JPS62169485A - Gas laser oscillating device - Google Patents

Gas laser oscillating device

Info

Publication number
JPS62169485A
JPS62169485A JP999886A JP999886A JPS62169485A JP S62169485 A JPS62169485 A JP S62169485A JP 999886 A JP999886 A JP 999886A JP 999886 A JP999886 A JP 999886A JP S62169485 A JPS62169485 A JP S62169485A
Authority
JP
Japan
Prior art keywords
gas laser
gas
blower
laser medium
discharge tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP999886A
Other languages
Japanese (ja)
Other versions
JPH0754859B2 (en
Inventor
Jun Sakuma
純 佐久間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP999886A priority Critical patent/JPH0754859B2/en
Publication of JPS62169485A publication Critical patent/JPS62169485A/en
Publication of JPH0754859B2 publication Critical patent/JPH0754859B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Abstract

PURPOSE:To quicken the exhaust velocity of a gas laser medium and to perform speedily a rise of the title device and a change-over of the oscillation mode by actuating a blower which enables the gas laser medium to circulate as an auxiliary means for an exhaust unit. CONSTITUTION:9a on the side near a gas discharge tube 1, a vacuum pump 1 is connected to a heat exchanger 9b on the other side and an ON-OFF valve 15 is connected to a halfway part of a reflux pipe 8 passed through the heat exchanger 9b. In case the oscillation form is changed-over, power supply to main discharge electrodes 3 and 4 is stopped, a blower 10 is stopped, the ON- OFF valve 15 is opened to evacuate until the internal pressure reaches 10Torr or thereabouts by the vacuum pump 1, the ON-OFF valve 15 is closed and the blower 10 is actuated. The blower 10 acts as a booster pump, whereby the evacuating action of the vacuum pump 11 is promoted and the internal pressure in the device including the circulating paths of the gas discharge tube 1, a feed pipe 7 and the reflux pipe 8 can be dropped to a pressure of 10<-1>Torr or less in a short time.

Description

【発明の詳細な説明】 〔発明の技術分野〕　　　゛ 本発明はガスレーザ発振装置に係り、特に軸流形の装置
ｔこ関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a gas laser oscillation device, and particularly to an axial flow type device.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

軸流形のガスレーザ発振装置は従来第２図に示すような
構成になっている。すなわち、二組の主放電電極が内部
に設けられているガス放電管（１）を有し、このガス放
電管（１）の両端には光共振器（２ａ）。A conventional axial flow type gas laser oscillation device has a configuration as shown in FIG. That is, it has a gas discharge tube (1) in which two sets of main discharge electrodes are provided, and an optical resonator (2a) is provided at both ends of this gas discharge tube (1).

（２ｂ）が気密に取り付けられている。上記主放電電極
は陽極（３ａ）、　（３ｂ）とこれらにそれぞれ対向し
て設けられている陰極（４ａ）、　（４ｂ）からなり、
陰極（４ａ）、　（４ｂ）側に安定化抵抗（５ａ）、　
（５ｂ）を介して高圧直流電源（６）に接続され、ガス
放電管（１）の管軸方向に沿って放電動作が行われるよ
うになっている。(2b) is attached airtight. The main discharge electrode consists of anodes (3a), (3b) and cathodes (4a), (4b) provided opposite to these, respectively,
Stabilizing resistor (5a) on the cathode (4a), (4b) side,
(5b) is connected to a high voltage DC power supply (6), and a discharge operation is performed along the tube axis direction of the gas discharge tube (1).

