JPS62137508A - Online thickness profile measuring apparatus - Google Patents
Online thickness profile measuring apparatusInfo
- Publication number
- JPS62137508A JPS62137508A JP27829185A JP27829185A JPS62137508A JP S62137508 A JPS62137508 A JP S62137508A JP 27829185 A JP27829185 A JP 27829185A JP 27829185 A JP27829185 A JP 27829185A JP S62137508 A JPS62137508 A JP S62137508A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- line
- rail
- scanning
- mount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、生産工程に組み込み、メッキ鋼板上のメッキ
層の厚さ、又は、磁気シート上の磁性膜塗布層の厚さを
螢光Ｘ線分析法により、連続的に迅速、且つ非破壊的に
測定し、厚みプロフィルを測定するためのオンライン厚
みプロフィル測定装置に関する。Detailed Description of the Invention [Industrial Application Field] The present invention is incorporated into the production process, and the thickness of the plating layer on a plated steel sheet or the thickness of the magnetic film coating layer on a magnetic sheet is controlled by fluorescent X. The present invention relates to an online thickness profile measuring device for measuring a thickness profile continuously, rapidly, and non-destructively using a line analysis method.
本発明は、ラインシート上に、塗布膜の膜厚測定用の螢
光Ｘ線装置を、第一架台はシート巾方向のみに走査し、
第二架台はラインシートスピードに同期させてラインシ
ート方向に走査し、かつラインシート巾方向にも走査し
、第三架台はラインシート中方向に走査し、かつ任意の
場所で任意の時間停止して塗布膜の膜厚を測定するオン
ライン厚みプロフィル測定装置である。In the present invention, a fluorescent X-ray device for measuring the thickness of a coating film is placed on a line sheet, the first mount scans only in the sheet width direction,
The second mount scans in the direction of the line sheet in synchronization with the line sheet speed and also scans in the width direction of the line sheet, and the third mount scans in the direction of the line sheet and stops at any location for any time. This is an online thickness profile measurement device that measures the thickness of a coating film.
従来、生産工程におけるメッキ鋼板上の付着量あるいは
磁気シート上の磁性膜の塗布量の測定の一方法として、
螢光Ｘ線による測定法が用いられている。ところが、第
１図に示すように、オンラインシート１上に架台２を走
査レール３の上一式設けるだけであり、測定ヘッド４を
走査させても第２図及び第３図に示す測定軌跡となった
。第２図は、通常のスキャンモードてあり、測定軌跡２
０ａはオンラインシートのラインスピードが速くなれば
なるほど、厚み↑ｎ報としてはライン方向の情仰に近く
なり、巾方向の厚み推定の精度が悪（なる。従って、測
定ヘッドのスキャンスピードの高速化が要求されるが、
現実的には不可能である。Conventionally, as a method for measuring the amount of coating on a plated steel plate or the amount of magnetic film on a magnetic sheet in the production process,
A measurement method using fluorescent X-rays is used. However, as shown in FIG. 1, only a set of mounts 2 and scanning rails 3 are provided on the online sheet 1, and even when the measuring head 4 is scanned, the measurement trajectory shown in FIGS. 2 and 3 is not achieved. Ta. Figure 2 shows normal scan mode, measurement trajectory 2
0a, as the line speed of the online sheet becomes faster, the thickness↑n information becomes closer to the information in the line direction, and the accuracy of thickness estimation in the width direction becomes worse.Therefore, the scanning speed of the measurement head increases. is required, but
This is not realistically possible.
又、第３図は、メッキ鋼板のメッキ付着誉測定によく用
いられる方式で、ＪＩＳ−Ｈ−０４０１ｒ溶融亜鉛めっ
き試験方法Ｊに規定されている三点法に準拠された方式
で得られる測定軌跡２０ｂであるが、これも前述同様に
シート巾方向の情報が欠けている。In addition, Figure 3 shows the measurement locus obtained by a method often used to measure plating adhesion on plated steel sheets, which is based on the three-point method specified in JIS-H-0401r hot-dip galvanizing test method J. 20b, but this also lacks information in the sheet width direction as described above.
