JPS62210418A - Light beam deflection mirror - Google Patents
Light beam deflection mirrorInfo
- Publication number
- JPS62210418A JPS62210418A JP5244986A JP5244986A JPS62210418A JP S62210418 A JPS62210418 A JP S62210418A JP 5244986 A JP5244986 A JP 5244986A JP 5244986 A JP5244986 A JP 5244986A JP S62210418 A JPS62210418 A JP S62210418A
- Authority
- JP
- Japan
- Prior art keywords
- movable part
- mirror
- center
- support
- light beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005484 gravity Effects 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000013016 damping Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 3
- 230000004907 flux Effects 0.000 abstract description 2
- 230000033001 locomotion Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Optical Recording Or Reproduction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は光デイスク装置などにおける光スポットの精密
位置制御用光ビーム偏向ミラーに係り、特に小型化およ
び組立時間の短縮に好適な偏向ミラー支持構造に関する
。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a light beam deflection mirror for precise position control of a light spot in an optical disk device, etc., and in particular to a deflection mirror support suitable for downsizing and shortening assembly time. Regarding structure.
金属材料を支持部材として用いた光ビーム偏向ミラーに
は例えば特開昭６０−１５３０２０号公報に記載された
十字ばね構造のものと、金属ワイヤを用いたねじりばね
構造のものがある。十字ばね支持型は、十字ばねの交線
を中心とした回転の剛性は小さく、それ以外の回転およ
び直進方向の剛性が十分大きい長所を持っている。Light beam deflection mirrors using metal materials as supporting members include, for example, those with a cross spring structure described in Japanese Patent Application Laid-open No. 153020/1982, and those with a torsion spring structure using metal wires. The cross spring support type has the advantage that the rigidity in rotation around the intersection line of the cross springs is small, but the rigidity in other rotations and in the straight direction is sufficiently large.
一方ワインを用いたねじりばね構造は、ミラーをミラー
支持体に固定し、駆動コイルで回転駆動するもので１以
上の可動部を一端を固定部に固定した支持ワイヤで支持
するものである。On the other hand, in the torsion spring structure using wine, the mirror is fixed to a mirror support and rotated by a drive coil, and one or more movable parts are supported by a support wire with one end fixed to a fixed part.
上記の十字ばね構造のものは、交差するばねの両端を可
動部および固定部に接続点が接続する必要があり、接続
点は合計８点となる。そのため組立時間が長くなる問題
がある。また十字ばねの固定点は、ミラー可動の厚みよ
りも外になってしまうため、光ヘッドの小型化の面で問
題である。一方上記のねじりばね構造のものは、ワイン
の長手方向の剛性は高いが、それ以外の方向の直進およ
び回転方向の剛性が低いため、外部から加速度が加わる
とミラー位置が移動してしまい、反射光の位置および方
向がずれてしまう問題があった。In the above cross spring structure, it is necessary to connect both ends of the intersecting springs to the movable part and the fixed part at connection points, for a total of eight connection points. Therefore, there is a problem that the assembly time becomes long. Furthermore, the fixing point of the cross spring is outside the thickness of the movable mirror, which poses a problem in terms of miniaturization of the optical head. On the other hand, the torsion spring structure described above has high rigidity in the longitudinal direction of the wine, but has low rigidity in other directions such as linear movement and rotational directions, so when external acceleration is applied, the mirror position moves and the reflection There was a problem that the position and direction of the light were shifted.
