JPS62138834A - Active matrix type liquid crystal display device - Google Patents
Active matrix type liquid crystal display deviceInfo
- Publication number
- JPS62138834A JPS62138834A JP60279931A JP27993185A JPS62138834A JP S62138834 A JPS62138834 A JP S62138834A JP 60279931 A JP60279931 A JP 60279931A JP 27993185 A JP27993185 A JP 27993185A JP S62138834 A JPS62138834 A JP S62138834A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- liquid crystal
- mim
- display device
- crystal display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【発明の詳細な説明】
技術分野
本発明は、アクティマトリクス型の液晶表示装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to an acti-matrix liquid crystal display device.
従来技術
液晶表示装置の各画素にアクティブ素子を形成して駆動
するアクティブマトリクス表示は、表示品質の向上と大
容量化を可能にするものとして注目され、小型カラーテ
レビからＯＡ用ドツトマトリクス用表示装置へと展開し
つつある。Prior Art Active matrix displays, in which active elements are formed and driven in each pixel of a liquid crystal display device, have attracted attention as a means of improving display quality and increasing capacity. It is developing into
液晶駆動用アクティブ素子としては、ＴＦＴ（Ｔｈｉｎ
Ｆｉｌｍ Ｔｒａｎｓｉｓｔｏｒ ：薄膜トランジス
タ）やＭ Ｉ Ｍ （Ｍｅｔａｌ Ｉｎ５ｕｌａｔｏｒ
Ｍｅｔａｌ）素子が知られているが、いずれも金属お
よびその酸化物で形成するため、一般に蒸着、スパッタ
等の真空系を必要とし生産性が悪い。As an active element for driving liquid crystal, TFT (Thin
Film Transistor (Thin Film Transistor) and MIM (Metal In5ulator)
Metal) elements are known, but since they are all formed from metals and their oxides, they generally require vacuum systems such as vapor deposition and sputtering, resulting in poor productivity.
見訓勿且孜
本発明は、製造工程を簡略化することが可能で、生産性
に優れたアクティダマ１−リクス型液晶表示装置を提供
するものである。DISCLOSURE OF THE INVENTION The present invention provides an actidamerix type liquid crystal display device that can simplify the manufacturing process and has excellent productivity.
升豆立直處
本発明のアクティブマトリクス型液晶表示装置は、基板
上にストライプ状に電極を形成し。The active matrix liquid crystal display device of the present invention has electrodes formed in stripes on a substrate.
その上面に有機多結晶体膜を形成し、さらにその上に画
素電極を形成してＭ Ｉ Ｍ構造とした第１の基板と、
ストライプ状の対向電極を有する第２の基板とを離間、
対向して配設し、これら基板間に液晶を収納したことを
特徴とする特以下、添付図面に治って本発明をさらに詳
細に説明する。a first substrate having an M I M structure by forming an organic polycrystalline film on its upper surface and further forming a pixel electrode thereon;
separated from a second substrate having a striped counter electrode;
The present invention will now be described in more detail with reference to the accompanying drawings.
第１図は、ＭＩＭ基板１１の構成例を示す断面図、第２
図は平面図であり、透明基板１３上に設けられた電極１
５上に有機多結晶体膜１７が連続して設けられ、さらに
その上に画素電極１９が形成されてＭＩＭ素子を構成し
ている。電極１５はストライプ状を呈しており、銅など
の高導電性材料から形成されてい２゜画素電極１９はＩ
Ｔ○などの透明導電膜から形成されている。なお、電極
１５を透明電極としたり、画素電極１９を不透明電極と
することもできる。基板としてはガラス基板、プラスチ
ックフィルム基板などが用いられる。FIG. 1 is a sectional view showing an example of the configuration of the MIM board 11;
The figure is a plan view, and the electrode 1 provided on the transparent substrate 13
An organic polycrystalline film 17 is continuously provided on the organic polycrystalline film 17, and a pixel electrode 19 is further formed on the organic polycrystalline film 17 to constitute an MIM element. The electrode 15 has a striped shape and is made of a highly conductive material such as copper.
It is formed from a transparent conductive film such as T○. Note that the electrode 15 may be a transparent electrode, and the pixel electrode 19 may be an opaque electrode. As the substrate, a glass substrate, a plastic film substrate, etc. are used.
