JPS62245131A - Scratch testing machine - Google Patents
Scratch testing machineInfo
- Publication number
- JPS62245131A JPS62245131A JP8932586A JP8932586A JPS62245131A JP S62245131 A JPS62245131 A JP S62245131A JP 8932586 A JP8932586 A JP 8932586A JP 8932586 A JP8932586 A JP 8932586A JP S62245131 A JPS62245131 A JP S62245131A
- Authority
- JP
- Japan
- Prior art keywords
- scratch
- pendulum
- indenter
- specimen
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012360 testing method Methods 0.000 title claims description 17
- 238000006748 scratching Methods 0.000 claims abstract description 19
- 230000002393 scratching effect Effects 0.000 claims abstract description 19
- 238000006073 displacement reaction Methods 0.000 claims abstract description 12
- 230000003287 optical effect Effects 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 5
- 239000002344 surface layer Substances 0.000 abstract description 4
- 239000000523 sample Substances 0.000 description 31
- 238000005259 measurement Methods 0.000 description 8
- 238000003754 machining Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 241000428199 Mustelinae Species 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は固定表面を圧子によりひっかき、その材料のひ
っかき変形強度を測定するひっかき試験機に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a scratch tester that scratches a fixed surface with an indenter and measures the scratch deformation strength of the material.
（従来の技術）
近年、微細機械加工の技術は急速に進歩し、サブミクロ
ンオーダーの加工精度も要求されている。そのような高
い加工精度を達成するためには、工具と被加工物との間
の位置決め精度を高めるだけではなく、切削に伴う変形
パリの形成過程など材料表面の変形強度やその変形挙動
を知る必要がある。表面が受ける変形状態に関する情報
を得るひとつの手段としてひっかき試験機があり、これ
までに幾つかのひっかき試験機が提案されている。それ
らの多くはマルテンス形と総称されるタイプのひっかき
試験機である。マルテンス形ひっかき試験機の典型的な
構造を、第５図をにより説明する。(Prior Art) In recent years, micromachining technology has rapidly advanced, and processing precision on the submicron order is now required. In order to achieve such high machining accuracy, it is necessary not only to improve the positioning accuracy between the tool and the workpiece, but also to understand the deformation strength of the material surface and its deformation behavior, such as the formation process of deformation points during cutting. There is a need. A scratch tester is one means of obtaining information regarding the deformation state that a surface undergoes, and several scratch testers have been proposed so far. Most of them are scratch test machines of the type collectively called Martens type. A typical structure of a Martens type scratch tester will be explained with reference to FIG.
７は試料表面をひっかく圧子、２は試料を固定した試料
台で垂直方向に昇降するとともに、モーター等の駆動系
を介することにより矢印の方向に移動する。１９は試料
に加える垂直荷重用の分銅、２０はアーム、２２はバラ
ンスウェイトでアーム２０の水平方向のバランスを調節
する。２１はアームの支点である。試験は、はじめに分
銅１９を乗せない状態でバランスウェイト２２でアーム
２０の水平調節を行い、次に試料テーブルを上昇させ試
料と圧子７を接触させる。その後、分銅１９を加えた後
に試料テーブル２を移動させ、試料表面に形成されたひ
つかき溝を測定、観察することによってひつかき硬さや
表面の変形特性に関する知見を得るものである。Reference numeral 7 indicates an indenter that scratches the surface of the sample, and 2 indicates a sample stage on which the sample is fixed, which moves vertically up and down and also moves in the direction of the arrow through a drive system such as a motor. Reference numeral 19 indicates a weight for applying a vertical load to the sample, 20 indicates an arm, and 22 indicates a balance weight for adjusting the balance of the arm 20 in the horizontal direction. 21 is the fulcrum of the arm. In the test, first, the arm 20 is horizontally adjusted using the balance weight 22 without the weight 19 placed on it, and then the sample table is raised to bring the sample and the indenter 7 into contact. Thereafter, after adding a weight 19, the sample table 2 is moved, and by measuring and observing the squeeze grooves formed on the sample surface, knowledge about the strain hardness and surface deformation characteristics can be obtained.
