JPS62207804A - Apparatus for separating and capturing ultrafine particles - Google Patents
Apparatus for separating and capturing ultrafine particlesInfo
- Publication number
- JPS62207804A JPS62207804A JP61050396A JP5039686A JPS62207804A JP S62207804 A JPS62207804 A JP S62207804A JP 61050396 A JP61050396 A JP 61050396A JP 5039686 A JP5039686 A JP 5039686A JP S62207804 A JPS62207804 A JP S62207804A
- Authority
- JP
- Japan
- Prior art keywords
- ultrafine particles
- filter
- ultrafine
- particles
- carrier gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011882 ultra-fine particle Substances 0.000 title claims abstract description 96
- 239000012159 carrier gas Substances 0.000 abstract description 23
- 239000002245 particle Substances 0.000 abstract description 11
- 230000010355 oscillation Effects 0.000 abstract 3
- 239000007788 liquid Substances 0.000 description 31
- 239000000126 substance Substances 0.000 description 28
- 239000007789 gas Substances 0.000 description 12
- 230000033001 locomotion Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000005192 partition Methods 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 210000002381 plasma Anatomy 0.000 description 4
- 230000002745 absorbent Effects 0.000 description 3
- 239000002250 absorbent Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000000110 cooling liquid Substances 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000011344 liquid material Substances 0.000 description 2
- 241000270666 Testudines Species 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 235000012149 noodles Nutrition 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は超微粒子の分離及び捕集装置に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for separating and collecting ultrafine particles.
従来、アーク及びプラズマ等、超高温熱源を利用した超
微粒子の分離及び捕集装置としては、一般的に不活性ガ
スの流れに生成した超微粒子を乗せ捕集部に設置したセ
ルロース及びガラス繊維等のフィルターを用い捕集して
いた。Conventionally, ultrafine particle separation and collection devices using ultra-high temperature heat sources such as arcs and plasmas have generally used cellulose or glass fibers, etc., in which ultrafine particles generated in a flow of inert gas are placed in a collection section. was collected using a filter.
また、ガス蒸発法を用いた場合の従来の捕集装置は超微
粒子生成容器内壁に付着した超微粒子を内壁を伝って流
れるシリコンオイル系溶液を用いて回収する装置〔特開
昭４９−５２１６３）及び生成した超微粒子を冷却によ
り固化した気体又は液体に付着せしめ、分散状態で捕集
せしめる装置（特公昭５６−１５４４２）がある。Furthermore, a conventional collection device using the gas evaporation method is a device that collects ultrafine particles attached to the inner wall of an ultrafine particle generation container using a silicone oil-based solution flowing along the inner wall [Japanese Patent Laid-Open No. 49-52163]. There is also an apparatus (Japanese Patent Publication No. 56-15442) in which the generated ultrafine particles are attached to a gas or liquid solidified by cooling and collected in a dispersed state.
前記の従来技術は捕集部に設置したフィルタ一部で、超
微粒子が連続的にフィルター表面に積み重なる次め超微
粒子間の結合による粒子成長が考えられ、しかもある一
定量以上、捕集するとフィルターが目づまり状態の点に
ついて配慮がされておらず、キャリアガスを循環させて
いる超微粒子製造装置の場合にはキャリアガスの流量が
減少し、超微粒子の生成に悪影響を及ぼす。また、捕集
容量がフィルターの容量で決定するため、フィルターを
並列に数個、設置する構造が考えられるが、構造上複雑
となり超微粒子を操作上、大気に触ｎることなく捕集し
なければならないため１回収する場合には複雑な過程を
必要とする等の問題があった。The above-mentioned conventional technology is a part of the filter installed in the collection part, and it is thought that ultrafine particles are continuously piled up on the filter surface and then particle growth occurs due to bonding between the ultrafine particles.Moreover, when a certain amount or more is collected, the filter In the case of an ultrafine particle manufacturing apparatus in which carrier gas is circulated without consideration given to the clogging state, the flow rate of the carrier gas decreases, which adversely affects the generation of ultrafine particles. In addition, since the collection capacity is determined by the capacity of the filter, a structure in which several filters are installed in parallel can be considered, but the structure is complicated and it is necessary to collect ultrafine particles without coming into contact with the atmosphere. Therefore, there were problems such as the need for a complicated process if one recovery was required.
