JPS62151672A - Ultra-high vacuum valve - Google Patents
Ultra-high vacuum valveInfo
- Publication number
- JPS62151672A JPS62151672A JP28917585A JP28917585A JPS62151672A JP S62151672 A JPS62151672 A JP S62151672A JP 28917585 A JP28917585 A JP 28917585A JP 28917585 A JP28917585 A JP 28917585A JP S62151672 A JPS62151672 A JP S62151672A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- disk
- cylinder
- piston cylinder
- valve disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2007—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member specially adapted operating means therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2042—Special features or arrangements of the sealing
- F16K1/2085—Movable sealing bodies
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Valves (AREA)
- Sliding Valves (AREA)
- Lift Valve (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は超高真空ゲート弁特にスイング弁により成る超
高真空ゲート弁に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an ultra-high vacuum gate valve, particularly an ultra-high vacuum gate valve comprising a swing valve.
（従来技術）
超高真空装置例えば核融合実験装置には多くの超高真空
ゲート弁が使用されている。その理由としてゲート弁は
気体の通過抵抗が少ないことがあげられる。即ち核融合
実験装置では内部観測や測定器具等の出入れ等配管を含
めて弁開時通路がストレートに貫通しなければならない
条件が多いためゲート弁が選定されるケースが多い。(Prior Art) Many ultra-high vacuum gate valves are used in ultra-high vacuum equipment, such as nuclear fusion experimental equipment. The reason for this is that gate valves have little resistance to gas passage. That is, in many cases, gate valves are selected in nuclear fusion experimental equipment because there are many conditions in which the passage must pass straight through when the valve is open, including piping for internal observation and inlet/output of measuring instruments, etc.
このゲート弁は通常通路の軸と直角な一方向に弁ディス
クを移動しなければならないため駆動部も含めると配管
中心から突出する部分が多くなる。In this gate valve, the valve disk must normally be moved in one direction perpendicular to the axis of the passage, so if the drive section is included, many parts protrude from the center of the piping.
第４図、第５図はこのような従来のゲート弁の例を示す
。FIGS. 4 and 5 show examples of such conventional gate valves.
第４図、第５図において１は直径路２００ｍｍの大口径
弁座、２はこれに対接される円板状弁ディスク、３はこ
の弁ディスク２を前記弁座１に押圧する弁抑え、４はこ
の弁抑え３をリンク５を介して支持する弁用入口（水平
方向）方向移動体、６はこの移動体４をピストンロッド
７を介して弁ディスク２の弁用入口（水平方向）方向に
往復移動せしめるためのピストンシリンダ、８は弁抑え
ストッパー、９はこのストッパー８に突き当たるよう前
記弁抑え３の端部に設けたローラを示し、ピストンシリ
ンダ６を駆動して第４図、第５図においてピストンロッ
ド７を下方に移動せしめれば移動体４が弁抑え３及び弁
ディスク２と共に下方に移動し、弁抑え３のローラ９が
前記ストッパー８に突き当たった後はリンク５を介して
弁抑え３及び弁ディスク２が弁ディスクの軸方向に移動
され、弁ディスク２が弁座工に対接されてシールが達成
される。In FIGS. 4 and 5, 1 is a large-diameter valve seat with a diameter passage of 200 mm, 2 is a disk-shaped valve disk that is in contact with this, and 3 is a valve suppressor that presses this valve disk 2 against the valve seat 1; 4 is a moving body in the valve inlet (horizontal direction) direction that supports this valve stopper 3 via a link 5, and 6 is a moving body that supports this moving body 4 in the valve inlet (horizontal direction) direction of the valve disk 2 via a piston rod 7. 8 is a valve stopper, and 9 is a roller provided at the end of the valve stopper 3 so as to abut against this stopper 8. In the figure, when the piston rod 7 is moved downward, the movable body 4 moves downward together with the valve stopper 3 and the valve disk 2, and after the roller 9 of the valve stopper 3 hits the stopper 8, the valve is moved through the link 5. The retainer 3 and the valve disk 2 are moved in the axial direction of the valve disk, and the valve disk 2 is brought into contact with the valve seat to achieve a seal.