特公昭５９−３３４０に記載せれているひっかき試験機
には幾つかの改良が施されている。アームを板バネにす
ることによりひっかき変形抵抗の精密測定ができること
、メカ二カルスットパーを設置することにより圧子と試
料表面との衝撃的な接触を防止できることなどが特徴で
あり、さらに支点と試料テーブルのスライド部に静圧気
体軸受をアームの水平調整に非接触変位センサーをそれ
ぞれ用いることによって、精度及び感度が著しく向上し
ている。しかし、圧子に対して試料テーブルを移動させ
るという基本的な構造はマルテンス形のひっかき試験機
と同様である。Several improvements have been made to the scratch tester described in Japanese Patent Publication No. 59-3340. Features include the use of a leaf spring for the arm to enable precise measurement of scratch deformation resistance, and the installation of a mechanical stopper to prevent impactful contact between the indenter and the sample surface. Accuracy and sensitivity are significantly improved by using a static pressure gas bearing in the sliding part and a non-contact displacement sensor for horizontal adjustment of the arm. However, the basic structure of moving the sample table relative to the indenter is the same as the Martens scratch tester.
（発明が解決しようとする問題点）
以上述べてきた従来のひっかき試験機では、表面層の変
形状態に関してより詳細な情報を得るためにアーム系全
体の垂直方向の剛性を出来るだけ低くし、低荷重を精密
に負荷する必要があった。(Problems to be Solved by the Invention) In the conventional scratch testing machine described above, the vertical stiffness of the entire arm system is made as low as possible in order to obtain more detailed information regarding the deformation state of the surface layer. It was necessary to apply the load precisely.
それ故に、試料テーブルを高速で移動させると、圧子の
跳飛が生じ、圧子と試料表面の接触状態が衝撃的、かつ
断続的になるとの欠点が指摘されている。そのような圧
子の跳飛を防止するために、従来のひっかき試験機のひ
っかき速度は（試料テーブルの移動速度）は一般に数ｃ
ｍ／ｓｅｅ以下の低速度領域に限定されている。サブミ
クロンを越える高い加工精度を達成するという゛観点で
、ひっかき試験の結果からその材料の変形抵抗や加工性
を判定し、それらのデータを実際の機械加工に適用する
ためには、加工条件にできるだけ近い条件下でひっかき
試験を行うことが必要である。通常の機械加工では加工
速度が数１０〜数１００ｃｍ／ｓｅｅであることを考え
れば、従来のひっかき試験機が適正な加工条件を設定し
得る十分なシュミレーション実験として有効な手段であ
るかという懸念があった。Therefore, it has been pointed out that when the sample table is moved at high speed, the indenter may jump, and the contact between the indenter and the sample surface becomes impactful and intermittent. In order to prevent such indenter jumping, the scratching speed (moving speed of the sample table) of a conventional scratching tester is generally several c.
It is limited to the low speed region below m/see. From the perspective of achieving high machining accuracy exceeding submicron, it is necessary to judge the deformation resistance and workability of the material from the scratch test results, and to apply these data to actual machining, it is necessary to adjust the machining conditions. It is necessary to perform the scratch test under conditions as close as possible. Considering that the machining speed in normal machining is several tens to several hundreds of cm/see, there are concerns as to whether conventional scratch testing machines are an effective means for sufficient simulation experiments to set appropriate machining conditions. there were.
