JPS62259001A - Manufacture of magnetic scale - Google Patents
Manufacture of magnetic scaleInfo
- Publication number
- JPS62259001A JPS62259001A JP10247086A JP10247086A JPS62259001A JP S62259001 A JPS62259001 A JP S62259001A JP 10247086 A JP10247086 A JP 10247086A JP 10247086 A JP10247086 A JP 10247086A JP S62259001 A JPS62259001 A JP S62259001A
- Authority
- JP
- Japan
- Prior art keywords
- scale
- base body
- magnetic
- graphite material
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000000696 magnetic material Substances 0.000 claims abstract description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 239000007770 graphite material Substances 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 abstract description 5
- 230000002093 peripheral effect Effects 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract description 2
- 239000011347 resin Substances 0.000 abstract description 2
- 229920005989 resin Polymers 0.000 abstract description 2
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 abstract 1
- 238000003754 machining Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910017060 Fe Cr Inorganic materials 0.000 description 1
- -1 and the grooves Substances 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
【発明の詳細な説明】 〔発明の利用分野〕 本発明は磁気スケールの製作方法に関するものである。[Detailed description of the invention] [Field of application of the invention] The present invention relates to a method for manufacturing a magnetic scale.
磁気スケールとして、従来磁性若しくは非磁性基体に目
盛用の溝を形成し、その溝に記録媒体の磁性金属線を埋
込んだ磁気スケールが公知ぐある。As a conventional magnetic scale, there is a known magnetic scale in which a scale groove is formed in a magnetic or non-magnetic substrate, and a magnetic metal wire of a recording medium is embedded in the groove.
前記基体材としては、ステンレス、アルミニウム合金、
プラスチック等が用いられている。The base material includes stainless steel, aluminum alloy,
Plastic etc. are used.
（問題点）
前記ステンレス等の基体に目盛を加工するのには、放電
加工、レーザ加工、プレス加工、切削加工等によるが、
基体材によって加工方法に制約があり、加工精度も高く
得られない欠点があった。(Problem) Machining scales on the base material such as stainless steel can be done by electric discharge machining, laser machining, press machining, cutting machining, etc.
There are restrictions on the processing method depending on the base material, and there are disadvantages in that high processing accuracy cannot be obtained.
ワイＡ７カツト放電加工方法を用いてスリブ１〜加工す
るにはワイヤ電極の線径以下に加工することができない
し、レーザ加工を利用ケるとステンレス材の良熱伝導性
のために焦点が拡がり加工孔がテーバ状になったり加工
拡大して加工精度が低く、分割数も少ない欠点があった
。Wire A7 cut When machining from 1 to slit using the electric discharge machining method, it is not possible to process the wire to a diameter smaller than that of the wire electrode, and when laser machining is used, the focus is expanded due to the good thermal conductivity of the stainless steel material. The disadvantages were that the machining hole became tapered or enlarged, resulting in low machining accuracy and a small number of divisions.
（問題点の解決手段）
本発明は以上の欠点を改良するために提案されたらので
、１」体にグラファイト（各秤カーボンを含む）を用い
、目盛を加工形成するのにレーザビームを利用する。そ
して加工された目盛の凹部若しくは凸部に磁気材を固着
して磁気スケールを製作Ｊるようにしたことを特徴とす
る。(Means for Solving the Problems) The present invention was proposed to improve the above-mentioned drawbacks, and therefore: 1) Graphite (including carbon for each scale) is used for the body, and a laser beam is used to process and form the scales. . The present invention is characterized in that the magnetic scale is manufactured by fixing a magnetic material to the concave or convex portions of the processed scale.
以下図面の一実施例により本発明を説明する。 The present invention will be explained below with reference to an embodiment of the drawings.
第１図に於て、１は円板状の基体で、グラフフイト、パ
イログラファイト、グラジ−カーボン、その他のカーボ
ン材が用いられ、中心軸１ａに回転を与える。２がその
回転モータ、３はＹＡＧ１Ｃ０２等のレーザ発振器、４
は直角反射ミラー、５は集束レンズで、集束ビーム６は
基体１の周縁に照射され、加工が施される。７はモータ
２の回転とレーザ発振器３のビーム発射とをｌ１ｉｌ１
１１１制御する制御装置である。In FIG. 1, reference numeral 1 denotes a disc-shaped base body made of graphite, pyrographite, grady carbon, or other carbon material, which imparts rotation to the central axis 1a. 2 is its rotating motor, 3 is a laser oscillator such as YAG1C02, 4
5 is a right-angle reflecting mirror, 5 is a focusing lens, and a focused beam 6 is irradiated onto the periphery of the substrate 1 to be processed. 7 controls the rotation of the motor 2 and the beam emission of the laser oscillator 3.
This is a control device that performs 111 control.