一般に核融合実験装置では強力な磁場の作用で真空容器
内に高温高密度のプラズマを閉じ込めるが、このプラズ
マ発生及び停止時に装置に強力な電磁力が加わり配管等
に大きな振動を生ずる。In general, nuclear fusion experimental equipment confines high-temperature, high-density plasma in a vacuum chamber using a strong magnetic field, but when this plasma is generated and stopped, a strong electromagnetic force is applied to the equipment, causing large vibrations in piping, etc.
この振動により質量の大きいゲート弁の突出部に大きな
衝撃を生じ、事故発生のちととなる。This vibration causes a large impact on the protruding part of the gate valve, which has a large mass, resulting in an accident.
また、核融合装置には各種の機器が取りつけられ、これ
ら機器とゲート弁との干渉を避けるために、ゲート弁の
取りつけには、空間的及び取りつけ時の方向性に多くの
制約がある。Further, various devices are attached to the nuclear fusion device, and in order to avoid interference between these devices and the gate valve, there are many restrictions on the space and orientation when attaching the gate valve.
（発明の目的）
本発明は上記のような欠点を除去した、配管中心部から
の突出部分が少なくゲート弁全体のシール性能を高めた
、耐振性の超高真空ゲート弁を得るにある。(Object of the Invention) The present invention is to obtain a vibration-resistant ultra-high vacuum gate valve that eliminates the above-mentioned drawbacks, has a small protrusion from the center of the piping, and improves the sealing performance of the entire gate valve.
（発明の構成）
本発明の超高真空弁は弁筐と、この弁筐の弁座に対接さ
れる弁ディスクと、この弁ディスクの一端を前記弁筐に
回動自在に枢支する枢支機構と、前記弁筐に設けた弁デ
ィスク開閉用ピストンシリンダと、このピストンシリン
ダのピストンロッドと前記弁ディスクの枢支基部近傍間
を連結する機構と、前記弁ディスクが前記弁座に対接し
た状態で前記弁ディスクを前記弁座に押圧するための機
構とより成り、前記弁ディスク開閉用シリンダを操作す
ることによって前記弁ディスクを前記弁座に接する位置
と対接しない位置に回動できるよう乙こしたことを特徴
とする。(Structure of the Invention) The ultra-high vacuum valve of the present invention includes a valve housing, a valve disk that faces a valve seat of the valve housing, and a pivot that rotatably supports one end of the valve disk to the valve housing. a support mechanism, a piston cylinder for opening and closing a valve disc provided in the valve housing, a mechanism connecting a piston rod of the piston cylinder to a vicinity of a pivot base of the valve disc, and the valve disc facing the valve seat. a mechanism for pressing the valve disk against the valve seat in a state in which the valve disk is in contact with the valve seat, and by operating the valve disk opening/closing cylinder, the valve disk can be rotated between a position in contact with the valve seat and a position in which it is not in contact with the valve seat. It is characterized by having a pleasant atmosphere.
（発明の実施例） 以下図面によって本発明の詳細な説明する。(Example of the invention) The present invention will be explained in detail below with reference to the drawings.
