JPS62153364U - - Google Patents

Info

Publication number
JPS62153364U
JPS62153364U JP3813086U JP3813086U JPS62153364U JP S62153364 U JPS62153364 U JP S62153364U JP 3813086 U JP3813086 U JP 3813086U JP 3813086 U JP3813086 U JP 3813086U JP S62153364 U JPS62153364 U JP S62153364U
Authority
JP
Japan
Prior art keywords
substrate
target
scattered atoms
sputter
adhere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3813086U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3813086U priority Critical patent/JPS62153364U/ja
Publication of JPS62153364U publication Critical patent/JPS62153364U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係るスパツタ装置の一実施例
を示す説明図。第２図は従来例を示す説明図。 １……ターゲツト、９……基板、１３……マス
ク板。 FIG. 1 is an explanatory diagram showing an embodiment of a sputtering device according to the present invention. FIG. 2 is an explanatory diagram showing a conventional example. 1...Target, 9...Substrate, 13...Mask board.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ターゲツト１をスパツタせしめて該ターゲツト
１の飛散原子を別途設けられた基板９の表面に被
着させるべく構成してなるスパツタ装置に於いて
、前記基板９への飛散原子の被着を制御するため
のマスク板１３が、前記基板９の表面側に回転自
在に設けられてなることを特徴とするスパツタ装
置。 In a sputtering device configured to sputter a target 1 and cause the scattered atoms of the target 1 to adhere to the surface of a separately provided substrate 9, for controlling the adhesion of the scattered atoms to the substrate 9. A sputtering apparatus characterized in that a mask plate 13 is rotatably provided on the surface side of the substrate 9.
JP3813086U 1986-03-14 1986-03-14 Pending JPS62153364U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3813086U JPS62153364U (en) 1986-03-14 1986-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3813086U JPS62153364U (en) 1986-03-14 1986-03-14

Publications (1)

Publication Number Publication Date
JPS62153364U true JPS62153364U (en) 1987-09-29

Family

ID=30850085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3813086U Pending JPS62153364U (en) 1986-03-14 1986-03-14

Country Status (1)

Country Link
JP (1) JPS62153364U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933764B2 (en) * 1974-06-26 1984-08-17 ソシエテ アノニム オトモビル シトロエン レジ パル レ ザルテイクル １１８ ア １５０ ド ラ ルワ シユル レ ソシエテ コメルシアル A device that quickly attaches to a wall for passing cables.

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933764B2 (en) * 1974-06-26 1984-08-17 ソシエテ アノニム オトモビル シトロエン レジ パル レ ザルテイクル １１８ ア １５０ ド ラ ルワ シユル レ ソシエテ コメルシアル A device that quickly attaches to a wall for passing cables.

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