JPS62167887A - Coating apparatus with heating system - Google Patents
Coating apparatus with heating systemInfo
- Publication number
- JPS62167887A JPS62167887A JP810086A JP810086A JPS62167887A JP S62167887 A JPS62167887 A JP S62167887A JP 810086 A JP810086 A JP 810086A JP 810086 A JP810086 A JP 810086A JP S62167887 A JPS62167887 A JP S62167887A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- gas
- tube
- chemical vapor
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 17
- 239000011248 coating agent Substances 0.000 title claims description 9
- 238000000576 coating method Methods 0.000 title claims description 9
- 238000006243 chemical reaction Methods 0.000 claims abstract description 11
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 10
- 229910000831 Steel Inorganic materials 0.000 abstract description 9
- 239000010959 steel Substances 0.000 abstract description 9
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract description 5
- 239000011247 coating layer Substances 0.000 abstract description 2
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000003129 oil well Substances 0.000 abstract 1
- 238000005299 abrasion Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000001556 precipitation Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000006552 photochemical reaction Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010913 used oil Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は例えば鋼管、油井管などの内径面に化学的気
相析出反応によってＴｉＣ、ＴｉＮなどのコーチイング
ミｔ形成させる装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for forming a coaching deposit of TiC, TiN, etc. on the inner diameter surface of, for example, a steel pipe or oil country tubular goods by a chemical vapor deposition reaction.
従来、鋼管又はその他の管の内面をコーティングする装
置としては、長いノズルの先端から管内面に向って塗料
を吹き付は焼成する装置又は管の内径の中心軸に合せて
金属製の電極を設け、この電極と管の間に電解液を導入
すると共に、上記電極と管の間に電流を流して、電極の
材料全管内面に析出させる電気化学的方法又Ｖｉ管の内
径にそって薄肉の他のパイプを挿入して密着させる方法
などがあった。Conventionally, equipment for coating the inner surface of steel pipes or other pipes includes equipment that sprays and fires paint from the tip of a long nozzle toward the inner surface of the pipe, or equipment that installs a metal electrode aligned with the central axis of the inner diameter of the pipe. An electrochemical method is used in which an electrolyte is introduced between the electrode and the tube, and a current is passed between the electrode and the tube to deposit the electrode material on the entire inner surface of the tube. There were methods such as inserting other pipes and making them stick together.
しかＬ７ながら塗料を用いる方法は密着性、耐磨耗性、
耐熱性に欠け、又メッキによる方法においても密着性、
ピノホールの発生、耐磨耗性において間領があった。更
に、薄肉パイプを挿入する方法においては、密着性、製
造コスト、耐蝕性、耐磨耗性などの間型があった。However, although it is L7, the method of using paint has good adhesion, abrasion resistance,
It lacks heat resistance, and even when using plating, it has poor adhesion.
There were gaps in the occurrence of pinotholes and abrasion resistance. Furthermore, in the method of inserting a thin-walled pipe, there are intermediate molds with respect to adhesion, manufacturing cost, corrosion resistance, abrasion resistance, etc.
この発明においては上記の問題点を解決するため、管の
内径面をコーティングする装置において、この管を加熱
する装置を上記管の外側に設け、上記管の内径面にそっ
て化学的気相析出反応奮起すガスを導入してコーティン
グするものである。In order to solve the above-mentioned problems, in this invention, in an apparatus for coating the inner diameter surface of a tube, a device for heating the tube is provided outside the tube, and chemical vapor deposition is performed along the inner diameter surface of the tube. Coating is performed by introducing a gas that stimulates a reaction.
この発明においては、管の外側に加熱装置を設は管の内
側に化学的気相析出反応を起すガスを導入１７て、加熱
すると管の内面にＴｉＣ、ＴｉＮなどが析出してコーテ
ィングされる。In this invention, a heating device is provided on the outside of the tube, and a gas that causes a chemical vapor deposition reaction is introduced 17 into the inside of the tube, and when heated, TiC, TiN, etc. are deposited and coated on the inner surface of the tube.