有機多結晶体膜１７は、電極１５と画素電極１９との間
に電圧が印加された際に、ＭＩＭ構造をとって第６図に
示すような降伏特性を示すものが選択される。電極１５
、有機絶縁体膜１７および画素電極１９はＭＩＭ素子を
形成し、第６図に示したようにしきい値を有する。電極
１５と画素電極Ｘ９との間に電圧を印加すると、ある電
圧以上で急峻に電圧が増加する。有機多結晶体としては
テトラシアノキノジメタン（ＴＣＮＱ）などが用いられ
る。有機多結晶体膜は塗布法などにより容易に形成する
ことができ、金属酸化物薄膜と異なり真空雰囲気を必要
としない。また、有機多結晶体は誘電率が大きいので、
比較的膜厚が厚くてもＭＩＭ構造を形成することができ
るために、有機多結晶体膜をストライプ状の電極１５に
合わせてパターニングすることを省略できる。この結果
、さらに生産性を改善し、歩留りを向上することができ
る。従来のＭＩＭ素子基板では電極表面（上面）に絶縁
性を持たせるとともにＭＩＭを構造を実現するために、
電極の上面に厚く酸化物層を設けるとともに側面に薄い
酸化物層を形成し、側面の酸化物を介してＭＩＭ構造と
していた。そのため、側面の酸化物層を形成するための
、パターニング工程が必要であった。また、電極側面を
利用するために、電極と画素電極とを離間して基板上に
形成することが必要となる。これに対して本発明では、
電極１５の上に有機多結晶体膜１７を介して重ねるよう
にして画素電極を形成することもでき、設計上の自由度
が向上する。The organic polycrystalline film 17 is selected to have an MIM structure and exhibit breakdown characteristics as shown in FIG. 6 when a voltage is applied between the electrode 15 and the pixel electrode 19. Electrode 15
, the organic insulator film 17 and the pixel electrode 19 form an MIM element and have a threshold as shown in FIG. When a voltage is applied between the electrode 15 and the pixel electrode X9, the voltage increases sharply above a certain voltage. Tetracyanoquinodimethane (TCNQ) or the like is used as the organic polycrystal. Organic polycrystalline films can be easily formed by coating methods and do not require a vacuum atmosphere, unlike metal oxide thin films. In addition, organic polycrystals have a large dielectric constant, so
Since the MIM structure can be formed even if the film is relatively thick, patterning the organic polycrystalline film to match the striped electrodes 15 can be omitted. As a result, it is possible to further improve productivity and increase yield. In conventional MIM element substrates, in order to provide insulation on the electrode surface (top surface) and to realize the MIM structure,
A thick oxide layer was provided on the top surface of the electrode, and a thin oxide layer was formed on the side surfaces, forming an MIM structure with the oxide on the side surfaces interposed. Therefore, a patterning process was required to form an oxide layer on the side surfaces. Furthermore, in order to utilize the side surfaces of the electrodes, it is necessary to form the electrodes and the pixel electrodes on the substrate apart from each other. In contrast, in the present invention,
The pixel electrode can also be formed so as to overlap the electrode 15 with the organic polycrystalline film 17 interposed therebetween, increasing the degree of freedom in design.
第３図は、第１図に示したＭＩＭ基板１１を基板を用い
たアクティブマトリクス型液晶表示装置の構成例を示す
一部断面図である。ＭＩＭ基板１１上に配向膜２３を形
成した第１の基板２１と第２の基′Ｆｉ３１とが離間、
対向して配設され、その間に液晶３３が封入されている
。第２の基板３１にはス［・ライブ状に透明電極３５が
形成されており、さらにその上に配向膜が形成されてい
る。FIG. 3 is a partial cross-sectional view showing a configuration example of an active matrix liquid crystal display device using the MIM substrate 11 shown in FIG. 1 as a substrate. The first substrate 21 on which the alignment film 23 is formed on the MIM substrate 11 and the second base 'Fi31 are separated,
They are arranged to face each other, and a liquid crystal 33 is sealed between them. A transparent electrode 35 is formed in the shape of a strip on the second substrate 31, and an alignment film is further formed thereon.
Ｍ 工Ｍ素子部４１と液晶４３との等価回路は第７図に
示した通りであり、電圧によりＭＩＭ素子部４１の抵抗
が変化し、駆動信号により選択された画素には、電荷が
チャージされて表示が保持されるため、走査信号印加時
間の短いマトリクス型液晶表示装置においても、十分な
コントラストが得られる。The equivalent circuit between the MIM element section 41 and the liquid crystal 43 is as shown in FIG. Since the display is maintained, sufficient contrast can be obtained even in a matrix type liquid crystal display device in which the scanning signal application time is short.