本発明においては第１図〜第３図に示すように弁座１に
対接される弁ディスク２の一端を弁筐１０ユこ枢支ビン
１１によって回動自在に枢支し、前記弁筐ｌＯに弁ディ
スク２の開閉ピストンシリンダ６を設け、弁ディスク２
の枢支部近傍に突出せしめた突起１２にピン１３及びリ
ンク１４を介して前記弁筐１０内において前記ピストン
シリンダ６のピストンロッド７の遊端を連結せしめ、ビ
ス１ヘンシリンダ６に流体圧を作用せしめてピストンロ
ッド７を上下動せしめることによって前記弁ディスクを
配管を塞がない開位置と弁座に完全に接し配管を完全に
閉しる閉位置の何れかに移動できるようにすると共に、
弁ディスク２が閉じたとき、この弁ディスク２の遊端に
作用して弁ディスク２を弁座１に押圧せしめるための機
構１５を設ける。In the present invention, as shown in FIGS. 1 to 3, one end of the valve disk 2 facing the valve seat 1 is rotatably supported by a valve housing 10 and a pivot pin 11. A piston cylinder 6 for opening and closing the valve disc 2 is provided in lO, and a piston cylinder 6 for opening and closing the valve disc 2 is provided.
The free end of the piston rod 7 of the piston cylinder 6 is connected within the valve housing 10 to a protrusion 12 protruding near the pivot portion of the valve via a pin 13 and a link 14, and fluid pressure is applied to the screw cylinder 6. By at least moving the piston rod 7 up and down, the valve disc can be moved to either an open position where it does not block the piping or a closed position where it completely contacts the valve seat and completely closes the piping, and
A mechanism 15 is provided for acting on the free end of the valve disc 2 to press the valve disc 2 against the valve seat 1 when the valve disc 2 is closed.
本発明の弁ディスク２は例えばその−側面が弁座１に対
接されろ円板状素子２ａと、ごの素子２ａの他側面に対
接した開閉素子２ｂと、この２つの素子２ａ、 ２ｂ
の中心部に両者を若干離間するため介挿したポール２Ｃ
と、この２つの素子２ａ。The valve disk 2 of the present invention includes, for example, a disc-shaped element 2a whose one side faces the valve seat 1, an opening/closing element 2b which faces the other side of the element 2a, and these two elements 2a, 2b.
Pole 2C inserted in the center of the
and these two elements 2a.
２ｂをその面に平行な方向に互に相対的に移動可能なる
ように連結したスプリング２ｄとにより形成する。2b and a spring 2d connected so as to be movable relative to each other in a direction parallel to the surface thereof.
更に本発明の押圧機構１５は例えば第１図、第３図に示
すように前記弁ディスク開閉用ピストンシリンダ６の反
対側において前記外筐１０に設けたピストンシリンダ１
６と、そのピストンロッド１７と、このピストンロッド
１７の遊端の弁ディスク側面に形成したＶ字状の切り込
み溝１８と、この溝１８にその一端を挿入した断面菱形
の押杆１９とこの押杆１９をピストンロッド１７に相対
的に常時上方に傾斜するようその下方から上方に抑制す
るスプリング２０と、前記ピストンロット１７の前記側
面と反対側の側面に対抗して前記弁筐１０の内面に設け
た座２１と、この座２１とこれに対抗する前記ピストン
ロッド１７の側面間に介挿したローラ２２と、このロー
ラ２２を弁筐１０に連結ずろ引張ばね２３とにより形成
せしめ、弁ディスク２が閉じられたときピストンシリン
ダ１６が駆動されてピストンロッド１７が上昇し、その
際前記傾斜している断面菱形の押杆１９の他端が弁ディ
スク２の開閉素子２ｂの′Ｍ端部側面の段部２′に 係
合し、更にピストンロッド１７が上昇すれば前記スプリ
ング２０に抗して前記押杆１９が水平位置となって開閉
素子２ｂが横方向に弁座ｌに向って最大に押圧されるよ
うにする。Further, the pressing mechanism 15 of the present invention includes a piston cylinder 1 provided in the outer casing 10 on the opposite side of the valve disc opening/closing piston cylinder 6, as shown in FIGS. 1 and 3, for example.
