JPS62218682A - Screw vacuum pump - Google Patents
Screw vacuum pumpInfo
- Publication number
- JPS62218682A JPS62218682A JP5918186A JP5918186A JPS62218682A JP S62218682 A JPS62218682 A JP S62218682A JP 5918186 A JP5918186 A JP 5918186A JP 5918186 A JP5918186 A JP 5918186A JP S62218682 A JPS62218682 A JP S62218682A
- Authority
- JP
- Japan
- Prior art keywords
- exhaust port
- pump casing
- exhaust
- port
- intake
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012423 maintenance Methods 0.000 abstract description 7
- 239000000498 cooling water Substances 0.000 abstract description 2
- 238000009434 installation Methods 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005755 formation reaction Methods 0.000 abstract 1
- 239000000047 product Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000006227 byproduct Substances 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/086—Carter
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はスクリュー真空ポンプの吸気口および排気口の
配置に係り、特に半導体製造装置に用いられる真空ポン
プの信頼性およびメンテナンス性に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to the arrangement of the intake port and exhaust port of a screw vacuum pump, and particularly relates to the reliability and maintainability of a vacuum pump used in semiconductor manufacturing equipment. .
従来のスクリュー真空ポンプは、特公昭５〇−１９７７
２号公報に示されるように、吸気口および排気口がポン
プケーシングに対して非対称に配置されていて、排気口
と排気ポートとの間のスペースが狭く、かつ排気口には
排気管系が直接接続される構成となっている。このため
特に半導体製造装置に用いられる真空ポンプのように排
気ポート付近に堆積する反応ガスの生成物を定期的に取
りのぞく必要のあるものについては、そのメンテナンス
性を改善するための構成が配置されていなかった。The conventional screw vacuum pump was manufactured by the Japanese government in 1977.
As shown in Publication No. 2, the intake port and the exhaust port are arranged asymmetrically with respect to the pump casing, the space between the exhaust port and the exhaust port is narrow, and the exhaust pipe system is directly connected to the exhaust port. It is configured to be connected. For this reason, especially for vacuum pumps used in semiconductor manufacturing equipment that require periodic removal of reaction gas products that accumulate near the exhaust port, structures are installed to improve their maintainability. It wasn't.
上記にのべたごと〈従来技術は半導体製造装置に用いら
れる真空ポンプのごとく、排気ポート付近に堆積する反
応ガスによる生成物を定期的に取りのぞくためのメンテ
ナンス性を配慮しておらずこのため排気ポート付近に堆
積した反応ガスによる生成物が運転中の振動等のｗ悠に
よっておす。As mentioned above, conventional technology, like vacuum pumps used in semiconductor manufacturing equipment, does not take into account the ease of maintenance to periodically remove the products of reaction gas that accumulate near the exhaust port, and therefore the exhaust The products of the reaction gas deposited near the port are washed away by vibrations during operation.
めすロータ間の微小間隙に落ち込みおす、めす口−タを
ロックさせるというスクリュー真空ポンプにとって致命
的なトラブルを起す問題があった。There was a problem that the female rotor would fall into the minute gap between the female rotors and cause the female rotor to lock, causing a fatal problem for screw vacuum pumps.
本発明の目的は上記にのべた問題点を解決し、メンテナ
ンス作業を容易化し信頼性の高いスクリュー真空ポンプ
を提供することにある。An object of the present invention is to solve the above-mentioned problems and provide a screw vacuum pump that facilitates maintenance work and is highly reliable.
本発明の特徴は、排気口の位置を給気口に近い位置に配
置（ポンプケーシングに対し排気口を給気口と左右、ま
たは上下対称の位置になるよう排気口を移動させた。）
することによって排気ポートと排気口を結ぶ通路に広い
スペースを確保し、この間に脱着可能なフランジを取り
付けたものである。A feature of the present invention is that the exhaust port is located close to the air supply port (the exhaust port is moved so that it is symmetrical to the air supply port, horizontally or vertically, with respect to the pump casing).
By doing so, a wide space is secured in the passage connecting the exhaust port and the exhaust port, and a removable flange is attached between the passages.
上記の構成であるから、排気ポートと排気口の通路の間
に脱着可能なフランジを取り付けることにより、排気ポ
ート付近に堆積する生成物を取りのぞく作業が排気管系
を取りはずすことなく可能となるためメンテナンス作業
が非常に容易になるとともに１作業スペースも広いため
確実に生成物を取りのぞくことができ、生成物に起因す
るおす。With the above configuration, by installing a removable flange between the exhaust port and the exhaust port passage, it is possible to remove products that accumulate near the exhaust port without removing the exhaust pipe system. Maintenance work becomes very easy, and the work space is large, so you can reliably remove products, and remove any waste caused by products.
