JPS62169415A - Cleaning apparatus - Google Patents
Cleaning apparatusInfo
- Publication number
- JPS62169415A JPS62169415A JP1279886A JP1279886A JPS62169415A JP S62169415 A JPS62169415 A JP S62169415A JP 1279886 A JP1279886 A JP 1279886A JP 1279886 A JP1279886 A JP 1279886A JP S62169415 A JPS62169415 A JP S62169415A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- ground fault
- nichrome wire
- exposed
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 10
- 239000000126 substance Substances 0.000 claims abstract description 26
- 239000010453 quartz Substances 0.000 claims abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 230000005611 electricity Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910001120 nichrome Inorganic materials 0.000 abstract description 20
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract description 18
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 5
- 229920005591 polysilicon Polymers 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 abstract description 3
- 238000007598 dipping method Methods 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000008155 medical solution Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【発明の詳細な説明】
、産】ユＪ冴ＵＷ庄！
本発明は、薬液を使用してウェハ等の洗浄を行う洗浄装
置に関する。[Detailed description of the invention] , produced by Yu J Sae UW Sho! The present invention relates to a cleaning device that cleans wafers and the like using a chemical solution.
従漣Ｊ口り肘
ウェハ等を製造するときの様々な工程の一つに、表面に
付着した余分な成分を取り去る洗浄工程があり、温度を
上昇させた薬液でウェハの洗浄を行っている。その薬液
としては塩酸やアンモニア等の導電性の薬液を使用する
ことが多く、液温を上昇させる為には、薬液槽内にニク
ロム線を石英で覆った石英ヒータ等を取りつけ、薬液を
加熱している。One of the various processes involved in manufacturing wafers and the like is a cleaning process to remove excess components adhering to the surface, and the wafers are cleaned with a chemical solution at an elevated temperature. Conductive chemicals such as hydrochloric acid or ammonia are often used as the chemical solution, and in order to raise the temperature of the solution, a quartz heater made of nichrome wire covered with quartz is installed in the chemical tank to heat the chemical solution. ing.
−８＜ ’ｌ、よ゛と る。占
ニクロム線への通電の断続により石英の表面温度が上昇
したり下降したりするので、その影ツにより石英の表面
は劣化してヒータは徐々に細くなっていく。そしてつい
には石英にピンホール等が生じてニクロム線が露出する
ようになると、そこに薬液が入り込んでニクロム線が溶
は出していく。-8<'l, read. The surface temperature of the quartz rises or falls due to the intermittent application of electricity to the nichrome wire, which causes the surface of the quartz to deteriorate and the heater to gradually become thinner. Eventually, a pinhole or the like appears in the quartz, exposing the nichrome wire, and the chemical solution enters the hole, dissolving the nichrome wire.
薬液中にニクロム線の金属イオンが混入すると、そのイ
オンが洗浄しているウェハの表面等に付着するので、洗
浄が不完全になり不良品が発生する。If the metal ions of the nichrome wire are mixed into the chemical solution, the ions will adhere to the surface of the wafer being cleaned, resulting in incomplete cleaning and the production of defective products.
その発生を防止するために一定期間ごとにヒータを薬液
槽から取り出し、目視によってニクロム線が露出してい
ないかどうか検査をしているが、小さな傷の場合等では
見逃すことがあり、またヒータには薬液が付着している
ので検査する時にはその取り扱いに注意する必要があっ
た。In order to prevent this from occurring, the heater is removed from the chemical bath at regular intervals and visually inspected to see if the nichrome wire is exposed. Since it has a chemical solution attached to it, it was necessary to handle it with care when testing it.
本発明は上記の問題点を解決するために発明されたもの
で、ヒータのニクロム線が露出したことを知らせること
のできる洗浄装置を提供することを目的としている。The present invention was invented to solve the above-mentioned problems, and an object of the present invention is to provide a cleaning device that can notify that the nichrome wire of the heater is exposed.
皿皿立玉ｒ゛ るための 一
本発明の洗浄装置は、薬液槽内に設けられ、導電性の薬
液の温度を上昇させるヒータと、薬液に浸されかつ接地
された耐薬品性の電極棒と、ヒータへの電力の供給を遮
断する漏電ブレーカと、この漏電ブレーカの作動したこ
とを知らせる表示装置とを備える。A cleaning device of the present invention for rolling a dish standing ball includes a heater installed in a chemical tank to raise the temperature of a conductive chemical solution, and a chemical-resistant electrode rod immersed in the chemical solution and grounded. , an earth leakage breaker that cuts off the supply of power to the heater, and a display device that notifies that the earth leakage breaker has been activated.