6, its piston rod 17, a V-shaped cut groove 18 formed on the side surface of the valve disk at the free end of this piston rod 17, a push rod 19 with a diamond-shaped cross section with one end inserted into this groove 18, and this push rod 19. a spring 20 that restrains the rod 19 upwardly from below so that it always tilts upwardly relative to the piston rod 17; The valve disk 2 is formed by a seat 21 provided, a roller 22 inserted between the seat 21 and the side surface of the piston rod 17 opposing the seat 21, and a sliding tension spring 23 connecting the roller 22 to the valve housing 10. When the is closed, the piston cylinder 16 is driven and the piston rod 17 is raised, and at this time, the other end of the inclined push rod 19, which has a rhombic cross section, touches the side surface of the 'M end of the opening/closing element 2b of the valve disc 2. When the piston rod 17 engages with the stepped portion 2' and further rises, the push rod 19 becomes a horizontal position against the spring 20, and the opening/closing element 2b is pushed laterally toward the valve seat l to the maximum. to be done.
本発明の超高真空弁は上記のような構成であるから弁デ
ィスク開閉用ピストンシリンダ６を操作することによっ
て弁ディスクをスイングし極めて簡単且つ容易に通路を
開閉できると共にその閉位置では弁ディスク２の遊端が
押圧機構１５によって弁座１に押圧されその閉状態が確
実に維持されるようになる。Since the ultra-high vacuum valve of the present invention has the above-described structure, by operating the valve disk opening/closing piston cylinder 6, the valve disk can be swung to open and close the passage very simply and easily, and in the closed position, the valve disk 2 The free end of the valve is pressed against the valve seat 1 by the pressing mechanism 15 to ensure that the closed state is maintained.
（発明の効果）
本発明超高真空ゲート弁においては配管中心からの突出
部が少ないので耐振動性に優れ、且つその動作が簡単で
ある大きな利益がある。(Effects of the Invention) The ultra-high vacuum gate valve of the present invention has the great advantage of having excellent vibration resistance and simple operation because there are few protruding parts from the center of the piping.
基本的な外形形状が円形であるため、シール性能に優れ
ている。Since the basic external shape is circular, it has excellent sealing performance.
従来の同口径のものに比べ、小型、軽量であるため、他
の機器に与える重量負荷が小さく、取り扱いが容易であ
る。Since it is smaller and lighter than conventional devices of the same diameter, it imposes less weight on other equipment and is easier to handle.
第１図は本発明超高真空弁の閉状態の縦断正面図、第２
図はその縦断側面図、第３図は同じく開状態の縦断正面
図、第４図は従来のゲート弁の縦断正面図、第５図はそ
の縦断側面図である。
１・・大口径弁座、２・・円板状弁ディスク、３・・弁
抑え、４・・方向移動体、６・・ピストンシリンダ、７
・・・ピストンロッド、８・・弁抑えストッパー、９・
・ローラ、１０・・弁筐、１１・・枢支ビン、１２・・
突起、１３・・ビン、１４・・リンク、１５・・押圧機
構、１６・・シリンダ、１７・・ピストンロッド、１８
・・溝、１９・・押杆、２０・・スプリング、２１・・
座、２２・・ローラ、２３・・引張ばね。
ル４圓
′ｊ Φ
＋５０
９ ｄFigure 1 is a longitudinal sectional front view of the ultra-high vacuum valve of the present invention in the closed state;
3 is a longitudinal sectional side view of the conventional gate valve, FIG. 3 is a longitudinal sectional front view of the conventional gate valve, FIG. 4 is a longitudinal sectional front view of the conventional gate valve, and FIG. 5 is a longitudinal sectional side view of the conventional gate valve. 1. Large-diameter valve seat, 2. Disc-shaped valve disk, 3. Valve stopper, 4. Directional moving body, 6. Piston cylinder, 7
... Piston rod, 8. Valve restraint stopper, 9.
・Roller, 10... Valve case, 11... Pivot bottle, 12...
Projection, 13... Bottle, 14... Link, 15... Pressing mechanism, 16... Cylinder, 17... Piston rod, 18
...Groove, 19..Press rod, 20..Spring, 21..