一方、ガス蒸発法で用いられている捕集装置はアーク及
びプラズマ等、超高温熱源を利用した超微粒子生成法に
は用いることができない。その理由は超微粒子の生成に
超高温熱源を利用しているため、超微粒子を生成してい
る容器内壁に溶液を・流したシ、冷却により固化した気
体又は液体を容器内壁に固定させたりすると、溶液及び
固化した気体又は液体が蒸発し、超微粒子の生成に悪影
響を及ぼす問題があった。また、こｎらの装置は捕集時
に超微粒子を分級する技術について配慮されておらず、
特にアーク法で生成された超微粒子は粒径分布が非常に
広範囲である問題点があった０本発明の目的は捕集に用
いるフィルターが目づまｐｔ起こさず、超微粒子を大量
かつ安易に分離及び捕集する装置を提供することにある
。On the other hand, the collection device used in the gas evaporation method cannot be used in the ultrafine particle generation method using an ultra-high temperature heat source such as an arc or plasma. The reason for this is that an ultra-high temperature heat source is used to generate ultrafine particles, so if a solution is poured onto the inner wall of the container where the ultrafine particles are being generated, or the gas or liquid solidified by cooling is fixed to the inner wall of the container. However, there was a problem in that the solution and solidified gas or liquid evaporated, which adversely affected the production of ultrafine particles. In addition, these devices do not take into consideration the technology for classifying ultrafine particles during collection,
In particular, the ultrafine particles generated by the arc method have a problem in that the particle size distribution is very wide.The purpose of the present invention is to easily separate a large amount of ultrafine particles without causing clogging of the filter used for collection. and to provide a device for collecting it.
また、本発明の別な目的は狭範囲の粒度分布を有する活
性な超微粒子を捕集し１分散状！ＩＩ４を保持した状態
で装置より安易に取り出すことが可能な装置を提供する
ことにある。Another object of the present invention is to collect active ultrafine particles with a narrow particle size distribution and to form a single dispersion! To provide a device capable of easily taking out II4 from the device while holding it.
前記目的は、捕集部に設置したフィルタ一部に振動機構
を設置し、かつその振動機構の下方にバルブを介して１
個もしくは複数個の大容量捕集室を設け、その周囲に超
音波発生機構を設けることによシ、達成さｎる。The purpose is to install a vibration mechanism in a part of the filter installed in the collection section, and to install a vibration mechanism below the vibration mechanism through a valve.
This can be achieved by providing one or more large-capacity collection chambers and providing an ultrasonic generation mechanism around them.
また、前記、別な目的はキャリアガスにより運ばれた超
微粒子を、そのまま、非酸化性の界面活性剤を含む液状
物質内へ導入し、液状物質中でキャリアガスと超微粒子
の分離を促進させる機構を設け、かつその周囲に超音波
発生機構を設けることにより、達成される。Another purpose is to directly introduce the ultrafine particles carried by the carrier gas into a liquid substance containing a non-oxidizing surfactant to promote separation of the carrier gas and the ultrafine particles in the liquid substance. This is achieved by providing a mechanism and providing an ultrasonic generation mechanism around the mechanism.
本発明では捕集部に設置したフィルターに上下。 In the present invention, the upper and lower filters are installed in the collection section.
圧右、回転もしくは不規則な運動をさせることにより、
キャリアガスで運ばれた超微粒子はフィルターでキャリ
アガスと超微粒子に分離され、フィルター表面で捕えた
超微粒子は振動状態のフィルター表面で振υ落とされ、
捕集部下部に設置した大容量捕集室内に固着しない状態
で集めらｎる。By compressing, rotating or making irregular movements,
The ultrafine particles carried by the carrier gas are separated into carrier gas and ultrafine particles by the filter, and the ultrafine particles captured on the filter surface are shaken off by the vibrating filter surface.