（問題点を解決するための手段）
本発明は一端を回転軸に固定され他端にひっかき用の圧
子が固定された自由振動する振子と、該振子の回転角を
測定する角度検出器と、該振子の下方に位置し試験片を
固定した試料台を鉛直方向に移動させる駆動器と、試験
片の表面と振子の他端に固定された圧子とのひっかき深
さを測定する変位計とを備えたことを特徴とするひっか
き試験機である。(Means for Solving the Problems) The present invention includes a freely vibrating pendulum having one end fixed to a rotating shaft and a scratching indenter fixed to the other end, and an angle detector for measuring the rotation angle of the pendulum. A driver that vertically moves a sample stage located below the pendulum and on which a test piece is fixed, and a displacement meter that measures the depth of scratch between the surface of the test piece and an indenter fixed on the other end of the pendulum. This is a scratch testing machine characterized by the following features:
すなわち本発明は、従来のひっかき試験機の上記欠点を
改善するものであり、数１００ｃｍ／ｓｅｅ以下の速度
で振動する振子の先端に固定した圧子が試料表面をひっ
かく際に費やされるエネルギーを測定する角度検出器と
、試料を昇降させることによって圧子と試料表面とのひ
っかき深さを変化させる駆動器及び該ひっかき深さを測
定する変位計とで構成されるひっかき試験機である。That is, the present invention improves the above-mentioned drawbacks of the conventional scratching tester, and measures the energy expended when an indenter fixed to the tip of a pendulum vibrating at a speed of several 100 cm/see or less scratches the sample surface. This is a scratch test machine that includes an angle detector, a driver that changes the scratch depth between the indenter and the sample surface by raising and lowering the sample, and a displacement meter that measures the scratch depth.
（作用）
本発明のひっかき試験機はひっかき過程で消費されるエ
ネルギーを振子の回転角から測定し、そのエネルギーか
ら材料表面の変形抵抗を測定する原理に基すいている。(Function) The scratching tester of the present invention is based on the principle of measuring the energy consumed in the scratching process from the rotation angle of the pendulum, and measuring the deformation resistance of the material surface from that energy.
すなわち、先端に圧子を固定した振子の持ち上げ角α、
圧子が表面をひっかいた後の振子の振止がり角ｐ、表面
に形成された皿上のひっかき溝の体積Ｖを用いてひっか
き変形抵抗Ｒを
Ｒ＝＝ｍｇｒ（ｃｏｓｐ−ｃｏｓａ）／Ｖと定義した。In other words, the lifting angle α of a pendulum with an indenter fixed at its tip,
Define the scratching deformation resistance R as R==mgr(cosp-cosa)/V using the resting angle p of the pendulum after the indenter scratches the surface, and the volume V of the scratching groove on the plate formed on the surface. did.
但し、ｍは圧子に作用する振子系全体の慣性質量、ｇは
重力加速度、ｒは振子の半径である。測定した変形抵抗
Ｒによって材料表面の変形強度や変形特性の評価を行う
ことができる。However, m is the inertial mass of the entire pendulum system acting on the indenter, g is the gravitational acceleration, and r is the radius of the pendulum. The deformation strength and deformation characteristics of the material surface can be evaluated based on the measured deformation resistance R.
さらに、角度検出器と駆動器とを後述するパーソナルコ
ンピュータによる制御部を介して制御することにより、
ひっかき過程にある圧子を材料表面との接触から離脱さ
せることができる構造になっている。それによって、ひ
っかき途中の表面の変形状態の変化を逐次観察すること
が可能である。Furthermore, by controlling the angle detector and the driver via a control section using a personal computer, which will be described later,
It has a structure that allows the indenter to be removed from contact with the material surface during the scratching process. Thereby, it is possible to sequentially observe changes in the deformation state of the surface during scratching.
（実施例）
第１図は本発明の一実施例を表わす図である。試料１は
試料台２の上に真空チャックによって固定されている。(Embodiment) FIG. 1 is a diagram showing an embodiment of the present invention. A sample 1 is fixed on a sample stage 2 by a vacuum chuck.
試料台２は、マイクロメーターによりＸ。Sample stage 2 is set to X by a micrometer.
