JPS6217130U - - Google Patents

Info

Publication number
JPS6217130U
JPS6217130U JP10851785U JP10851785U JPS6217130U JP S6217130 U JPS6217130 U JP S6217130U JP 10851785 U JP10851785 U JP 10851785U JP 10851785 U JP10851785 U JP 10851785U JP S6217130 U JPS6217130 U JP S6217130U
Authority
JP
Japan
Prior art keywords
electrodes
substrate
resistance
contact piece
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10851785U
Other languages
Japanese (ja)
Other versions
JPH0528769Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985108517U priority Critical patent/JPH0528769Y2/ja
Publication of JPS6217130U publication Critical patent/JPS6217130U/ja
Application granted granted Critical
Publication of JPH0528769Y2 publication Critical patent/JPH0528769Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す斜視図、第２
図ａ，ｂ，ｃは接触片を製作する一例を示す図、
第３図ａ，ｂは接触片の櫛歯の先端の拡大図、第
４図ａ，ｂ，ｃは接触片の他の製作例を示す図、
第５図は従来装置による測定状態を示す図、第６
図は拡がり抵抗値Ｒｓと探触子の測定位置の関係
を示す図である。 １…シリコンウエハ、２…拡散層、１０，１０
ａ…接触片、１１，１１ａ，１２，１２ａ，１３
，１３ａ…櫛歯状電極、３０，３０ａ，３１，３
１ａ，３２，３２ａ…リード線。 Fig. 1 is a perspective view showing one embodiment of the present invention;
Figures a, b, and c are diagrams showing an example of manufacturing a contact piece,
Figures 3a and b are enlarged views of the tips of the comb teeth of the contact piece, Figures 4a, b, and c are views showing other manufacturing examples of the contact piece,
Figure 5 is a diagram showing the measurement state by the conventional device, Figure 6
The figure is a diagram showing the relationship between the spreading resistance value Rs and the measurement position of the probe. 1... Silicon wafer, 2... Diffusion layer, 10, 10
a...Contact piece, 11, 11a, 12, 12a, 13
, 13a... comb-shaped electrode, 30, 30a, 31, 3
1a, 32, 32a...Lead wires.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 基板を研磨して厚さ方向に傾斜を設け、一定間
隔に複数の電極が形成された接触片の前記電極を
前記傾斜面に接触させ、前記複数の電極の相対す
る電極間のそれぞれの電気抵抗の変化を測定する
ことにより、前記基板に形成された拡散層の深さ
や薄膜の厚さを測定する拡がり抵抗測定装置。 The substrate is polished to provide an inclination in the thickness direction, and the electrodes of a contact piece having a plurality of electrodes formed at regular intervals are brought into contact with the inclined surface, and each electrical resistance between opposing electrodes of the plurality of electrodes is determined. A spreading resistance measuring device that measures the depth of a diffusion layer and the thickness of a thin film formed on the substrate by measuring changes in the diffusion resistance.
JP1985108517U 1985-07-16 1985-07-16 Expired - Lifetime JPH0528769Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985108517U JPH0528769Y2 (en) 1985-07-16 1985-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985108517U JPH0528769Y2 (en) 1985-07-16 1985-07-16

Publications (2)

Publication Number Publication Date
JPS6217130U true JPS6217130U (en) 1987-02-02
JPH0528769Y2 JPH0528769Y2 (en) 1993-07-23

Family

ID=30985788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985108517U Expired - Lifetime JPH0528769Y2 (en) 1985-07-16 1985-07-16

Country Status (1)

Country Link
JP (1) JPH0528769Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053207A (en) * 2008-11-04 2009-03-12 Shinko Electric Ind Co Ltd Probe for measuring electrical characteristics and method of manufacturing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5560869A (en) * 1978-10-31 1980-05-08 Mitsubishi Electric Corp Device for measuring spreading resistance

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5560869A (en) * 1978-10-31 1980-05-08 Mitsubishi Electric Corp Device for measuring spreading resistance

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053207A (en) * 2008-11-04 2009-03-12 Shinko Electric Ind Co Ltd Probe for measuring electrical characteristics and method of manufacturing the same

Also Published As

Publication number Publication date
JPH0528769Y2 (en) 1993-07-23

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