It is collected in a large-capacity collection chamber installed at the bottom of the collection section without sticking.
この大容量捕集室の周囲に超音波発生機構を設けること
により、集められた超微粒子は超音波によって分散さｎ
る機能も有している。By providing an ultrasonic generation mechanism around this large-capacity collection chamber, the collected ultrafine particles are dispersed by ultrasonic waves.
It also has the function of
超微粒子発生室と捕集部の間の配管に超音波発生機構を
設置することにニジ、キャリアガス中の超微粒子は分散
・分級さｎ、同一配管内に固定した数個所のフィルター
で捕集さｎる。なお、この装置にフィルターを振動させ
る機構を付７１１１することにより、捕集が安易となる
。By installing an ultrasonic generation mechanism in the piping between the ultrafine particle generation chamber and the collection section, the ultrafine particles in the carrier gas can be dispersed and classified, and then collected using several filters fixed in the same piping. Sanru. Note that by adding a mechanism to vibrate the filter to this device, collection becomes easier.
また１本発明はアーク及びプラズマ等、超高温熱源を利
用し、生成した超微粒子をすぐに液状物質内に導入し、
液状物質内でポーラス状焼結材を用い、分離させること
によって、高品質な超微粒子を得ることができる。この
液状物質容器の周囲に超音波発生機構を設置することに
よって、非常に分散状態が良好な超微粒子が得ら【る。In addition, the present invention utilizes an ultra-high temperature heat source such as an arc or plasma, and immediately introduces the generated ultrafine particles into a liquid substance,
High-quality ultrafine particles can be obtained by using a porous sintered material in a liquid substance and separating it. By installing an ultrasonic generation mechanism around this liquid substance container, ultrafine particles with a very good dispersion state can be obtained.
以下、本発明の詳細な説明する。第１図は本発明を利用
した超微粒子製造装置の一例である〇１は超微粒子発生
室、２は振動フィルター機構、３は大量の超微粒子を集
積できる捕集室、４は循環ポンプ、５は超微粒子の生成
に使用さｎるガスと同一組成のガスボンベ、６は超音波
発振器、７（ａ）〜７（ｄ）はバルブであり、８はガス
排気口である０次に前記装置の動作を説明する。超微粒
子発生室１内でアーク又はプラズマ等、超高温熱源を利
用して生成した超微粒子はキャリアガスの流れに乗り、
振動フィルター機構２まで移送さ几、そのフィルターで
超微粒子とキャリアガスに分離さｎる。The present invention will be explained in detail below. Fig. 1 shows an example of an ultrafine particle production device using the present invention. 〇1 is an ultrafine particle generation chamber, 2 is a vibration filter mechanism, 3 is a collection chamber that can accumulate a large amount of ultrafine particles, 4 is a circulation pump, 5 is a gas cylinder having the same composition as the gas used to generate ultrafine particles, 6 is an ultrasonic oscillator, 7(a) to 7(d) are valves, and 8 is a gas exhaust port. Explain the operation. Ultrafine particles generated in the ultrafine particle generation chamber 1 using an ultrahigh temperature heat source such as an arc or plasma ride on the flow of carrier gas.
The particles are transferred to a vibrating filter mechanism 2, where they are separated into ultrafine particles and carrier gas.
フィルターを通過したキャリアガスは循環ポンプ４によ
り、再度、超微粒子発生室１に戻さｎ、前記と同様のプ
ロセスをくり返す。その場合、！ｆｉｔ内の閉状態のバ
ルブは？（ｃ）、 ７（ｄ）である。一方。The carrier gas that has passed through the filter is returned to the ultrafine particle generation chamber 1 by the circulation pump 4, and the same process as described above is repeated. In that case,! Which valve in the fit is closed? (c), 7(d). on the other hand.
