JPS62193567U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の全体の構成を示す一実施例の
断面図、第２図は圧電ダイアフラム及び支持部材
の一実施例の正面図及びＡ―Ａ′断面図、第３図
は金属薄板と圧電素子との接着面付近の部分拡大
図、第４図は従来装置の一例の断面図及び圧電素
子の平面図である。 （符号の説明） １…圧電ダイアフラム、４…
支持部材、１０…金属薄板、１１，１２…圧電素
子、２０…導電性接着剤。 Fig. 1 is a sectional view of an embodiment showing the overall structure of the present invention, Fig. 2 is a front view and A-A' sectional view of an embodiment of the piezoelectric diaphragm and supporting member, and Fig. 3 is a cross-sectional view of a piezoelectric diaphragm and a supporting member. FIG. 4 is a partially enlarged view of the vicinity of the adhesive surface with the piezoelectric element, and a cross-sectional view of an example of a conventional device and a plan view of the piezoelectric element. (Explanation of symbols) 1...Piezoelectric diaphragm, 4...
Supporting member, 10... Metal thin plate, 11, 12... Piezoelectric element, 20... Conductive adhesive.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 金属薄板の表側と裏側のほぼ同一の位置に薄板
状の２枚の圧電素子を導電性接着剤によつて接着
したバイモルフ構造の圧電ダイアフラムを筐体に
装着し、上記バイモルフ構造の圧電ダイアフラム
に外部から力学量が印加された場合に上記圧電素
子に生ずる電気信号を取り出すことによつて印加
された力学量を検出することを特徴とする圧電型
力学量センサ。 A piezoelectric diaphragm with a bimorph structure, in which two piezoelectric elements in the shape of a thin plate are bonded with a conductive adhesive at almost the same positions on the front and back sides of a thin metal plate, is attached to the housing, and an external A piezoelectric mechanical quantity sensor, characterized in that an applied mechanical quantity is detected by extracting an electrical signal generated in the piezoelectric element when a mechanical quantity is applied to the piezoelectric element.