また、上記ガス放電管（１）にはコ字状の供給管（力が
光共振器（２ａ）、　（２ｂ）と電極（３ａ）、　（３
ｂ）　（７）そレソレの間の管壁部分にその両端を接続
して閉ループを形成している。さらに、ガスレーザ管（
１）の陰極（４ａ）、　（４ｂ）間に相当する管壁部分
と供給管（７）との間には環流管（８）が接続されてい
る。この環流管（８）には一対の熱交換器（９ａ）、　
（９ｂ）とこれらの間に位置して送風機αＱが接続され
ている。上記供給管（力と環流管（８）とでガス放電管
（１）を共用し、途中で２方向に分れた後合流する循環
路が形成されている。In addition, the gas discharge tube (1) has a U-shaped supply tube (the force is the optical resonator (2a), (2b) and the electrode (3a), (3
b) (7) Both ends are connected to the tube wall portion between the two solenoids to form a closed loop. In addition, a gas laser tube (
A reflux tube (8) is connected between the tube wall portion corresponding to the cathodes (4a) and (4b) of 1) and the supply tube (7). This reflux pipe (8) includes a pair of heat exchangers (9a),
(9b) and a blower αQ is connected between them. The gas discharge tube (1) is shared by the supply tube (force) and the reflux tube (8), and a circulation path is formed in which the gas discharge tube (1) is split into two directions and then merged.

なお、ガスレーザ管（１）に近い位置に接続された一方
の熱交換器（９ａ）′には排気装置としての真空ポンプ
ａυが、また、他方の熱交換器（９ｂ）にはガスレーザ
管（１）内にガスレーザ媒質を供給するための供給装置
（１２が接続されている。Note that one heat exchanger (9a)' connected to a position close to the gas laser tube (1) is equipped with a vacuum pump aυ as an exhaust device, and the other heat exchanger (9b) is equipped with a gas laser tube (1). A supply device (12) is connected for supplying a gas laser medium into the gas laser medium.

以上の構成によってレーザ発振を行わせる際は。When performing laser oscillation with the above configuration.

必ず古いガスレーザ媒質を真空ポンプαυにより十分に
排気し、　１０−”Ｔｏｒｒ程度以下まで真空度を下げ
てからガスを注入して用いる。また、ガスレーザ媒質ガ
スは数種類のガスを混合したものが用いられるが、たと
えば連続発振時をパルス発振時ではそれぞれに対する最
適な混合ガスの比率は異なるのが一般的であり、これら
の発振形態を切り換える際も真空ポンプにより排気して
から新しいガスレーザ媒質を満たすようにしている。と
ころが。Be sure to fully evacuate the old gas laser medium using a vacuum pump αυ, lower the degree of vacuum to about 10-” Torr, and then inject the gas before use. Also, the gas laser medium gas used is a mixture of several types of gases. However, for example, the optimal ratio of mixed gas for continuous oscillation and pulse oscillation is generally different, and when switching between these oscillation modes, it is necessary to evacuate the gas using a vacuum pump and then fill it with a new gas laser medium. But...

真空ポンプの能力および＠置の容積等にもよるが。It depends on the capacity of the vacuum pump and the volume of the @ place.

十分な真空度まで排気させる際、　１ＱＴｏｒｒ（らい
までは数十秒で到達するが、　１０−’Ｔｏｒｒまでは
１０分程度かかり５装置の立ち上げや発振形態の切り換
えに要する時間は殆んどこの時間に費されてし才いスピ
ーディに行なえなかった。When evacuating to a sufficient degree of vacuum, it takes several tens of seconds to reach 1Q Torr, but it takes about 10 minutes to reach 10-'Torr5. I couldn't do it quickly because I wasted so much time.

〔発明の目的〕[Purpose of the invention]

本発明は必要以上の排気能力をもつ装置を使うことなく
、排気速度を速め瞬敏な立ち上げ等を可能としたガスレ
ーザ発振装置を提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a gas laser oscillation device that can increase the pumping speed and quickly start up without using a device with an exhaust capacity higher than necessary.

〔発明の概要〕[Summary of the invention]

上記目的を達成するためにガスレーザ媒質を循環させる
送風機の後段に排気装置を設けた構成にし、送風機を排
気装置の補助手段と動作させるようケこしたものである
。In order to achieve the above object, an exhaust device is provided downstream of a blower that circulates a gas laser medium, and the blower is designed to work as an auxiliary means for the exhaust device.