超微粒子はフィルターを振動させているため、フィルタ
ー表面に付着せず、大容量の捕集室３に集積する。また
、該装置内部の圧力変動に対しては、圧力が上昇した場
合はバルブ７ （Ｃ） ’ｅ開放しガス排気口８よりガ
スを排気し、圧力が減少した場合はバルブ７（ｄ）を開
放し、ガスを供給する。また、捕集室３に大量の超微粒
子が集積された場合はバルブ７（ａ）、７（ｂ）を閉じ
、超音波発振器６により、超微粒子を分散し、捕集室３
を交換する。Since the filter is vibrated, the ultrafine particles do not adhere to the filter surface and accumulate in the large-capacity collection chamber 3. In addition, in response to pressure fluctuations inside the device, if the pressure rises, valve 7 (C) 'e is opened to exhaust gas from the gas exhaust port 8, and if the pressure decreases, valve 7 (d) is opened. Open and supply gas. In addition, when a large amount of ultrafine particles are accumulated in the collection chamber 3, the valves 7(a) and 7(b) are closed, and the ultrasonic oscillator 6 disperses the ultrafine particles.
exchange.
本装置ではフィルターを振動させているために連続的に
移送される超微粒子がフィルター表面で積み重なること
がなく、フィルターが目づまりを起こさないで、振動フ
ィルター機構２下部に設置１、た捕集室に集積する。こ
ｎは、超微粒子単体は超微細で雰囲気ガスの質量より軽
いが１個々に電気的に中性状態であり、磁気結合を起こ
し数個つながった状態となるため、捕集室３に集積する
。In this device, since the filter is vibrated, the continuously transferred ultrafine particles do not accumulate on the filter surface, and the filter does not become clogged. Accumulate. Although the individual ultrafine particles are ultrafine and lighter than the mass of the atmospheric gas, they are individually electrically neutral and magnetically bond to form several connected particles, so they accumulate in the collection chamber 3. .
また、捕集室３ｔ−あらかじめ真空（１０””Ｔｏｒｒ
程度）まで引いた状態で保持しその後、装置に設置し。In addition, the collection chamber 3t is vacuumed (10"" Torr) in advance.
2), and then install it in the device.
バルブ７（ａ）、７（ｂ）を開放することによシ大量の
超微粒子を瞬時に捕集することも可能である。また、超
微粒子を活性な状態を保持したまま、装置より取り出せ
ることにより、超微粒子の多種の用途に用いることが可
能である。It is also possible to instantly collect a large amount of ultrafine particles by opening the valves 7(a) and 7(b). Furthermore, since the ultrafine particles can be taken out of the device while maintaining their active state, the ultrafine particles can be used for a variety of purposes.
本装置の振動フィルター機構の詳細を第２図に示す。９
は配管、１０はベローズ、１１はフィルター、１２は伝
達機構、１３は上下移動機構、１４Ｆｉ左右移動機講で
ある。フィルター１１と配管９との間にベローズ１０を
接置し、配管外部に設けた上下、左右移動機構１３．１
４を動作させることにより、伝達機構を媒介に動作全伝
達させフィルターを振動させる。その場合の変位はベロ
ーズ１０によって吸収させる。また、フィルターに回転
運動、不規則運動をあたえることも容易に會える。本装
置の振動周期及び振動時間が自由に変更させることが可
能であるため、超微粒子の生成効率が高い場曾は連続的
にフィルターｔ−振動させ、生成効率が低い場合はパル
ス波的にフィルターを振動させることにより、超微粒子
の生成効率が異なる材料にも使用でき、フィルターを長
時間。The details of the vibration filter mechanism of this device are shown in Figure 2. 9
10 is a pipe, 10 is a bellows, 11 is a filter, 12 is a transmission mechanism, 13 is a vertical movement mechanism, and 14Fi is a left and right movement mechanism. A bellows 10 is placed between the filter 11 and the pipe 9, and a vertical and horizontal movement mechanism 13.1 is provided outside the pipe.
4, the entire motion is transmitted through the transmission mechanism and the filter is vibrated. The displacement in that case is absorbed by the bellows 10. Furthermore, it is also easy to apply rotational motion or irregular motion to the filter. Since it is possible to freely change the vibration period and vibration time of this device, if the generation efficiency of ultrafine particles is high, the filter is vibrated continuously, and if the generation efficiency is low, the filter is filtered in a pulsed wave. By vibrating the filter, it can be used for materials with different ultrafine particle generation efficiency, and the filter can be used for a long time.