旦
ヒータのニクロム線が露出すると薬液および電極棒を通
して漏電が起る。漏電ブレーカがその漏電を検知して作
動し、ヒータへの電力の供給を中止すると表示装置は漏
電ブレーカの作動、っまりヒータのニクロム線が露出し
たことを知らせる。Once the heater's nichrome wire is exposed, electrical leakage occurs through the chemical solution and electrode rod. When the earth leakage breaker detects the earth leakage and operates, stopping the supply of power to the heater, the display device will notify you that the earth leakage breaker has been activated and that the nichrome wire of the heater has been exposed.
災見皿 第１図は本発明の一実施例を示す概略図である。Misami plate FIG. 1 is a schematic diagram showing an embodiment of the present invention.
図において薬液槽１１内にはニクロム線等の抵抗加熱線
の囲りを石英管で覆ったヒータ１２が取り付けられ、薬
液槽ｌｌ内に満たされた導電性の薬液１３、例えば塩酸
等の加熱を行う。この塩酸１３により図示されていない
ウェハ等の洗浄が行われる。成分が塩酸に溶出しないよ
うな耐薬品性の電極棒１４、例えばポリシリコン棒等が
この塩酸１３に浸され、電線１５により接地されている
。ヒータ１２の電極はその一方２１ａが直接に、他方２
１ｂはソリッドステートリレー（以下ではＳＳＲと略す
）２２を介して間接に、漏電ブレーカ２３の出力２４に
接続されている。In the figure, a heater 12 is installed in a chemical tank 11, which is made by covering a resistance heating wire such as a nichrome wire with a quartz tube. conduct. This hydrochloric acid 13 cleans wafers and the like (not shown). A chemically resistant electrode rod 14 whose components do not dissolve in hydrochloric acid, such as a polysilicon rod, is immersed in this hydrochloric acid 13 and grounded by an electric wire 15. One electrode 21a of the heater 12 is directly connected to the other electrode 21a.
1b is indirectly connected to the output 24 of the earth leakage breaker 23 via a solid state relay (hereinafter abbreviated as SSR) 22.
また漏電ブレーカ２３の入力２５は商用電源２６につな
がれている。塩酸１３には温度を計るための抵抗測温体
３１等が浸されていて、その出力は温度調節器３２に導
かれ塩酸１３の温度に応じてＳＳＲ２２の断続を行って
いる。表示装置３６はリレー３５、リレー３５のＢ接点
３４、ブザー３３から構成され、リレー３５は漏電ブレ
ーカ２３の出力２４に、ブザー３３はＢ接点３４を介し
て商用電源２６に接続されている。Further, an input 25 of the earth leakage breaker 23 is connected to a commercial power source 26. A resistance temperature measuring element 31 and the like for measuring the temperature is immersed in the hydrochloric acid 13, and its output is led to a temperature regulator 32, and the SSR 22 is turned on and off according to the temperature of the hydrochloric acid 13. The display device 36 includes a relay 35, a B contact 34 of the relay 35, and a buzzer 33. The relay 35 is connected to the output 24 of the earth leakage breaker 23, and the buzzer 33 is connected to the commercial power source 26 via the B contact 34.
では次に動作について説明する。Next, the operation will be explained.
漏電ブレーカ２３がオンの状態では、温度調節器３２か
らの信号に従って断続するＳＳＲ２２を介してヒータ１
２に電力が供給され、塩酸１３は一定の温度に保たれて
いる。一方リレー３５は可動鉄片を吸い付けているので
Ｂ接点３４は開いたままあり、ブザー３３は沈黙してい
る。ヒータ１２のニクロム線が露出するまでは、ニクロ
ム線とポリシリコン棒１４とは石英によって絶縁され、
漏電は起こらないので、漏電ブレーカ２３はオンの状態
を維持している。When the earth leakage breaker 23 is on, the heater 1 is
Electric power is supplied to 2, and hydrochloric acid 13 is kept at a constant temperature. On the other hand, since the relay 35 attracts the movable iron piece, the B contact 34 remains open and the buzzer 33 remains silent. Until the nichrome wire of the heater 12 is exposed, the nichrome wire and the polysilicon rod 14 are insulated by quartz.
