JPS62197073U - - Google Patents
Info
- Publication number
- JPS62197073U JPS62197073U JP1129586U JP1129586U JPS62197073U JP S62197073 U JPS62197073 U JP S62197073U JP 1129586 U JP1129586 U JP 1129586U JP 1129586 U JP1129586 U JP 1129586U JP S62197073 U JPS62197073 U JP S62197073U
- Authority
- JP
- Japan
- Prior art keywords
- housing ring
- movable housing
- fixed housing
- conductor
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 18
- 239000004020 conductor Substances 0.000 claims description 11
- 239000012212 insulator Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図乃至第９図は本考案の実施例に係り、第
１図は第１実施例に係るプローブ装置１を上面か
ら見た斜視図、第２図はプローブ装置１を下面か
ら見た斜視図、第３図はプローブ装置１の要部の
一部縦断面図、第４図は本考案装置を用いた半導
体測定装置の正面図、第５図は本考案装置に用い
るコンタクトプローブを示す一部縦断面図、第６
図は別実施例に係るハウジングリングの斜視図、
第７図は従来例に係るプローブ装置の一部縦断面
図である。
１：プローブ装置、２，７，３５Ａ，３５Ｂ：
コンタクトプローブ、３：固定ハウジングリング
、３ａ：穴、４：基板、５：プローブカード、６
：可動ハウジングリング、６ａ：穴、７：コンタ
クトブローブ、８：弾性部材、１２：端子領域、
１３：導体部の一例たる穴。
1 to 9 relate to embodiments of the present invention, FIG. 1 is a perspective view of the probe device 1 according to the first embodiment seen from the top, and FIG. 2 is a perspective view of the probe device 1 seen from the bottom. 3 is a partial vertical sectional view of the main parts of the probe device 1, FIG. 4 is a front view of a semiconductor measuring device using the device of the present invention, and FIG. 5 is a diagram showing a contact probe used in the device of the present invention. Sectional longitudinal sectional view, No. 6
The figure is a perspective view of a housing ring according to another embodiment,
FIG. 7 is a partial vertical sectional view of a conventional probe device. 1: Probe device, 2, 7, 35A, 35B:
Contact probe, 3: fixed housing ring, 3a: hole, 4: board, 5: probe card, 6
: Movable housing ring, 6a: Hole, 7: Contact probe, 8: Elastic member, 12: Terminal area,
13: A hole that is an example of a conductor part.
補正 昭６２．７．９
図面の簡単な説明を次のように補正する。
明細書第２３頁第５行の「第９図」を「第７図
」と補正する。Amendment July 9, 1982 The brief description of the drawing is amended as follows. "Fig. 9" on page 23, line 5 of the specification is corrected to "Fig. 7."
Claims (1)
に突出しかつ弾性力により突出方向に付勢される
ピンを備えたコンタクトプローブを用いるプロー
ブ装置において、 少なくとも一部が導電体からなり、円筒状
の穴を有しかつ絶縁体を介して前記穴の軸心位置
に前記コンタクトプローブを中心導体として保持
する固定ハウジングリングと、 少なくとも一部が導電体からなり、円筒状
の穴を有しかつ絶縁体を介して前記穴の軸心位置
に前記コンタクトプローブを中心導体として保持
し、プローブカードを取り付けるため前記固定ハ
ウジングリングと同一の中心軸上に配置される、
円周方向に所定の中心角の範囲で回動可能な可動
ハウジングリングと、 前記固定ハウジングリング及び前記可動ハ
ウジングリングの間に配置され、両面に当接する
前記コンタクトプローブを電気的に接続するため
の導体部を備え、かつ少なくとも前記固定ハウジ
ングリング及び前記可動ハウジングリングの何れ
か一方に対向する面に備えられた前記導体部は端
子領域となつている基板と、 導電体からなり、前記固定ハウジングリン
グ及び前記可動ハウジングリングの少なくとも一
方に接触すべく前記固定ハウジングリング及び前
記可動ハウジングリングのいずれか一方に取り付
けられた導電体からなる弾性部材とを備え、 前記固定ハウジングリング及び前記可動ハウジ
ングリングに保持され前記基板を介して互いに接
続された前記コンタクトプローブを中心導体とし
て、そして前記弾性部材を介して互いに接続され
た前記固定ハウジングリング及び前記可動ハウジ
ングリングを外部導体として、電気信号を伝達す
ることを特徴とするプローブ装置。 ２ 前記弾性部材は、前記固定ハウジングリング
及び前記可動ハウジングリングに接触し、前記固
定ハウジングリング及び前記可動ハウジングリン
グのいずれか一方に取り付けられたものであるこ
とを特徴とする実用新案登録請求の範囲第１項に
記載のプローブ装置。[Claims for Utility Model Registration] 1. In a probe device using a contact probe equipped with a pin that protrudes freely in and out from at least one end of a cylindrical body and is biased in the protruding direction by an elastic force, at least a portion thereof a fixed housing ring made of a conductive material and having a cylindrical hole and holding the contact probe as a center conductor at an axial center position of the hole via an insulator; and holding the contact probe as a center conductor at the axial center position of the hole via an insulator, and disposed on the same center axis as the fixed housing ring for attaching a probe card.
a movable housing ring that is rotatable in a circumferential direction within a predetermined center angle range; and a movable housing ring that is disposed between the fixed housing ring and the movable housing ring and that is for electrically connecting the contact probe that abuts on both sides. The conductor portion is provided on a surface facing at least one of the fixed housing ring and the movable housing ring, and the conductor portion is made of a substrate serving as a terminal area, and a conductor, and the conductor portion is provided on a surface facing at least one of the fixed housing ring and the movable housing ring. and an elastic member made of a conductor attached to either the fixed housing ring or the movable housing ring so as to come into contact with at least one of the movable housing rings, the elastic member being held by the fixed housing ring or the movable housing ring. electrical signals are transmitted using the contact probes connected to each other via the substrate as a center conductor and the fixed housing ring and the movable housing ring connected to each other via the elastic member as outer conductors. Characteristic probe device. 2. A utility model registration claim characterized in that the elastic member is in contact with the fixed housing ring and the movable housing ring and is attached to either the fixed housing ring or the movable housing ring. The probe device according to item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1129586U JPS62197073U (en) | 1986-01-29 | 1986-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1129586U JPS62197073U (en) | 1986-01-29 | 1986-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197073U true JPS62197073U (en) | 1987-12-15 |
Family
ID=30798377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1129586U Pending JPS62197073U (en) | 1986-01-29 | 1986-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197073U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05275034A (en) * | 1992-03-27 | 1993-10-22 | Toshiba Corp | X-ray image tube |
| JP2010019797A (en) * | 2008-07-14 | 2010-01-28 | Fujitsu Ltd | Socket for double ended probe pin, double ended probe pin, and probe unit |
-
1986
- 1986-01-29 JP JP1129586U patent/JPS62197073U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05275034A (en) * | 1992-03-27 | 1993-10-22 | Toshiba Corp | X-ray image tube |
| JP2010019797A (en) * | 2008-07-14 | 2010-01-28 | Fujitsu Ltd | Socket for double ended probe pin, double ended probe pin, and probe unit |