使用することができる特徴も有している。また、超音波
発振器６を配管９の外部より超音波を発振させることに
より、フィルターの目づまりをよりいっそう防止するこ
とが可能でるる。It also has features that can be used. Further, by causing the ultrasonic oscillator 6 to oscillate ultrasonic waves from outside the pipe 9, it is possible to further prevent clogging of the filter.
次に従来装置と実施例との比較を行った結果について述
べる。Next, the results of a comparison between the conventional device and the embodiment will be described.
従来装置：アーク法を用い、アーク電流３００Ａ、アー
ク電圧４１Ｖの条件下で材料を６０Ｐ重量のニッケルを
用いて実験を行った結果、実験開始後５分で外径４Ｑｌ
ｌａＩＬ、セルロース製のフィルターが目づまりした。Conventional equipment: As a result of conducting an experiment using nickel with a weight of 60P under conditions of an arc current of 300A and an arc voltage of 41V using the arc method, the outer diameter decreased to 4Ql within 5 minutes after the start of the experiment.
laIL, the cellulose filter was clogged.
（ここで超微粒子生成量は１００ｔ７ｈである。）
嚢施例：同様の条件下で実験を行つ之結果、実験開始後
３０分経過してもフィルターは目づまりしなかった。従
来法と比較して６倍以上の長時間運転が可能となりフィ
ルターの寿命ものびた。(Here, the amount of ultrafine particles produced is 100t7h.) Bag Example: As a result of conducting an experiment under the same conditions, the filter did not become clogged even 30 minutes after the start of the experiment. Compared to the conventional method, it is possible to operate for more than six times as long, and the life of the filter has been extended.
第３図は液状物質を利用した超微粒子製造装置の一例で
ある。１５は超微粒子発生室で生成さｎた超微粒子、１
６はポーラス状の焼結材、１７は液状物質、１８は吸湿
剤、１９は断熱材、２０は冷却液、２１は液状物質補充
室、２２は大容量捕集器である。超微粒子発生室１よシ
生成した超微粒子１５はキャリアガスとともに液状物質
１７内へ、ボー２ス状の焼結材１６を通過して導入され
、液状物質１７内で超微粒子１５とキャリアガスは分離
さｎ、超微粒子１５は液状物質１７内を浮遊し、キャリ
アガスだけが液状物質１７を通過する。FIG. 3 shows an example of an ultrafine particle manufacturing apparatus using a liquid substance. 15 is ultrafine particles generated in the ultrafine particle generation chamber, 1
6 is a porous sintered material, 17 is a liquid substance, 18 is a moisture absorbent, 19 is a heat insulating material, 20 is a cooling liquid, 21 is a liquid substance replenishment chamber, and 22 is a large capacity collector. The ultrafine particles 15 generated from the ultrafine particle generation chamber 1 are introduced into the liquid substance 17 together with the carrier gas through the bowl-shaped sintered material 16, and the ultrafine particles 15 and the carrier gas are separated in the liquid substance 17. Once separated, the ultrafine particles 15 float within the liquid substance 17, and only the carrier gas passes through the liquid substance 17.
また、柩状物質通過後の配管内に吸湿剤１８を設け、キ
ャリアガスを通過させた。液状物質容器の周囲を断熱材
１９で取り囲み、その間に冷却液２０をバルブ７（Ｃ）
から供給し、充満させた。超微粒子の捕集はバルブ７
（ａ） を介して大容量捕集ｉ！２２ｔ−設け、バルブ
７ （ａ）を開放することによＶ超微粒子１５全液状物
質１７に混合状態のまま捕集する。Further, a moisture absorbent 18 was provided in the pipe after the passage of the rectangular substance, and the carrier gas was allowed to pass therethrough. The liquid substance container is surrounded by a heat insulating material 19, and the cooling liquid 20 is supplied to the valve 7 (C) between the two.