本発明は以上に鑑みてなされたものであって、従来のス
キャンモードと、三点モードによる測定部と、合わせて
架台自らライン同期し走査させることにより完全に巾方
向情報を測定する測定ヘッドを有することにより、前述
のライン方向の情報と複合させることによって、測定シ
ート全面の厚みプロフィルを推定し、提供することを目
的とする。The present invention has been made in view of the above, and includes a measurement unit that uses the conventional scan mode and three-point mode, and a measurement head that completely measures width direction information by synchronizing and scanning the line of the mount itself. The purpose of this is to estimate and provide the thickness profile of the entire surface of the measurement sheet by combining it with the above-mentioned line direction information.
第４図は、本発明の一実施例である。ラインシート２の
上に第一走査レール５をライン中方向に設け、第一走査
レール５にライン巾方向に走査できるように第一架台８
及び第一測定ヘッド１１を設置する。この第一測定ヘッ
ドによりラインシートの厚み測定軌跡は第２図の測定軌
跡２０ａを得る。更に、第一走査レール５に隣接し、ラ
イン巾方向に第三走査レール６を設け、第三架台９及び
第三測定ヘッドを設ける。第三架台９は、ラインシート
１の巾方向に走査し、かつ任意設定の場所に任意の時間
固定可能であり、両端と中心を固定場所とした場合のラ
インシート厚み測定軌跡は第３図の測定軌跡２０ｂを得
る。また更に、ラインシート１の両端に、ラインシート
１に平行して同期スキャンレール１４．１４を設け、同
期スキャンレール１４．１４に第二走査レール７を設置
し第二走査レール７に、第二架台１０及び第二測定ヘッ
ド１３を設置する。第二走査レール７は、同期スキャン
レール１４．１４上をラインシート１のラインスピード
に同期して走査し、さらに、第二架台ＩＯｌ及び第二測
定ヘッド１３は、第二走査レール７上を、第二走査レー
ルの走査に同期して走査させることにより、ラインシー
トｌの測定軌跡は第５図のような測定軌跡２０ｃが得ら
れ、完全なラインシート１のシート巾方向の測定軌跡が
得られる。FIG. 4 is an embodiment of the present invention. A first scanning rail 5 is provided on the line sheet 2 in the middle direction of the line, and a first mount 8 is provided so that the first scanning rail 5 can be scanned in the line width direction.
and the first measurement head 11 is installed. With this first measurement head, the thickness measurement locus of the line sheet obtains the measurement locus 20a shown in FIG. 2. Further, a third scanning rail 6 is provided adjacent to the first scanning rail 5 in the line width direction, and a third mount 9 and a third measuring head are provided. The third mount 9 can scan in the width direction of the line sheet 1 and can be fixed at any preset location for any time, and the line sheet thickness measurement trajectory when both ends and the center are fixed locations is as shown in Figure 3. A measurement trajectory 20b is obtained. Furthermore, synchronous scan rails 14.14 are provided at both ends of the line sheet 1 in parallel with the line sheet 1, a second scanning rail 7 is installed on the synchronous scan rail 14.14, and a second scanning rail 7 is provided on the second scanning rail 7. The pedestal 10 and the second measurement head 13 are installed. The second scanning rail 7 scans on the synchronous scanning rail 14.14 in synchronization with the line speed of the line sheet 1, and furthermore, the second mount IOL and the second measurement head 13 scan on the second scanning rail 7, By scanning in synchronization with the scanning of the second scanning rail, a measurement trajectory 20c of the line sheet 1 as shown in Fig. 5 is obtained as the measurement trajectory of the line sheet 1, and a complete measurement trajectory of the line sheet 1 in the sheet width direction is obtained. .
オンラインシートに対する横方向、縦方向及び任意三点
位置の厚み情報を提供することができることから、シー
ト全体の厚みプロファイルを精度良く推定でき、更に、
それによって、より精度の良い生産管理を可能とする効
果を本発明は有する。Since it is possible to provide online sheet thickness information in the horizontal direction, vertical direction, and arbitrary three-point positions, the thickness profile of the entire sheet can be estimated with high accuracy.
Thereby, the present invention has the effect of enabling more accurate production control.
