeated bending.

(3)耐熱性が良いこと(軟化温度が高いこと)半導体
機器の組立工程中、ダイボンディング、ワイヤボンディ
ング、レジンモールド等の各工程においてリードフレー
ム材は300〜450℃の高温にさらされるため、この
程度の加熱で機械的強度が低下しないことが必要である
(3) Good heat resistance (high softening temperature) During the assembly process of semiconductor devices, lead frame materials are exposed to high temperatures of 300 to 450°C in various processes such as die bonding, wire bonding, and resin molding. It is necessary that mechanical strength not be reduced by heating to this extent.

(4)熱膨張係数が半導体チップあるいはモールドレジ
ンに近いこと 加熱を伴う組立工程中の熱膨張差による歪みに起因する
半導体チップの特性変動あるいはモールドレジンとの密
着性劣化を防ぐため、リードフレーム材には半導体チッ
プあるいはモールドレジンと近似した熱膨張係数が必要
とされる。
(4) The coefficient of thermal expansion is close to that of the semiconductor chip or mold resin.In order to prevent changes in the characteristics of the semiconductor chip or deterioration of adhesion with the mold resin due to distortion due to differences in thermal expansion during the assembly process that involves heating, the lead frame material requires a thermal expansion coefficient similar to that of a semiconductor chip or mold resin.

(5)めっき性が良いこと ダイボンディングされる部分のリードフレーム表面には
目的に応じて金や銀のめっきが施されるため、めっきの
被着性が良く、めっき欠陥の少ない材料であることが必
要である。
(5) Good plating properties The surface of the lead frame where die bonding is performed is plated with gold or silver depending on the purpose, so the material should have good plating adhesion and few plating defects. is necessary.

(6)半田付は性が良いこと 最終ユーザーでの半田実装を容易にするため、ICの外
部リードにはあらかじめSnや半田の被覆が施される。
(6) Good soldering properties To facilitate solder mounting by the final user, the external leads of the IC are coated with Sn or solder in advance.

従ってリードフレーム材には半田濡れ性の良いことまた
、半田耐候性の良いこと(長時間使用中の半田密着性の
劣化が少ないこと)などが必要とされる。
Therefore, lead frame materials are required to have good solder wettability and good solder weather resistance (less deterioration of solder adhesion during long-term use).

(7)モールドレジンとの密着性が良いこと一般に集積
回路は、最終的にはレジンモールドされるタイプが多く
、この場合レジンとの密着性の良いことが必要とされる
(7) Good adhesion with mold resin Generally, many integrated circuits are ultimately molded with resin, and in this case, good adhesion with resin is required.

しかしながら従来よりリードフレーム材料として用いら
れているF e−42%Ni、Fe−29%Ni−17
%CoなどのFe−Ni系合金、あるいは鉄人鋼、リン
青銅などのCu基合金はいずれも一長一短があり、いず
れかの必要特性を犠牲にして用途に応じた使い分けがな
されていた。
However, Fe-42%Ni and Fe-29%Ni-17, which have been conventionally used as lead frame materials,
Fe--Ni alloys such as %Co, and Cu-based alloys such as Tetsujin Steel and Phosphor Bronze all have advantages and disadvantages, and have been used depending on the purpose at the expense of one of the required properties.

これらリードフレーム材の中でもCu基合金は1?e−
Ni系合金に比べて熱伝導性、電気伝導性が極めてすぐ
れ、また安価であるため近年その使用量は急激に増加し
はじめ業界ではCu基合金の欠点である機械的強度や耐
熱性を改良した各種の合金が提案されてきた。
Among these lead frame materials, is Cu-based alloy 1? e-
Compared to Ni-based alloys, it has extremely superior thermal conductivity and electrical conductivity, and is also cheaper, so its usage has begun to increase rapidly in recent years, and the industry has improved its mechanical strength and heat resistance, which are the shortcomings of Cu-based alloys. Various alloys have been proposed.

しかしながら、これらの合金はいずれも機械的強度重視
あるいは電気伝導度重視のどちらかに片寄ったものが多
く、半田付は性に対する配慮が十分でなかった。たとえ
ば、機械的強度向上の目的で添加した合金元素が何等か
の形で半田濡れ性や半田耐候性を害するという例が多く
あった。
However, most of these alloys are biased toward either mechanical strength or electrical conductivity, and insufficient consideration has been given to soldering properties. For example, there have been many cases in which alloying elements added for the purpose of improving mechanical strength somehow impair solder wettability or solder weather resistance.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

本発明はかがる点に鑑み高強度と高電気伝導性とを兼ね
備え、さらに半田耐候性を改善しリードフレーム用材料
として好適な諸特性を有する新規な銅合金を提供するも
のである。
In view of these problems, the present invention provides a new copper alloy that has both high strength and high electrical conductivity, and also has improved solder weather resistance and has various properties suitable as a material for lead frames.