本発明の目的は、接続部の数が少ない、固定部のミラー
厚み方向位置が偏向ミラー可動部の厚み内に位置すると
いうねじりばね方式の利点を保ちつつ、光スポットの位
置決め精度を低下させる振動を抑制した光ビーム偏向ミ
ラーを提供することにある。The purpose of the present invention is to maintain the advantages of the torsion spring method in that the number of connection parts is small and the position of the fixed part in the mirror thickness direction is located within the thickness of the deflection mirror movable part, while eliminating vibrations that reduce the positioning accuracy of the optical spot. An object of the present invention is to provide a light beam deflection mirror that suppresses the
上記の目的は、可動部を左右２つの薄板状のばね部材で
支持し、この支持ばね部材の厚み方向をミラーの面内方
向に合わせると共に、支持ばね部材のねじり中心線上近
傍に可動部の重心を設けることにより達成される。The above purpose is to support the movable part with two thin plate-shaped spring members on the left and right, align the thickness direction of the support spring members with the in-plane direction of the mirror, and place the center of gravity of the movable part near the torsion center line of the support spring member. This is achieved by providing
ミラーの場合、ミラー面内でミラーが微少量位動しても
光ビームの位置には全く影響しない。偏向ミラー支持ば
ねを金属板より成るねじりばねとして、低剛性の金属板
厚み方向をミラー面内方向に合わせ、高剛性の金属板巾
方向をミラー法線方向とすれば、光ビームの位置に関係
するミラー法線方向のミラー変化を小さく抑制できる。In the case of a mirror, even if the mirror moves by a small amount within the mirror plane, it does not affect the position of the light beam at all. If the deflection mirror support spring is a torsion spring made of a metal plate, and the thickness direction of the low-rigidity metal plate is aligned with the in-plane direction of the mirror, and the width direction of the high-rigidity metal plate is aligned with the normal direction of the mirror, the relationship between the position of the light beam and Mirror changes in the mirror normal direction can be suppressed to a small level.
以下１本発明の一実施例を第１図により説明する。可動
部１０は、ミラー１１とミラー支持体１２と駆動コイル
１３から構成されている。支持ばね１４は一端を可動部
１０に、他端を固定部１５にねじ１６で固定されている
。ミラー支持体１２はアルミニウムなどの軽量で電気伝
導度の高い金属から成り、その両端に長方形状の穴１７
が形成されている。穴１７の中に磁気回路のヨーク１８
の一端が挿入され、磁石１９とヨーク１８の形成する磁
気ギャップ２０を形成する。穴１７とほぼ同形状の駆動
コイル１３が穴１７と重ねて接合されており、ミラー支
持体１２と駆動コイル１３の最も外側の辺は磁気ギャッ
プ２０の中に位置づけられている。支持ばね１４はステ
ンレスなどからなる平らな薄板であり、可動部１０の両
側に対称に設けられている０両側の支持ばね１２の中心
線は同一直線上Ｃの上にあり、直線Ｃは可動部１０の回
転中心となる。可動部１０の重心は直線Ｃの近傍に位置
する。可動部１０は直ａＣを法線とする回転平面のうち
ミラー中央を通る平面に対しほぼ対称となるように作ら
れている。支持ばね１２は可動部１０の長手方向（Ｘ方
向）のほぼ中央部に位置する。磁石１９とヨーク１８は
同一形状、同一材料のものが両端に設けられており、そ
の結果磁気ギャップ２０の磁束密度は１両側ともばらつ
きを除けば同じ値となる０両端の駆動コイル１３も同一
形状、同一巻数であり、両端に発生するミラー法線方向
（２方向）の力の向きが反対となるように電流の向きを
決定すれば、両端の駆動コイル１３に同じ大きさの電流
を流す事により両端に方向が逆で大きさが同じ力、すな
わち偶力が発生する。An embodiment of the present invention will be described below with reference to FIG. The movable part 10 is composed of a mirror 11, a mirror support 12, and a drive coil 13. The support spring 14 has one end fixed to the movable part 10 and the other end fixed to the fixed part 15 with a screw 16. The mirror support 12 is made of a lightweight metal with high electrical conductivity such as aluminum, and has rectangular holes 17 at both ends.
is formed. A magnetic circuit yoke 18 is placed in the hole 17.
One end of the yoke 18 is inserted to form a magnetic gap 20 between the magnet 19 and the yoke 18 . A drive coil 13 having substantially the same shape as the hole 17 is overlapped and bonded to the hole 17, and the outermost sides of the mirror support 12 and the drive coil 13 are positioned within the magnetic gap 20. The support springs 14 are flat thin plates made of stainless steel or the like, and are provided symmetrically on both sides of the movable part 10.The center lines of the support springs 12 on both sides are on the same straight line C, and the straight line C is the same as the movable part 10. 10 rotation center. The center of gravity of the movable part 10 is located near the straight line C. The movable part 10 is made to be substantially symmetrical with respect to a plane passing through the center of the mirror among rotation planes whose normal is the axle aC. The support spring 12 is located approximately at the center of the movable portion 10 in the longitudinal direction (X direction). The magnet 19 and the yoke 18 have the same shape and the same material at both ends, and as a result, the magnetic flux density of the magnetic gap 20 has the same value on both sides except for variations.The drive coils 13 at both ends also have the same shape. , if the number of turns is the same and the direction of the current is determined so that the direction of the force in the mirror normal direction (two directions) generated at both ends is opposite, the same magnitude of current can be passed through the drive coil 13 at both ends. This creates a force couple with opposite directions and the same magnitude at both ends.