めすロータのロックというスクリュー真空ポンプにとっ
て致命的なトラブルをさけることができる。It is possible to avoid the problem of locking the female rotor, which is fatal to screw vacuum pumps.
以下に本発明の実施例を第１図、第２図、第３図、第４
図および第５図により説明する。Examples of the present invention are shown below in Figures 1, 2, 3, and 4.
This will be explained with reference to the drawings and FIG.
第１図は本発明の実施例を示した吸気口と排気口をポン
プケーシングに対し対称に配置したスクリュー真空ポン
プの外観図であり、第２図は第１図におけるＡ断面図で
ある。FIG. 1 is an external view of a screw vacuum pump showing an embodiment of the present invention in which an intake port and an exhaust port are arranged symmetrically with respect to a pump casing, and FIG. 2 is a cross-sectional view of A in FIG. 1.
第１図および第２図において、吸気口１および排気口２
がポンプケーシング３に対し対称位置に固定的に取り付
けられており、排気口２側のポンプケーシング３の側面
には脱着可能なフランジ４が取り付けられている。In Figures 1 and 2, intake port 1 and exhaust port 2
are fixedly attached to the pump casing 3 at symmetrical positions, and a removable flange 4 is attached to the side surface of the pump casing 3 on the exhaust port 2 side.
ポンプケーシング３にはおすロータ５およびめすロータ
６がそれぞれ両軸端側に軸封部７を介し軸受８により回
動自在に取り付けられている。A male rotor 5 and a female rotor 6 are rotatably attached to the pump casing 3 by bearings 8 via shaft seals 7 on both shaft end sides, respectively.
そしておすロータ５およびめすロータ６の一方の軸端に
はこれらのロータのタイミングを取るためにそれぞれタ
イミングギヤ９および１ｏが固定的に取り付けられてい
る。おすロータ５およびめすロータ６を内蔵したポンプ
ケーシング３はギヤケーシング１１に固定的に取り付け
られている。Timing gears 9 and 1o are fixedly attached to one shaft end of the male rotor 5 and the female rotor 6, respectively, for timing these rotors. A pump casing 3 containing a male rotor 5 and a female rotor 6 is fixedly attached to a gear casing 11.
一方モートル１２も同様にギヤケーシング１１に固定的
に取り付けられており、モードル１２の軸端には増速ギ
ヤ１３が固定的に取り付けられておりめすロータ６のタ
イミングギヤ１０とかみ合っている。On the other hand, the motor 12 is similarly fixedly attached to the gear casing 11, and a speed increasing gear 13 is fixedly attached to the shaft end of the motor 12 and meshes with the timing gear 10 of the female rotor 6.
以上が全体構成であるが、第３図および第４図にて本発
明の説明をする。The overall configuration has been described above, and the present invention will be explained with reference to FIGS. 3 and 4.
第３図は第１図におけるＢ断面図であり、第４図は第３
図におけるＣ断面図である。Fig. 3 is a sectional view of B in Fig. 1, and Fig. 4 is a sectional view of B in Fig. 1.
It is a sectional view of C in the figure.
ポンプケーシング３に内蔵されたおすロータ５およびめ
すロータ６（第３図では図示せず）の一端には吸気口１
が、そして他端には排気ポート１４がポンプケーシング
３に固定的に設けられている。An intake port 1 is provided at one end of a male rotor 5 and a female rotor 6 (not shown in FIG. 3) built into the pump casing 3.
However, at the other end, an exhaust port 14 is fixedly provided to the pump casing 3.
排気ポート１４から排気口２までで成形される通路１５
はポンプケーシングの内筒１６と外筒１７とではさまれ
た冷却水ジャケット１８の一部に設けられていて、その
外筒１７には脱着可能なフランジ４が取り付けられてい
る。A passage 15 formed from the exhaust port 14 to the exhaust port 2
is provided in a part of a cooling water jacket 18 sandwiched between an inner cylinder 16 and an outer cylinder 17 of the pump casing, and a removable flange 4 is attached to the outer cylinder 17.
以上説明した構成によれば、半導体製造装置に用いられ
るような真空ポンプの排気ポート付近に堆積する反応ガ
スによる生成物の除去は排気管系を取りはずしせずに、
フランジを取りはずすことによって容易に行なえるため
メンテナンス作業を大幅に軽減できるとともに、排気ポ
ートと排気口までの通路に広いスペースが設けられるの
で生成物の除去が完全にでき生成物の取残しによるトラ
ブル等が防止できる。According to the configuration described above, products caused by reaction gas deposited near the exhaust port of a vacuum pump used in semiconductor manufacturing equipment can be removed without removing the exhaust pipe system.