〔問題点を解決するための手段〕[Means for solving problems]

本発明者らは前述のような問題点を解決するべくCu−
Ni−Ti系合金を対象に実験を行なった結果、本合金
にFe、CoとM n 、 hl gおよびZnとを特
定量含有せしめることにより高強度、高電気伝導性およ
び良好なる半田耐候性とを兼ね備えた合金が得られるこ
とを見出し本発明に到ったものである。
In order to solve the above-mentioned problems, the present inventors developed Cu-
As a result of experiments conducted on Ni-Ti alloys, it was found that by containing specific amounts of Fe, Co, Mn, hlg, and Zn in this alloy, high strength, high electrical conductivity, and good solder weather resistance were achieved. The inventors have discovered that it is possible to obtain an alloy that has both of the following, and have thus arrived at the present invention.

具体的には、重量XにてNi O,8〜4.0%および
Ti002〜4.0を(Ni/Ti比率 Cu基合金にさらにFeおよびCoのうちの1種または
2種を合計テ0.01−1.0%、Mn 0.1−1.
0%、 M g0.05〜0.6%のうちの1種または
2種を合計で0.05〜1.0%を含有せしめたことを
特徴とする合金、そして更にこれにZn O,1〜1.
0%を含有せしめたことを特徴とする合金である NiおよびTiはCuマトリックス中にNi3Tiある
いはNiTiとして微細に析出し、合金の電気伝導性を
あまり低下させずに機械的強度および耐熱性を向上させ
るものでありその組成比率を適正範囲内にコントロール
することが重要なポイントとなる。つまり重量ガでのN
 i/ T i比率が1未満の場合には過剰のTiが、
また逆にNi/Ti比率が4を越える場合にはNiが、
それぞれCuマトリックス中に固溶し合金の電気伝導性
を低下させる。したがって、Ni/Ti比率は1〜4と
した。
Specifically, NiO, 8 to 4.0% and Ti002 to 4.0 are added to the Ni/Ti ratio Cu-based alloy, and one or two of Fe and Co are added to the total amount of .01-1.0%, Mn 0.1-1.
0%, Mg0.05-0.6%, and further contains ZnO,1. ~1.
The alloy is characterized by containing 0% Ni and Ti, which are finely precipitated as Ni3Ti or NiTi in the Cu matrix, improving the mechanical strength and heat resistance without significantly reducing the electrical conductivity of the alloy. It is important to control the composition ratio within an appropriate range. In other words, N in terms of weight
When the i/Ti ratio is less than 1, the excess Ti is
Conversely, when the Ni/Ti ratio exceeds 4, Ni
Each is dissolved in the Cu matrix and reduces the electrical conductivity of the alloy. Therefore, the Ni/Ti ratio was set to 1-4.

次にNiおよびTiの絶対量に関しては、Ni O。Next, regarding the absolute amounts of Ni and Ti, NiO.

部未満あるいはTi O,2%未満では十分に機械的強
度が得られず、またNiあるいはTiがそれぞれ4゜0
%を越えると合金の加工性が劣化するとともにめっき性
、半田濡れ性等にも悪影響を及ぼすようになるため重量
%にてNi O,8〜4.0%およびTiO,2〜4.
0%に限定した。
If Ni or Ti is less than 4% or less than 2%, sufficient mechanical strength cannot be obtained, and if Ni or Ti is less than 4%
If it exceeds 8% to 4.0% by weight of NiO and 2 to 4% by weight of TiO, the workability of the alloy will deteriorate and it will also have an adverse effect on plating properties, solder wettability, etc.
It was limited to 0%.

FeおよびCoは合金中に微細に析出し、はんだ濡れ性
をあまり劣化させることなく、機械的強度を向上させる
元素であるが、0.01%未満ではその効果が充分でな
く、また1、0%を超えると電気伝導度の低下が大きく
なるため、いずれか1種または2種合計で0.01〜1
.0%とした。
Fe and Co are elements that finely precipitate in the alloy and improve mechanical strength without significantly deteriorating solder wettability, but if it is less than 0.01%, the effect is not sufficient; If it exceeds 0.01% to 1%, the electrical conductivity will decrease significantly, so either one or both of them in total should be 0.01 to 1%.
.. It was set to 0%.