第１図は従来の方式を示すブロック図、第２図は従来方
式及び本発明による第一測定ヘッドによる測定軌跡を示
す図、第３図は従来方式及び本発明による第三測定ヘッ
ドによる測定軌跡を示す図、第４図は本発明の一実施例
を示すブロック図、第５図は本発明による第二測定ヘッ
ドによる測定軌跡を示す図である。
１・・・ラインシート
２・・・走査台
３・・・走査レール
４・・・測定ヘッド
５・・・第一走査レール
６・・・第三走査レール
７・・・第二走査レール
８・・・第一架台
９・・・第三架台
１０・・・第二架台
１１・・・第一測定ヘッド
１２・・・第三測定ヘッド
１３・・・第二測定ヘッド
１４・・・同期スキャンレール
以上
出願人 セイコー電子工業株式会社
代理人 弁理士 最 上 務（他１名）オ芝来停」の
フ゛ロック図
第 １ 図
ライ二ノろ佐ｎ
第２面
従来質１及び本発明０
％３ヲ則宙１へ・／ド１＝Ｚ’）５則楚軌跡蜀３図
−焚詭鋼のプロ・１７図
篇４図
案３渭ｊ定へ・汁によろ渭り定ｗＬ跡ぢホ寸図第５図FIG. 1 is a block diagram showing the conventional method, FIG. 2 is a diagram showing the measurement trajectory by the first measuring head according to the conventional method and the present invention, and FIG. 3 is the measurement trajectory by the conventional method and the third measuring head according to the present invention. FIG. 4 is a block diagram showing an embodiment of the present invention, and FIG. 5 is a diagram showing a measurement trajectory by the second measuring head according to the present invention. 1... Line sheet 2... Scanning table 3... Scanning rail 4... Measuring head 5... First scanning rail 6... Third scanning rail 7... Second scanning rail 8. ...First mount 9...Third mount 10...Second mount 11...First measurement head 12...Third measurement head 13...Second measurement head 14...Synchronized scan rail Applicant: Seiko Electronic Industries Co., Ltd. Agent, Patent Attorney, Mogami (and one other person) To the sky 1 / Do 1 = Z') 5 rules Chu locus Shu 3 diagram - Pro of burning steel / 17 diagrams 4 designs 3 To j j determination / Juice lingering wL trace Ji Ho size diagram No. 5 figure
Claims (1)
する装置において、 前記シートライン巾方向に対して走査する第一架台と、
前記第一架台に設置された第一の螢光Ｘ線測定ヘッドと
、 前記シートのラインスピードに同期して前記ラインシー
トのライン方向に走査し、ラインシート巾方向に走査す
る第二架台と、前記第二架台に設置された第二の螢光Ｘ
線測定ヘッドと、 前記ラインシート巾方向に走査でき、かつ任意設置の場
所に任意の時間固定可能な第三架台と、前記第三架台に
設置された螢光Ｘ線測定ヘッドで構成されることを特徴
とするオンライン厚みプロフィル測定装置。[Scope of Claims] An apparatus for measuring the thickness profile of the amount of coating deposited on a line sheet, comprising: a first mount that scans in the width direction of the sheet line;
a first fluorescent X-ray measurement head installed on the first mount; a second mount that scans in the line direction of the line sheet in synchronization with the line speed of the sheet and scans in the width direction of the line sheet; a second fluorescent light X installed on the second mount;
Consisting of a line measurement head, a third mount that can scan in the width direction of the line sheet and can be fixed at any location for any time, and a fluorescent X-ray measurement head installed on the third mount. An online thickness profile measurement device featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27829185A JPS62137508A (en) | 1985-12-11 | 1985-12-11 | Online thickness profile measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27829185A JPS62137508A (en) | 1985-12-11 | 1985-12-11 | Online thickness profile measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62137508A true JPS62137508A (en) | 1987-06-20 |
Family
ID=17595303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27829185A Pending JPS62137508A (en) | 1985-12-11 | 1985-12-11 | Online thickness profile measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62137508A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5735055A (en) * | 1996-04-23 | 1998-04-07 | Aluminum Company Of America | Method and apparatus for measuring the thickness of an article at a plurality of points |
| JP2013015539A (en) * | 2007-01-01 | 2013-01-24 | Jordan Valley Semiconductors Ltd | Inspection method and inspection device |
-
1985
- 1985-12-11 JP JP27829185A patent/JPS62137508A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5735055A (en) * | 1996-04-23 | 1998-04-07 | Aluminum Company Of America | Method and apparatus for measuring the thickness of an article at a plurality of points |
| JP2013015539A (en) * | 2007-01-01 | 2013-01-24 | Jordan Valley Semiconductors Ltd | Inspection method and inspection device |
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