第４図は、本発明で用いられるＭＩＭ基板１１の他の構
成例を示す断面図である。有機多結晶体膜が、連続的で
はなくパターニングされている以外は、第１図に示した
ものと同様である。FIG. 4 is a sectional view showing another configuration example of the MIM substrate 11 used in the present invention. It is similar to that shown in FIG. 1, except that the organic polycrystalline film is patterned rather than continuous.
第５図は、第４図に示したＭＩＭ基板１１を基板に用い
た液晶表示装置の構成例を示す一部断面図である。ＭＩ
Ｍ基板１１上に配向膜２３を形成した第１の基板２１と
第２の基板３１とが離間、対向して配設され、その間に
液晶３３が封入されている。第２の基板３１にはストラ
イプ状に透明電極３５が形成されており、さらにその上
に配向膜が形成されている。FIG. 5 is a partial cross-sectional view showing a configuration example of a liquid crystal display device using the MIM substrate 11 shown in FIG. 4 as a substrate. M.I.
A first substrate 21 having an alignment film 23 formed on the M substrate 11 and a second substrate 31 are arranged facing each other and separated from each other, and a liquid crystal 33 is sealed between them. Transparent electrodes 35 are formed in stripes on the second substrate 31, and an alignment film is further formed thereon.
発明の効果
本発明によれば、有機多結晶体膜を用いてＭＩＭ素子を
構成しているので、塗布法などの簡便な方法により膜形
成ができ、工程が簡略化されるとともに歩留りも向上す
る。Effects of the Invention According to the present invention, since the MIM element is constructed using an organic polycrystalline film, the film can be formed by a simple method such as a coating method, which simplifies the process and improves the yield. .
実施例
厚さ３００μｍのガラス板上に、巾３０μｍ、ピッチ２
００μｍのストライプ状に銅の電極を形成した。Example: On a glass plate with a thickness of 300 μm, a width of 30 μm and a pitch of 2
Copper electrodes were formed in stripes of 00 μm.
この透明基板を、アセトニトリル中にテトラシアノキシ
ジメタンを溶解した液に浸漬し、厚さ１μｍのテトラシ
アノキノジメタン膜を形成した。さらにこの上面にＩＴ
Ｏ膜を形成し、エツチングにより画素電極を形成してＭ
ＩＭ基板を作成した。This transparent substrate was immersed in a solution of tetracyanoxydimethane dissolved in acetonitrile to form a 1 μm thick tetracyanoquinodimethane film. Furthermore, on the top of this
Form an O film, form a pixel electrode by etching, and
An IM board was created.
一方、同様のガラス基板上にＩＴ○膜を形成し、エツチ
ングによりストライプ状の透明電極を形成して対向基板
とした。On the other hand, an IT◯ film was formed on a similar glass substrate, and striped transparent electrodes were formed by etching to form a counter substrate.
これら２つの基板にそれぞれポリイミド配向膜を形成し
たのちラビング処理したのち、１０μｍのギャップ幅で
対向させ、この中にネマティック液晶ＺＬＩ １５０５
（メルク社製）を封入し周囲をシールして、ＭＩＭアク
ティブマトリクス型液晶表示装置（セル）を作成した。After forming a polyimide alignment film on each of these two substrates and subjecting them to a rubbing treatment, they were placed facing each other with a gap width of 10 μm, and a nematic liquid crystal ZLI 1505 was placed between them.
(manufactured by Merck & Co., Ltd.) and the periphery was sealed to create an MIM active matrix liquid crystal display device (cell).
このセルを２枚の偏光板に挟み、線順次駆動方式により
駆動したところ、デユーティ比１／２５６程度までほぼ
スタティック駆動と同様のコントラスト視覚特性が得ら
れた。When this cell was sandwiched between two polarizing plates and driven using a line-sequential driving method, contrast visual characteristics almost the same as those obtained with static driving were obtained up to a duty ratio of about 1/256.
