JPS6214600A - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPS6214600A JPS6214600A JP15361785A JP15361785A JPS6214600A JP S6214600 A JPS6214600 A JP S6214600A JP 15361785 A JP15361785 A JP 15361785A JP 15361785 A JP15361785 A JP 15361785A JP S6214600 A JPS6214600 A JP S6214600A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- piezoelectric
- center
- vibrating element
- piezoelectric vibrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、圧電素子を電気−音響変換器として利用す
る圧電振動素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a piezoelectric vibrating element that uses a piezoelectric element as an electro-acoustic transducer.
近年、各方面において、圧電振動素子に利用されるジル
コニウムチタン酸鉛を主体とする強圧電性セラミックが
開発された。そして、この強圧電性セラミックの薄片に
電極面を付けたものを金属板ベースの片面（ユニモルフ
形）又は両面（バイモルフ形）に貼り合わせた圧電振動
板が多量に生産されており、この圧電振動板はコストが
著しく低減されるようになったので、上記した強圧鑞性
セラミックは電気−音響変換器に広く用いられている。In recent years, strong piezoelectric ceramics mainly made of zirconium lead titanate have been developed in various fields for use in piezoelectric vibrating elements. A large number of piezoelectric diaphragms are manufactured by laminating a thin piece of strong piezoelectric ceramic with an electrode surface attached to one side (unimorph type) or both sides (bimorph type) of a metal plate base. Since the cost of plates has been significantly reduced, the high-pressure solder ceramics described above are widely used in electro-acoustic transducers.
従来、この種の圧電振動板は支点を外縁端部に設け、両
電極間に信号電圧を印加することによって、中央部分が
最大振幅となるような凸レンズ形振動モードの振動を生
起して、圧電ブザー、電話器用リンガ−２その他の各種
音響機器に広く使われている。Conventionally, this type of piezoelectric diaphragm has a fulcrum at the outer edge, and by applying a signal voltage between both electrodes, vibration is generated in a convex lens-shaped vibration mode with the maximum amplitude at the center, and the piezoelectric diaphragm is It is widely used in buzzers, telephone ringer 2, and other various audio equipment.
ところで、普通多く用いられる直径約３０１１１前後の
圧電振動板の場合外縁端部を支点とする凸レンズ形振動
モードの１次基本共振周波数ｆｏ は、約３〜５ ＫＨ
ｚ が最低限度で、これ以下に引き下げることは、圧
電性セラミックの脆弱性により薄片加工が困難であるた
めに経済的でない。By the way, in the case of a commonly used piezoelectric diaphragm with a diameter of about 30111 mm, the primary fundamental resonance frequency fo of the convex lens-shaped vibration mode with the outer edge as the fulcrum is about 3 to 5 KH.
z is the minimum value, and lowering it below this value is not economical because it is difficult to process thin pieces due to the brittleness of the piezoelectric ceramic.
さて、音響振動工学によれば、一般に振動体は物性に関
して基本共振周波数ｆ、を境に、このｆ。Now, according to acoustic vibration engineering, in general, the physical properties of a vibrating body range from a fundamental resonant frequency f.
以上の周波数帯域は定速度領域として、また、上記〔。The above frequency bands are considered as constant velocity regions, and are also referred to as [.
以下の帯域は定振幅領域として働く。通常スピーカ等の
音響放射体が自由空間内に一定の強さの音圧を放射する
には、振動板は、その振動帯域内において一定速度をも
って運動しなければならない。したがって、上記した凸
レンズ形振動モードによる圧電振動板を利用してスピー
カ等を構成しようとすれば、ｆ６；３〜５ ＫＨｚ
以上の定速度領域にある高音用スピーカは極めて容易に
作られるが、【。以下の定振幅領域の中低音用スピーカ
は、音響放射出力が激減して実用に供し得るスピーカは
ほとんど実現が不可能に近い。The following bands act as constant amplitude regions. In order for an acoustic radiator such as a speaker to radiate sound pressure of a constant intensity into free space, the diaphragm must move at a constant speed within its vibration band. Therefore, if you try to construct a speaker etc. using the piezoelectric diaphragm with the above-mentioned convex lens type vibration mode, f6; 3 to 5 KHz.