Supplied and charged from Valve 7 collects ultrafine particles
(a) Large-capacity collection via i! 22t-, and by opening valve 7 (a), the V ultrafine particles 15 are collected in a mixed state with the entire liquid substance 17.
また、減少した液状物質１７の補充は液状物質補充室２
１よジパルプ７（ｂ）を操作して行う。In addition, the reduced liquid substance 17 is replenished by the liquid substance replenishment chamber 2.
1 by operating Yojipulp 7(b).
前記、ポーラス状の焼結材は超微粒子とキャリアガスの
分離を容易に行わせるために設けたもので、この他に耐
腐食性にすぐれている材料、たとえばステンレスかセラ
ミックス等をポーラス又は格子状の構造にして用いるこ
とも可能である。超微粒子を生成直後に液状物質１７内
へ導入することにより、液状物質１７内で急冷さｎるた
め、高品質な超微粒子が得らｎる。超微粒子発生室を出
たあとのキャリアガスの温度は、超微粒子生成熱源によ
っても異なるが、３００に−１０００に程度である。そ
のため液状物質１７の蒸気圧が低い場合は一部が蒸発し
、キャリアガスに混入するおそｎがある。そｎらを除去
するために配管内に吸湿剤１８を設けた。また、液状物
質１７が常に一定温度を保持させるために、周囲から冷
却した０この時の冷却液は液体窒素が一般イ効であるが
、冷却水を循環させる方法を用いても冷却は十分行える
Ｏ
また、液状物質中に非酸化性の界面活性剤を加え、液状
物質容器外部から超音波発振器を付加することにより分
散状態が良好な超微粒子を得ることができる。The porous sintered material mentioned above was provided to facilitate the separation of the ultrafine particles and the carrier gas.In addition, materials with excellent corrosion resistance, such as stainless steel or ceramics, were provided in a porous or lattice shape. It is also possible to use the structure as follows. By introducing the ultrafine particles into the liquid substance 17 immediately after generation, they are rapidly cooled within the liquid substance 17, so that high quality ultrafine particles can be obtained. The temperature of the carrier gas after leaving the ultrafine particle generation chamber varies depending on the ultrafine particle generation heat source, but is about 300 to -1000. Therefore, if the vapor pressure of the liquid substance 17 is low, there is a possibility that a part of it will evaporate and be mixed into the carrier gas. A moisture absorbent 18 was provided inside the piping to remove them. In addition, in order for the liquid material 17 to always maintain a constant temperature, it is generally effective to use liquid nitrogen as the cooling liquid cooled from the surroundings, but cooling can also be achieved by circulating cooling water. O Further, by adding a non-oxidizing surfactant to the liquid substance and adding an ultrasonic oscillator from outside the liquid substance container, ultrafine particles with a good dispersion state can be obtained.
本実施例によｎば、液状物質を配管上部よりシャワー状
もしくは噴霧状態で落下させることにより超微粒子とキ
ャリアガスを分離する装置も提供することが可能である
。また、液状物質は非酸化性の界面活性剤を少量、混入
した有機化合物を用いることが可能で、特にカルボニル
基を用いると良好な超微粒子が得られる０また、液状物
質と超微粒子を分離する場合は液状物質を蒸発させｎば
良いっ
第４図に超微粒子分級技術を用いた一例を示し友。２３
は配管外部に設置した超音波発振器の振動強度分布、２
４は仕切ジ板である。超微粒子発生室１で生成した超微
粒子を含むキャリアガスが通過する配管の途中に超音波
発振器６５配置し、その配管部分よシ配管内径を拡張し
、仕切シ板２７を配管内に設置し、仕切り板の後方にフ
ィルター１１を設は捕集する構造である。According to this embodiment, it is also possible to provide an apparatus that separates ultrafine particles and carrier gas by dropping a liquid substance from the upper part of the pipe in a shower or spray state. In addition, as the liquid substance, it is possible to use an organic compound mixed with a small amount of non-oxidizing surfactant, and in particular, if carbonyl groups are used, good ultrafine particles can be obtained.In addition, it is possible to separate the liquid substance and ultrafine particles. Figure 4 shows an example of using ultrafine particle classification technology. 23
is the vibration intensity distribution of the ultrasonic oscillator installed outside the pipe, 2
4 is a partition plate. An ultrasonic oscillator 65 is placed in the middle of a pipe through which a carrier gas containing ultrafine particles generated in the ultrafine particle generation chamber 1 passes, the inner diameter of the pipe is expanded from that part of the pipe, and a partition plate 27 is installed inside the pipe. A filter 11 is installed behind the partition plate to collect the particles.