This can be done easily by removing the flange, which greatly reduces maintenance work, and since there is a wide space between the exhaust port and the passage to the exhaust port, products can be completely removed, resulting in problems caused by products being left behind. can be prevented.
また本発明では吸気口および排気口をポンプケーシング
に対し左右または上下対称に位置したが本発明のスクリ
ュー真空ポンプを多段機として用いる場合第５図に示す
ように、１段機１９の排気口と２段機２０の吸気口を直
短管で接続できるので作業性もよく、また据付はスペー
スも省スペースとなる利点がある。Furthermore, in the present invention, the intake port and the exhaust port are located horizontally or vertically symmetrically with respect to the pump casing, but when the screw vacuum pump of the present invention is used as a multi-stage machine, as shown in FIG. Since the intake port of the two-stage machine 20 can be connected with a straight and short pipe, work efficiency is improved, and installation space is also advantageously saved.
尚本発明の実施例はいずれもおすロータとめすロータの
軸中心を垂直、平行に配置した例についてのべているが
、おすロータとめすロータの軸中心が水平、平行に配置
した場合でも本発明の実施が可能であるということはい
うまでもないことである。Although the embodiments of the present invention all describe examples in which the axial centers of the male rotor and female rotor are arranged vertically and parallel to each other, the present invention also applies when the axial centers of the male rotor and female rotor are arranged horizontally and parallel to each other. It goes without saying that the invention can be put into practice.
以上のように本発明によれば排気口の位置を吸気口に近
い位置に配Ｉ！（本発明ではポンプケーシングに対し排
気口を給気口と左右、または上下対称の位置になるよう
排気口を移動させた）すれば排気ポートと排気口との間
に広いスペースが設けられるため、
（１）半導体製造装置に用いられる真空ポンプのように
排気ポート付近に反応ガスによる生成部が堆積するよう
な場合のメンテナンス作業が容易にしかも確実に行なえ
るため生成物の取残し等によるトラブルが防げる。As described above, according to the present invention, the exhaust port is located close to the intake port! (In the present invention, the exhaust port is moved to the pump casing so that the exhaust port is located horizontally or vertically symmetrically with the air supply port.) By doing so, a wide space is provided between the exhaust port and the exhaust port, so that (1) Maintenance work can be performed easily and reliably in cases where reaction gas products accumulate near the exhaust port, such as in vacuum pumps used in semiconductor manufacturing equipment, so problems such as products being left behind can be avoided. It can be prevented.
（２）本発明の真空ポンプを多段機として使用する場合
、配管系作業が容易であるとともに省スペース化ができ
る。(2) When the vacuum pump of the present invention is used as a multistage machine, piping work is easy and space can be saved.
等の効果を得ることができる。Effects such as this can be obtained.
第１図は本発明の実施例を示す吸気・排気口をポンプケ
ーシングに対し対称に配置した外観図、第２図は第１図
のＡ−Ａ断面図、第３図は第１図のＢ−Ｂ断面図、第４
図は、第３図のＣ−Ｃ断面。
第５図は多段機とした場合の本発明の一実施例を示す外
観図である。
１・・・吸気口、２・・・排気口、３・・・ポンプケー
シング、冨 １ 図
１ −−− ｒｉｌ１口 ５−−− ９ＪＯ
−タ２−−−木ｍ気口 〆一−−めＴＯ−７３−
−−、ホ、°シフ′ケーンシク゛’ ／４−一一膚
トクヒ本°−←４−−−フラシン゛ １５−−
−−通一鍮シ冨 ２ 口
３−−−ボ↓７察ルア°１４−−−↑楔気ホ゛−ト４−
−−７クシン゛ ｔｓ−−−ｉ寥６一不４図
／−−一口及凭口
２−−一琲負４０
３−一一オパンアγ−ンシク′。
４−−−フラシン
５−一−わ゛丁ローク
ｂ−／フすロータ
第 ５ 図Fig. 1 is an external view showing an embodiment of the present invention in which the intake and exhaust ports are arranged symmetrically with respect to the pump casing, Fig. 2 is a sectional view taken along line A-A in Fig. 1, and Fig. 3 is a B-B in Fig. 1. -B sectional view, 4th
The figure is a cross section taken along line C-C in FIG. FIG. 5 is an external view showing an embodiment of the present invention in the case of a multi-stage machine. 1... Intake port, 2... Exhaust port, 3... Pump casing, depth 1 Figure 1 --- ril1 port 5 --- 9JO
-ta 2---Ki m air mouth 〆1--meTO-73-
--, ho, °shifu'kenshiku゛' /4-11 skin tokuhihon °-←4---Flashin゛ 15--
---Through Brass Seat 2 Mouth 3---Bot↓7 Sensing Lua °14---↑Wedge Air Hole 4-