A treble speaker in the above constant speed range can be made extremely easily, but [. In the following speakers for medium and low frequencies in the constant amplitude range, the acoustic radiation output is drastically reduced, making it almost impossible to create a speaker that can be put to practical use.
この発明の出願人は、さきに圧ｔＷ動板の中央部付近に
粘弾性層を介して重錘を結合し、圧電撮動板の中央部付
近を拘束して、この圧電振動板の外縁端部から起振力を
取り出すように構成した圧電振動素子を提案した（特願
昭５９−１８６９７９号）。The applicant of this invention first connected a weight to the vicinity of the center of the piezoelectric diaphragm through a viscoelastic layer, restrained the vicinity of the center of the piezoelectric diaphragm, and proposed a piezoelectric vibrating element configured to extract vibrational force from a portion (Japanese Patent Application No. 59-186979).
このような構成の圧電振動素子では、凹レンズ形振動モ
ードの撮動を生起させ、相当広帯域にわたり近似的に定
速度撮動特性を得ることができる。In the piezoelectric vibrating element having such a configuration, it is possible to cause imaging in a concave lens type vibration mode and obtain approximately constant speed imaging characteristics over a considerably wide band.
上記のように構成された圧電振動素子では、圧電振動板
の中央部付近に重錘を結合する場合に用いる粘弾性層は
、動的粘弾性定数が外部気温の変化に敏感に反応して変
動しやすいため、これを用いたスピーカ等音響製品の再
生音質に微妙な影響を与えて好ましくなく、音響特性が
低下するという問題点があった。In the piezoelectric vibrating element configured as described above, the dynamic viscoelastic constant of the viscoelastic layer used when connecting the weight near the center of the piezoelectric vibrating plate fluctuates in response to changes in external temperature. This has a problem in that it has a subtle influence on the reproduced sound quality of audio products such as speakers using it, which is undesirable, and the acoustic characteristics deteriorate.
この発明は、かかる問題点を解決するためになぎれたも
ので、外部気温の変化に対しても振動の安定化を計り、
かつ製品の信頼性を向上できる圧電振動素子を得ること
を目的とする。This invention was developed to solve this problem, and it stabilizes the vibration even when the external temperature changes.
The purpose of the present invention is to obtain a piezoelectric vibrating element that can improve product reliability.
この発明に係る圧電振動素子は、圧電振動板の中央部付
近に設けた小開孔の両面に、この小開孔を貫通する結合
軸により２つ重錘を、それぞれ粘弾性部材を介在して一
体的に結合し、圧電振動板の中央部付近を拘束するよう
にしたものである。The piezoelectric vibrating element according to the present invention has two weights attached to both sides of a small aperture provided near the center of a piezoelectric diaphragm by connecting shafts passing through the small aperture, each with a viscoelastic member interposed therebetween. The piezoelectric diaphragm is integrally connected to restrain the vicinity of the center of the piezoelectric diaphragm.
この発明の圧電振動素子においては、圧電振動板の中央
部付近に設けた小開孔を貫通する結合軸により２つの重
錘を、それぞれ粘弾性部材を両面に介在して結合し、圧
電振動板の中央部付近を拘束することにより、凹レンズ
形振動モードを形成し、圧電撮動板の外縁端部から起振
力を取り出すようにし、これにより、充分な結合強度か
えられ外部気温の変化に対しても撮動の安定化が得られ
る。In the piezoelectric vibrating element of the present invention, two weights are coupled by a coupling shaft passing through a small hole provided near the center of the piezoelectric diaphragm, with viscoelastic members interposed on both sides, and the piezoelectric diaphragm By restraining the vicinity of the center of the piezoelectric imaging plate, a concave lens-shaped vibration mode is formed and the vibration force is extracted from the outer edge of the piezoelectric imaging plate. Stabilization of shooting can be achieved even when shooting.