Seat, 22...Roller, 23...Tension spring. Le4 yen'j Φ +50 9 d
Claims (1)
の弁ディスクの一端を前記弁筐に回動自在に枢支する枢
支機構と、前記弁筐に設けた弁ディスク開閉用ピストン
シリンダと、このピストンシリンダのピストンロッドと
前記弁ディスクの枢支基部近傍間を連結する機構と、前
記弁ディスクが前記弁座に対接した状態で前記弁ディス
クを前記弁座に押圧するための機構とより成り、前記弁
ディスク開閉用シリンダを操作することによって前記弁
ディスクを前記弁座に接する位置と対接しない位置に回
動できるようにしたことを特徴とする超高真空弁。A valve housing, a valve disk that faces a valve seat of the valve housing, a pivot mechanism that rotatably supports one end of the valve disk to the valve housing, and a valve disk opening/closing device provided in the valve housing. a mechanism for connecting the piston rod of the piston cylinder to the vicinity of the pivot base of the valve disk; and a mechanism for pressing the valve disk against the valve seat with the valve disk facing the valve seat. An ultra-high vacuum valve comprising a mechanism for rotating the valve disk, the valve disk being able to be rotated between a position in contact with the valve seat and a position in which it is not in contact with the valve seat by operating the valve disk opening/closing cylinder.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28917585A JPS62151672A (en) | 1985-12-24 | 1985-12-24 | Ultra-high vacuum valve |
| DE19863643152 DE3643152A1 (en) | 1985-12-24 | 1986-12-17 | Ultra high vacuum valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28917585A JPS62151672A (en) | 1985-12-24 | 1985-12-24 | Ultra-high vacuum valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62151672A true JPS62151672A (en) | 1987-07-06 |
Family
ID=17739736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28917585A Pending JPS62151672A (en) | 1985-12-24 | 1985-12-24 | Ultra-high vacuum valve |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS62151672A (en) |
| DE (1) | DE3643152A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006161974A (en) * | 2004-12-08 | 2006-06-22 | Aisin Sangyo Kk | Damper device |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2751394B1 (en) * | 1996-07-18 | 1999-02-05 | Eaton Sa Monaco | SOLENOID VALVE FOR DISPENSING LIQUID |
| DE19746241C2 (en) * | 1997-10-20 | 2000-05-31 | Vat Holding Ag Haag | Device for closing an opening |
| DE10309909B4 (en) * | 2003-03-07 | 2007-11-29 | Gesellschaft für Schwerionenforschung mbH | Pressure sensor triggerable quick release device |
| FR2858840A1 (en) * | 2003-08-13 | 2005-02-18 | Mp 98 Power Modulation Control | Closing and sealing device for gaseous fluid or viscous liquid transporting circuit, has parallelogram maneuvering valve to rotate around axle, and packing assembly providing sealing, where rotation of rod advances valve on seat |
| FR2966546B1 (en) * | 2010-10-22 | 2013-08-23 | Snecma | CONTROLLED ISOLATION VALVE WITH REINFORCED SEALING |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3973753A (en) * | 1974-03-18 | 1976-08-10 | Varian Associates | High vacuum gate valve |
| DE3131178A1 (en) * | 1981-08-06 | 1983-02-24 | Leybold-Heraeus GmbH, 5000 Köln | Vacuum valve, the valve plate of which is pivoted out of the path of flow when opened |
-
1985
- 1985-12-24 JP JP28917585A patent/JPS62151672A/en active Pending
-
1986
- 1986-12-17 DE DE19863643152 patent/DE3643152A1/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006161974A (en) * | 2004-12-08 | 2006-06-22 | Aisin Sangyo Kk | Damper device |
| JP4594057B2 (en) * | 2004-12-08 | 2010-12-08 | アイシン産業株式会社 | Damper device |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3643152A1 (en) | 1987-07-02 |
| DE3643152C2 (en) | 1990-06-28 |
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