第１図は、この発明の一実施例を示す装置の断面図であ
る。図において、１はその内面４にコーティングしよう
とする鋼管、２はこの鋼管の外側に設けたガス炉又は電
気抵抗式加熱炉などの加熱装置、３は上記ａ管１の内面
４の一部をシールドするように接している融壁、５は融
壁６によってシールドした内室１０内に噴出させた化学
的気相析出反応性のガス、６はこのガス５をガスボンベ
（図示せず）よシ導くガス管、７は内室１０内のガス８
を排出するための排気管、９はガス管６と内面４との間
にプラズマを発生させるプラズマ発生装置、１１は鋼管
の内側を示す管内で一般には大気が満たされている。１
２は管１の加熱装置２に対する管の移動方向である。FIG. 1 is a sectional view of an apparatus showing an embodiment of the present invention. In the figure, 1 is a steel pipe whose inner surface 4 is to be coated, 2 is a heating device such as a gas furnace or electric resistance heating furnace installed outside the steel pipe, and 3 is a part of the inner surface 4 of the above-mentioned a-tube 1. 5 is a chemical vapor deposition reactive gas injected into the inner chamber 10 shielded by the molten wall 6, and 6 is a molten wall that is in contact with the molten wall so as to be shielded. A gas pipe 7 to guide the gas 8 in the inner chamber 10
9 is a plasma generator for generating plasma between the gas pipe 6 and the inner surface 4, and 11 is the inside of the steel pipe, which is generally filled with the atmosphere. 1
2 is the direction of movement of the tube 1 relative to the heating device 2.
次にこの動作について説明する。上記のように構成した
加熱式コーティング装置に設けた融壁６の内、即ち内室
１０に接続した排気管７の先端に真空ポンプ（図示せず
）を設け、真空（１０Ｔｏｒｒ〜１Ｏ−２Ｔｏｒｒ ）
ｆつ〈シ、ガス管６ｘり化学的気相析出反応を起すガ
ス５を導入すると共に、プラズマ発生装置９によってガ
ス￥ｆ６と管の内面４との間にプラズマを発生させれば
、放電による電子はガス５の分子に当りこれを分解した
り他の成分を合成したりする。このとき例えばＴＩＣｔ
、 ＋ ０−１４＋Ｈ２で構成したガス５を導入してお
けばＴｉＣのＩ！！／ｆ：内面４にコーティングするこ
とが出来る◇しかるにＴｉＣの鋼管１の内面４への密着
力は、不十分な場合があるが、加熱装［２によって管１
を加熱（２５０℃〜８００℃）すれば、析出反応が進行
するばかりでなく、その密着力は増大する。Next, this operation will be explained. A vacuum pump (not shown) is provided at the tip of the exhaust pipe 7 connected to the melting wall 6 provided in the heating type coating apparatus configured as above, that is, the inner chamber 10, and a vacuum (10 Torr to 1 O-2 Torr) is installed.
If a gas 5 that causes a chemical vapor deposition reaction is introduced through the gas pipe 6x, and a plasma is generated between the gas ￥f6 and the inner surface 4 of the pipe by the plasma generator 9, the discharge will occur. The electrons hit molecules of the gas 5 and decompose them or synthesize other components. In this case, for example, TICt
, + If gas 5 composed of 0-14 + H2 is introduced, TiC's I! ! /f: The inner surface 4 can be coated ◇However, the adhesion of TiC to the inner surface 4 of the steel pipe 1 may be insufficient, but the heating device [2
Heating (250°C to 800°C) not only advances the precipitation reaction but also increases its adhesion.
このようにして、管１を矢印１２の方向に移動したり、
或いは回転したシすれば、信頼性の良いコーティング層
を管１の内面４の一部又は全部にわたって形成させるこ
とが出来る。In this way, the tube 1 can be moved in the direction of the arrow 12,
Alternatively, by rotating it, a reliable coating layer can be formed over part or all of the inner surface 4 of the tube 1.
第２図はこの発明の他の実施例を示す装置の断面図であ
る。図において、１，４，５，６，７゜８．１１は第１
図に示したものと同一の作用をするものである。２ａは
管１の外側に設けた誘導加熱装置、５ａ 、 ３ｈは窓
１４を設はガス５及び排気ガス８を出入れできるように
構成した融壁、１３ば２つの窓１４の間を通り抜けるレ
ーザである。FIG. 2 is a sectional view of an apparatus showing another embodiment of the invention. In the figure, 1, 4, 5, 6, 7°8.11 is the first
It has the same effect as the one shown in the figure. Reference numeral 2a indicates an induction heating device provided on the outside of the tube 1, reference numerals 5a and 3h indicate a melting wall having a window 14 so that gas 5 and exhaust gas 8 can enter and exit, and reference numeral 13 indicates a laser beam passing between the two windows 14. It is.
次にこの動作について説明する。図のように構成されｆ
Ｃ，装置において、排気Ｗ７の先端に設けた真空ポンプ
（図示せｆ′″）によって管内１１を真空（ＩＣ” Ｔ
ｏｒｒ 〜１Ｏ−２Ｔｏｒｒ ）にする。次にガス管６
より化学的気相析出反応を起すガス１！ｆ５を徐々［９
内１１に導入（０，１〜２００Ｔｏｒｒ ） して、２
つのレーザ透過用の窓１４の間忙レーザ１３（例えば赤
外線レーザ）を通過させればこのレーザのエネルギーに
よって光化学反応を起し例えばＴｉＣ又はＴｉＮなどが
内面４に析出してコーティングされる。Next, this operation will be explained. It is configured as shown in the figure.