第１図、第２図及び第３図は、それぞれこの発明の一実
施例である圧電振動素子を構成する部品を示す斜視図及
び断面図である。第１図はユニモルフ形の圧電振動板１
の一例を示しており、この圧電撮動板１は金属薄板２の
片面に電極付きの圧電板４を貼り合わせて構成されてい
る。また、圧電振動板１には中央部付近に小開孔３を開
設し。FIG. 1, FIG. 2, and FIG. 3 are a perspective view and a cross-sectional view, respectively, showing parts constituting a piezoelectric vibrating element according to an embodiment of the present invention. Figure 1 shows a unimorph piezoelectric diaphragm 1.
This piezoelectric imaging plate 1 is constructed by pasting a piezoelectric plate 4 with electrodes on one side of a thin metal plate 2. In addition, a small opening 3 is provided in the piezoelectric diaphragm 1 near the center.
さらに、圧電振動板ｌの外周部５ａと同様に小開孔３に
近接する圧電振動板１の内周部５ｂにも電極面を施さな
い細い絶縁部分を設けて、信号電圧による沿面放電の発
生を防止するようにしである。Furthermore, similar to the outer circumferential portion 5a of the piezoelectric diaphragm l, a thin insulating portion without an electrode surface is provided on the inner circumferential portion 5b of the piezoelectric diaphragm 1 adjacent to the small aperture 3 to generate creeping discharge due to the signal voltage. This is to prevent this.
次に、第２図は粘弾性部材としての間座６を示し、この
間座６は中心部に小開孔７を設け、かつ粘弾性材料で作
られ、厚さ約０．８〜１．Ｑｉｍ程度のウレタンゴム等
のゴム発泡材から成り、その両面に被膜８（発泡過程で
生ずるスキン）が形成されている。また、第３図は亜鈴
形の重錘９を示し、この重錘９は等重量の饅頭形（半球
形）の重錘１０ａ。Next, FIG. 2 shows a spacer 6 as a viscoelastic member, this spacer 6 has a small opening 7 in the center, is made of a viscoelastic material, and has a thickness of about 0.8 to 1 mm. It is made of a rubber foam material such as urethane rubber of Qim grade, and a coating 8 (skin formed during the foaming process) is formed on both sides of the rubber foam material. Further, FIG. 3 shows a bell-shaped weight 9, and this weight 9 is a bun-shaped (hemispherical) weight 10a of equal weight.
ｌＯｂを結合軸１１で一体的に結合して亜鈴形状とした
もので、例えば全重量が約２ｇ前後の鉛工で作られる。1Ob is integrally connected with a connecting shaft 11 to form a bell shape, and is made of lead work, for example, with a total weight of about 2 g.
次に、第４図はこの発明の一実施例である圧電振動素子
を示す断面図であり、上記第１図〜第３図に示す各部品
を組み立てることにより構成される。その組立て順序と
しては、まず、圧電振動板１の中央部付近に設けた小開
孔３に位置合わせした２個の間座６をそれぞれ圧電振動
板１の両面に置き１分割した一方の重錘ｌＯａを結合し
た結合軸１１を谷間座６の中心部の小開孔７を貫通させ
、他方の重錘ｔｏ ｂを差し込み、結合軸１１により両
重錘１０ａ、１０ｂをゆるみなく一体的に結合させる。Next, FIG. 4 is a sectional view showing a piezoelectric vibrating element according to an embodiment of the present invention, which is constructed by assembling the respective parts shown in FIGS. 1 to 3 above. The assembly order is as follows: First, two spacers 6 aligned with the small openings 3 provided near the center of the piezoelectric diaphragm 1 are placed on both sides of the piezoelectric diaphragm 1, and one of the divided weights is placed on each side of the piezoelectric diaphragm 1. The connecting shaft 11 with which lOa is connected is passed through the small opening 7 in the center of the valley washer 6, and the other weight to b is inserted, and both the weights 10a and 10b are integrally connected with the connecting shaft 11 without loosening. .
この場合、各接合面にはあらかじめ液状Ｉｔ、ＴＶシリ
コンゴム接着材を塗布してガタを防止し、また、結合軸
１１が小開孔３に接触しないように留意するものとする
。In this case, liquid It or TV silicone rubber adhesive should be applied in advance to each bonding surface to prevent looseness, and care should be taken to prevent the coupling shaft 11 from coming into contact with the small opening 3.