〔発明の実施例〕[Embodiments of the invention]

以下、一実施例を示す第１図に基いて本発明を説明する
。なお、第２図と共通する部分には同一符号を付し詳細
な説明は省略する。すなわち、第２図に示す従来構成と
異なる箇所はガス放電管（１）に近い側の一方の熱交換
器（９ａ）に供給装置（Ｅつが接続され、他方の熱交換
器（９ｂ）に真空ポンプαυが接続された点と、この他
方の熱交換器（９ｂ）を経た環流管（８）の中途部にソ
レノイドパルプ等からなる開閉弁（ｔすが接続された点
にある。なお、上記の構成において、供給装置（Ｉりは
熱交換器（９り以外の箇所に接続してもよい。The present invention will be explained below based on FIG. 1 showing one embodiment. Note that parts common to those in FIG. 2 are designated by the same reference numerals, and detailed explanations will be omitted. That is, the difference from the conventional configuration shown in Fig. 2 is that a supply device (E) is connected to one heat exchanger (9a) near the gas discharge tube (1), and a vacuum is connected to the other heat exchanger (9b). There is a point where the pump αυ is connected and a point where an on-off valve made of solenoid pulp etc. In this configuration, the supply device (1) may be connected to a location other than the heat exchanger (9).

以上の構成ζこおいて、たとえば発振形態を切り換える
際の排気操作ζこついて説明する。先ず、主放電電極へ
の電力供給を停止して放電を中断させるとともに送風機
（ｌＯｌの作動を停止した後、開閉弁α９を開にした状
態で真空ポンプαυにて内部圧力がＩＱＴｈｒｒ程度に
なるくらいまで排気する。次に、開閉弁α最を閉にし、
送風機Ｑｌを作動させる。これにより送風機αＣは循環
作用を行わずメカニカルブースタポンプとして作用する
。したがって、真空ポンプαυの排気作用が一段と促進
され、短時間にガス放電管（１）および供給管（７）、
＠流管（８）の循環路を含んだ装置内を１０−’　Ｔｏ
ｒｒ以下の圧力にすることができるようになった。In the above configuration ζ, for example, the exhaust operation ζ when switching the oscillation form will be explained. First, stop the power supply to the main discharge electrode to interrupt the discharge, and after stopping the operation of the blower (lOl), with the on-off valve α9 open, use the vacuum pump αυ until the internal pressure reaches about IQThrr. Next, close the on-off valve α,
Operate the blower Ql. This causes the blower αC to function as a mechanical booster pump without performing any circulation action. Therefore, the evacuation action of the vacuum pump αυ is further promoted, and the gas discharge tube (1) and the supply tube (7) are removed in a short time.
@ 10-' To inside the device including the circulation path of the flow tube (8)
It is now possible to reduce the pressure to below rr.

〔発明の効果〕〔Effect of the invention〕

必要以上の排気能力をもつ排気装置を使うことなく短時
間に十分な排気ができるようになったため、装置の立ち
上げや発振形態の切り換えをスピーディに行えるように
なった。Since it is now possible to perform sufficient exhaust in a short time without using an exhaust system with more exhaust capacity than necessary, it has become possible to start up the equipment and switch the oscillation mode quickly.

【図面の簡単な説明】[Brief explanation of drawings]

？ＩＳ１図は本発明の一実施例を示す構成図、第２図は
従来例を示す構成図である。 （１）・・・ガス放電管　　　　（２ａ）、　（２ｂ）
・・・光共振器（７）・・・供１拾管（循環路）（８）
・・・環流管（循環路）（１０）・・・送　Ｋ　機　　
　　　　住υ・・・真空ポンプ（排気装置）（ｌの・・
・供給装置　　　　　α９・・・開閉弁代理人　弁理士
　　則　近　憲　佑 同　　　　　竹　花　喜久男? FIG. IS1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a block diagram showing a conventional example. (1)...Gas discharge tube (2a), (2b)
... Optical resonator (7) ... 1st tube (circulation path) (8)
... Circulation pipe (circulation path) (10) ... Feeding machine
Housing υ...Vacuum pump (exhaust device) (l...
・Supply device α9... Opening/closing valve agent Patent attorney Noriyuki Chika Yudo Kikuo Takehana