本実施例は配管中を流れる超微粒子に超音波波１！Ｉｈ
をあ九え、配管中で超微粒子の分散２分級を行い、狭範
囲の粒度分布に分れた超微粒子を仕切υ板に設置したフ
ィルターで捕集する装置である。In this example, ultrasonic waves of 1! Ih
In this device, ultrafine particles are dispersed and classified into two parts in a pipe, and the ultrafine particles separated into a narrow range of particle size distribution are collected by a filter installed on a partition plate.
超微粒子に超音波をあてると粒度の小さな超微粒子はど
遠くへ移動する。また、超微粒子の分散効率を向上させ
るためには、キャリアガス流量を低量にし、超音波振動
強度を増力口させ、配管形状金丸型より角型とし、配管
を前記のように配管を拡張することにより、分級状態が
良好な超微粒子を得ることが可能である。When ultrasonic waves are applied to ultrafine particles, the small particles move far away. In addition, in order to improve the dispersion efficiency of ultrafine particles, the carrier gas flow rate should be lowered, the ultrasonic vibration intensity should be increased, the piping should be square rather than round, and the piping should be expanded as described above. By doing so, it is possible to obtain ultrafine particles with a good classification state.
本実施例では前記したような、振動フィルター液状物質
を利用した捕集技術を用いることにより高品質でしかも
粒径分布が均一な超微粒子を大量に捕集することが可能
である。In this example, by using a collection technique using a vibrating filter liquid material as described above, it is possible to collect a large amount of high-quality ultrafine particles with a uniform particle size distribution.
本発明によればフィルターに振動を付加することにより
、フィルターの目づまりがなくなり、長時間、連続して
超微粒子の生成及び捕集が行える。According to the present invention, by applying vibration to the filter, the filter is not clogged, and ultrafine particles can be continuously generated and collected for a long period of time.
また、本発°明によれば生成した直後の超微粒子を液状
物質せ冷却及び捕集上行うことができるため、大量の超
微粒子を効率良く、安易に分散状態のまま捕集すること
ができる効果がある。Furthermore, according to the present invention, since the ultrafine particles immediately after being generated can be cooled and collected by using a liquid substance, a large amount of ultrafine particles can be efficiently and easily collected in a dispersed state. effective.
更に、本発明によれば配管中を流れる超微粒子に超音波
をあてるこ勺により、分散・分級さｎた高品質の超微粒
子が得られる効果がある。Further, according to the present invention, by applying ultrasonic waves to the ultrafine particles flowing through the pipe, it is possible to obtain high quality ultrafine particles that have been dispersed and classified.