次（こ、上記第４図に示す圧電振動素子の動作について
説明する。今、金属薄板２と圧電板４との間に外部より
信号電圧ｅを印加すると、圧電板４はピエゾ効果により
印加された信号電圧Ｃに対応する伸縮力を生じ、金属薄
板２との間に剪断応力による湾曲変形を生起する。とこ
ろで、この発明では、圧電振動板１の中央部付近には重
錘９と粘弾性材料の各間座６で構成された機械的インピ
ーダンスが付加されているため、圧電振動板１の中央部
付近は拘束され、この結果、圧電振動板１は図の破線で
示すような凹レンズ形振動モードで変形する基準振動を
生起し、その最大振幅である圧電振動板１の外縁端部１
２より起碌力Ｆ１を取り出し、振動系を速度ｖｌ で励
振駆動を行うことかで ″きる。Next, we will explain the operation of the piezoelectric vibrating element shown in FIG. A stretching force corresponding to the signal voltage C generated is generated, and a bending deformation due to shear stress is generated between the piezoelectric diaphragm 1 and the thin metal plate 2.In the present invention, a weight 9 and a viscoelastic Since the mechanical impedance formed by each spacer 6 of the material is added, the vicinity of the center of the piezoelectric diaphragm 1 is restrained, and as a result, the piezoelectric diaphragm 1 vibrates in a concave lens shape as shown by the broken line in the figure. The outer edge 1 of the piezoelectric diaphragm 1 generates a reference vibration that deforms in the mode, and its maximum amplitude is the outer edge 1 of the piezoelectric diaphragm 1
This can be done by extracting the motive force F1 from 2 and driving the vibration system at a speed vl.
このような振動系の動作は、第５図及び第６図６ζ示す
等価回路図によりさらに明確に説明できる。The operation of such a vibration system can be explained more clearly with the equivalent circuit diagrams shown in FIGS. 5 and 6.
すなわち、圧電振動板１であるインピーダンスｚｌ（ｍ
、 ｃ、 １１）は重錘９ （ｍ２ ） と粘弾性材料
の間座６ （Ｃ！ｒ！ ）より成る拘束インピーダ７
スＺ、 （ｍ。That is, the impedance zl(m
, c, 11) is a restraint impeder 7 consisting of a weight 9 (m2) and a spacer 6 (C!r!) made of viscoelastic material.
SuZ, (m.
Ｃａｒｔ）と直列回路を形成しｓＺｌの起振力Ｆ１
に伴う流入する速度ｖ１は２．により制御される。ｚｔ
の内部要素は、第６図に示すように質量ｍ、とコンプラ
イアンスＣ１と粘性抵抗ｒ、の並列素子から □成
るので、低音域では、主として質ｌｆｔ ＩＪアクタン
スが関与して圧電振動板１の中央部付近を強く拘束し、
その外縁端部１２の蛋幅を増大するが、中音から高音域
にかけては、主としてコンプライアンスＣ２が関与して
上記の拘束を減少する結果、外縁端部１２の振幅が減少
する。したがって、速度ｖ１は作動周波数に応じて制御
され％２．の端子ｘ −ｙに接続される負荷ｚｏを近似
的に定速度Ｖｏをもって励振が可能になる。Cart) to form a series circuit with the excitation force F1 of sZl.
The inflow velocity v1 associated with this is 2. controlled by zt
As shown in Fig. 6, the internal element of the diaphragm consists of a parallel element of mass m, compliance C1, and viscous resistance r. The area around the body is strongly restrained,
The amplitude of the outer edge portion 12 is increased, but from the middle to high frequency range, the compliance C2 is mainly involved to reduce the above-mentioned constraint, and as a result, the amplitude of the outer edge portion 12 is reduced. Therefore, the speed v1 is controlled according to the operating frequency and %2. It becomes possible to excite the load zo connected to the terminal x-y of the motor at an approximately constant speed Vo.