C. In the device, the inside of the tube 11 is evacuated (IC'' T
orr ~1O-2Torr). Next, gas pipe 6
Gas 1 that causes more chemical vapor phase deposition reactions! f5 gradually [9
Introduced into 11 (0.1 to 200 Torr) and 2
When a laser 13 (for example, an infrared laser) is passed between the two laser transmission windows 14, a photochemical reaction is caused by the energy of the laser, and for example, TiC or TiN is deposited on the inner surface 4 and coated.
しか１〜ながらその析出速度や密着力などを更に促進さ
せるためには、鋼管１の内面４に一加熱することが有効
であることは前述の通りであるが、ここではその作用ｋ
Ｂ管１の外刃に設けた誘導加熱装置２ａによって実現し
た。However, as mentioned above, it is effective to heat the inner surface 4 of the steel pipe 1 in order to further accelerate the precipitation rate and adhesion, but here we will discuss its effect k.
This was realized by an induction heating device 2a provided on the outer blade of the B tube 1.
第３図は、この発明の別の一実施例を示す装置の断面図
である。図において、１．４，５．６゜７．８，９．１
１は第１図に示したものと同−又は相当部分を示す。２
ｂは管１の外側の全てを包むように設けた加熱装［，３
ａ、３ｂけ管１の両端に設はガス５及び排出ガス８が通
れるようにした融壁である。FIG. 3 is a sectional view of an apparatus showing another embodiment of the invention. In the figure, 1.4, 5.6° 7.8, 9.1
1 indicates the same or equivalent portion as shown in FIG. 2
b is a heating device [, 3
A, 3B are provided at both ends of the pipe 1 to allow gas 5 and exhaust gas 8 to pass therethrough.
次にこの装置の動作について説明する。先づ排気管７よ
り管内１１のガス（初めは大気）を真空ポンプ（図示せ
ず）に接続した排気管７によって真ｍ （１Ｏ−５Ｔｏ
ｒｒ 〜１Ｏ−２Ｔｏｒｒ ）にする。次にガス管６よ
りボン−？（図示せず）に接続された化学的気相析出反
応を起すガス５を導入して排気管７よシ排出させる。Next, the operation of this device will be explained. First, the gas (initially atmospheric air) in the pipe 11 is pumped through the exhaust pipe 7 to a vacuum pump (not shown), and the exhaust pipe 7 is connected to a vacuum pump (not shown).
rr ~1O-2Torr). Next, from gas pipe 6? A gas 5 for causing a chemical vapor deposition reaction is introduced and discharged through an exhaust pipe 7 (not shown).
次にプラズマ発生装置９を作動させれば、ガス５はその
エネルギーの作用によって例えばＴｉＣ。Next, when the plasma generator 9 is activated, the gas 5 becomes, for example, TiC due to the action of its energy.
ＴｉＮなどの層を内面４に形成する。A layer such as TiN is formed on the inner surface 4.
ところが、その析出速度や密着力を更に増進させるため
には、ｇｌの内面４を高温（２５０℃〜８００℃）に保
っておくことが望ましい。加熱装置２ｂはそのためのも
のであって、管１の加工に際して出入れする蓋を有しか
つレーザの発射装置、ガス５０人出装置、加熱温間の制
御装置などを備えたものである。However, in order to further improve the precipitation rate and adhesion, it is desirable to keep the inner surface 4 of the GL at a high temperature (250°C to 800°C). The heating device 2b is for this purpose, and has a lid that can be taken in and out when processing the tube 1, and is equipped with a laser emitting device, a gas discharge device, a heating temperature control device, and the like.
以上説明したようだこの発明においでは、化学的気相析
出反応によつ１督の内面をコーティングする装置におい
て、被加工面即ち管の内面を加熱するように構成したの
で、析出の速度と、密着力を増進させ、例えば半永久的
に使用する油井管などの耐磨耗性、耐蝕性などを向上し
、信頼度を向上させる効果がある。As explained above, in this invention, in the apparatus for coating the inner surface of the pipe by chemical vapor deposition reaction, the surface to be processed, that is, the inner surface of the pipe, is heated, so that the speed of precipitation can be increased. It has the effect of increasing adhesion, improving the abrasion resistance and corrosion resistance of, for example, semi-permanently used oil country tubular goods, and improving reliability.