--7 Kushin゛ ts --- i寥6 4 /--Bite and mouth 2--1㎲ 40 3-11 Opan ah γ-nsik'. 4--Flash rotor Fig. 5
Claims (1)
空ポンプケーシングと両端部が軸支持され同期して回転
するように前記ポンプケーシング内に収容され、互にか
み合っている一対のロータを備えてなるスクリュー真空
ポンプにおいて、吸気口および排気口をポンプケーシン
グに対し左右または上下対称に配置し、かみ合っている
おすロータおよびめすロータ端部の排気ポートより排気
口までの通路の一部を脱着可能にしたことを特徴とする
スクリュー真空ポンプ。1. It comprises a screw vacuum pump casing in which an intake port and an exhaust port are formed, and a pair of rotors which are housed in the pump casing and mesh with each other, with both ends supported by shafts so as to rotate synchronously. In screw vacuum pumps, the intake and exhaust ports are arranged horizontally or vertically symmetrically with respect to the pump casing, and a part of the passage from the exhaust ports at the ends of the engaged male and female rotors to the exhaust port can be detached. A screw vacuum pump characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5918186A JPS62218682A (en) | 1986-03-19 | 1986-03-19 | Screw vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5918186A JPS62218682A (en) | 1986-03-19 | 1986-03-19 | Screw vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62218682A true JPS62218682A (en) | 1987-09-26 |
Family
ID=13105977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5918186A Pending JPS62218682A (en) | 1986-03-19 | 1986-03-19 | Screw vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62218682A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04175488A (en) * | 1990-11-08 | 1992-06-23 | Kobe Steel Ltd | Screw compressor |
| US6413065B1 (en) * | 1998-09-09 | 2002-07-02 | Pradeep Dass | Modular downhole multiphase pump |
| JP2006342742A (en) * | 2005-06-09 | 2006-12-21 | Hitachi Industrial Equipment Systems Co Ltd | Screw compressor |
| JP2007040294A (en) * | 2005-07-06 | 2007-02-15 | Kobe Steel Ltd | Two-stage screw compressor |
| WO2007022798A1 (en) * | 2005-08-25 | 2007-03-01 | Ateliers Busch Sa | Pump housing |
| CN105386972A (en) * | 2015-12-09 | 2016-03-09 | 合肥工业大学 | Screw vacuum pump of motive seal structure |
| DE102013101164B4 (en) * | 2013-02-06 | 2016-03-24 | Leistritz Pumpen Gmbh | Screw Pump |
| CN105971882A (en) * | 2016-07-12 | 2016-09-28 | 合肥新沪屏蔽泵有限公司 | Novel double-screw vacuum pump |
| CN109505770A (en) * | 2018-11-30 | 2019-03-22 | 江阴爱尔姆真空设备有限公司 | A kind of parallel huge discharge screw pump device |
-
1986
- 1986-03-19 JP JP5918186A patent/JPS62218682A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04175488A (en) * | 1990-11-08 | 1992-06-23 | Kobe Steel Ltd | Screw compressor |
| US6413065B1 (en) * | 1998-09-09 | 2002-07-02 | Pradeep Dass | Modular downhole multiphase pump |
| JP2006342742A (en) * | 2005-06-09 | 2006-12-21 | Hitachi Industrial Equipment Systems Co Ltd | Screw compressor |
| JP2007040294A (en) * | 2005-07-06 | 2007-02-15 | Kobe Steel Ltd | Two-stage screw compressor |
| WO2007022798A1 (en) * | 2005-08-25 | 2007-03-01 | Ateliers Busch Sa | Pump housing |
| AU2005335899B2 (en) * | 2005-08-25 | 2011-06-09 | Ateliers Busch Sa | Pump housing |
| KR101210400B1 (en) | 2005-08-25 | 2012-12-10 | 아뜰리에 부쉬 에스.아. | Pump casing and pump with the pump casing |
| DE102013101164B4 (en) * | 2013-02-06 | 2016-03-24 | Leistritz Pumpen Gmbh | Screw Pump |
| CN105386972A (en) * | 2015-12-09 | 2016-03-09 | 合肥工业大学 | Screw vacuum pump of motive seal structure |
| CN105386972B (en) * | 2015-12-09 | 2017-05-17 | 合肥工业大学 | Screw vacuum pump of motive seal structure |
| CN105971882A (en) * | 2016-07-12 | 2016-09-28 | 合肥新沪屏蔽泵有限公司 | Novel double-screw vacuum pump |
| CN109505770A (en) * | 2018-11-30 | 2019-03-22 | 江阴爱尔姆真空设备有限公司 | A kind of parallel huge discharge screw pump device |
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