上記したような圧電振動素子を用いて構成した圧電形コ
ーンスピーカを、第７図に断面図で示している。図に示
す圧電形コーンスピーカは、適当なサイズのコーン形振
動板１３ （ｍＱ ）の頂端部の折返し部に圧電振動板
１の外縁端部１２を結合し、コーン形振動板１３の外縁
端部は弾性エツジｘ４（ｃｏｒｏ）を介して固定部１５
に結合して構成されている。ここで、コーン形振動板１
３が定速度ＶＱで励振されれば、原則として一定音圧Ｐ
、を前方向へ放射することができる。なお、第５図に示
す等価回路図では、コーン形振動板１３のインピーダン
スｚ。A piezoelectric cone speaker constructed using the piezoelectric vibrating element as described above is shown in cross section in FIG. In the piezoelectric cone speaker shown in the figure, the outer edge 12 of the piezoelectric diaphragm 1 is coupled to the folded portion of the top end of a cone-shaped diaphragm 13 (mQ) of an appropriate size, and the outer edge of the cone-shaped diaphragm 13 is is fixed part 15 via elastic edge x4 (coro)
It is composed of a combination of Here, cone-shaped diaphragm 1
3 is excited at a constant velocity VQ, in principle a constant sound pressure P
, can be emitted in the forward direction. In addition, in the equivalent circuit diagram shown in FIG. 5, the impedance z of the cone-shaped diaphragm 13.
（ｍ、 Ｃｏｒｏ）は拘束インピーダンスＺ、 （ｍｔ
ｃｔｒｔ）のｘ、ｙ端子に接続することになる。(m, Coro) is the constraint impedance Z, (mt
ctrt) x and y terminals.
第８図は、第４図の圧電振動素子の振動態様を説明する
ための断面図である。図に示す圧電振動素子において、
圧電振動板１は圧電板４と金属薄板３とを貼り合わせた
積層体であることから、いわゆる共振感度Ｑが大である
ために、基準振動以外に定在波振動が発生する。例えば
、第８図に破線で示すｆ、〜ｆ、のような複数の節円振
動が低音域に生起し、圧電振動板１の外縁端部１２の速
度Ｖ。FIG. 8 is a cross-sectional view for explaining the vibration mode of the piezoelectric vibrating element shown in FIG. 4. In the piezoelectric vibrating element shown in the figure,
Since the piezoelectric diaphragm 1 is a laminate made of a piezoelectric plate 4 and a thin metal plate 3 bonded together, the so-called resonance sensitivity Q is large, so that standing wave vibrations are generated in addition to the reference vibration. For example, a plurality of nodal circular vibrations such as f and ~f shown by broken lines in FIG.
の周波数レスポンスは、第９図に実線で示すようになり
、主として低音域に顕著な山谷特性となって極大、極小
を持つ結果、特にスピーカ等に応用した場合に、周波数
レスポンスが乱れ、音質を劣化して好ましくない場合が
ある。一方において、 ゛上記した節円の定在波振
動は圧電振動板１の動的インピーダンスを軽減し、変換
感度を増強する上で重要な効果があることも見逃すこと
はできないので、−概には上記節円振動を抑制してはな
らない。この発明においては、第４図に示すように２枚
の間座６の粘性抵抗ｒ、の制動作用に依存して定在波振
動を吸収するようにしている。したがつて、間座６の材
質の選択は難しく、その材質としては、動的粘性抵抗が
適当であり、しかも、その温度係数が小さく、外界の温
度変化に対して影響が少ないものでなければならない。The frequency response becomes as shown by the solid line in Figure 9, and has peaks and troughs that are noticeable mainly in the bass range, with local maximums and minimums.As a result, the frequency response becomes distorted and the sound quality deteriorates, especially when applied to speakers, etc. It may deteriorate and become undesirable. On the other hand, it cannot be overlooked that the standing wave vibration of the nodal circle described above has an important effect in reducing the dynamic impedance of the piezoelectric diaphragm 1 and increasing the conversion sensitivity. The nodal vibrations mentioned above must not be suppressed. In this invention, as shown in FIG. 4, standing wave vibrations are absorbed depending on the braking action of the viscous resistance r of the two spacers 6. Therefore, it is difficult to select the material for the spacer 6, and the material must have appropriate dynamic viscous resistance, have a small temperature coefficient, and have little effect on external temperature changes. No.