Claims (4)

【特許請求の範囲】[Claims] （１）ガス放電管と、このガス放電管の両端側に相対向
して設けられた光共振器と、上記ガスレーザ管に封入さ
れたガスレーザ媒質と、上記ガスレーザ管に接続されガ
スレーザ媒質の通路となる循環路と、この循環路に接続
し封入されたガスレーザ媒質を循環させる送風機と、こ
の送風機から出たガスレーザ媒質が通る循環路に接続さ
れた開閉弁と、上記送風機を経て上記開閉弁に至る間の
循環路に接続された排気装置と、上記ガス放電管内にガ
スレーザ媒質を供給する供給装置とを備えたことを特徴
とするガスレーザ発振装置。(1) A gas discharge tube, an optical resonator provided opposite to each other at both ends of the gas discharge tube, a gas laser medium sealed in the gas laser tube, and a gas laser medium passage connected to the gas laser tube. a circulation path, a blower connected to the circulation path to circulate the enclosed gas laser medium, an on-off valve connected to the circulation path through which the gas laser medium emitted from the blower passes, and reaches the on-off valve via the blower. A gas laser oscillation device comprising: an exhaust device connected to a circulation path between the gas discharge tubes; and a supply device for supplying a gas laser medium into the gas discharge tube. （２）上記循環路はガスレーザ媒質を所定温度に保つ手
段が付加されていることを特徴とする特許請求の範囲第
１項記載のガスレーザ発振装置。(2) The gas laser oscillation device according to claim 1, wherein the circulation path is provided with means for maintaining the gas laser medium at a predetermined temperature. （３）ガス放電管は少なくとも一以上の主放電電極を備
えていることを特徴とする特許請求の範囲第１項記載の
ガスレーザ発振装置。(3) The gas laser oscillation device according to claim 1, wherein the gas discharge tube is provided with at least one main discharge electrode. （４）ガス放電管内における放電方向とガスレーザ媒質
の流れ方向が同方向になることを特徴とする特許請求の
範囲第１項記載のガスレーザ発振装置。(4) The gas laser oscillation device according to claim 1, wherein the discharge direction in the gas discharge tube and the flow direction of the gas laser medium are in the same direction.
JP999886A 1986-01-22 1986-01-22 Gas laser oscillator Expired - Lifetime JPH0754859B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP999886A JPH0754859B2 (en) 1986-01-22 1986-01-22 Gas laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP999886A JPH0754859B2 (en) 1986-01-22 1986-01-22 Gas laser oscillator

Publications (2)

Publication Number Publication Date
JPS62169485A true JPS62169485A (en) 1987-07-25
JPH0754859B2 JPH0754859B2 (en) 1995-06-07

Family

ID=11735509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP999886A Expired - Lifetime JPH0754859B2 (en) 1986-01-22 1986-01-22 Gas laser oscillator

Country Status (1)

Country Link
JP (1) JPH0754859B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5139783A (en) * 1989-04-07 1992-08-18 L'oreal Process for the preparation of alginate capsules, apparatus for producing said capsules and cosmetic compositions containing said capsules
US5204111A (en) * 1989-04-07 1993-04-20 L'oreal Process for the preparation of alginate capsules, apparatus for producing said capsules and cosmetic compositions containing said capsules

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5139783A (en) * 1989-04-07 1992-08-18 L'oreal Process for the preparation of alginate capsules, apparatus for producing said capsules and cosmetic compositions containing said capsules
US5204111A (en) * 1989-04-07 1993-04-20 L'oreal Process for the preparation of alginate capsules, apparatus for producing said capsules and cosmetic compositions containing said capsules

Also Published As

Publication number Publication date
JPH0754859B2 (en) 1995-06-07

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