ｍ１図はこの発明の一実施例を示す断面図、第２図はこ
の発明の他の実施例を示す断面図、第３図はこの発明の
別の実施例を示す断面図である。
図において、１は鋼管、２は加熱装置、６は融壁、４は
内口、５はガス、６はガス管、７は排気管、８は排ガス
である。
代理人 弁理士 佐 藤 正 年
第１図
４ 力値
８ 遭￥気力°又
９ ニブラス°、７光ｉ戟量Fig. m1 is a sectional view showing one embodiment of the present invention, Fig. 2 is a sectional view showing another embodiment of the invention, and Fig. 3 is a sectional view showing another embodiment of the invention. In the figure, 1 is a steel pipe, 2 is a heating device, 6 is a melting wall, 4 is an inner port, 5 is a gas, 6 is a gas pipe, 7 is an exhaust pipe, and 8 is an exhaust gas. Agent Patent Attorney Tadashi Sato Year 1 Fig. 4 Power value 8 Encounter force °mata 9 Niblas °, 7 light igeki amount
Claims (1)
加熱する装置を上記管の外側に設け、上記管の内径面に
そつて化学的気相析出反応を起すガスを導入してコーテ
ィングすることを特徴とする加熱式コーティング装置。A device for coating the inner diameter surface of a tube, characterized in that a device for heating the tube is provided on the outside of the tube, and a gas that causes a chemical vapor deposition reaction is introduced along the inner diameter surface of the tube for coating. Heated coating equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP810086A JPS62167887A (en) | 1986-01-20 | 1986-01-20 | Coating apparatus with heating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP810086A JPS62167887A (en) | 1986-01-20 | 1986-01-20 | Coating apparatus with heating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62167887A true JPS62167887A (en) | 1987-07-24 |
Family
ID=11683884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP810086A Pending JPS62167887A (en) | 1986-01-20 | 1986-01-20 | Coating apparatus with heating system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62167887A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011513593A (en) * | 2008-03-12 | 2011-04-28 | アリタス コーポレーション エス．エー． | Plasma system |
-
1986
- 1986-01-20 JP JP810086A patent/JPS62167887A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011513593A (en) * | 2008-03-12 | 2011-04-28 | アリタス コーポレーション エス．エー． | Plasma system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4530750A (en) | Apparatus for coating optical fibers | |
| US8857698B2 (en) | Method for manufacturing insulating glazing | |
| CA2573485C (en) | Method and system for coating internal surfaces of prefabricated process piping in the field | |
| JP3083149B2 (en) | Metal-glass composite pipe and its manufacturing method | |
| US3345218A (en) | Preoxidation of stainless steel for glass-to-metal sealing | |
| FR2583780A1 (en) | METHOD FOR COATING SUBSTRATES IN A VACUUM CHAMBER | |
| US4237183A (en) | Process for the surface treatment of a synthetic resin lens and the product thereof | |
| JPH05239654A (en) | Laser-assisted chemical vapor deposition | |
| US3663265A (en) | Deposition of polymeric coatings utilizing electrical excitation | |
| US20010055653A1 (en) | Process for cleaning an article, process for coating an article, and device therefor | |
| JPS62167887A (en) | Coating apparatus with heating system | |
| US1639575A (en) | Ernest yeoman robinson | |
| US5145710A (en) | Method and apparatus for applying a metallic coating to threaded end sections of plastic pipes and resulting pipe | |
| JPH11286762A (en) | Continuous hot dipping method and apparatus therefor | |
| FR2575679A1 (en) | IMPROVEMENT TO THE METHOD OF COATING A SUBSTRATE SUCH AS A GLASS TAPE, BY A PULVERULENT PRODUCT, AND DEVICE FOR CARRYING OUT SAID METHOD | |
| JPH02138469A (en) | Material for vacuum having diamond surface, surface treatment of this material for vacuum production, of diamond film surface, vacuum vessel and its parts formed by using material for vacuum, in-vacuum driving mechanism, electron release source, in-vacuum heater and vessel of vapor deposition source | |
| US3279937A (en) | Method and apparatus for coating electric lamp bulbs | |
| JPS5852473A (en) | Surface treatment of metallic material | |
| SU1704993A1 (en) | Method of preparing tubes with inner protective coating for welding | |
| JPH0149417B2 (en) | ||
| JPS5823591A (en) | Production for small diameter metallic tube involving plastic coated filament material | |
| JPH0280227A (en) | Coat forming method for coated metal tube material | |
| CN111850481B (en) | PVD (physical vapor deposition) multilayer ion coating process | |
| JPS62167880A (en) | Apparatus for coating inside and outside of pipe | |
| JP3421457B2 (en) | Method and apparatus for dry treatment of metal surfaces |