JPS6214734U - - Google Patents
Info
- Publication number
- JPS6214734U JPS6214734U JP10655485U JP10655485U JPS6214734U JP S6214734 U JPS6214734 U JP S6214734U JP 10655485 U JP10655485 U JP 10655485U JP 10655485 U JP10655485 U JP 10655485U JP S6214734 U JPS6214734 U JP S6214734U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- transfer
- arcuate
- utility
- edge portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007688 edging Methods 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図ａ，ｂは本考案の治具にウエーハボート
を保持したときの断面図を、第２図ａ，ｂは本考
案による治具の例の別の実施態様による断面図を
、第３図ａ，ｂは従来の治具の斜視図を、第４図
はウエハーボートの斜視図を、第５図は従来の治
具にウエハーボートを保持した場合の断面図を示
す。
１……筒状体、２……搬送アーム、３……ウエ
ーハ、４……ウエーハーボート、５……脚、６…
…エツジ部、７……縁どり、８……空孔。
1A and 1B are cross-sectional views of a wafer boat held in a jig according to the present invention, FIGS. 2A and 2B are cross-sectional views of another embodiment of the jig according to the present invention, and FIGS. Figures a and b are perspective views of a conventional jig, Figure 4 is a perspective view of a wafer boat, and Figure 5 is a sectional view of a wafer boat held by a conventional jig. 1... Cylindrical body, 2... Transfer arm, 3... Wafer, 4 ... Wafer boat, 5... Legs, 6...
...Edge part, 7... Border, 8... Hole.
Claims (1)
縁どりを設けてなることを特徴とするウエハーボ
ート搬送用保持治具。 A holding jig for wafer boat transfer, characterized in that an edge portion of the transfer arm is provided with an arcuate or annular edging.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10655485U JPS6214734U (en) | 1985-07-12 | 1985-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10655485U JPS6214734U (en) | 1985-07-12 | 1985-07-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6214734U true JPS6214734U (en) | 1987-01-29 |
Family
ID=30982022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10655485U Pending JPS6214734U (en) | 1985-07-12 | 1985-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6214734U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4912511A (en) * | 1972-05-11 | 1974-02-04 |
-
1985
- 1985-07-12 JP JP10655485U patent/JPS6214734U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4912511A (en) * | 1972-05-11 | 1974-02-04 |