第１図は本発明のＭＩＭ基板の構成例を示す一部断面図
、第２図はその平面図である。第３図は本発明の液晶表
示装置の構成例を示す一部断面図である。
第４図は本発明のＭＩＭ基板の他の構成例を示す一部断
面図、第５図はこの基板を用いた本発明の液晶表示装置
の構成例を示す一部断面図である。
第６図はＭＩＭ素子の電圧−電流特性を示すグラフであ
り、第７図は、液晶表示装置の等価回路を示す図である
。
１３・・・ＭＩＭ基板 １５・・・電 極１７
・・・有機多結晶体膜 １９・・画素電極２１・・・
第１の基板 ３１・・第２の基板３５・・・透明
電極FIG. 1 is a partial sectional view showing an example of the configuration of an MIM board according to the present invention, and FIG. 2 is a plan view thereof. FIG. 3 is a partial cross-sectional view showing an example of the structure of a liquid crystal display device of the present invention. FIG. 4 is a partial sectional view showing another example of the configuration of the MIM substrate of the present invention, and FIG. 5 is a partial sectional view showing an example of the configuration of the liquid crystal display device of the invention using this substrate. FIG. 6 is a graph showing voltage-current characteristics of an MIM element, and FIG. 7 is a diagram showing an equivalent circuit of a liquid crystal display device. 13... MIM board 15... Electrode 17
...Organic polycrystalline film 19...Pixel electrode 21...
First substrate 31... Second substrate 35... Transparent electrode
Claims (1)
有機多結晶体膜を形成し、さらにこの有機多結晶体を介
して画素電極を形成してＭＩＭ構造とした第１の基板と
、ストライプ状の対向電極を有する第２の基板とを離間
、対向して配設し、これら基板間に液晶を収納したこと
を特徴とするアクティブマトリクス型液晶表示装置。1. A first substrate having an MIM structure by forming electrodes in a stripe shape on the substrate, forming an organic polycrystalline film on the upper surface thereof, and further forming a pixel electrode through the organic polycrystalline body; An active matrix type liquid crystal display device, characterized in that a second substrate having a striped counter electrode is arranged to be spaced apart and facing each other, and a liquid crystal is housed between these substrates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60279931A JPS62138834A (en) | 1985-12-12 | 1985-12-12 | Active matrix type liquid crystal display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60279931A JPS62138834A (en) | 1985-12-12 | 1985-12-12 | Active matrix type liquid crystal display device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62138834A true JPS62138834A (en) | 1987-06-22 |
Family
ID=17617906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60279931A Pending JPS62138834A (en) | 1985-12-12 | 1985-12-12 | Active matrix type liquid crystal display device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62138834A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0417852A2 (en) * | 1989-09-15 | 1991-03-20 | Philips Electronics Uk Limited | Active matrix display devices and methods of fabricating such |
| JP2006520478A (en) * | 2003-01-17 | 2006-09-07 | ダイオード・ソリューションズ・インコーポレーテッド | Display using organic materials |
| US7898042B2 (en) | 2006-11-07 | 2011-03-01 | Cbrite Inc. | Two-terminal switching devices and their methods of fabrication |
| US8222077B2 (en) | 2006-11-07 | 2012-07-17 | Cbrite Inc. | Metal-insulator-metal (MIM) devices and their methods of fabrication |
| US8807926B2 (en) | 2008-11-05 | 2014-08-19 | Ihi Corporation | Turbocharger |
| US9528386B2 (en) | 2011-05-26 | 2016-12-27 | Ihi Corporation | Nozzle blade |
| US9741901B2 (en) | 2006-11-07 | 2017-08-22 | Cbrite Inc. | Two-terminal electronic devices and their methods of fabrication |
-
1985
- 1985-12-12 JP JP60279931A patent/JPS62138834A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0417852A2 (en) * | 1989-09-15 | 1991-03-20 | Philips Electronics Uk Limited | Active matrix display devices and methods of fabricating such |
| JP2006520478A (en) * | 2003-01-17 | 2006-09-07 | ダイオード・ソリューションズ・インコーポレーテッド | Display using organic materials |
| US8253910B2 (en) | 2003-01-17 | 2012-08-28 | Cbrite Inc. | Display employing organic material |
| US7898042B2 (en) | 2006-11-07 | 2011-03-01 | Cbrite Inc. | Two-terminal switching devices and their methods of fabrication |
| US8193594B2 (en) | 2006-11-07 | 2012-06-05 | Cbrite Inc. | Two-terminal switching devices and their methods of fabrication |
| US8222077B2 (en) | 2006-11-07 | 2012-07-17 | Cbrite Inc. | Metal-insulator-metal (MIM) devices and their methods of fabrication |
| US9741901B2 (en) | 2006-11-07 | 2017-08-22 | Cbrite Inc. | Two-terminal electronic devices and their methods of fabrication |
| US8807926B2 (en) | 2008-11-05 | 2014-08-19 | Ihi Corporation | Turbocharger |
| US9528386B2 (en) | 2011-05-26 | 2016-12-27 | Ihi Corporation | Nozzle blade |
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