基体１のレーザ照射点は急速に加熱し蒸発して穿孔加工
が行なわれ、モータ２による回転制御に合せて発ｆｉ器
３の出力ビーム照射をパルス的にＤＩ御することにより
、第３図に示すように基体１の周縁に円周方向に沿った
微小な穿孔１ｃを等間隔に加工形成する。基体１のグラ
フフィト材は、金属材に比較して熱伝導性が悪く、断熱
、熱絶縁が良い材料であるから、レーザビームスポット
は熱の拡散がな（、スポット径に対応した高精度の穿孔
加工ができる。穿孔精度はレーザビーム６の照射点のス
ポット径の±５μ程度以下の精度で微細に高精度に加工
することができる。尚、このレーザ加工に当たり、加工
部分に酸素ガスを供給することにより照射点部分の酸化
腐食作用が准み加工速度を高めることができる。基体１
の回転速度とレーザビーム６のパルス照射ｉ＋Ｉ ＩＩ
＋によって第３図のように基体円周上に高精度に穿孔し
た等間隔目盛を微細分割して加工形成することができる
。The laser irradiation point on the substrate 1 is rapidly heated and evaporated to perform the perforation process, and by controlling the output beam irradiation of the fiducer 3 in a pulsed manner in accordance with the rotation control by the motor 2, As shown, minute perforations 1c are formed along the circumferential direction on the periphery of the base 1 at equal intervals. The graphite material of the base 1 has poor thermal conductivity and good thermal insulation compared to metal materials, so the laser beam spot has no heat diffusion (and a high-precision measurement corresponding to the spot diameter). Perforation processing is possible.Drilling accuracy is fine and highly accurate with an accuracy of less than ±5μ of the spot diameter of the irradiation point of the laser beam 6.In addition, during this laser processing, oxygen gas is supplied to the processing part. By doing so, the oxidation corrosion effect at the irradiation point is reduced and the processing speed can be increased.Substrate 1
rotation speed and pulse irradiation of laser beam 6 i+I II
With +, it is possible to finely divide and form evenly spaced scales drilled on the circumference of the base body with high precision as shown in FIG.
第２図は基体円板１の外周側面に等間隔目盛の満１ｂを
レーザ加工により形成したものである。この溝の加工に
は基体側面に照射したレーザビームを上下に振らせなが
ら加工し、基体円板１を等ピッチで断続回転＄１ ｔｉ
ｌｌすることにより加工することができる。この溝１ｂ
の加工形成においても、基体１がグラファイトであり、
断熱的にビームスポットのみを加工することができ、高
精度に加工することかできる。In FIG. 2, evenly spaced graduations 1b are formed on the outer peripheral side surface of the base disk 1 by laser processing. To process this groove, the laser beam applied to the side surface of the substrate is swung up and down, and the substrate disk 1 is intermittently rotated at a constant pitch of $1 ti.
It can be processed by ll. This groove 1b
Also in processing and forming, the substrate 1 is graphite,
Only the beam spot can be processed adiabatically, allowing for highly accurate processing.
第４図は、他の実施例の切断側面図で、（ａ）が基体円
板１の周縁上面に凹部１ｄを形成し、（ｂ）が周側面に
四部１ｅを形成し、（Ｃ）が周縁上面から傾斜する凹部
１ｂを形成したものである。 次に以上のレーザ加工に
よって得られた基体１の目盛の溝１ｂ又は孔１０等の凹
部に若しくは溝間の凸部に磁気材の固着をするが、磁気
材としては磁石、セミハード磁石、又はソフト磁性材が
任意に選択利用でき、これを線状、帯状、粒状、若しく
は片状にして固着する。FIG. 4 is a cutaway side view of another embodiment, in which (a) a recess 1d is formed on the upper surface of the peripheral edge of the base disk 1, (b) a four part 1e is formed on the peripheral side, and (C) A recessed portion 1b is formed that slopes from the upper surface of the periphery. Next, a magnetic material is fixed to the concave parts such as the grooves 1b or holes 10 of the scale of the base body 1 obtained by the above laser processing, or to the convex parts between the grooves. Any magnetic material can be selected and fixed in the form of a line, band, grain, or piece.
例えば、磁気材の粉粒を溝等の加工目盛に樹脂で接着し
、磁気目盛を形成する。又磁気材の線を目盛に巻付ける
ことができる。磁気材として例えばＳｍ Ｃｏ系、Ｂａ
Ｆｅ＋２０＋９ （又はＢａ０・６（Ｆｅ ２０３ ）
系、Ｆｅ Ｃｒ Ｃｏ系、ＮｄＢ系、その他の磁性材が
利用できる。基体への固着を機械的にしたものは耐熱性
が高く、２５０〜３００℃程度で実用することができた
。For example, a magnetic scale is formed by bonding particles of magnetic material to a processed scale such as a groove with a resin. Also, a wire of magnetic material can be wrapped around the scale. Examples of magnetic materials include Sm Co, Ba
Fe+20+9 (or Ba0.6 (Fe 203 )
Magnetic materials such as Fe Cr Co based, NdB based, and other magnetic materials can be used. Those that were mechanically fixed to the substrate had high heat resistance and could be put to practical use at temperatures of about 250 to 300°C.
磁気スケールの検出には、目盛に着磁して対向する磁気
ヘッドにより検出し、又外部磁界を作用して磁気変化に
より検出することができ、これにより位置、角度、速度
等の検出ができる。The magnetic scale can be detected by magnetizing the graduations and using opposing magnetic heads, or by applying an external magnetic field to detect magnetic changes, thereby making it possible to detect positions, angles, speeds, etc.