Ｙ、Ｚの３方向にｌｐｍの精度で手動で動かせるＸＹＺ
テーブルであり、駆動器として用いた圧電アクチュエー
ター３により２方向（矢印方向）の微調移動が可能であ
る。試料台２の移動量を測定する光導波路４（フォトニ
ックプローブ（商品名））からの光５は試料台２の上に
真空チャックによって固定された鏡６に反射して再び光
導波路４に戻り光導波路４と鏡６との変位量すなわち試
料１と圧子７とのひっかき深さを検出することができる
。圧子７は振子８の先端に固定されており、振子８のも
う一端は角度検出器として用いた光ロータリ−エンコー
ダー９の回転軸に取付けられている。光ロータリ−エン
コーダー９は振子の持上げ角αと、ひっかき後の振子の
振上がり角ｐを検知する。XYZ that can be manually moved in 3 directions of Y and Z with lpm accuracy
The table is capable of fine adjustment movement in two directions (arrow directions) using a piezoelectric actuator 3 used as a driver. Light 5 from an optical waveguide 4 (photonic probe (trade name)) that measures the amount of movement of the sample stage 2 is reflected by a mirror 6 fixed on the sample stage 2 by a vacuum chuck and returns to the optical waveguide 4 again. The amount of displacement between the optical waveguide 4 and the mirror 6, that is, the scratch depth between the sample 1 and the indenter 7 can be detected. The indenter 7 is fixed to the tip of a pendulum 8, and the other end of the pendulum 8 is attached to the rotating shaft of an optical rotary encoder 9 used as an angle detector. The optical rotary encoder 9 detects the lifting angle α of the pendulum and the swinging angle p of the pendulum after scratching.
第２図は本発明の一実施例を示すブロック図である。パ
ーソナルコンピューター１０からの制御信号をデジタル
ｌアナログ変換器１１、定電圧電源１２、電圧増幅器１
３を介して圧電アクチュエーター５に加えることにより
試料台２の移動量を制御した。また、光ロータリ−エン
コーダー９からの信号はデジタルカウンタ１４、パーソ
ナルコンピューター１０を介してデータ処理され、ひっ
かき試験中の振子の角度変化としてディスプレイ１５あ
るいはプリンター１６に出力される。さらに、ひっかき
深さはフォトニックプローブ４からの信号を光センサ１
７、アナログｌデジタル変換器１８を通してパーソナル
コンピューター１０に入力される。FIG. 2 is a block diagram showing one embodiment of the present invention. A control signal from a personal computer 10 is transferred to a digital/analog converter 11, a constant voltage power supply 12, and a voltage amplifier 1.
3 to the piezoelectric actuator 5, the amount of movement of the sample stage 2 was controlled. Further, the signal from the optical rotary encoder 9 is data-processed via a digital counter 14 and a personal computer 10, and is outputted to a display 15 or printer 16 as a change in the angle of the pendulum during the scratch test. Furthermore, the scratch depth is determined by converting the signal from the photonic probe 4 into the optical sensor 1.
7. Input to personal computer 10 through analog/digital converter 18.
前記の例で、変位計として用いた先導波路と光センサは
良好な反射率を有する金あるいは白金を被覆した鏡を併
用することにより、４ｎｍの分解能で変位量を測定する
ことができる。変位計としてはこれ以外に静電容量、電
磁誘導、磁界の変化を利用した非接触型変位計も使用す
ることができる。In the above example, the amount of displacement can be measured with a resolution of 4 nm by using a gold- or platinum-coated mirror with good reflectivity for the leading waveguide and optical sensor used as a displacement meter. In addition to these displacement meters, non-contact displacement meters that utilize capacitance, electromagnetic induction, and changes in magnetic fields can also be used.