M n 、 M g 、およびZnは半田耐候性を改善
する合金元素であるが今のところその機構については不
明な点が多い。おそらく合金中に微量固溶している元素
の半田付は界面への拡散移動を抑制し半田/母材界面に
TiやNiとSnとのもろい金属間化合物が形成される
のを防いでいるものと推定されるが、その含有量がMn
あるいはZnの場合は0.1%未満、Mgの場合は0.
05%未満では十分な効果が得られず、逆にMnあるい
はZnを1.0%を越えて含有せしめても、またMgの
場合0.6%を越えて含有せしめてもそれ以上の効果は
得られないうえ、合金の電気伝導度が低下し過ぎるため
それぞれMn0.1〜1.0%、Mg 0.05−0.
6%、 Zn 0.1−1.0%に限定した。
M n , M g , and Zn are alloying elements that improve solder weather resistance, but so far there are many points that are unclear about the mechanism. Probably, the soldering of small amounts of elements dissolved in solid solution in the alloy suppresses the diffusion and movement to the interface and prevents the formation of brittle intermetallic compounds of Ti, Ni, and Sn at the solder/base metal interface. It is estimated that the content is Mn
Or less than 0.1% for Zn and 0.1% for Mg.
If it is less than 0.05%, no sufficient effect will be obtained, and conversely, even if Mn or Zn is contained in excess of 1.0%, or in the case of Mg, in excess of 0.6%, no further effect will be obtained. In addition, the electrical conductivity of the alloy is too low.
6%, Zn 0.1-1.0%.

またMn、ZnおよびMgを複合的に含有せしめる場合
、その総和が1.0%を越えると合金の電気伝導度の低
下が無視できなくなるため、その総和量を0.05−1
.0%に限定した。
Furthermore, when containing Mn, Zn and Mg in combination, if the total exceeds 1.0%, the decrease in the electrical conductivity of the alloy cannot be ignored, so the total amount should be reduced to 0.05-1%.
.. It was limited to 0%.

〔実施例〕〔Example〕

以下本発明を実施例により説明する。 The present invention will be explained below with reference to Examples.

第1表に示す合金を高周波誘導溶解炉にて溶解、鋳造し
、鍛造および熱間圧延により厚さ5IIIllまで圧延
し、ついで研削により表面の酸化スケールを除去したの
ち冷間圧延、軟化焼鈍を繰り返し最終冷間圧延率50%
にて板厚0.25mmにしあげ、450℃で時効処理を
行なった。これらの試料について電気伝導度、引張強さ
、半田濡れ性および半田耐候性の試験を行なった結果を
第2表に示す。半田濡れ性については、厚さ0.25o
n、幅20画、長さ30圃の試料を用いMII、−5T
D−202F METHOo 2080に基いて半田付
けを行い、半田の濡れ状態を目視で観察した。
The alloy shown in Table 1 was melted and cast in a high-frequency induction melting furnace, rolled to a thickness of 5IIIll by forging and hot rolling, and then subjected to repeated cold rolling and softening annealing after removing the oxide scale on the surface by grinding. Final cold rolling rate 50%
The plate was made to have a thickness of 0.25 mm at 450° C. and aged at 450° C. These samples were tested for electrical conductivity, tensile strength, solder wettability, and solder weather resistance, and the results are shown in Table 2. For solder wettability, the thickness is 0.25o.
MII, -5T using a sample of n, width 20 strokes and length 30 fields
D-202F Soldering was performed based on METHOo 2080, and the wetting state of the solder was visually observed.

また半田耐候性については、前記の方法で半田付けした
試料を大気中150℃で500時間保持したのち半径z
閣の曲率に曲げ、再度間げを戻した場合の母材からの半
田剥離状況により判定した。第1表。
Regarding the solder weather resistance, after holding the sample soldered by the above method in the atmosphere at 150°C for 500 hours, the radius z
Judgment was made based on the peeling of solder from the base material when the material was bent to the curvature of the cabinet and the gap was returned again. Table 1.

第2表において、従来合金のうち試料番号14はNi入
り銅合金、番号15はリン青銅系の高強度鋼合金、番号
16は42Ni合金である。
In Table 2, among the conventional alloys, sample number 14 is a Ni-containing copper alloy, sample number 15 is a phosphor bronze-based high-strength steel alloy, and sample number 16 is a 42Ni alloy.