ところが、粘弾性定数の安定な材料は極めて少なく、こ
の発明の出願人が試験的に検討した結果、粘弾性部材と
して、厚さ約０．８〜１゜０絽程度で、自質部に気泡細
粒を含有するブチルゴム系合成ゴムの発泡材から成り、
表面に表皮（スキンという）のあるものは、実用上はか
なり満足できるものであることが確認された。ところが
、上記ブチルゴム発泡材といえども過酷な温度条件に対
しては、粘弾性特性が充分とは云えない傾向がある。However, there are very few materials with stable viscoelastic constants, and as a result of experimental studies conducted by the applicant of the present invention, the applicant of the present invention found that they can be used as a viscoelastic member with a thickness of about 0.8 to 1.0 mm and without air bubbles in the self-governing part. Consists of foamed butyl rubber-based synthetic rubber containing fine particles.
It has been confirmed that materials with a skin on the surface are quite satisfactory in practical terms. However, even the butyl rubber foam material described above tends to have insufficient viscoelastic properties under severe temperature conditions.
第１Ｏ図はこの発明の他の実施例である圧電振動素子を
示す断面図である。図に示す圧電振動板１は上記第４図
に示すものと同様に構成されている。FIG. 1O is a sectional view showing a piezoelectric vibrating element according to another embodiment of the present invention. The piezoelectric diaphragm 1 shown in the figure has the same structure as that shown in FIG. 4 above.
また、この圧電振動板１の中央部付近に設けた小開孔３
の両面には、２枚の椀形ゴム質の間座１５ａ。In addition, a small opening 3 provided near the center of this piezoelectric diaphragm 1
There are two bowl-shaped rubber spacers 15a on both sides.
１５ｂを対抗して貼り合わせて２つの小室１７ ａ 、
１７ｂを形成し、この各小室１７ ａ 、 １７ ｂ
は２つの重錘を一体に結合した結合軸１６と小開孔３の
周囲とで形成される狭い間隙１９を通じて相互に連結さ
れている。また、各小室１７ａ、１７ｂ内には粘性油で
あるシリコン油１８（動粘度的１，０００ Ｃｓｔ （
センチストークス）程度のもの）が封入されている。こ
のため、動作時には、シリコン油１８は狭い間＠１９を
通過して上下の各小室１７ ａ 、 １７ ｂ間を交互
に流動するので、この実施例では、このようなシリコン
油１８が流動する際の粘性抵抗を利用するようにしたも
のである。そして、シリコン油１８の粘度と上記狭い間
隙１９を任意に調節することにより、自由に所要の粘性
抵抗を広範囲に得ることができる。15b are pasted together to form two small chambers 17a,
17b, and each of these small chambers 17a, 17b
are interconnected through a narrow gap 19 formed by a connecting shaft 16 that integrally connects two weights and the periphery of the small aperture 3. Furthermore, in each of the small chambers 17a and 17b, there is silicone oil 18 (kinematic viscosity: 1,000 Cst), which is a viscous oil.
centistokes)) is enclosed. Therefore, during operation, the silicone oil 18 passes through the narrow space @19 and flows alternately between the upper and lower chambers 17a and 17b, so in this embodiment, when such silicone oil 18 flows, It is designed to utilize the viscous resistance of By arbitrarily adjusting the viscosity of the silicone oil 18 and the narrow gap 19, the desired viscous resistance can be freely obtained over a wide range.
また、シリコン油１８の動粘度は温度依存性が純水に匹
敵するほどに安定な物質であるので、上記ブチルゴム発
泡材の粘性よりもはるかに安定していて、過酷な外部の
温度条件にも充分に耐えられ得る。In addition, the kinematic viscosity of silicone oil 18 is a stable substance whose temperature dependence is comparable to that of pure water, so it is much more stable than the viscosity of the butyl rubber foam material, and can withstand harsh external temperature conditions. It can be tolerated well.