尚、スケール基体は、円板を回転するものに限□
らず、リニアスケールにより直線に移動させるもの、そ
の他が利用できる。Note that the scale base is limited to one that rotates a disc.
You can also use one that moves in a straight line using a linear scale, and others.
以上のように、本発明によればグラフ１イトを基体とし
て、これにレーザビームを照射して目盛の溝、孔、傷等
を加工形成するようにしたから、グラフフィト材の断熱
特性によりビームスポットが拡がらずに微細にＥ１精度
に目盛の加工ができ、レーザビームの集束によって目盛
加工を極めて微細分割して加工形成することができ、分
解能の高いエンコーダ、スケールを製作することができ
る。As described above, according to the present invention, the graphite material is used as a base material, and the grooves, holes, scratches, etc. of the scale are processed and formed by irradiating the laser beam onto the substrate. It is possible to finely process scales with E1 accuracy without the spot spreading, and by focusing the laser beam, it is possible to process and form the scales by extremely fine divisions, making it possible to manufacture encoders and scales with high resolution.
加工された目盛にはその凹部又は凸部に磁気材を固着し
、着磁して又は外部磁界を作用して磁気検出を行なうよ
うにしたから、高精度、高分解能の検出ができ、位置、
角度、速度等が検出できる。Magnetic material is fixed to the concave or convex portions of the machined scale, and magnetic detection is performed by magnetizing it or by applying an external magnetic field, making it possible to perform high-precision, high-resolution detection.
Angle, speed, etc. can be detected.
又、スケール基板がグラファイト材の耐熱、断熱材であ
り、熱膨張係数が小さく高精度の検出ができる。又、グ
ラファイト材は比重が小さり、義械装置への組込みにお
いて任意の部分に利用でき、軽量で高精度に位置、角度
検出ができる。勿論アブソリュート型スケールとしても
有効である。In addition, the scale substrate is made of graphite, which is a heat-resistant and heat-insulating material, and has a small coefficient of thermal expansion, allowing for highly accurate detection. In addition, graphite material has a low specific gravity, so it can be used in any part of the prosthetic device, and it is lightweight and allows highly accurate position and angle detection. Of course, it is also effective as an absolute type scale.
第１図は本発明の一工程図、第２図は本発明の一実施例
スケール側面及び正面図、第３図は他の実施例スケール
の側面及び正面図、第４図（ａ ）（ｂ ） （Ｃ）
は何れも本発明の他の実施例スケールの切断側面図であ
る。
１・・・・・・・・・６体
２・・・・・・・・・回転モータ
３・・・・・・・・・レーザ発振器
６・・・・・・・・・シー１ｆビーム
７・−・・・・・・・シＩｔｌｌ装置
ｌｂ、１ｃ、１ｄ、１ｅ、Ｈ・・・・・・・・・加工目
盛特 許 出 願 人
株式会社井上ジ１１パックス研究所
代表者 井 上 潔Fig. 1 is a process diagram of the present invention, Fig. 2 is a side and front view of a scale according to one embodiment of the present invention, Fig. 3 is a side and front view of a scale of another embodiment, and Figs. 4 (a) and (b). ) (C)
Both are cut side views of scales according to other embodiments of the present invention. 1...6 bodies 2...Rotating motor 3...Laser oscillator 6...Sea 1f beam 7・・・・・・・・・Itll device lb, 1c, 1d, 1e, H・・・・・・・・・ Machining scale patent applicant Kiyoshi Inoue, Representative of Inoue Ji11 Pax Research Institute
Claims (1)
基体にレーザビームにより目盛を加工形成し、該加工形
成された目盛の凹部若しくは凸部に磁気材を固着して成
ることを特徴とする磁気スケールの製作方法。A magnetic scale characterized in that the base material is graphite (including various types of carbon), a scale is formed on the base by processing with a laser beam, and a magnetic material is fixed to the concave or convex portions of the processed scale. production method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10247086A JPS62259001A (en) | 1986-05-02 | 1986-05-02 | Manufacture of magnetic scale |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10247086A JPS62259001A (en) | 1986-05-02 | 1986-05-02 | Manufacture of magnetic scale |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62259001A true JPS62259001A (en) | 1987-11-11 |
Family
ID=14328335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10247086A Pending JPS62259001A (en) | 1986-05-02 | 1986-05-02 | Manufacture of magnetic scale |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62259001A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111182998A (en) * | 2017-09-29 | 2020-05-19 | 株式会社钟化 | Graphite laminate processed product, method for producing same, and laser cutting device for graphite laminate processed product |
-
1986
- 1986-05-02 JP JP10247086A patent/JPS62259001A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111182998A (en) * | 2017-09-29 | 2020-05-19 | 株式会社钟化 | Graphite laminate processed product, method for producing same, and laser cutting device for graphite laminate processed product |
| CN111182998B (en) * | 2017-09-29 | 2022-06-21 | 株式会社钟化 | Graphite laminate processed product, method for producing same, and laser cutting device for graphite laminate processed product |
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