JPS62262648A - Permanent magnet type surface pulse motor - Google Patents
Permanent magnet type surface pulse motorInfo
- Publication number
- JPS62262648A JPS62262648A JP10473586A JP10473586A JPS62262648A JP S62262648 A JPS62262648 A JP S62262648A JP 10473586 A JP10473586 A JP 10473586A JP 10473586 A JP10473586 A JP 10473586A JP S62262648 A JPS62262648 A JP S62262648A
- Authority
- JP
- Japan
- Prior art keywords
- stator
- phase
- permanent magnet
- electromagnets
- electromagnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000696 magnetic material Substances 0.000 claims description 3
- 230000005389 magnetism Effects 0.000 claims 1
- 239000011295 pitch Substances 0.000 abstract 3
- 239000000126 substance Substances 0.000 abstract 1
- 230000005284 excitation Effects 0.000 description 9
- 238000007796 conventional method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000779 smoke Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- HCBIBCJNVBAKAB-UHFFFAOYSA-N Procaine hydrochloride Chemical compound Cl.CCN(CC)CCOC(=O)C1=CC=C(N)C=C1 HCBIBCJNVBAKAB-UHFFFAOYSA-N 0.000 description 1
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Landscapes
- Linear Motors (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、永久磁石をmxn個の電磁石の空隙に対向す
る1fllf!面に貼付けた可動子が、r41性体より
なる格子状凸起をもつ平板状の固定子に対し、二次元的
に移動可能に支持されたm x n l[のザーフIイ
スパルスモータに関り−る。DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention provides a permanent magnet that faces mxn air gaps of electromagnets. The movable element attached to the surface is movably supported two-dimensionally with respect to a flat stator having lattice-like protrusions made of R41 material. Ri-ru.
(従来の技#4)
従来例(特公昭49−41602号、持分11r(52
−7962号)としてのザイネチツクの面パルスモータ
のようにハイブリッド形や可変磁気抵抗形のリニアパル
スL−りをXfi向、Y方向に設(Jたhli造のもの
がある。(Conventional technique #4) Conventional example (Special Publication No. 49-41602, equity 11r (52
There are some hybrid type or variable magnetic resistance type linear pulse motors such as Zynetschik's surface pulse motor (No. 7962), which have linear pulses in the Xfi direction and the Y direction.
(発明が解決しようとする問題点)
これらの従来技術は、可動子と固定子のそれぞれの誘導
子は丁が空隙を介して対向する所謂1− 、/T形マシ
ンであるため、発生する推力が寸法の割に小さく、人容
措化がむずかしかった。(Problems to be Solved by the Invention) In these conventional techniques, the thrust force generated is However, it was small compared to its size, making it difficult to accommodate humans.
ここにおいて本発明は、従来例の難点を克服し、工作機
のテーブル送りやXYステージ、プロッタなどにおける
精度、連応性の要求から、ダイレクトドライブのり一−
フ■イスモータが望ましく、小形で高推力の永久磁石ナ
ーフエイスバルスモークを111!供することを、その
目的とする。Here, the present invention overcomes the difficulties of the conventional example and addresses the requirements for precision and coordination in table feeding of machine tools, XY stages, plotters, etc.
A chair motor is preferable, and a small, high-thrust permanent magnet Nerf Aisbar Smoke 111! Its purpose is to provide
(発明が解決しようとする問題点)
本発明は、可動子としてmxn個の電磁石、固定子とし
て平板状の磁性体J:り成る。可動子は固定子に対して
、一定の空隙を保って、固定子表面上を自由に移動でき
るよう支持されている。固定子の可動子に対向する表面
には、磁性体の一定ピッチの格子状凸起部が設けられ、
可動子電磁石の固定子に対向り−る磁極面には、薄板状
の永久磁石が貼付けられていて、この磁石は固定子格子
ピッチに等しい極対ピッチで、格子状にN極とS極が交
互に?:ilaされているamXn個の電磁石の固定子
修了に対する位置は、永久磁石の磁極かりいに2π/m
、2π/nの相差をもつように配置されているmn相永
久磁石形サすフTイスモークである。(Problems to be Solved by the Invention) The present invention consists of mxn electromagnets as a mover and a flat magnetic body J as a stator. The movable element is supported with a constant gap between it and the stator so that it can move freely on the surface of the stator. The surface of the stator facing the mover is provided with lattice-like protrusions made of magnetic material at a constant pitch.
A thin plate-like permanent magnet is attached to the magnetic pole surface of the mover electromagnet facing the stator, and this magnet has N and S poles arranged in a lattice pattern with a pole-to-pole pitch equal to the stator lattice pitch. Alternately? : The position of the am
, 2π/n phase difference.