また、前記のロータリーエンコーダーの基本的な性能は
検出角分解能０．０７°、起動トルク５ｇｃｍ以下、入
力軸イナーシャ４１．５ｇｃｍ２である。この他の角度
検出器としては磁気ロータリーエンコーダー、レーザー
ドツプラー装置、振り子の振動状態を高速度テレビカメ
ラで撮影し、それを画像解析する方法などを用いること
もできる。The basic performance of the rotary encoder is a detection angle resolution of 0.07°, a starting torque of 5 gcm or less, and an input shaft inertia of 41.5 gcm2. Other angle detectors that can be used include a magnetic rotary encoder, a laser Doppler device, and a method of photographing the vibration state of the pendulum with a high-speed television camera and analyzing the image.
また、振子にはガラス（商品名ネオセラームガラス、日
本電気硝子社製）とインバー合金を組合わせて作製する
ことにより振子全体の熱膨張は極めて低く抑えることが
できた。振子の半径７ｃｍ、±２°Ｃの温度範囲で熱膨
張量は±５ｎｍ以下である。Furthermore, by manufacturing the pendulum using a combination of glass (trade name Neoceram Glass, manufactured by Nippon Electric Glass Co., Ltd.) and Invar alloy, the thermal expansion of the entire pendulum could be kept extremely low. The pendulum has a radius of 7 cm and the thermal expansion is less than ±5 nm in a temperature range of ±2°C.
この振子の熱膨張の他に装置全体の熱膨張や振動などを
影響が相剰されて、試料表面に対する圧子のひっかき深
さの測定精度は±２０ｎｍである。In addition to the thermal expansion of the pendulum, thermal expansion and vibration of the entire apparatus are also affected, and the measurement accuracy of the scratch depth of the indenter on the sample surface is ±20 nm.
振子先端に固定したひっかき用の圧子は、ダイヤモンド
、サファイヤなどの硬質鉱物、ＷＣ。The scratching indenter fixed to the tip of the pendulum is made of hard minerals such as diamond, sapphire, and WC.
Ａｌ２Ｏ３などの硬質セラミック、Ｗ、Ｔｉなどの高融
点金属から作製しだ円錐あるいは角錘形状のチップを用
いた。圧子の一例を紹介すると、機械研磨によって頂角
９０’に加工したダイヤモンド製の円錐圧子にさらにイ
オンエツチング法により圧子先端の曲率半径を０．１１
１ｍとしたものである。Chips in the shape of an elliptic cone or pyramid made of hard ceramic such as Al2O3 or high melting point metal such as W or Ti were used. An example of an indenter is a diamond conical indenter that has been mechanically polished to an apex angle of 90', and then ion etched to create a radius of curvature of 0.11 at the tip of the indenter.
The length is 1m.
次に、本発明のひっかき試験機の性能を測定例により説
明する。Next, the performance of the scratch tester of the present invention will be explained using measurement examples.
（測定例１）
１０ｍｍ角のガラス基板上にカーボンを厚さ３１１ｍマ
グネトロンスパッタ法により被覆した試料について第１
図、第２図に示したひっかき試験機でひっかき変形抵抗
を測定した。測定条件は振子の半径７ｃｍ、振子持上げ
角：１０３．８°、圧子二頂角９０°のダイヤモンド円
錐圧子、圧子に作用する慣性質量：１０ｇ、ひっかき溝
の最大深さ：１．１ｐｍ、ひっかき速度：９２゜２ｃｍ
／ｓｅｃである。実施例１における振子の角度の測定例
を第３図に示す。持上げ角α＝＝ｔｏａ、ｓ°、振上が
り角４３−１０１．４°であり、これによりカーボン膜
のひっかき変形抵抗は８．４ Ｘ １１０１２ｅｒ／ｃ
ｍ３と計算される。(Measurement Example 1) The first measurement was conducted for a sample in which a 10 mm square glass substrate was coated with carbon to a thickness of 311 m by magnetron sputtering.