Since no electrical leakage occurs, the electrical leakage breaker 23 remains on.
次に石英にピンホール等が生じてヒータ１２のニクロム
線の一部が露出すると上記の絶縁が破れ、塩酸１３とポ
リシリコン棒１４とを伝わて電気が流れて漏電が起る。Next, when a pinhole or the like is formed in the quartz and a portion of the nichrome wire of the heater 12 is exposed, the above insulation is broken and electricity flows through the hydrochloric acid 13 and the polysilicon rod 14, causing a leakage.
漏電ブレーカ２３はそのことを検知してヒータ１２への
電力の供給を遮断する。するとリレー３５に印加される
電圧がＯｖとなるのでＢ接点３４が閉じ、それと同時に
ブザー３３が鳴り出してニクロム線が露出したことを知
らせる。The earth leakage breaker 23 detects this and cuts off the power supply to the heater 12. Then, the voltage applied to the relay 35 becomes Ov, so the B contact 34 closes, and at the same time, the buzzer 33 starts sounding to notify that the nichrome wire has been exposed.
なお本発明は上記実施例に限定されず、薬液１３はその
他の導電性の薬液、例えばアンモニア等の場合について
も通用することが可能である。Note that the present invention is not limited to the above embodiments, and the chemical liquid 13 may be other conductive chemical liquids, such as ammonia.
血皿皇立来
接地した電極棒を導電性の薬液中に浸し、漏電を検知し
た漏電ブレーカが作動すると、表示装置によりその作動
を表示するようにしたので、ニクロム線の露出を知らせ
ることのできる洗浄装置を提供することが可能になる。When the grounded electrode rod is immersed in a conductive chemical solution and the leakage breaker detects a leakage and is activated, a display device indicates the operation, making it possible to notify that the nichrome wire is exposed. It becomes possible to provide a cleaning device.
第１図は本発明の一実施例を示す概略図である。 １１・・・薬液槽 １２・・・ヒータ １３・・・薬液 １４・・・電極棒 ２３・・・漏電ブレーカ ３６・・・表示装置。 FIG. 1 is a schematic diagram showing an embodiment of the present invention. 11... Chemical tank 12... Heater 13...Medical solution 14...electrode rod 23...Earth leakage breaker 36...Display device.
Claims (2)
昇させるヒータと、前記薬液に浸されかつ接地された耐
薬品性の電極棒と、前記ヒータが漏電すると前記ヒータ
への電力の供給の遮断を行う漏電ブレーカと、漏電ブレ
ーカが作動したことを知らせる表示装置とを備えたこと
を特徴とする洗浄装置。(1) A heater installed in a chemical tank to raise the temperature of a conductive chemical solution, a chemical-resistant electrode rod immersed in the chemical solution and grounded, and supplying power to the heater when the heater leaks current. A cleaning device comprising: an earth leakage breaker that shuts off the electricity; and a display device that indicates that the earth leakage breaker has been activated.
れた抵抗加熱線とから構成されていることを特徴とする
特許請求の範囲第１項記載の洗浄装置。(2) The cleaning device according to claim 1, wherein the heater includes a quartz tube and a resistance heating wire provided inside the quartz tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1279886A JPS62169415A (en) | 1986-01-22 | 1986-01-22 | Cleaning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1279886A JPS62169415A (en) | 1986-01-22 | 1986-01-22 | Cleaning apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62169415A true JPS62169415A (en) | 1987-07-25 |
Family
ID=11815409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1279886A Pending JPS62169415A (en) | 1986-01-22 | 1986-01-22 | Cleaning apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62169415A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016162774A (en) * | 2015-02-26 | 2016-09-05 | 株式会社Ｓｃｒｅｅｎホールディングス | Heater abnormality detector, process liquid supply device, substrate processing system, and heater abnormality detection method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5310038A (en) * | 1976-07-15 | 1978-01-30 | Matsushita Electric Works Ltd | Leak breaker operation indicating device |
-
1986
- 1986-01-22 JP JP1279886A patent/JPS62169415A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5310038A (en) * | 1976-07-15 | 1978-01-30 | Matsushita Electric Works Ltd | Leak breaker operation indicating device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016162774A (en) * | 2015-02-26 | 2016-09-05 | 株式会社Ｓｃｒｅｅｎホールディングス | Heater abnormality detector, process liquid supply device, substrate processing system, and heater abnormality detection method |
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