JPS62135349U - - Google Patents
Info
- Publication number
- JPS62135349U JPS62135349U JP2304686U JP2304686U JPS62135349U JP S62135349 U JPS62135349 U JP S62135349U JP 2304686 U JP2304686 U JP 2304686U JP 2304686 U JP2304686 U JP 2304686U JP S62135349 U JPS62135349 U JP S62135349U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- gas introduction
- ion
- extraction electrode
- ionization chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000605 extraction Methods 0.000 claims description 3
- 238000009423 ventilation Methods 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims 1
Description
第１図は本考案の実施例のイオン源の断面図、
第２図は従来のイオン源の断面図である。
１……イオン源、２……チヤンバ、４……イオ
ン化室、６……ガス導入管、１６……イオン引出
電極、２２……ガス排気口、２４……通風路。
FIG. 1 is a cross-sectional view of an ion source according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view of a conventional ion source. DESCRIPTION OF SYMBOLS 1... Ion source, 2... Chamber, 4... Ionization chamber, 6... Gas introduction tube, 16... Ion extraction electrode, 22... Gas exhaust port, 24... Ventilation path.
Claims (1)
接続するとともに、前記チヤンバ外方に電子ビー
ム照射用のフイラメントを配置し、また、チヤン
バのイオン出射側にイオン引出電極を設けたイオ
ン源において、 前記ガス導入管を前記イオン化室内の中心位置
近傍にまで突設するとともに、チヤンバの前記ガ
ス導入管の対向位置にガス排気口を形成する一方
、前記引出電極にイオン化室と連通する通風路を
設けたことを特徴とするイオン源。[Claim for Utility Model Registration] A gas introduction pipe is connected to a chamber constituting an ionization chamber, a filament for electron beam irradiation is arranged outside the chamber, and an ion extraction electrode is provided on the ion exit side of the chamber. In the provided ion source, the gas introduction tube is provided protruding to the vicinity of the center position within the ionization chamber, and a gas exhaust port is formed at a position opposite to the gas introduction tube in the chamber, while the extraction electrode is connected to the ionization chamber. An ion source characterized by having a communicating ventilation path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986023046U JPH044353Y2 (en) | 1986-02-20 | 1986-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986023046U JPH044353Y2 (en) | 1986-02-20 | 1986-02-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62135349U true JPS62135349U (en) | 1987-08-26 |
| JPH044353Y2 JPH044353Y2 (en) | 1992-02-07 |
Family
ID=30820998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986023046U Expired JPH044353Y2 (en) | 1986-02-20 | 1986-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044353Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6123257U (en) * | 1984-07-17 | 1986-02-12 | 日本電子株式会社 | Ion source for mass spectrometers, etc. |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1598816A (en) * | 1977-07-20 | 1981-09-23 | Brico Eng | Powder metallurgy process and product |
-
1986
- 1986-02-20 JP JP1986023046U patent/JPH044353Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6123257U (en) * | 1984-07-17 | 1986-02-12 | 日本電子株式会社 | Ion source for mass spectrometers, etc. |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH044353Y2 (en) | 1992-02-07 |