この発明は以上説明したとおり、圧電振動素子において
、圧ｔｉ動板の中央部付近に設けた小開孔を貫通する結
合軸により２つの重錘を、それぞれ粘弾性部材を介在し
て結合し、圧電振動板の中央部付近を拘束するように構
成したので、外部気温の変化に対しても振動の安定性が
得られ、また、組立て加工が容易で、信頼性の高い製品
を安価に供給することができるという優れた効果を奏す
るものである。As explained above, in a piezoelectric vibrating element, this invention connects two weights via a viscoelastic member through a connecting shaft passing through a small hole provided near the center of a piezoelectric plate, Since the piezoelectric diaphragm is configured to be constrained near the center, vibration stability is achieved even with changes in external temperature.It is also easy to assemble, and provides a highly reliable product at a low price. It has the excellent effect of being able to
第１図、第２図及び第３図は、それぞれこの発明の一実
施例である圧電振動素子を構成する部品を示す斜視図及
び断面図、第４図はこの発明の一実施例である圧電振動
素子を示す断面図、第５図及び第６図は、第４図の圧電
振動素子とその一部の各等価回路図、第７図は、第４図
の圧電振動素子を用いて構成した圧電形コーンスピーカ
を示す断面図、第８図及び第９図は、それぞれ第４図の
圧電振動素子の振動態様を説明するための断面図、及び
周波数レスポンスを示す図、第１Ｏ図はこの発明の他の
実施例である圧電振動素子を示す断面図である。
図において、１・・・圧電振動板、２・・・金属薄板、
３．７・・・小開孔、４・・・圧電板、５ａ・・・圧電
撮動板１の外周部、５ｂ・・・圧電振動板１の内周部、
６゜１５ ａ 、 １５ ｂ−・・間座、８・・・被膜
％ ９１１０ａ 、 １０ｂ、、。
重錘、１１ 、１６・・・結合軸、１２・・・外縁端部
、１３・・・コーン形振動板、１４・・・弾性エツジ％
１５・・・固定部、１７ａ。
１７ ｂ・・・小室％１８・・・シリコン油、１９・・
・間隙である。 □なお、各図中、同一符号は同一
、又は相当部分を示す。
第４図 第３ｒＩＪ
３．７： ハーフ′ＡＪＬ
１２’ ５”１ＪＬＩＩｎｌｉＰ４：圧１９
又
５ｏ：氏Ｖ視動樅１の外題音Ｙ
５ｂ：瓜電復動猥１の円周郭
６：関度
８：液膜
第 ６ 図
第７１１1, 2, and 3 are a perspective view and a cross-sectional view, respectively, showing parts constituting a piezoelectric vibrating element which is an embodiment of the present invention, and FIG. 4 is a piezoelectric vibrating element which is an embodiment of the present invention. 5 and 6 are equivalent circuit diagrams of the piezoelectric vibrating element shown in FIG. 4 and a portion thereof, and FIG. 7 is a cross-sectional view showing the piezoelectric vibrating element shown in FIG. 4. 8 and 9 are a cross-sectional view showing the piezoelectric cone speaker, respectively, are a cross-sectional view for explaining the vibration mode of the piezoelectric vibrating element in FIG. It is a sectional view showing a piezoelectric vibrating element which is another example. In the figure, 1...piezoelectric diaphragm, 2...metal thin plate,
3.7...Small opening, 4...Piezoelectric plate, 5a...Outer circumference of piezoelectric imaging plate 1, 5b...Inner circumference of piezoelectric diaphragm 1,
6゜15a, 15b--spacer, 8...coating% 9110a, 10b,. Weight, 11, 16... Connection shaft, 12... Outer edge end, 13... Cone-shaped diaphragm, 14... Elastic edge %
15... Fixed part, 17a. 17 b... Small room% 18... Silicone oil, 19...
・It is a gap. □In each figure, the same reference numerals indicate the same or equivalent parts. Figure 4 3rIJ 3.7: Half'AJL
12'5"1JLIInliP4: Pressure 19
Also, 5o: Mr. V visual movement fan 1 extra title sound Y 5b: Guaden fumo 1 circumference 6: Kanji 8: Liquid film No. 6 Figure 711
Claims (3)
る結合軸により２つの重錘を、それぞれ粘弾性部材を介
在して結合し、前記圧電振動板の中央部付近を拘束して
、この圧電振動板の外縁端部から起振力を取り出すよう
に構成したことを特徴とする圧電振動素子。(1) Two weights are connected via a viscoelastic member by a connecting shaft passing through a small hole provided near the center of the piezoelectric diaphragm, and the center of the piezoelectric diaphragm is restrained. A piezoelectric vibrating element characterized in that the piezoelectric vibrating element is configured to extract an excitation force from an outer edge portion of the piezoelectric vibrating plate.