The scratch deformation resistance was measured using the scratch testing machine shown in Fig. 2. The measurement conditions were: pendulum radius 7 cm, pendulum lifting angle: 103.8°, diamond conical indenter with an indenter divertex angle of 90°, inertial mass acting on the indenter: 10 g, maximum depth of scratching groove: 1.1 pm, scratching speed. :92゜2cm
/sec. An example of measuring the pendulum angle in Example 1 is shown in FIG. The lifting angle is α==toa, s°, and the swinging angle is 43-101.4°, so the scratch deformation resistance of the carbon film is 8.4 x 11012er/c.
It is calculated as m3.
（測定例２）
試料と試験条件は前述と同様にして、但しひっかき深さ
を０．１２〜１．５１１ｍの間で変化させ、そのときの
ひっかき変形抵抗を測定した。第４図にひっかき深さと
変形抵抗の関係を示す。ひっかき深さが小さくなるにつ
れて変形抵抗は増加する傾向を示している。(Measurement Example 2) The sample and test conditions were the same as described above, but the scratch depth was varied between 0.12 and 1.511 m, and the scratch deformation resistance at that time was measured. Figure 4 shows the relationship between scratch depth and deformation resistance. The deformation resistance tends to increase as the scratch depth decreases.
（発明の効果）
以上実施例に示したように、本発明によるひっかき試験
機は、従来に比較してはるかに高いびつかき速度の領域
で、ひっかき深さ０．１１１ｍレベルでの表面層のひっ
かき変形抵抗を高精度で測定できることが判かった。(Effects of the Invention) As shown in the examples above, the scratching tester according to the present invention can scratch the surface layer at a scratching depth of 0.111 m in a much higher scratching speed region than conventional ones. It was found that deformation resistance could be measured with high accuracy.
第１図及び第２図は本発明のひっかき試験機の一実施例
の構造図とブロック図の例を示す図、第３図は振子の回
転角の測定を示す図、第４図はひっかき深さと変形抵抗
の関係を示す図、第５図は従来のひっかき試験機の基本
的な構造を示す図である。
図面において
１は試料、２は試料台、３は圧電アクチュエーター、４
は先導波路、５は光、６は鏡、７は圧子、８は振子、９
は光エンコーダ−，１０はパーソナルコンピューター、
１１はデジタル／アナログ変換器、１２は定電圧電源、
１３は電圧増幅器、１４はデジタルカウンタ、１５はデ
ィスプレイ、１６はプリンター、１７は光センサ、１８
はアナログｌデジタル変換器である。
千 １ 喝
ひ・炉、！変形系坑（ｅｒｇ／ｃｍ３）×−Figures 1 and 2 are diagrams showing an example of the structure and block diagram of an embodiment of the scratch tester of the present invention, Figure 3 is a diagram showing measurement of the rotation angle of the pendulum, and Figure 4 is the scratch depth. FIG. 5 is a diagram showing the basic structure of a conventional scratch tester. In the drawings, 1 is a sample, 2 is a sample stage, 3 is a piezoelectric actuator, and 4 is a
is a leading waveguide, 5 is a light, 6 is a mirror, 7 is an indenter, 8 is a pendulum, 9
is an optical encoder, 10 is a personal computer,
11 is a digital/analog converter, 12 is a constant voltage power supply,
13 is a voltage amplifier, 14 is a digital counter, 15 is a display, 16 is a printer, 17 is a light sensor, 18
is an analog-to-digital converter. 1,000 cheers/furnace! Deformed pit (erg/cm3) ×-
Claims (1)
された自由振動する振子と、該振子の回転角を測定する
角度検出器と、該振子の下方に位置し試験片を固定した
試料台を鉛直方向に移動させる駆動器と、試験片の表面
と振子の他端に固定された圧子とのひっかき深さを測定
する変位計とを備えたことを特徴とするひっかき試験機
。A freely vibrating pendulum with one end fixed to a rotating shaft and a scratching indenter fixed to the other end, an angle detector for measuring the rotation angle of the pendulum, and a sample fixed to a test piece located below the pendulum. A scratch testing machine characterized by being equipped with a driver that moves a table in the vertical direction, and a displacement meter that measures the depth of scratch between the surface of a test piece and an indenter fixed to the other end of a pendulum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8932586A JPS62245131A (en) | 1986-04-17 | 1986-04-17 | Scratch testing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8932586A JPS62245131A (en) | 1986-04-17 | 1986-04-17 | Scratch testing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62245131A true JPS62245131A (en) | 1987-10-26 |