次に、第２図を用いて可動部１０の動作を説明する。ミ
ラー１１に対し入射光ビームエが約４５″に当たり反射
して出射光ビーム０となる。両端の駆動コイル１３でＺ
方向の正、負の力が発生し、可動部１０はθだけ回転す
る。すると出射光は２θだけ角度を変えられる。支持ば
ねの回転中心Ｃと可動部１０の重心が一致、両端のコイ
ル１３で発生する正、負の力の大きさが一致している場
合、可動部１０には０方向の回転運動しか発生しない、
しかし、一般には回転中心Ｃと可動部重心はずれており
、コイル１３で発生する正、負の力も同じ大きさではな
い。また両側の支持ばね１２も形状、材料特性にずれが
避けられない。これらの影響が可動部１０は０方向（Ｙ
軸回り）の回転の他に、ｘ、ｙ、Ｚ方向の直進運動およ
びＸ、ｚ軸回りの回転運動がわずかであるが発生する。Next, the operation of the movable part 10 will be explained using FIG. 2. The incident light beam A hits approximately 45" on the mirror 11 and is reflected to become the output light beam 0. The drive coils 13 at both ends
Positive and negative forces are generated in the directions, and the movable part 10 rotates by θ. Then, the angle of the emitted light can be changed by 2θ. When the rotation center C of the support spring and the center of gravity of the movable part 10 match, and the magnitudes of the positive and negative forces generated in the coils 13 at both ends match, the movable part 10 only generates rotational motion in the 0 direction. ,
However, in general, the center of rotation C and the center of gravity of the movable part are offset, and the positive and negative forces generated in the coil 13 are not of the same magnitude. Further, the support springs 12 on both sides inevitably have deviations in shape and material properties. These influences cause the movable part 10 to move in the 0 direction (Y
In addition to rotations (about the axes), linear motions in the x, y, and Z directions and rotational motions about the X and z axes occur to a small extent.
支持ばね１２の長手方向（Ｙ方向）の剛性は十分高く、
巾方向（２方向）の剛性も十分大きい。しがし厚み方向
（Ｘ方向）の剛性は小さい。その結果、ミラー１１のＺ
方向、Ｙ方向の直進運動およびＸ回りの変位は十分小さ
くなるが、Ｘ方向の直進運動およびＺ軸回りの変位は必
らずしも小さいとは云えない大きさとなる。ところがミ
ラー１１がミラー面内（ｘ−ｙ面）で移動、回転しても
、ミラー１１で反射された出射光０の位置および角度は
変化しない。そのため出射光０はミラー１１の回転角θ
のみによって変化し、回転中心Ｃと可動部重心のずれ、
両端の駆動コイル１３で発生する力のアンバランスある
いは両端支持ばね１２の剛性アンバランスなどの影響は
無視できる。The rigidity of the support spring 12 in the longitudinal direction (Y direction) is sufficiently high.
The rigidity in the width direction (two directions) is also sufficiently large. The rigidity in the thickness direction (X direction) is small. As a result, Z of mirror 11
Although the linear movement in the Y direction and the displacement around the X axis are sufficiently small, the linear movement in the X direction and the displacement around the Z axis are not necessarily small. However, even if the mirror 11 moves or rotates within the mirror plane (xy plane), the position and angle of the emitted light 0 reflected by the mirror 11 do not change. Therefore, the output light 0 is the rotation angle θ of the mirror 11.
The difference between the center of rotation C and the center of gravity of the moving part,
The effects of unbalanced forces generated by the drive coils 13 at both ends or unbalanced rigidities of the supporting springs 12 at both ends can be ignored.