する合成ゴム発泡材から成る部材を用いることを特徴と
する特許請求の範囲第１項記載の圧電振動素子。(2) The piezoelectric vibrating element according to claim 1, wherein the viscoelastic member is a member made of a synthetic rubber foam material containing fine cell particles in its own part.
を前記圧電振動板の小開孔の両面に対抗して貼り合わせ
て２つの小室を形成し、この各小室に封入した粘性油を
、前記圧電振動板の小開孔と前記結合軸との間隙を通し
て流動させ、その流動の際の粘性抵抗を利用した部材を
用いることを特徴とする特許請求の範囲第１項記載の圧
電振動素子。(3) As the viscoelastic member, two bowl-shaped rubber spacers are pasted together opposite both sides of the small opening of the piezoelectric diaphragm to form two small chambers, and each of the small chambers is sealed. Claim 1, characterized in that the viscous oil is made to flow through the gap between the small opening of the piezoelectric diaphragm and the coupling shaft, and a member is used that utilizes viscous resistance during the flow. Piezoelectric vibrating element.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15361785A JPS6214600A (en) | 1985-07-12 | 1985-07-12 | Piezoelectric vibrator |
| GB08521410A GB2166022A (en) | 1984-09-05 | 1985-08-28 | Piezoelectric vibrator |
| US06/771,838 US4654554A (en) | 1984-09-05 | 1985-08-30 | Piezoelectric vibrating elements and piezoelectric electroacoustic transducers |
| DE19853531325 DE3531325A1 (en) | 1984-09-05 | 1985-09-02 | PIEZOELECTRIC VIBRATION BODIES AND SPEAKERS EQUIPPED WITH THE SAME |
| FR8513100A FR2569931A1 (en) | 1984-09-05 | 1985-09-04 | VIBRANT PIEZOELECTRIC ELEMENTS AND ELECTROACOUSTIC PIEZOELECTRIC TRANSDUCERS USING SUCH ELEMENTS |
| FR8600712A FR2574610A1 (en) | 1984-09-05 | 1986-01-20 | Piezoelectric loudspeaker - with two weights joined by viscoelastic layers and connecting rod |
| FR8600711A FR2574609A1 (en) | 1984-09-05 | 1986-01-20 | Piezoelectric element for radio loudspeaker - includes piezoelectric plate with main and auxiliary weights attached to visco-elastic layers on opposed faces |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15361785A JPS6214600A (en) | 1985-07-12 | 1985-07-12 | Piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6214600A true JPS6214600A (en) | 1987-01-23 |
| JPH0332960B2 JPH0332960B2 (en) | 1991-05-15 |
Family
ID=15566404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15361785A Granted JPS6214600A (en) | 1984-09-05 | 1985-07-12 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6214600A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6747395B1 (en) * | 1998-11-02 | 2004-06-08 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric loudspeaker |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55104200A (en) * | 1979-02-06 | 1980-08-09 | Matsushita Electric Ind Co Ltd | Piezoelectric horn speaker |
| JPS55125693U (en) * | 1979-03-01 | 1980-09-05 | ||
| JPS58202698A (en) * | 1982-05-21 | 1983-11-25 | Citizen Watch Co Ltd | Supporting structure of piezoelectric type electro- acoustic transducer |
-
1985
- 1985-07-12 JP JP15361785A patent/JPS6214600A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55104200A (en) * | 1979-02-06 | 1980-08-09 | Matsushita Electric Ind Co Ltd | Piezoelectric horn speaker |
| JPS55125693U (en) * | 1979-03-01 | 1980-09-05 | ||
| JPS58202698A (en) * | 1982-05-21 | 1983-11-25 | Citizen Watch Co Ltd | Supporting structure of piezoelectric type electro- acoustic transducer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6747395B1 (en) * | 1998-11-02 | 2004-06-08 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric loudspeaker |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0332960B2 (en) | 1991-05-15 |
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