(作 用)
永久磁石形リニアパルスモータをリーフエイスモークに
展開しており、X方向は2nステツプ。(Function) A permanent magnet type linear pulse motor is deployed in a leaf axe smoke, with 2n steps in the X direction.
y方向は2nステツプ、相数mxnで正方格子のIll
目を4mn分割して位置決めでき、同時にrn n相励
磁により強い推力を得る。The y direction is a square lattice with 2n steps and the number of phases mxn.
The eyes can be divided into 4 mm for positioning, and at the same time a strong thrust can be obtained by rn-n phase excitation.
(実/Il!@ )
本発明の一実施例の外観を表わす斜視図を第1図に示1
゜
これは、縦列m=2個、横列n=2個の4相永久磁石形
サーフェイスパルスモータである。(Actual/Il!@) A perspective view showing the appearance of one embodiment of the present invention is shown in Fig. 1.
゜This is a 4-phase permanent magnet surface pulse motor with m=2 columns and n=2 rows.
可動子1は、それぞれ電磁石]−り11に電磁石コイル
12を巻回した4個の゛電磁石11のΔ。The mover 1 has four electromagnets 11 each having an electromagnet coil 12 wound around the electromagnet 11.
B、C,Dを長方形状に固着し、この電磁石11の固定
子へ対向するl! pツブ面には永久t4[i12の薄
板が貼付【)られて栴成されている。B, C, and D are fixed in a rectangular shape, and l! is opposed to the stator of this electromagnet 11. A thin plate of T4 [i12] is permanently attached to the P-tube surface.
固定子2は平板状の磁性体から成り、横のX方向格子ビ
ッヂλ 1wiのy方向格子ピッチλ とy
りる斜線で表わす格子状凸起部(′t)っとも白地の部
分は四部である)を設けて形成する。The stator 2 is made of a flat magnetic material, and the horizontal grating pitch λ in the y direction of the lateral ) is provided and formed.
この電磁石11のギ驚・ツブ面からみた永久磁石12の
磁歯パターンは第2図のようにイ【っている。The magnetic tooth pattern of the permanent magnet 12 seen from the tooth surface of the electromagnet 11 is as shown in FIG.
’、; 43、電磁石コイル112を縦線を施した磁極
は強められ、Il線のむい遇…1ユ弱められることを示
し、かつ縦線部(よ固定子2の格子状凸起部21に対応
する1゜
各電磁?i11の相電磁石Δ損、B相、C相、D相の相
対的配置は第3図に示すように、格子ピップλ 、λ、
の1//I−リ゛つづらしである。!f’ <hわ×
ら、△に対し、1Bはλx//l、Cはλ、//I、D
(よλ8/11とλ、/4だ警J IJ’らしである。',; 43. The magnetic poles of the electromagnetic coil 112 with vertical lines are strengthened, and the direction of the Il wire is weakened by 1 unit, and The corresponding 1° phase electromagnet Δ loss of each electromagnet i11, the relative arrangement of the B phase, C phase, and D phase are as shown in FIG.
1//I-ri spelling. ! f'<hwa× et al, △, 1B is λx//l, C is λ, //I, D
(The λ8/11 and λ, /4 seem to be police J IJ'.
第2図で、l−(ル112を励磁しlζどさ、=1イル
112のIll<囲む磁極がN極、その両a1りにある
外側の磁*がS 14に…化されるどすると、内側磁極
にIf/iられた永久mc112aの…極N極は強めら
れ、S極は弱められるととbに、外側磁極では逆−に永
久16凸121〕のIa f4!Sが強められ、N M
iが弱められる。In Fig. 2, if l-(le 112 is excited, lζ = 1 Ill of 112 < the surrounding magnetic pole is the N pole, and the outer magnetic * located on both a1 is S 14... , the N pole of the permanent mc112a attached If/i to the inner magnetic pole is strengthened, the S pole is weakened, and on the contrary, the Ia f4!S of the permanent 16 convex 121] of the outer magnetic pole is strengthened, N M
i is weakened.
強められる内側の永久磁石12aのN極と外側の永久磁
石12t)のS極は、丁度固定子2の格子状凸起部21
に一致するピッチ(×方向λ8.y方向λ )の位置に
設けられているので、格子状凸起部21を吸引して、つ
まり可動子1が移動して、一致する位置に平衡する。The N pole of the inner permanent magnet 12a and the S pole of the outer permanent magnet 12t, which are strengthened, are exactly at the lattice-like convex portion 21 of the stator 2.
Since it is provided at a position with a pitch that matches (x direction λ8, y direction λ), the lattice-like convex portion 21 is attracted, that is, the movable element 1 moves, and is balanced to the matching position.
しかして、各電磁石11において、Aの次にB。Thus, in each electromagnet 11, A is followed by B.