Family
ID=13967514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8932586A Pending JPS62245131A (en) | 1986-04-17 | 1986-04-17 | Scratch testing machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62245131A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002016907A1 (en) * | 2000-08-23 | 2002-02-28 | Plint & Partners Limited | Scratch resistance testing apparatus and method |
| US6520004B1 (en) * | 1998-03-11 | 2003-02-18 | E. I. Du Pont De Nemours And Company | Test apparatus and method of measuring mar resistance of film or coating |
| KR100471677B1 (en) * | 2002-11-30 | 2005-03-09 | 한국표준과학연구원 | A scratch tester using three axis-load cell |
| US6945097B2 (en) * | 2002-04-10 | 2005-09-20 | Mts Systems Corporation | Characteristic strain and fracture resistance for scratch independently of indenter geometry |
| JP2009520930A (en) * | 2005-12-23 | 2009-05-28 | バローレック・マネスマン・オイル・アンド・ガス・フランス | Exterior protection for inflatable threaded pipe fittings |
| JP2010101876A (en) * | 2008-09-29 | 2010-05-06 | Ihi Corp | Material property specification method of elastoplastic material by indentor indentation test |
| JP2011237366A (en) * | 2010-05-13 | 2011-11-24 | Daipla Wnres Co Ltd | Sample installation method using sample surface layer cutting apparatus and sample installation apparatus |
| WO2013158387A1 (en) * | 2012-04-19 | 2013-10-24 | Dow Global Technologies Llc | Pendulum-type mar testing device |
| RU2613570C1 (en) * | 2015-12-01 | 2017-03-17 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Комсомольский-на-Амуре государственный технический университет" (ФГБОУ ВПО "КнАГТУ") | Asymmetric pendulum dicing method |
-
1986
- 1986-04-17 JP JP8932586A patent/JPS62245131A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6520004B1 (en) * | 1998-03-11 | 2003-02-18 | E. I. Du Pont De Nemours And Company | Test apparatus and method of measuring mar resistance of film or coating |
| WO2002016907A1 (en) * | 2000-08-23 | 2002-02-28 | Plint & Partners Limited | Scratch resistance testing apparatus and method |
| US6945097B2 (en) * | 2002-04-10 | 2005-09-20 | Mts Systems Corporation | Characteristic strain and fracture resistance for scratch independently of indenter geometry |
| KR100471677B1 (en) * | 2002-11-30 | 2005-03-09 | 한국표준과학연구원 | A scratch tester using three axis-load cell |
| JP2009520930A (en) * | 2005-12-23 | 2009-05-28 | バローレック・マネスマン・オイル・アンド・ガス・フランス | Exterior protection for inflatable threaded pipe fittings |
| JP2010101876A (en) * | 2008-09-29 | 2010-05-06 | Ihi Corp | Material property specification method of elastoplastic material by indentor indentation test |
| JP2011237366A (en) * | 2010-05-13 | 2011-11-24 | Daipla Wnres Co Ltd | Sample installation method using sample surface layer cutting apparatus and sample installation apparatus |
| WO2013158387A1 (en) * | 2012-04-19 | 2013-10-24 | Dow Global Technologies Llc | Pendulum-type mar testing device |
| RU2613570C1 (en) * | 2015-12-01 | 2017-03-17 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Комсомольский-на-Амуре государственный технический университет" (ФГБОУ ВПО "КнАГТУ") | Asymmetric pendulum dicing method |
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