第1表 第2表 第1表および第2表の結果から明らかなように本発明合
金は高強度と高電気伝導度とを兼ね備え、さらに、良好
なる半田耐候性を有していることがわかる。Ni/Ti
比が1〜4の範囲をはずれると試料番号1,2の比較例
に示すごとく電気伝導度は著しく低下しCu合金の長所
が失われ、M n 、 M gあるいはZnを含有しな
いものは試料番号3に示すごとく半田耐候性が劣る。本
発明合金は、従来合金の42Ni合金に比べ電気伝導度
は10倍以上あり、またNi入り銅合金やSn、P入り
の高強度銅合金に比べ強度はほぼ同等であるが、電気伝
導度が高く、かつ半田耐候性においても優れている。
As is clear from the results in Tables 1 and 2, the alloy of the present invention has both high strength and high electrical conductivity, and also has good solder weather resistance. . Ni/Ti
When the ratio is outside the range of 1 to 4, the electrical conductivity decreases significantly as shown in the comparative example of sample numbers 1 and 2, and the advantages of the Cu alloy are lost. As shown in No. 3, the solder weather resistance is poor. The electrical conductivity of the alloy of the present invention is more than 10 times that of the conventional 42Ni alloy, and the strength is almost the same as that of Ni-containing copper alloys and high-strength copper alloys containing Sn and P, but the electrical conductivity is It also has excellent solder weather resistance.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明に係る合金は半導体装置用の
リードフレーム材として十分な強度と電気伝導性を具備
し、さらに半田耐候性も良好であるため、極めて信頼性
の高いリードフレーム材となりえるものである。
As explained above, the alloy according to the present invention has sufficient strength and electrical conductivity as a lead frame material for semiconductor devices, and also has good solder weather resistance, so it can be used as an extremely reliable lead frame material. It is something.

Claims (1)

【特許請求の範囲】 1 重量%にてNi0.8〜4.0%およびTi0.2
〜4.0%を(Ni%/Ti%)=1〜4の範囲内で含
有し、さらにFeおよびCoのうちの1種または2種を
合計で0.01〜1.0%、そしてさらにMn0.1〜
1、0%、Mg0.05〜0.6%のうちの1種または
2種を合計で0.05〜1.0%を含有し残部実質的に
Cuよりなることを特徴とするリードフレーム用銅合金
。 2 重量%にてNi0.8〜4.0%およびTi0.2
〜4、0を(Ni%/Ti%)=1〜4の範囲内で含有
し、さらにFeおよびCoのうちの1種または2種を合
計で0.01〜1.0%、そしてさらにMn0.1〜1
.0%、Mg0.05〜0.6%のうちの1種または2
種とZn0.1〜1.0%をZn+Mn+Mgの合計で
0.05〜1.0%含有し残部実質的にCuよりなるこ
とを特徴とするリードフレーム用銅合金。
[Claims] 1% by weight of Ni0.8-4.0% and Ti0.2%
~4.0% within the range of (Ni%/Ti%) = 1 to 4, further containing one or two of Fe and Co in a total of 0.01 to 1.0%, and further Mn0.1~
1.0%, Mg0.05-0.6%, and one or two of Mg0.05-0.6% in a total of 0.05-1.0%, and the remainder substantially consists of Cu. Copper alloy. 2% by weight Ni0.8-4.0% and Ti0.2
~4,0 within the range of (Ni%/Ti%) = 1 to 4, further containing one or two of Fe and Co in a total of 0.01 to 1.0%, and further containing Mn0 .1~1
.. 0%, one or two of Mg0.05-0.6%
A copper alloy for a lead frame, characterized in that it contains seeds and 0.1 to 1.0% of Zn in a total of 0.05 to 1.0% of Zn+Mn+Mg, and the remainder substantially consists of Cu.
JP61106190A 1986-05-09 1986-05-09 Copper alloy for lead frame Pending JPS62263942A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61106190A JPS62263942A (en) 1986-05-09 1986-05-09 Copper alloy for lead frame

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61106190A JPS62263942A (en) 1986-05-09 1986-05-09 Copper alloy for lead frame

Publications (1)

Publication Number Publication Date
JPS62263942A true JPS62263942A (en) 1987-11-16

Family

ID=14427274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61106190A Pending JPS62263942A (en) 1986-05-09 1986-05-09 Copper alloy for lead frame

Country Status (1)

Country Link
JP (1) JPS62263942A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004024964A2 (en) 2002-09-13 2004-03-25 Olin Corporation Age-hardening copper-base alloy and processing
JP2006144047A (en) * 2004-11-17 2006-06-08 Dowa Mining Co Ltd Cu-Ni-Ti BASED COPPER ALLOY AND COOLING PLATE

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004024964A2 (en) 2002-09-13 2004-03-25 Olin Corporation Age-hardening copper-base alloy and processing
WO2004024964A3 (en) * 2002-09-13 2004-07-01 Olin Corp Age-hardening copper-base alloy and processing
JP2006144047A (en) * 2004-11-17 2006-06-08 Dowa Mining Co Ltd Cu-Ni-Ti BASED COPPER ALLOY AND COOLING PLATE
JP4568092B2 (en) * 2004-11-17 2010-10-27 Dowaホールディングス株式会社 Cu-Ni-Ti copper alloy and heat sink

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