A、Bと励磁を切替えて行くと、つまりAを正相で次に
Bも正相で励磁しさらにAを逆相でさらにまたBを逆相
でl1ilI附すれば、可動F1+よ左側I\X方向移
動する。If you switch the excitation to A and B, that is, if A is in the positive phase, then B is also excited in the positive phase, and then A is in the negative phase and B is in the negative phase again, the movable F1+ will be on the left side I\ Move in the X direction.
また、Δの次にC0Δ、Cと励磁すれば、可動子11よ
顕すへy方法移動する。Furthermore, if Δ is then excited, C0Δ, then C, the movable element 11 moves in the y direction.
なJ5、第4図は可動子1を固定子2に対向して自在に
移動可能に支承し案内する手段の一例を表わず路線図を
示し、可動子の4隅に玉13を配置しているが、空気軸
受あるいは磁気軸受C4箇所を7方向支持Jればよい。J5, Figure 4 shows a route map without showing an example of a means for freely movably supporting and guiding the movable element 1 facing the stator 2, and shows balls 13 arranged at the four corners of the movable element. However, it is sufficient to support four air bearings or magnetic bearings in seven directions.
本発明の池の実施例として次の手段が考えられる。The following means can be considered as an embodiment of the pond of the present invention.
(ア) 円筒状に巻付けることにより、円筒面パルスモ
ータができる。(a) A cylindrical pulse motor can be created by winding it in a cylindrical shape.
(イ) 電磁石としてE形電磁石ヨークに1相の電磁石
コイルを巻回するのに限るものではなく、E形電磁石ヨ
ークに3相の電磁石コイルあるいはC形電磁石コイルに
1相の電磁石コイルを巻装するなど種々のものが可能で
ある。(b) The electromagnet is not limited to winding a 1-phase electromagnetic coil around an E-type electromagnet yoke; it is also possible to wind a 3-phase electromagnetic coil around an E-type electromagnet yoke or a 1-phase electromagnetic coil around a C-type electromagnet coil. Various things are possible, such as
(つ) 電磁石側を固定し、格子状磁性体を可動子とす
ることもできる。(1) It is also possible to fix the electromagnet side and use the lattice-shaped magnetic body as the mover.
(1) 固定子2の…性体凸起部21を可動子1の永久
磁石12と入れ替えた構造も可能である。(1) A structure in which the magnetic body convex portion 21 of the stator 2 is replaced with the permanent magnet 12 of the mover 1 is also possible.
(オ) 各相ff1la石11の励磁方式として、例え
ば4相の場合、1相励磁、2相励磁、3相励磁。(E) As the excitation method for each phase ff1la stone 11, for example, in the case of four phases, one-phase excitation, two-phase excitation, and three-phase excitation.
4相励磁および1〜2相、2〜3相、3〜4相交代励磁
など多くの方式が可能である。Many methods are possible, such as 4-phase excitation and 1-2 phase, 2-3 phase, 3-4 phase alternating excitation.
(力) 閉ループ励磁方式により、特定の軌道に沿って
可動子1が動くようにすることもできる。(Force) The movable element 1 can also be made to move along a specific trajectory using a closed loop excitation method.
かくして本発明によれば、次に18げろ数多くのF′6
段の効果が1qられる。Thus, according to the present invention, next 18 Gero many F'6
The effect of the stage is reduced by 1q.
■ 永久磁石としてレアアースコバルト、ネオジウム鉄
ボロンなどの強力なものを用いるので、lW力が従来例
のハイブリッド形の3倍以上であるため、小形、高推力
のサーフェイスモータになる。■ Since a strong permanent magnet such as rare earth cobalt or neodymium iron boron is used, the IW force is more than three times that of the conventional hybrid type, resulting in a small, high-thrust surface motor.
■ 大音filXYテーブル、工作機送りなど応用が広
い。■ Wide range of applications such as loud fil XY table and machine tool feeding.
■ 従来のX軸すニアモータとY軸すニアモータを組合
Uて、サーフエイスモークにする方式に比べると、1相
で×、y方向のIff力を出すので、力の利用率が高い
。■ Compared to the conventional method of combining an X-axis near motor and a Y-axis near motor to create a surf ax smoke, it outputs Iff force in the x and y directions in one phase, so the power utilization rate is high.
■ X軸とy軸が独立ではないので、精度の高い位置決
め制御ができる。■ Since the X-axis and y-axis are not independent, highly accurate positioning control is possible.