第１図は振動フィルター機構を用いた本発明の超微粒子
の分離及び捕集装置の断面図、ｔｌｃＺ図は振動フィル
ター機構の詳細図、第３図は液状物質を用い本発明の超
微粒子の分離及び捕集装置の断面図、５ｇ４図は本発明
に係わる装置の分級機構の説明図である。
１・・・超微粒子発生室、２・・・振動フィルター機構
、３・・・捕集呈、６・・・超音波発振器、１０・・・
ベローズ。
１３・・・上下移動機構、１４・・・左右移動機構、１
７・・・液状物質、２４・・・仕切シ板。
第 １ 閣
１・・・鋺蒋躇舖 ６ 起怖、ヵ昏
１、＝ｇ％７４ＪｖＰ肩（６７（”）−Ｖ＋−１（＋＋
、７’さ ・・ 坤 １ト ◆ ８ ・・
１′灯弯トＦ＋、纏牛・・櫨’？＆ ｉ；’＞７＠
５・・ マパスπ２′ンベ
第 ２ 図
１１− ７ｓＩｖグー １８°−’Ｃ’
Ａ ｅＬ 餐ｊＩＺ 珠造磯壜
１３・ ′ＣＣ切切壜・壜
４２ヤ初訃塙・積
第 ３ 閃
１９・・ 貢魅１
＋ ＋（＋。
２０・・・伶計屯
２１・・ 漿７Ｉかｆ４’ｉｆ麺を督
ス２・・・ 天３１キ亀膚１−
第４ 図
ＺＪ 、、翻暫）騎１６ｔ
ｇｋｉｐ殊痺・些
Ｚ４−・・ 、１τ仰１尺Figure 1 is a sectional view of the ultrafine particle separation and collection device of the present invention using a vibration filter mechanism, the tlcZ diagram is a detailed view of the vibration filter mechanism, and Figure 3 is the separation of ultrafine particles of the present invention using a liquid substance. and 5g4, a sectional view of the collection device, are explanatory diagrams of the classification mechanism of the device according to the present invention. DESCRIPTION OF SYMBOLS 1... Ultrafine particle generation chamber, 2... Vibration filter mechanism, 3... Collection device, 6... Ultrasonic oscillator, 10...
Bellows. 13... Vertical movement mechanism, 14... Horizontal movement mechanism, 1
7...Liquid substance, 24...Partition plate. 1st Cabinet 1...Ichigo Chiang Hiroshi 6 Kikai, Kakuma 1, =g%74JvP Shoulder (67('')-V+-1(++
,7'sa... gon 1to ◆ 8...
1'Tokyo F+, Matogyu...Haji'? &i;'＞7＠ 5... Mapas π2' Nbe 2nd Figure 11-7sIv goo 18°-'C'
A eL Dinner j IZ Juzukuri Isobottle 13, 'CC Kirikiribottle, Bottle 42ya Hatshuanan, Product 3rd Flash 19... Tribute 1 + + (+. 20...Yikeitun 21... Choi 7I? f4'if noodle control 2... Heaven 31 ki turtle skin 1- 4th figure ZJ ,, translation) ki 16t gkip shushin・sho Z4-... , 1τ elevation 1 shaku
Claims (1)
用いて分離及び捕集する装置において、該フィルターに
振動機構を付加し、かつバルブを介して１個又は複数個
の大容量捕集室を設けたことを特徴とする超微粒子の分
離及び捕集装置。1. In a device that uses a filter to separate and collect generated ultrafine particles in a gas stream, a vibration mechanism is added to the filter, and one or more large-capacity collection chambers are connected via a valve. 1. An apparatus for separating and collecting ultrafine particles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61050396A JPS62207804A (en) | 1986-03-10 | 1986-03-10 | Apparatus for separating and capturing ultrafine particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61050396A JPS62207804A (en) | 1986-03-10 | 1986-03-10 | Apparatus for separating and capturing ultrafine particles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62207804A true JPS62207804A (en) | 1987-09-12 |
Family
ID=12857714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61050396A Pending JPS62207804A (en) | 1986-03-10 | 1986-03-10 | Apparatus for separating and capturing ultrafine particles |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62207804A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007503973A (en) * | 2003-08-28 | 2007-03-01 | テクナ・プラズマ・システムズ・インコーポレーテッド | Methods for the synthesis, separation and purification of powder materials |
-
1986
- 1986-03-10 JP JP61050396A patent/JPS62207804A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007503973A (en) * | 2003-08-28 | 2007-03-01 | テクナ・プラズマ・システムズ・インコーポレーテッド | Methods for the synthesis, separation and purification of powder materials |
| JP4754488B2 (en) * | 2003-08-28 | 2011-08-24 | テクナ・プラズマ・システムズ・インコーポレーテッド | Methods for the synthesis, separation and purification of powder materials |
| KR101122219B1 (en) * | 2003-08-28 | 2012-04-18 | 테크나 플라즈마 시스템 인코포레이티드 | Process for the synthesis, separation and purification of powder materials |
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