しかし回転中心Ｃと可動部重心のずれが大きくなるとＸ
方向の直進運動とＹ軸回り（θ方向）の回転が連成し、
θ方向の回転に影響を与える場合がある。その場合には
Ｘ方向の直進運動を抑制する事によってθ方向への影響
を抑えることができる。一般に問題になるのはこれらの
運動形態を取る振動モードの場合であるから、この振動
周波数で可動部１０が主にＸ方向に振動するのを減衰さ
せるように、支持ばね１２に減衰吸収材を設けることに
より、この振動モードの振幅を小さくシ。However, if the deviation between the center of rotation C and the center of gravity of the movable part becomes large,
The linear movement in the direction and the rotation around the Y axis (θ direction) are coupled,
This may affect rotation in the θ direction. In that case, by suppressing the linear motion in the X direction, the influence on the θ direction can be suppressed. Generally, problems occur in vibration modes that take these forms of motion, so a damping absorbing material is applied to the support spring 12 so as to damp the vibration of the movable part 10 mainly in the X direction at this vibration frequency. By providing this, the amplitude of this vibration mode can be reduced.
結果的に０方向の回転を十分小さく抑えることができる
。上記振動吸収体を設けた支持ばねとして第３図のよう
に板ばね１４の両面に振動吸収用ゴム２１を設けたもの
、あるいは第４図のように板ばね１４の間に振動吸収用
ゴム２１を設けたものなどが考えられる。As a result, rotation in the zero direction can be suppressed to a sufficiently small level. As a support spring provided with the vibration absorber, a vibration absorbing rubber 21 is provided on both sides of the leaf spring 14 as shown in FIG. 3, or a vibration absorbing rubber 21 is provided between the leaf springs 14 as shown in FIG. A possible option would be one with a .
支持ばね１４が可動部１０の両側に分かれていると組立
の際に精度が出しにくいので、第７図に示す様に２つの
支持ばね１４の可動部側、固定部側をそれぞれ結合した
形状にする。そうすれば、２つの支持ばね１４は同一直
線上に精度よく位置した状態で固定部１５および可動部
１０と接続固定することができる。この後、固定部側の
接続部２２および可動部側の接続部２３をこのままにし
ても良いが、破線部りで折り取っても良い、折り取る場
合は、折り取り部にブリッジを設けて折り取り易くする
。If the support springs 14 are separated on both sides of the movable part 10, it will be difficult to achieve precision during assembly, so as shown in FIG. do. By doing so, the two support springs 14 can be connected and fixed to the fixed part 15 and the movable part 10 in a state where they are accurately positioned on the same straight line. After this, the connection part 22 on the fixed part side and the connection part 23 on the movable part side can be left as they are, or they can be broken off along the broken line.If you want to break them off, provide a bridge at the break-off part and fold them. Make it easier to take.
第５図に示すように接続部２３．２４を折り取ってしま
えば、支持ばね１４は可動部１ｏの厚みの範囲内に入っ
てしまうのが通常であり、支持ばねのために偏向ミラー
全体の厚さくＺ方向）が大きくなることはなく、小型化
に適する。As shown in FIG. 5, if the connecting parts 23 and 24 are broken off, the support spring 14 will normally be within the thickness of the movable part 1o, and the support spring will cover the entire deflection mirror. The thickness does not increase (in the Z direction), making it suitable for downsizing.
接続部を外側の２２だけにし、内側の２３がなくても、
ばね１４の精度を確保することは可能である６その場合
は、接続部２２を折り取ることなく、ばね１４を接続固
定して使用できる。Even if the connection part is only the outer part 22 and the inner part 23 is not included,
It is possible to ensure the accuracy of the spring 14.6 In that case, the spring 14 can be connected and fixed for use without breaking off the connecting portion 22.
本発明によれば光ビーム偏向ミラーの支持ばねとして、
従来の十字ばねと同等の機能を一枚の板ばねで挙げる事
が可能となる。その結果、偏向ミラーの部品数の削減、
組立時間の短縮更に厚みの低減を実現できる効果がある
。According to the present invention, as a support spring for a light beam deflection mirror,
It is possible to achieve the same function as a conventional cross spring with a single leaf spring. As a result, the number of parts for the deflection mirror is reduced,
This has the effect of shortening assembly time and reducing thickness.
第１図は本発明の一実施例を説明する斜視図、第２図は
第１図に示す実施例における可動部の正面図、第３図、
第４図および第５図は本発明の別の実施例を示す図で、
第３図および第４図は要部斜視図、第５図は要部正面図
である。
１１・・・ミラー、１２・・・ミラー支持体、１３・・
・駆動コイル、１４・・・支持ばね、１５・・・固定部
、１６・・・ねじ、１８・・・ヨーク、１９・・・磁石
。FIG. 1 is a perspective view illustrating an embodiment of the present invention, FIG. 2 is a front view of a movable part in the embodiment shown in FIG. 1, and FIG.
FIG. 4 and FIG. 5 are diagrams showing another embodiment of the present invention,
3 and 4 are perspective views of the main parts, and FIG. 5 is a front view of the main parts. 11...Mirror, 12...Mirror support, 13...
- Drive coil, 14... Support spring, 15... Fixed part, 16... Screw, 18... Yoke, 19... Magnet.
Claims (1)
称の可動部を備える光ビーム偏向ミラーにおいて、前記
可動部を左右２つの薄板状のばね部材で支持し、前記支
持ばね部材はその厚み方向を前記ミラーの面内方向に合
わせ、そのねじり中心線上近傍に前記可動部の重心を設
けたことを特徴とする光ビーム偏向ミラー。 ２、支持ばね部材の厚み方向に振動減衰用弾性体と金属
の薄板を積層した事を特徴とする特許請求の範囲第１項
記載の光ビーム偏向ミラー。 ３、左右の支持ばね部材の可動部側同志あるいは固定部
側同志は、互いに連結した構造の状態で組立てを行なう
ことを特徴とする特許請求の範囲第１項記載の光ビーム
偏向ミラー。[Scope of Claims] 1. A light beam deflection mirror including a substantially bilaterally symmetrical movable part having a mirror, a mirror support body, and a drive part, wherein the movable part is supported by two left and right thin plate-like spring members, and the supporting part is A light beam deflection mirror characterized in that the spring member has its thickness direction aligned with the in-plane direction of the mirror, and the center of gravity of the movable part is provided near the torsion center line of the spring member. 2. The light beam deflection mirror according to claim 1, wherein a vibration damping elastic body and a thin metal plate are laminated in the thickness direction of the support spring member. 3. The light beam deflection mirror according to claim 1, wherein the left and right support spring members on the movable part side or on the fixed part side are assembled in a state in which they are connected to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5244986A JPS62210418A (en) | 1986-03-12 | 1986-03-12 | Light beam deflection mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5244986A JPS62210418A (en) | 1986-03-12 | 1986-03-12 | Light beam deflection mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62210418A true JPS62210418A (en) | 1987-09-16 |
Family
ID=12915030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5244986A Pending JPS62210418A (en) | 1986-03-12 | 1986-03-12 | Light beam deflection mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62210418A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0515124U (en) * | 1991-08-09 | 1993-02-26 | アルプス電気株式会社 | Galvano mirror |
| US5446712A (en) * | 1991-04-22 | 1995-08-29 | Seiko Epson Corporation | Optical system having a precision angular displacement mechanism including a flat metal spring |
| US6122089A (en) * | 1997-12-09 | 2000-09-19 | Olympus Optical Co., Ltd. | Optical deflector comprising a movable member having a high rigidity and a reduced moment of inertia and a method for producing the same |
| EP1207416A1 (en) * | 2000-11-20 | 2002-05-22 | Olympus Optical Co., Ltd. | Optical deflector |
| JP2010002926A (en) * | 1997-12-09 | 2010-01-07 | Olympus Corp | Method for producing optical deflector |
-
1986
- 1986-03-12 JP JP5244986A patent/JPS62210418A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5446712A (en) * | 1991-04-22 | 1995-08-29 | Seiko Epson Corporation | Optical system having a precision angular displacement mechanism including a flat metal spring |
| JPH0515124U (en) * | 1991-08-09 | 1993-02-26 | アルプス電気株式会社 | Galvano mirror |
| US6122089A (en) * | 1997-12-09 | 2000-09-19 | Olympus Optical Co., Ltd. | Optical deflector comprising a movable member having a high rigidity and a reduced moment of inertia and a method for producing the same |
| JP2010002926A (en) * | 1997-12-09 | 2010-01-07 | Olympus Corp | Method for producing optical deflector |
| EP1207416A1 (en) * | 2000-11-20 | 2002-05-22 | Olympus Optical Co., Ltd. | Optical deflector |
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