第1図は本発明の一実施例の外観斜視図、第2図は電磁
石ギャップ面よりみた永久磁石の磁極パターン図、第3
図は相定磁石の相対的配置図、第4図は可動子支承機構
の路線図である。
1・・・可動子、11・・・電磁石、111・・・電磁
石ヨーク、112・・・電磁石コイル、12,12a。
12b・・・永久磁石、13・・・可動子支承手段。
出願人代理人 佐 藤 −雄
第3図
も4図Fig. 1 is an external perspective view of an embodiment of the present invention, Fig. 2 is a diagram of the magnetic pole pattern of the permanent magnet as seen from the electromagnet gap surface, and Fig. 3
The figure is a relative arrangement diagram of phase-constant magnets, and FIG. 4 is a route diagram of the movable element support mechanism. DESCRIPTION OF SYMBOLS 1... Mover, 11... Electromagnet, 111... Electromagnetic yoke, 112... Electromagnetic coil, 12, 12a. 12b... Permanent magnet, 13... Mover supporting means. Applicant's agent Mr. Sato Figures 3 and 4
Claims (1)
の空隙を保って、固定子表面上を自由に移動できるよう
支持され、 可動子電磁石の固定子に対向する磁極面には薄板状の永
久磁石が貼付けられ、この永久磁石は一定ピッチの格子
状にN極とS極が交互に着磁されて構成され、 固定子は、 平板状の磁性体より成り、その可動子の対向する表面に
は可動子永久磁石の磁極格子と同一の磁性体の格子状凸
起部を設けて形成され、 m×n個の電磁石の固定子磁性体格子状凸起部に対する
位置は、永久磁石の磁極が互いに2π/m、2π/nの
相差をもつように配置されていることを特徴とする永久
磁石形サーフェイスパルスモータ。[Scope of Claims] 1. The mover includes m×n electromagnets joined in a rectangular shape, and is supported so as to be able to move freely on the stator surface while maintaining a certain gap with the stator. A thin plate-like permanent magnet is attached to the magnetic pole face of the electromagnet facing the stator, and this permanent magnet is composed of alternating N and S poles magnetized in a lattice shape with a constant pitch, and the stator is a flat plate. The opposing surface of the mover is formed with a lattice-like protrusion of the same magnetic material as the magnetic pole lattice of the mover permanent magnet, and the stator magnetism of the m×n electromagnets is A permanent magnet surface pulse motor characterized in that the magnetic poles of the permanent magnets are positioned relative to the body lattice-like protrusions so that they have a phase difference of 2π/m and 2π/n.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10473586A JPS62262648A (en) | 1986-05-09 | 1986-05-09 | Permanent magnet type surface pulse motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10473586A JPS62262648A (en) | 1986-05-09 | 1986-05-09 | Permanent magnet type surface pulse motor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62262648A true JPS62262648A (en) | 1987-11-14 |
JPH0546784B2 JPH0546784B2 (en) | 1993-07-14 |
Family
ID=14388753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10473586A Granted JPS62262648A (en) | 1986-05-09 | 1986-05-09 | Permanent magnet type surface pulse motor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62262648A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02168846A (en) * | 1988-12-19 | 1990-06-28 | Shin Etsu Chem Co Ltd | Direct drive surface actuator |
-
1986
- 1986-05-09 JP JP10473586A patent/JPS62262648A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02168846A (en) * | 1988-12-19 | 1990-06-28 | Shin Etsu Chem Co Ltd | Direct drive surface actuator |
Also Published As
Publication number | Publication date |
---|---|
JPH0546784B2 (en) | 1993-07-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2003158866A (en) | Forcer and three-phase linear motor system | |
US4835424A (en) | Platen laminated in mutually perpendicular direction for use with linear motors and the like | |
JPS61229226A (en) | Actuator | |
KR100964538B1 (en) | Linear motor | |
JPH07131966A (en) | Two-dimensional linear motor | |
JP2002142436A (en) | Linear motor | |
JPH09308218A (en) | Linear motor, stage system and exposure device using it | |
JPS56114012A (en) | Precise positioning device | |
JPS62262648A (en) | Permanent magnet type surface pulse motor | |
JPS62126856A (en) | Linear motor | |
JPS635984B2 (en) | ||
US20050104454A1 (en) | Linear motor and X-Y stage | |
JP2004056864A (en) | Linear motor | |
US4833351A (en) | Muliple axis actuator | |
JPH03207256A (en) | Linear servo motor | |
JP3941026B2 (en) | Linear motor | |
JPH0732578B2 (en) | XY linear motor | |
JPS5943823Y2 (en) | linear pulse motor | |
JP2006034016A (en) | Linear motor for machine tool | |
JPH0312058Y2 (en) | ||
JPS6395848A (en) | Permanent magnet type surface pulse motor | |
JPH11288813A (en) | Magnetization method for permanent magnet | |
JPH1118405A (en) | Linear motor | |
JPH01160349A (en) | Linear pulse motor | |
JPH0811047Y2 (en) | Pulse motor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |